Abstract: A method of processing and passivating an implanted workpiece is disclosed, wherein, after passivation, the fugitive emissions of the workpiece are reduced to acceptably low levels. This may be especially beneficial when phosphorus, arsine, germane or another toxic species is the dopant being implanted into the workpiece. In one embodiment, a sputtering process is performed after the implantation process. This sputtering process is used to sputter the dopant at the surface of the workpiece, effectively lowering the dopant concentration at the top surface of the workpiece. In another embodiment, a chemical etching process is performed to lower the dopant concentration at the top surface. After this sputtering or chemical etching process, a traditional passivation process can be performed.

Abstract: An apparatus may include a main chamber, a substrate holder, disposed in a lower region of the main chamber, and defining a substrate region, as well as an RF applicator, disposed adjacent an upper region of the main chamber, to generate an upper plasma within the upper region. The apparatus may further include a central chamber structure, disposed in a central portion of the main chamber, where the central chamber structure is disposed to shield at least a portion of the substrate position from the upper plasma. The apparatus may include a bias source, electrically coupled between the central chamber structure and the substrate holder, to generate a glow discharge plasma in the central portion of the main chamber, wherein the substrate region faces the glow discharge region.

Abstract: A method of processing and passivating an implanted workpiece is disclosed, wherein, after passivation, the fugitive emissions of the workpiece are reduced to acceptably low levels. This may be especially beneficial when phosphorus, arsine, germane or another toxic species is the dopant being implanted into the workpiece. In one embodiment, a sputtering process is performed after the implantation process. This sputtering process is used to sputter the dopant at the surface of the workpiece, effectively lowering the dopant concentration at the top surface of the workpiece. In another embodiment, a chemical etching process is performed to lower the dopant concentration at the top surface. After this sputtering or chemical etching process, a traditional passivation process can be performed.

Abstract: An apparatus may include a main chamber, a substrate holder, disposed in a lower region of the main chamber, and defining a substrate region, as well as an RF applicator, disposed adjacent an upper region of the main chamber, to generate an upper plasma within the upper region. The apparatus may further include a central chamber structure, disposed in a central portion of the main chamber, where the central chamber structure is disposed to shield at least a portion of the substrate position from the upper plasma. The apparatus may include a bias source, electrically coupled between the central chamber structure and the substrate holder, to generate a glow discharge plasma in the central portion of the main chamber, wherein the substrate region faces the glow discharge region.

Abstract: A method for improving the ion beam quality in an ion implanter is disclosed. In some ion implantation systems, contaminants from the ion source are extracted with the desired ions, introducing contaminants to the workpiece. These contaminants may be impurities in the ion source chamber. This problem is exacerbated when mass analysis of the extracted ion beam is not performed, and is further exaggerated when the desired feedgas includes a halogen. The introduction of a diluent gas in the ion chamber may reduce the deleterious effects of the halogen on the inner surfaces of the chamber, reducing contaminants in the extracted ion beam. In some embodiments, the diluent gas may be germane or silane.

Abstract: A method for improving the ion beam quality in an ion implanter is disclosed. In some ion implantation systems, contaminants from the ion source are extracted with the desired ions, introducing contaminants to the workpiece. These contaminants may be impurities in the ion source chamber. This problem is exacerbated when mass analysis of the extracted ion beam is not performed, and is further exaggerated when the desired feedgas includes a halogen. The introduction of a diluent gas in the ion chamber may reduce the deleterious effects of the halogen on the inner surfaces of the chamber, reducing contaminants in the extracted ion beam. In some embodiments, the diluent gas may be germane or silane.

Abstract: A turbopump is formed from a metal additive manufacturing process in which both the housing and the impeller are formed as a single piece with the impeller trapped within the single piece housing. The impeller is formed with an axial bore and a shaft is secured by a tie bolt on one end to secure forward and aft bearings within the housing after the impeller and housing have been formed.

Abstract: The present disclosure provides for an adjuvant composition that is suited for injectable as well as transdermal administration. The adjuvant composition generally comprises a lipophile, a polymer of acrylic or methacrylic acid, saline, cholesterol, a saponin, and sodium hydroxide. A vaccine composition is also provided for that generally includes the vaccine composition of the present disclosure and an antigen. A method for vaccinating animals and humans utilizing the adjuvant composition of the present disclosure is also provided.

Abstract: An apparatus and a process for testing a large combustor or a high Mach aero vehicle in a wind tunnel, where liquid air stored in a tank is pumped to a high pressure above 1,500 psi, then vaporized to produce gaseous air at the same high pressure, where the high pressure gaseous air is then heated to a high temperature and then passed into a combustor for testing or passed through a converging diverging nozzle and then into a wind tunnel to produce a non-vitiated gaseous air flow of at least Mach 5 for testing of an aero vehicle. Water can be added to the high pressure liquid air to produce an air flow having a normal water content.

Abstract: An apparatus and methods of improving the ion beam quality of a halogen-based source gas are disclosed. Unexpectedly, the introduction of a noble gas, such as argon, to an ion source chamber may increase the percentage of desirable ion species, while decreasing the amount of contaminants and halogen-containing ions. This is especially beneficial in non-mass analyzed implanters, where all ions are implanted into the workpiece. In one embodiment, a first source gas, comprising a dopant and a halogen is introduced into an ion source chamber, a second source gas comprising a hydride, and a third source gas comprising a noble gas are also introduced. The combination of these three source gases produces an ion beam having a higher percentage of pure dopant ions than would occur if the third source gas were not used.

