Patents by Inventor Ting Chu

Ting Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10529658
    Abstract: Various embodiments of the present application are directed towards an integrated circuit comprising a memory cell on a homogeneous bottom electrode via (BEVA) top surface. In some embodiments, the integrated circuit comprises a conductive wire, a via dielectric layer, a via, and a memory cell. The via dielectric layer overlies the conductive wire. The via extends through the via dielectric layer to the conductive wire, and has a first sidewall, a second sidewall, and a top surface. The first and second sidewalls of the via are respectively on opposite sides of the via, and directly contact sidewalls of the via dielectric layer. The top surface of the via is homogenous and substantially flat. Further, the top surface of the via extends laterally from the first sidewall of the via to the second sidewall of the via. The memory cell is directly on the top surface of the via.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: January 7, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsia-Wei Chen, Wen-Ting Chu, Yu-Wen Liao
  • Publication number: 20200006360
    Abstract: A method for forming an integrated circuit (IC) and an IC are disclosed. The method for forming the IC includes: forming an isolation structure separating a memory semiconductor region from a logic semiconductor region; forming a memory cell structure on the memory semiconductor region; forming a memory capping layer covering the memory cell structure and the logic semiconductor region; performing a first etch into the memory capping layer to remove the memory capping layer from the logic semiconductor region, and to define a slanted, logic-facing sidewall on the isolation structure; forming a logic device structure on the logic semiconductor region; and performing a second etch into the memory capping layer to remove the memory capping layer from the memory semiconductor, while leaving a dummy segment of the memory capping layer that defines the logic-facing sidewall.
    Type: Application
    Filed: September 3, 2019
    Publication date: January 2, 2020
    Inventors: Tzu-Yu Chen, Kuo-Chi Tu, Wen-Ting Chu, Yong-Shiuan Tsair
  • Patent number: 10516106
    Abstract: The present disclosure relates to a resistive random access memory (RRAM) device. In some embodiments, the RRAM device has a bottom electrode disposed over a lower interconnect layer surrounded by an inter-level dielectric (ILD) layer. A dielectric data storage layer having a variable resistance is located above the bottom electrode, and a multi-layer top electrode is disposed over the dielectric data storage layer. The multi-layer top electrode has conductive top electrode layers separated by an oxygen barrier structure configured to mitigate movement of oxygen within the multi-layer top electrode. By including an oxygen barrier structure within the top electrode, the reliability of the RRAM device is improved since oxygen is kept close to the dielectric data storage layer.
    Type: Grant
    Filed: March 29, 2018
    Date of Patent: December 24, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Ting Chu, Tong-Chern Ong, Ying-Lang Wang
  • Publication number: 20190386204
    Abstract: Various embodiments of the present application are directed towards a method for forming a flat via top surface for memory, as well as an integrated circuit (IC) resulting from the method. In some embodiments, an etch is performed into a dielectric layer to form an opening. A liner layer is formed covering the dielectric layer and lining the opening. A lower body layer is formed covering the dielectric layer and filling a remainder of the opening over the liner layer. A top surface of the lower body layer and a top surface of the liner layer are recessed to below a top surface of the dielectric layer to partially clear the opening. A homogeneous upper body layer is formed covering the dielectric layer and partially filling the opening. A planarization is performed into the homogeneous upper body layer until the dielectric layer is reached.
    Type: Application
    Filed: August 27, 2019
    Publication date: December 19, 2019
    Inventors: Hsia-Wei Chen, Chih-Yang Chang, Chin-Chieh Yang, Jen-Sheng Yang, Sheng-Hung Shih, Tung-Sheng Hsiao, Wen-Ting Chu, Yu-Wen Liao, I-Ching Chen
  • Patent number: 10510953
    Abstract: Some embodiments relate to a device. The device includes a top electrode and a via disposed over the top electrode. A peripheral upper surface of the top electrode is above a central upper surface of the top electrode, and a tapered inner sidewall of the top electrode connects the peripheral upper surface to the central upper surface. The via establishes electrical contact with the tapered inner sidewall but is spaced apart from the central upper surface.
