Patents by Inventor Ting Chu
Ting Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240088217Abstract: Techniques are provided herein to form semiconductor devices that include a layer across an upper surface of a dielectric fill between devices and configured to prevent or otherwise reduce recessing of the dielectric fill. In this manner, the layer may be referred to as a barrier layer or recess-inhibiting layer. The semiconductor regions of the devices extend above a subfin region that may be native to the substrate. These subfin regions are separated from one another using a dielectric fill that acts as a shallow trench isolation (STI) structure to electrically isolate devices from one another. A barrier layer is formed over the dielectric fill early in the fabrication process to prevent or otherwise reduce the dielectric fill from recessing during subsequent processing. The layer may include oxygen and a metal, such as aluminum.Type: ApplicationFiled: September 8, 2022Publication date: March 14, 2024Applicant: Intel CorporationInventors: Tao Chu, Minwoo Jang, Chia-Ching Lin, Yanbin Luo, Ting-Hsiang Hung, Feng Zhang, Guowei Xu
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Publication number: 20240088292Abstract: Fin trim plug structures with metal for imparting channel stress are described. In an example, an integrated circuit structure includes a fin including silicon, the fin having a top and sidewalls, wherein the top has a longest dimension along a direction. A first isolation structure is over a first end of the fin. A gate structure including a gate electrode is over the top of and laterally adjacent to the sidewalls of a region of the fin. The gate structure is spaced apart from the first isolation structure along the direction. A second isolation structure is over a second end of the fin, the second end opposite the first end, the second isolation structure spaced apart from the gate structure along the direction. The first isolation structure and the second isolation structure both include a dielectric material laterally surrounding an isolated metal structure.Type: ApplicationFiled: September 8, 2022Publication date: March 14, 2024Inventors: Tao CHU, Feng ZHANG, Minwoo JANG, Yanbin LUO, Chia-Ching LIN, Ting-Hsiang HUNG
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Publication number: 20240088265Abstract: Techniques are provided herein to form semiconductor devices having epitaxial growth laterally extending between inner spacer structures to mitigate issues caused by the inner spacer structures either being too thick or too thin. A directional etch is performed along the side of a multilayer fin to create a relatively narrow opening for a source or drain region to increase the usable fin space for forming the inner spacer structures. After the inner spacer structures are formed around ends of the semiconductor layers within the fin, the exposed ends of the semiconductor layers are laterally recessed inwards from the outermost sidewalls of the inner spacer structures. Accordingly, the epitaxial source or drain region is grown from the recessed semiconductor ends and thus fills in the recessed regions between the spacer structures.Type: ApplicationFiled: September 8, 2022Publication date: March 14, 2024Applicant: Intel CorporationInventors: Tao Chu, Guowei Xu, Feng Zhang, Ting-Hsiang Hung, Chia-Ching Lin
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Patent number: 11926678Abstract: Disclosed herein are composite polypeptide. According to various embodiments, the composite polypeptide includes a parent polypeptide and a metal binding motif capable of forming a complex with a metal cation. The composite polypeptide may be conjugated with a linker unit having a plurality of functional elements to form a multi-functional molecular construct. Alternatively, multiple composite polypeptides may be conjugated to a linker unit to form a molecular construct, or a polypeptide bundle. Linker units suitable for conjugating with the composite polypeptide having the metal binding motif are also disclosed.Type: GrantFiled: October 8, 2021Date of Patent: March 12, 2024Assignee: Immunwork Inc.Inventors: Tse-Wen Chang, Hsing-Mao Chu, Wei-Ting Tian, Yueh-Hsiang Yu
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Patent number: 11929319Abstract: Integrated fan-out packages and methods of forming the same are disclosed. An integrated fan-out package includes two dies, an encapsulant, a first metal line and a plurality of dummy vias. The encapsulant is disposed between the two dies. The first metal line is disposed over the two dies and the encapsulant, and electrically connected to the two dies. The plurality of dummy vias is disposed over the encapsulant and aside the first metal line.Type: GrantFiled: July 22, 2021Date of Patent: March 12, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ching-Yu Huang, Han-Ping Pu, Ming-Kai Liu, Ting-Chu Ko, Yung-Ping Chiang, Chang-Wen Huang, Yu-Sheng Hsieh
