Patents by Inventor Ting Chu

Ting Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220216106
    Abstract: A method for fabricating an integrated circuit device is provided. The method includes forming an interconnect layer over a substrate, wherein the interconnect layer has a first interlayer dielectric layer, a first conductive feature in a first portion of the first interlayer dielectric layer, and a second conductive feature in a second portion of the first interlayer dielectric layer; depositing a dielectric layer over the interconnect layer; removing a first portion of the dielectric layer over the first conductive feature and the first portion of the first interlayer dielectric layer, and remaining a second portion of the dielectric layer over the second conductive feature and the second portion of the first interlayer dielectric layer; and forming a memory structure over the first conductive feature.
    Type: Application
    Filed: January 5, 2021
    Publication date: July 7, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsia-Wei CHEN, Fu-Ting SUNG, Yu-Wen LIAO, Wen-Ting CHU, Fa-Shen JIANG, Tzu-Hsuan YEH
  • Publication number: 20220209111
    Abstract: Some embodiments relate to an integrated circuit including one or more memory cells arranged over a semiconductor substrate between an upper metal interconnect layer and a lower metal interconnect layer. A memory cell includes a bottom electrode disposed over the lower metal interconnect layer, a data storage or dielectric layer disposed over the bottom electrode, and a top electrode disposed over the data storage or dielectric layer. An upper surface of the top electrode is in direct contact with the upper metal interconnect layer without a via or contact coupling the upper surface of the top electrode to the upper metal interconnect layer. Sidewall spacers are arranged along sidewalls of the top electrode, and have bottom surfaces that rest on an upper surface of the data storage or dielectric layer.
    Type: Application
    Filed: March 15, 2022
    Publication date: June 30, 2022
    Inventors: Chih-Yang Chang, Wen-Ting Chu
  • Publication number: 20220190117
    Abstract: The invention provides a silicon carbide semiconductor device, in particular to a monolithically integrated trench Metal-Oxide-Semiconductor Field-Effect Transistor with segmentally surrounded trench Schottky diode, which comprises a semiconductor substrate, a trench Metal-Oxide-Semiconductor Field-Effect Transistor and a trench Schottky diode. The trench Schottky diode has a perpendicularly disposed trench extending in a first horizontal direction, a metal electrode filled into the trench, and a plurality of doped regions disposed segmentally and extending in a second horizontal direction around the trench. The first horizontal direction is substantially orthogonal to the second horizontal direction, a side wall and a bottom wall of the metal electrode in the trench forms a Schottky junction, and the current flowing from the metal electrode is restricted between adjacent doped regions.
    Type: Application
    Filed: December 11, 2020
    Publication date: June 16, 2022
    Inventors: Chien-Chung HUNG, Kuo-Ting CHU, Chwan-Yin LI
  • Patent number: 11362271
    Abstract: The present disclosure relates to a memory device. The memory device includes a first electrode over a substrate and a second electrode over the substrate. A data storage structure is disposed between the first electrode and the second electrode. The data storage structure includes one or more metals having non-zero concentrations that change as a distance from the substrate increases.
    Type: Grant
    Filed: September 16, 2020
    Date of Patent: June 14, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hai-Dang Trinh, Cheng-Yuan Tsai, Hsing-Lien Lin, Wen-Ting Chu
  • Publication number: 20220157889
    Abstract: A resistive random access memory (RRAM) structure includes a resistive memory element formed on a semiconductor substrate. The resistive element includes a top electrode, a bottom electrode, and a resistive material layer positioned between the top electrode and the bottom electrode. The RRAM structure further includes a field effect transistor (FET) formed on the semiconductor substrate, the FET having a source and a drain. The drain has a zero-tilt doping profile and the source has a tilted doping profile. The resistive memory element is coupled with the drain via a portion of an interconnect structure.