    Type: Grant
    Filed: April 2, 2019
    Date of Patent: December 17, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsia-Wei Chen, Wen-Ting Chu, Kuo-Chi Tu, Chih-Yang Chang, Chin-Chieh Yang, Yu-Wen Liao, Wen-Chun You, Sheng-Hung Shih
  • Patent number: 10504865
    Abstract: Provided is a package structure includes a die having a first connector, a RDL structure disposed on the die, and a second connector. The RDL structure includes at least one elongated via located on and connected to the first connector. The second connector is disposed on and connected to the RDL structure.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: December 10, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ming-Kai Liu, Han-Ping Pu, Ting-Chu Ko, Yung-Ping Chiang, Chang-Wen Huang, Yu-Sheng Hsieh
  • Patent number: 10504963
    Abstract: In some embodiments, the present disclosure relates to a memory circuit having a first resistive random access memory (RRAM) element and a second RRAM element arranged within a dielectric structure over a substrate. The first RRAM element has a first conjunct electrode separated from a first disjunct electrode by a first data storage layer. The second RRAM element has a second conjunct electrode separated from a second disjunct electrode by a second data storage layer. A control device is disposed within the substrate and has first terminal coupled to the first conjunct electrode and the second conjunct electrode and a second terminal coupled to a word-line.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: December 10, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chin-Chieh Yang, Chih-Yang Chang, Wen-Ting Chu, Yu-Wen Liao
  • Patent number: 10505107
    Abstract: The present disclosure, in some embodiments, relates to a resistive random access memory (RRAM) device. The RRAM device includes a lower electrode over a conductive interconnect, and an upper electrode over the lower electrode. A data storage structure is disposed between the lower electrode and the upper electrode. The data storage structure includes a plurality of metal oxide layers having one or more metals from a first group of metals. A concentration of the one or more metals from the first group of metals changes as a distance from the lower electrode increases.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: December 10, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hai-Dang Trinh, Cheng-Yuan Tsai, Hsing-Lien Lin, Wen-Ting Chu
  • Publication number: 20190371999
    Abstract: The present disclosure, in some embodiments, relates to a resistive random access memory (RRAM) cell. The RRAM cell has a bottom electrode over a substrate. A data storage layer is over the bottom electrode and has a first thickness. A capping layer is over the data storage layer. The capping layer has a second thickness that is in a range of between approximately 1.9 and approximately 3 times thicker than the first thickness. A top electrode is over the capping layer.
    Type: Application
    Filed: August 14, 2019
    Publication date: December 5, 2019
    Inventors: Trinh Hai Dang, Hsing-Lien Lin, Cheng-Yuan Tsai, Chin-Chieh Yang, Yu-Wen Liao, Wen-Ting Chu, Chia-Shiung Tsai
  • Patent number: 10497436
    Abstract: A memory device includes a bottom electrode, a resistance switching layer and a top electrode. The bottom electrode is over a metallization layer embedded in an inter-metal dielectric layer. The bottom electrode has a top surface and a sidewall that extends at an obtuse angle relative to the top surface. The resistance switching layer is over the bottom electrode. The top electrode is over the resistance switching layer.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: December 3, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Chi Tu, Chu-Jie Huang, Sheng-Hung Shih, Nai-Chao Su, Wen-Ting Chu
  • Publication number: 20190355788
    Abstract: Various embodiments of the present application are directed a memory layout for reduced line loading. In some embodiments, a memory device comprises an array of bit cells, a first conductive line, a second conductive line, and a plurality of conductive bridges. The first and second conductive lines may, for example, be source lines or some other conductive lines. The array of bit cells comprises a plurality of rows and a plurality of columns, and the plurality of columns comprise a first column and a second column. The first conductive line extends along the first column and is electrically coupled to bit cells in the first column. The second conductive line extends along the second column and is electrically coupled to bit cells in the second column. The conductive bridges extend from the first conductive line to the second conductive line and electrically couple the first and second conductive lines together.