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Publication number: 20240076451Abstract: Provide a black matte polyimide film, including polyimide in an amount from 87 to 97 wt % of the black matte polyimide film, in which aromatic dianhydride and aromatic diamine are polymerized to form a polyimide precursor, and the polyimide precursor is chemically cyclized to form the polyimide, wherein the aromatic dianhydride at least includes 3,3?,4,4?-biphenyltetracarboxylic dianhydride in an amount being no less than 20 mol % of the aromatic dianhydride, and the aromatic diamine at least includes p-phenylenediamine in an amount from 5 to 40 mol % of the aromatic diamine; carbon black in an amount from 2 to 8 wt % of the black matte polyimide film; and silicon dioxide powder having a particle size between 1 and 10 ?m and a density less than 1 g/cm3 and being in an amount from 1 to 5 wt % of the polyimide film.Type: ApplicationFiled: August 29, 2023Publication date: March 7, 2024Inventors: YUNG-CHU CHUANG, YI-HSUEH HO, TING-XUAN DENG
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Publication number: 20240068517Abstract: A miniature linear guideway includes a rail, a slider, two circulation fittings and a retainer. The slider and the circulation fitting are set on the rail, so that a circulation channel is formed between the rail and the slider for the balls to run. The circulation fitting has several turning convex portions. The retainer has a plate portion and two retaining portions. The two ends of each retaining portion are connected to the plate portion by a positioning portion, and the plate portion is adjacent to the slider. The positioning portions of the retainer abut the turning convex portions. The width of the plate portion of the retainer is smaller than the distance between the turning convex portions of the circulation fitting. Thereby, the miniature linear guideway of the present invention can optimize the assembly efficiency, thereby realizing the purpose of automatic assembly.Type: ApplicationFiled: August 30, 2022Publication date: February 29, 2024Inventors: Jian-Ting LIN, Yung-Chin CHU
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Publication number: 20240071455Abstract: The present disclosure relates to an integrated chip structure. The integrated chip structure includes a first source/drain region and a second source/drain region disposed within a substrate. A select gate is over the substrate between the first source/drain region and the second source/drain region. A ferroelectric random access memory (FeRAM) device is over the substrate between the select gate and the first source/drain region. A transistor device is disposed on an upper surface of the substrate. The substrate has a recessed surface that is below the upper surface of the substrate and that is laterally separated from the upper surface of the substrate by a boundary isolation structure extending into a trench within the upper surface of the substrate. The FeRAM device is arranged over the recessed surface.Type: ApplicationFiled: November 10, 2023Publication date: February 29, 2024Inventors: Tzu-Yu Chen, Kuo-Chi Tu, Wen-Ting Chu, Yong-Shiuan Tsair
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Patent number: 11915754Abstract: A memory architecture includes: a plurality of cell arrays each of which comprises a plurality of bit cells, wherein each of bit cells of the plurality of cell arrays uses a respective variable resistance dielectric layer to transition between first and second logic states; and a control logic circuit, coupled to the plurality of cell arrays, and configured to cause a first information bit to be written into respective bit cells of a pair of cell arrays as an original logic state of the first information bit and a logically complementary logic state of the first information bit, wherein the respective variable resistance dielectric layers are formed by using a same recipe of deposition equipment and have different diameters.Type: GrantFiled: December 13, 2022Date of Patent: February 27, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yu-Der Chih, Chung-Cheng Chou, Wen-Ting Chu
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Patent number: 11912768Abstract: The present invention relates to the field of medical biology, and discloses a single domain antibody and derivative proteins thereof against CTLA4. In particular, the present invention discloses a CTLA4 binding protein and the use thereof, especially the use for treating and/or preventing CTLA4 relevant diseases such as tumor.Type: GrantFiled: July 7, 2021Date of Patent: February 27, 2024Assignees: SUZHOU ALPHAMAB CO., LTD., XITIAN ZHANG, XIN ZHANGInventors: Ting Xu, Xiaoxiao Wang, Jie Li, Haiyan Wu, Li Gao, Qian Chu, Yu Bai