Abstract: The present disclosure provides for an adjuvant composition that is suited for injectable as well as transdermal administration. The adjuvant composition generally comprises a lipophile, a polymer of acrylic or methacrylic acid, saline, cholesterol, a saponin, and sodium hydroxide. A vaccine composition is also provided for that generally includes the vaccine composition of the present disclosure and a DNA component. A method for vaccinating animals and humans utilizing the adjuvant composition of the present disclosure is also provided.

Abstract: An active substrate alignment system for an ion implanter, the system including a platen, a registration device adapted to selectively move a substrate engagement surface disposed adjacent the platen for limiting movement of a substrate disposed on the platen, a camera configured to capture an image of the substrate before the substrate is disposed on the platen, and a controller in communication with the camera and the registration device, the controller configured to command the registration device to move the substrate engagement surface based on the image to limit movement of the substrate in a predetermined manner.

Abstract: Catalyst compositions useful in the production of insulating polyurethane or polyisocyanurate foam are disclosed. The catalyst compositions impart increased stability of a mixture of the catalyst, a halogen-containing blowing agent, and a polyol. These catalyst compositions comprise of at least 10% of a tetraalkylguanidine and at least 10% of a tertiary amine catalyst with an isocyanate reactive group. These improved catalysts can be used with any halogenated blowing agent, and provide substantial stability benefits with the use of hydrofluoroolefins and hydrofluorochloroolefins. In an exemplary embodiment, a process includes providing a pre-mix comprising a hydrohaloolefin blowing agent, at least one polyol, water, and a catalyst comprising 10-50% tetramethylguanidine and 10-90% of one or more of an amine catalyst containing an isocyanate reactive group.

Abstract: The present disclosure provides for an adjuvant composition that is suited for injectable as well as transdermal administration. The adjuvant composition generally comprises a lipophile, a polymer of acrylic or methacrylic acid, saline, cholesterol, a saponin, and sodium hydroxide. A vaccine composition is also provided for that generally includes the vaccine composition of the present disclosure and an antigen. A method for vaccinating animals and humans utilizing the adjuvant composition of the present disclosure is also provided.

Abstract: A turbopump such as a liquid oxygen (LOX) turbopump for a liquid rocket engine is formed using a metal additive manufacturing process in which a single-piece impeller is formed within a single piece housing, the impeller being trapped within the single piece housing. The impeller is formed with an axial bore in which a shaft is inserted after the impeller and housing have been formed. The turbopump includes a protective coating that forms a reaction resistant surface on the base metal in areas of the base metal that are exposed to an oxidizer during pumping. The protective coating may be an enamel glass, a superalloy layer beneath an enamel glass layer, a composite layer of a mixture of enamel glass and superalloy, a composite mixture of oxide and superalloy, or a composite layer of a mixture of enamel glass, superalloy, and oxide.

Abstract: A method for improving the ion beam quality in an ion implanter is disclosed. In some ion implantation systems, contaminants from the ion source are extracted with the desired ions, introducing contaminants to the workpiece. These contaminants may be impurities in the ion source chamber. This problem is exacerbated when mass analysis of the extracted ion beam is not performed, and is further exaggerated when the desired feedgas includes a halogen. The introduction of a diluent gas in the ion chamber may reduce the deleterious effects of the halogen on the inner surfaces of the chamber, reducing contaminants in the extracted ion beam. In some embodiments, the diluent gas may be germane or silane.

Abstract: A composition and process to make polyisocyanurate or polyurethane foam using a catalyst composition comprising at least one bismuth carboxylate catalyst and one or more co-catalysts selected from the group of alkali metal carboxylates and quaternary ammonium carboxylate salts, such that the resultant foam has improved insulation properties. The polyisocyanurate or polyurethane foams produced by this catalyst composition and method are useful for laminated boardstock, construction panels, appliance insulation, and spray-applied insulation.

Abstract: An internal combustion engine with a piston having a piston head with a resonance cavity opening onto the head, and where a fuel nozzle located in a cylinder head is positioned to inject a fuel such as natural gas into the combustion chamber where resonance formed within the resonance cavity will ignite the fuel without the need of a spark plug. Inlet and exhaust ports in the cylinder head allow for air and combustion gas enter or leave the combustion chamber.

Abstract: A turbocharger for an internal combustion engine, the turbocharger being supported by hydrostatic bearings in both a radial and an axial direction by a compressed air supplied from a compressor of the turbocharger and boosted in pressure by a separate boost pump to a high enough pressure to support the rotor of the turbocharger. The turbocharger hydrostatic bearings are damped using wire mesh or dispersed friction dampers.

Abstract: A non-vitiated compressed air heater facility that can heat a non-vitiated compressed air from around 1,100 degrees F. to over 1,600 degrees F. using three heat exchangers oriented in a vertical direction and connected in series, where each heat exchanger uses a number of heat pipes with burners to produce a hot gas at around 2,000 F that counter flows with non-vitiated compressed air flowing over the heat pipes to add heat to the non-vitiated compressed air flowing through the heat exchangers. The non-vitiated compressed air heated to at least 1,600 F can be used to test an aero vehicle in a wind tunnel under high Mach # conditions, or can be used to supply non-vitiated compressed air to test a large combustor of a gas turbine engine.