    Type: Application
    Filed: October 10, 2018
    Publication date: November 21, 2019
    Inventors: Chih-Yang Chang, Wen-Ting Chu
  • Patent number: 10475999
    Abstract: Some embodiments relate to a method. A semiconductor substrate is received. The semiconductor substrate has an interconnect structure disposed over a memory region and a logic region of the semiconductor substrate. A bottom electrode and a top electrode are formed over the interconnect structure over the memory region. The bottom electrode is coupled to a lower metal layer in the interconnect structure, and the bottom and top electrode are separated from one another by a data storage or dielectric layer. An interlayer dielectric (ILD) layer is formed over the top electrode. A trench opening having vertical or substantially vertical sidewalls is formed in the ILD layer and exposes an upper surface of the top electrode. An upper metal layer is formed in the trench opening and is in direct contact with the top electrode.
    Type: Grant
    Filed: December 5, 2017
    Date of Patent: November 12, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Yang Chang, Wen-Ting Chu
  • Patent number: 10475852
    Abstract: A resistive random access memory (RRAM) structure includes a resistive memory element formed on a semiconductor substrate. The resistive element includes a top electrode, a bottom electrode, and a resistive material layer positioned between the top electrode and the bottom electrode. The RRAM structure further includes a field effect transistor (FET) formed on the semiconductor substrate, the FET having a source and a drain. The drain of the FET has a higher doping concentration than the source of the FET. The resistive memory element is coupled with the drain via a portion of an interconnect structure.
    Type: Grant
    Filed: October 15, 2018
    Date of Patent: November 12, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chin-Chieh Yang, Hsia-Wei Chen, Chih-Yang Chang, Kuo-Chi Tu, Wen-Ting Chu, Yu-Wen Liao
  • Publication number: 20190333920
    Abstract: Various embodiments of the present application are directed to a method for forming a boundary structure separating a memory cell and a logic device. In some embodiments, an isolation structure is formed separating a memory semiconductor region from a logic semiconductor region. A memory cell structure is formed on the memory semiconductor region, and a memory capping layer is formed covering the memory cell structure and the logic semiconductor region. A first etch is performed into the memory capping layer to remove the memory capping layer from the logic semiconductor region, and to define a slanted, logic-facing sidewall on the isolation structure. A logic device structure is formed on the logic semiconductor region. Further, a second etch is performed into the memory capping layer to remove the memory capping layer from the memory semiconductor, while leaving a dummy segment of the memory capping layer that defines the logic-facing sidewall.
    Type: Application
    Filed: April 27, 2018
    Publication date: October 31, 2019
    Inventors: Tzu-Yu Chen, Kuo-Chi Tu, Wen-Ting Chu, Yong-Shiuan Tsair
  • Publication number: 20190308981
    Abstract: The present invention provides a hydrobromide of methyl 3-[(4s)-8-bromo-1-methyl-6-(2-pyridyl)-4H-imidazol[1,2-a][1,4]benzodiazepine-4-yl] propionate and its related crystal forms, preparation method and use thereof. The hydrobromide has excellent solubility (>100 mg/ml), which is significantly superior to other currently commercially available or developed salt products, and is especially suitable for the preparation of injections, has relatively good stability in various crystal forms, and has good practical value and market prospects.
    Type: Application
    Filed: December 13, 2016
    Publication date: October 10, 2019
    Applicant: CHENGDU BRILLIANT PHARMACEUTICAL CO., LTD.
    Inventors: Haoxi HUANG, Guoqing ZHUO, Guoning SHANG, Zhen LIANG, Ting CHU, Cuicui CHEN, Ming LUO, Yingfu LI, Zhonghai SU
  • Publication number: 20190272873
    Abstract: The present disclosure, in some embodiments, relates to a method of operating a resistive random access memory (RRAM) array. The method includes applying a word-line voltage to a selected word-line during a read operation. A non-zero voltage is applied to a selected bit-line during the read operation. A first voltage is applied to a selected source-line during the read operation. The first voltage is smaller than a second voltage applied to an unselected source-line during the read operation.