    Type: Application
    Filed: January 31, 2022
    Publication date: May 19, 2022
    Inventors: Chin-Chieh Yang, Hsia-Wei Chen, Chih-Yang Chang, Kuo-Chi Tu, Wen-Ting Chu, Yu-Wen Liao
  • Patent number: 11335666
    Abstract: A memory device including a first semiconductor die and a memory cube mounted on and connected with the first semiconductor die is described. The memory cube includes multiple stacked tiers, and each tier of the multiple stacked tiers includes second semiconductor dies laterally wrapped by an encapsulant and a redistribution structure disposed on the second semiconductor dies and the encapsulant. The second semiconductor dies of the multiple stacked tiers are electrically connected with the first semiconductor die through the redistribution structures in the multiple stacked tiers.
    Type: Grant
    Filed: July 9, 2020
    Date of Patent: May 17, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Yu Huang, Han-Ping Pu, Ming-Kai Liu, Ting-Chu Ko, Yung-Ping Chiang, Chang-Wen Huang, Yu-Sheng Hsieh
  • Patent number: 11329221
    Abstract: The present disclosure, in some embodiments, relates to a method of forming a resistive random access memory (RRAM) device. The method includes forming one or more bottom electrode films over a lower interconnect layer within a lower inter-level dielectric layer. A data storage film having a variable resistance is formed above the one or more bottom electrode films. A lower top electrode film including a metal is over the data storage film, one or more oxygen barrier films are over the lower top electrode film, and an upper top electrode film including a metal nitride is formed over the one or more oxygen barrier films. The one or more oxygen barrier films include one or more of a metal oxide film and a metal oxynitride film. The upper top electrode film is formed to be completely confined over a top surface of the one or more oxygen barrier films.
    Type: Grant
    Filed: November 25, 2019
    Date of Patent: May 10, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Ting Chu, Tong-Chern Ong, Ying-Lang Wang
  • Patent number: 11329763
    Abstract: A decoding method and associated circuit are provided. The circuit includes a first memory, a decoder and a control circuit. In operations of the circuit, the first memory is configured to receive a data stream; the decoder is configured to receive the data stream to sequentially generate a plurality of frames, and sequentially decode the plurality of frames to respectively generate a plurality of codewords; and the control circuit is configured to determine an allowed maximum iteration count for decoding a current frame according to an iteration count for successfully decoding at least one previous frame of the current frame.
    Type: Grant
    Filed: February 16, 2020
    Date of Patent: May 10, 2022
    Assignee: Realtek Semiconductor Corp.
    Inventor: Tang-Ting Chu
  • Publication number: 20220139959
    Abstract: In some embodiments, the present disclosure relates to a method of forming an integrated chip including forming a ferroelectric layer over a bottom electrode layer, forming a top electrode layer over the ferroelectric layer, performing a first removal process to remove peripheral portions of the bottom electrode layer, the ferroelectric layer, and the top electrode layer, and performing a second removal process using a second etch that is selective to the bottom electrode layer and the top electrode layer to remove portions of the bottom electrode layer and the top electrode layer, so that after the second removal process the ferroelectric layer has a surface that protrudes past a surface of the bottom electrode layer and the top electrode layer.
    Type: Application
    Filed: January 12, 2022
    Publication date: May 5, 2022
    Inventors: Chih-Hsiang Chang, Kuo-Chi Tu, Sheng-Hung Shih, Wen-Ting Chu, Tzu-Yu Chen, Fu-Chen Chang
  • Patent number: 11316096
    Abstract: The present disclosure relates to an integrated circuit. The integrated circuit includes a an inter-layer dielectric (ILD) structure laterally surrounding a conductive interconnect. A dielectric protection layer is disposed over the ILD structure and a passivation layer is disposed over the dielectric protection layer. The passivation layer includes a protrusion extending outward from an upper surface of the passivation layer. A bottom electrode continuously extends from over the passivation layer to between sidewalls of the passivation layer. A data storage element is over the bottom electrode and a top electrode is over the data storage element.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: April 26, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Harry-Hak-Lay Chuang, Hung Cho Wang, Tong-Chern Ong, Wen-Ting Chu, Yu-Wen Liao, Kuei-Hung Shen, Kuo-Yuan Tu, Sheng-Huang Huang
  • Patent number: 11315861
    Abstract: Various embodiments of the present application are directed towards an integrated circuit comprising a memory cell on a homogeneous bottom electrode via (BEVA) top surface. In some embodiments, the integrated circuit comprises a conductive wire, a via dielectric layer, a via, and a memory cell. The via dielectric layer overlies the conductive wire. The via extends through the via dielectric layer to the conductive wire, and has a first sidewall, a second sidewall, and a top surface. The first and second sidewalls of the via are respectively on opposite sides of the via, and directly contact sidewalls of the via dielectric layer. The top surface of the via is homogenous and substantially flat. Further, the top surface of the via extends laterally from the first sidewall of the via to the second sidewall of the via. The memory cell is directly on the top surface of the via.