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Patent number: 11894267Abstract: A method for fabricating an integrated circuit device is provided. The method includes forming an interconnect layer over a substrate, wherein the interconnect layer has a first interlayer dielectric layer, a first conductive feature in a first portion of the first interlayer dielectric layer, and a second conductive feature in a second portion of the first interlayer dielectric layer; depositing a dielectric layer over the interconnect layer; removing a first portion of the dielectric layer over the first conductive feature and the first portion of the first interlayer dielectric layer, and remaining a second portion of the dielectric layer over the second conductive feature and the second portion of the first interlayer dielectric layer; and forming a memory structure over the first conductive feature.Type: GrantFiled: January 5, 2021Date of Patent: February 6, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hsia-Wei Chen, Fu-Ting Sung, Yu-Wen Liao, Wen-Ting Chu, Fa-Shen Jiang, Tzu-Hsuan Yeh
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Patent number: 11889705Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a first interconnect within a first inter-level dielectric (ILD) layer over a substrate. A memory device is disposed over the first interconnect and is surrounded by a second ILD layer. A sidewall spacer is arranged along opposing sides of the memory device and an etch stop layer is arranged on the sidewall spacer. The sidewall spacer and the etch stop layer have upper surfaces that are vertically offset from one another by a non-zero distance. A second interconnect extends from a top of the second ILD layer to an upper surface of the memory device.Type: GrantFiled: August 3, 2021Date of Patent: January 30, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsia-Wei Chen, Chih-Yang Chang, Chin-Chieh Yang, Jen-Sheng Yang, Kuo-Chi Tu, Wen-Ting Chu, Yu-Wen Liao
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Patent number: 11869943Abstract: A silicon carbide semiconductor device, in particular a monolithically integrated trench Metal-Oxide-Semiconductor Field-Effect Transistor with segmentally surrounded trench Schottky diode, includes a semiconductor substrate, a trench Metal-Oxide-Semiconductor Field-Effect Transistor and a trench Schottky diode. The trench Schottky diode has a perpendicularly disposed trench extending in a first horizontal direction, a metal electrode filled into the trench, and a plurality of doped regions disposed segmentally and extending in a second horizontal direction around the trench. The first horizontal direction is substantially orthogonal to the second horizontal direction, a side wall and a bottom wall of the metal electrode in the trench forms a Schottky junction, and the current flowing from the metal electrode is restricted between adjacent doped regions.Type: GrantFiled: December 11, 2020Date of Patent: January 9, 2024Assignee: SHANGHAI HESTIA POWER INC.Inventors: Chien-Chung Hung, Kuo-Ting Chu, Chwan-Yin Li
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Patent number: 11869564Abstract: The present disclosure relates to an integrated chip structure. The integrated chip structure includes a first source/drain region and a second source/drain region disposed within a substrate. A select gate is disposed over the substrate between the first source/drain region and the second source/drain region. A ferroelectric random-access memory (FeRAM) device is disposed over the substrate between the select gate and the first source/drain region. A first sidewall spacer, including one or more dielectric materials, is arranged laterally between the select gate and the FeRAM device. An inter-level dielectric (ILD) structure laterally surrounds the FeRAM device and the select gate and vertically overlies a top surface of the first sidewall spacer.Type: GrantFiled: July 18, 2022Date of Patent: January 9, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tzu-Yu Chen, Kuo-Chi Tu, Wen-Ting Chu, Yong-Shiuan Tsair
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Patent number: 11856797Abstract: A resistive random access memory (RRAM) structure includes a resistive memory element formed on a semiconductor substrate. The resistive element includes a top electrode, a bottom electrode, and a resistive material layer positioned between the top electrode and the bottom electrode. The RRAM structure further includes a field effect transistor (FET) formed on the semiconductor substrate, the FET having a source and a drain. The drain has a zero-tilt doping profile and the source has a tilted doping profile. The resistive memory element is coupled with the drain via a portion of an interconnect structure.Type: GrantFiled: January 31, 2022Date of Patent: December 26, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chin-Chieh Yang, Hsia-Wei Chen, Chih-Yang Chang, Kuo-Chi Tu, Wen-Ting Chu, Yu-Wen Liao