    Type: Application
    Filed: May 16, 2019
    Publication date: September 5, 2019
    Inventors: Chin-Chieh Yang, Chih-Yang Chang, Chang-Sheng Liao, Hsia-Wei Chen, Jen-Sheng Yang, Kuo-Chi Tu, Sheng-Hung Shih, Wen-Ting Chu, Manish Kumar Singh, Chi-Tsai Chen
  • Publication number: 20190258294
    Abstract: An electronic device housed in glass or other fragile material which is nevertheless proofed against breakage includes a shell, a battery, and a display screen formed on one side of the battery and received in the shell. The shell comprises a glass back cover and a crack-proof layer. The crack-proof layer is formed on the glass back cover. The battery abuts the crack-proof layer. The display screen is assembled beside the battery. The display screen is received in and partially exposed to the shell. The battery is electronically connected to the display screen. The electronic device is protected within the glass back cover which is itself proofed against shock and breakage when dropped or impacted. The disclosure further provides a method for manufacturing the electronic device.
    Type: Application
    Filed: February 12, 2019
    Publication date: August 22, 2019
    Inventors: YI-CHING LIN, TING-CHU LEE
  • Publication number: 20190259944
    Abstract: A semiconductor structure includes a memory region. A memory structure is disposed on the memory region. The memory structure includes a first electrode, a resistance variable layer, protection spacers and a second electrode. The first electrode has a top surface and a first outer sidewall surface on the memory region. The resistance variable layer has a first portion and a second portion. The first portion is disposed over the top surface of the first electrode and the second portion extends upwardly from the first portion. The protection spacers are disposed over a portion of the top surface of the first electrode and surround the second portion of the resistance variable layer. The protection spacers are configurable to protect at least one conductive path in the resistance variable layer. The protection spacers have a second outer sidewall surface substantially aligned with the first outer sidewall surface of the first electrode.
    Type: Application
    Filed: April 30, 2019
    Publication date: August 22, 2019
    Inventors: Kuo-Chi Tu, Chih-Yang Chang, Hsia-Wei Chen, Chin-Chieh Yang, Sheng-Hung Shih, Wen-Chun You, Wen-Ting Chu, Yu-Wen Liao
  • Patent number: 10388868
    Abstract: A semiconductor structure includes a memory region. A memory structure is disposed on the memory region. The memory structure includes a first electrode, a resistance variable layer, protection spacers and a second electrode. The first electrode has a top surface and a first outer sidewall surface on the memory region. The resistance variable layer has a first portion and a second portion. The first portion is disposed over the top surface of the first electrode and the second portion extends upwardly from the first portion. The protection spacers are disposed over a portion of the top surface of the first electrode and surround the second portion of the resistance variable layer. The protection spacers are configurable to protect at least one conductive path in the resistance variable layer. The protection spacers have a second outer sidewall surface substantially aligned with the first outer sidewall surface of the first electrode.
    Type: Grant
    Filed: May 23, 2016
    Date of Patent: August 20, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Chi Tu, Chih-Yang Chang, Hsia-Wei Chen, Chin-Chieh Yang, Sheng-Hung Shih, Wen-Chun You, Wen-Ting Chu, Yu-Wen Liao
  • Patent number: 10388865
    Abstract: The present disclosure, in some embodiments, relates to a resistive random access memory (RRAM) cell. The RRAM cell has a bottom electrode disposed over a lower interconnect layer and a data storage layer having a first thickness over the bottom electrode. A capping layer is disposed over the data storage layer. The capping layer has a second thickness that is in a range of between approximately 2 and approximately 3 times thicker than the first thickness. A top electrode is disposed over the capping layer and an upper interconnect layer is disposed over the top electrode.
    Type: Grant
    Filed: January 15, 2018
    Date of Patent: August 20, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Trinh Hai Dang, Hsing-Lien Lin, Cheng-Yuan Tsai, Chin-Chieh Yang, Yu-Wen Liao, Wen-Ting Chu, Chia-Shiung Tsai