    Type: Grant
    Filed: January 2, 2020
    Date of Patent: April 26, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsia-Wei Chen, Wen-Ting Chu, Yu-Wen Liao
  • Patent number: 11296147
    Abstract: A memory device includes a first bottom electrode, a first memory stack, and a second memory stack. The first bottom electrode has a first portion and a second portion connected to the first portion. The first memory stack is over the first portion of the first bottom electrode. The first memory stack includes a first resistive switching element and a first top electrode over the first resistive switching element. The second memory stack is over the second portion of the first bottom electrode. The second memory stack comprises a second resistive switching element and a second top electrode over the second resistive switching element.
    Type: Grant
    Filed: May 16, 2019
    Date of Patent: April 5, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chieh-Fei Chiu, Yong-Shiuan Tsair, Wen-Ting Chu, Yu-Wen Liao, Chin-Yu Mei, Po-Hao Tseng
  • Publication number: 20220102428
    Abstract: A method for fabricating an integrated circuit is provided. The method includes depositing a dielectric layer over a conductive feature; etching an opening in the dielectric layer to expose the conductive feature, such that the dielectric layer has a tapered sidewall surrounding the opening; depositing a bottom electrode layer into the opening in the dielectric layer; depositing a resistance switch layer over the bottom electrode layer; patterning the resistance switch layer and the bottom electrode layer respectively into a resistance switch element and a bottom electrode, in which a sidewall of the bottom electrode is landing on the tapered sidewall of the dielectric layer.
    Type: Application
    Filed: September 25, 2020
    Publication date: March 31, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chieh-Fei CHIU, Wen-Ting CHU, Yong-Shiuan TSAIR, Yu-Wen LIAO, Chih-Yang CHANG, Chin-Chieh YANG
  • Publication number: 20220093687
    Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a first resistive random access memory (RRAM) element over a substrate. The first RRAM element has a first terminal and a second terminal. A second RRAM element is arranged over the substrate and has a third terminal and a fourth terminal. The third terminal is electrically coupled to the first terminal of the first RRAM element. A reading circuit is coupled to the second terminal and the fourth terminal. The reading circuit is configured to read a single data state from both a first non-zero read current received from the first RRAM element and a second non-zero read current received from the second RRAM element.
    Type: Application
    Filed: December 6, 2021
    Publication date: March 24, 2022
    Inventors: Chin-Chieh Yang, Chih-Yang Chang, Wen-Ting Chu, Yu-Wen Liao
  • Publication number: 20220093849
    Abstract: Various embodiments of the present application are directed towards a method for forming a flat via top surface for memory, as well as an integrated circuit (IC) resulting from the method. In some embodiments, an etch is performed into a dielectric layer to form an opening. A liner layer is formed covering the dielectric layer and lining the opening. A lower body layer is formed covering the dielectric layer and filling a remainder of the opening over the liner layer. A top surface of the lower body layer and a top surface of the liner layer are recessed to below a top surface of the dielectric layer to partially clear the opening. A homogeneous upper body layer is formed covering the dielectric layer and partially filling the opening. A planarization is performed into the homogeneous upper body layer until the dielectric layer is reached.