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Patent number: 11856788Abstract: A method for fabricating a semiconductor device is provided. The method includes depositing a bottom electrode layer over a substrate; depositing a ferroelectric layer over the bottom electrode layer; depositing a first top electrode layer over the ferroelectric layer, wherein the first top electrode layer comprises a first metal; depositing a second top electrode layer over the first top electrode layer, wherein the second top electrode layer comprises a second metal, and a standard reduction potential of the first metal is greater than a standard reduction potential of the second metal; and removing portions of the second top electrode layer, the first top electrode layer, the ferroelectric layer, and the bottom electrode layer to form a memory stack, the memory stack comprising remaining portions of the second top electrode layer, the first top electrode layer, the ferroelectric layer, and the bottom electrode layer.Type: GrantFiled: March 4, 2021Date of Patent: December 26, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tzu-Yu Chen, Sheng-Hung Shih, Fu-Chen Chang, Kuo-Chi Tu, Wen-Ting Chu, Alexander Kalnitsky
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Patent number: 11844286Abstract: Various embodiments of the present application are directed towards a method for forming a flat via top surface for memory, as well as an integrated circuit (IC) resulting from the method. In some embodiments, an etch is performed into a dielectric layer to form an opening. A liner layer is formed covering the dielectric layer and lining the opening. A lower body layer is formed covering the dielectric layer and filling a remainder of the opening over the liner layer. A top surface of the lower body layer and a top surface of the liner layer are recessed to below a top surface of the dielectric layer to partially clear the opening. A homogeneous upper body layer is formed covering the dielectric layer and partially filling the opening. A planarization is performed into the homogeneous upper body layer until the dielectric layer is reached.Type: GrantFiled: November 30, 2021Date of Patent: December 12, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsia-Wei Chen, Chih-Yang Chang, Chin-Chieh Yang, Jen-Sheng Yang, Sheng-Hung Shih, Tung-Sheng Hsiao, Wen-Ting Chu, Yu-Wen Liao, I-Ching Chen
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Patent number: 11835614Abstract: A graphical near-field identification method and apparatus are provided. The method includes filtering a searched beacon signal according to a preset filtration condition. The method further includes matching a filtered beacon with beacons in all beacon graphs to obtain a beacon graph having a largest beacon matching number and the number of beacons matched with the beacon graph. The method further includes determining whether the number of the beacons matched with the beacon graph is less than a beacon determination minimum number requirement. The method further includes determining whether the number of the beacons matched with the beacon graph meets a beacon graph benchmark number condition. The method further includes determining that an object position is in a scenario where the beacon graph is located. The method further includes estimating a distance to the beacon by using a RSSI value of the beacon signal.Type: GrantFiled: December 30, 2020Date of Patent: December 5, 2023Assignee: Opple Lighting Co., Ltd.Inventors: Jianming Xia, Ting Chu
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Patent number: 11839090Abstract: Various embodiments of the present application are directed towards an integrated chip comprising memory cells separated by a void-free dielectric structure. In some embodiments, a pair of memory cell structures is formed on a via dielectric layer, where the memory cell structures are separated by an inter-cell area. An inter-cell filler layer is formed covering the memory cell structures and the via dielectric layer, and further filling the inter-cell area. The inter-cell filler layer is recessed until a top surface of the inter-cell filler layer is below a top surface of the pair of memory cell structures and the inter-cell area is partially cleared. An interconnect dielectric layer is formed covering the memory cell structures and the inter-cell filler layer, and further filling a cleared portion of the inter-cell area.Type: GrantFiled: June 9, 2021Date of Patent: December 5, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsia-Wei Chen, Wen-Ting Chu, Yu-Wen Liao
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Patent number: 11832529Abstract: The present disclosure relates to an integrated circuit. The integrated circuit includes a an inter-layer dielectric (ILD) structure laterally surrounding a conductive interconnect. A dielectric protection layer is disposed over the ILD structure and a passivation layer is disposed over the dielectric protection layer. The passivation layer includes a protrusion extending outward from an upper surface of the passivation layer. A bottom electrode continuously extends from over the passivation layer to between sidewalls of the passivation layer. A data storage element is over the bottom electrode and a top electrode is over the data storage element.Type: GrantFiled: April 20, 2022Date of Patent: November 28, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tong-Chern Ong, Wen-Ting Chu, Yu-Wen Liao, Kuei-Hung Shen, Kuo-Yuan Tu, Sheng-Huang Huang