    Type: Application
    Filed: November 30, 2021
    Publication date: March 24, 2022
    Inventors: Hsia-Wei Chen, Chih-Yang Chang, Chin-Chieh Yang, Jen-Sheng Yang, Sheng-Hung Shih, Tung-Sheng Hsiao, Wen-Ting Chu, Yu-Wen Liao, I-Ching Chen
  • Publication number: 20220085280
    Abstract: Various embodiments of the present application are directed towards a method for forming a flat via top surface for memory, as well as an integrated circuit (IC) resulting from the method. In some embodiments, an etch is performed into a dielectric layer to form an opening. A liner layer is formed covering the dielectric layer and lining the opening. A lower body layer is formed covering the dielectric layer and filling a remainder of the opening over the liner layer. A top surface of the lower body layer and a top surface of the liner layer are recessed to below a top surface of the dielectric layer to partially clear the opening. A homogeneous upper body layer is formed covering the dielectric layer and partially filling the opening. A planarization is performed into the homogeneous upper body layer until the dielectric layer is reached.
    Type: Application
    Filed: November 30, 2021
    Publication date: March 17, 2022
    Inventors: Hsia-Wei Chen, Chih-Yang Chang, Chin-Chieh Yang, Jen-Sheng Yang, Sheng-Hung Shih, Tung-Sheng Hsiao, Wen-Ting Chu, Yu-Wen Liao, I-Ching Chen
  • Publication number: 20220085288
    Abstract: An integrated circuit device has an RRAM cell that includes a top electrode, an RRAM dielectric layer, and a bottom electrode having a surface that interfaces with the RRAM dielectric layer. Oxides of the bottom electrode are substantially absent from the bottom electrode surface. The bottom electrode has a higher density in a zone adjacent the surface as compared to a bulk region of the bottom electrode. The surface has a roughness Ra of 2 nm or less. A process for forming the surface includes chemical mechanical polishing followed by hydrofluoric acid etching followed by argon ion bombardment. An array of RRAM cells formed by this process is superior in terms of narrow distribution and high separation between low and high resistance states.
    Type: Application
    Filed: November 23, 2021
    Publication date: March 17, 2022
    Inventors: Fu-Chen Chang, Kuo-Chi Tu, Wen-Ting Chu
  • Patent number: 11276819
    Abstract: Some embodiments relate to an integrated circuit including one or more memory cells arranged over a semiconductor substrate between an upper metal interconnect layer and a lower metal interconnect layer. A memory cell includes a bottom electrode disposed over the lower metal interconnect layer, a data storage or dielectric layer disposed over the bottom electrode, and a top electrode disposed over the data storage or dielectric layer. An upper surface of the top electrode is in direct contact with the upper metal interconnect layer without a via or contact coupling the upper surface of the top electrode to the upper metal interconnect layer. Sidewall spacers are arranged along sidewalls of the top electrode, and have bottom surfaces that rest on an upper surface of the data storage or dielectric layer.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: March 15, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yang Chang, Wen-Ting Chu
  • Publication number: 20220077165
    Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a bottom electrode disposed over a substrate. A data storage structure is disposed on the bottom electrode and is configured to store a data state. A top electrode is disposed on the data storage structure. The top electrode has interior surfaces defining a recess within an upper surface of the top electrode. A masking layer contacts a bottom of the recess and extends to over the upper surface of the top electrode. An interconnect extends through the masking layer and to the top electrode. The interconnect is directly over the upper surface of the top electrode.
    Type: Application
    Filed: November 17, 2021
    Publication date: March 10, 2022
    Inventors: Tzu-Yu Chen, Kuo-Chi Tu, Sheng-Hung Shih, Wen-Ting Chu, Chih-Hsiang Chang, Fu-Chen Chang
  • Publication number: 20220066866
    Abstract: An all flash array storage device includes a flash memory array including multiple flash memories and a microprocessor. The flash memories correspond to multiple logical aggregation units. Each logical aggregation unit includes multiple stripes. Each stripe includes multiple storage units, including multiple data units and at least one parity unit. The microprocessor detects a status of the flash memories. In response to a detection result indicating that one of the flash memories has been removed from the flash memory array, the microprocessor sequentially performs a repair operation on the stripes comprised in one or more logical aggregation units that have been written with data. In the repair operation of one stripe, the microprocessor recalculates protection information of the stripe according to content stored in a portion of data units of the stripe and writes the recalculated protection information in one or more storage units of the stripe.
    Type: Application
    Filed: June 4, 2021
    Publication date: March 3, 2022
    Inventor: Ting-Chu Lee