Patents by Inventor Ting Chu
Ting Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11723292Abstract: The present disclosure, in some embodiments, relates to a memory device. The memory device includes a dielectric protection layer having sidewalls defining an opening over a conductive interconnect within an inter-level dielectric (ILD) layer. A bottom electrode structure extends from within the opening to directly over the dielectric protection layer. A variable resistance layer is over the bottom electrode structure and a top electrode is over the variable resistance layer. A top electrode via is disposed on the top electrode and directly over the dielectric protection layer.Type: GrantFiled: June 24, 2020Date of Patent: August 8, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Yang Chang, Wen-Ting Chu, Kuo-Chi Tu, Yu-Wen Liao, Hsia-Wei Chen, Chin-Chieh Yang, Sheng-Hung Shih, Wen-Chun You
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Patent number: 11706930Abstract: A semiconductor device includes a bottom electrode, a top electrode, a sidewall spacer, and a data storage element. The sidewall spacer is disposed aside the top electrode. The data storage element is located between the bottom electrode and the top electrode, and includes a ferroelectric material. The data storage element has a peripheral region which is disposed beneath the sidewall spacer and which has at least 60% of ferroelectric phase. A method for manufacturing the semiconductor device and a method for transforming a non-ferroelectric phase of a ferroelectric material to a ferroelectric phase are also disclosed.Type: GrantFiled: May 27, 2021Date of Patent: July 18, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tzu-Yu Chen, Sheng-Hung Shih, Fu-Chen Chang, Kuo-Chi Tu, Wen-Ting Chu
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Publication number: 20230217842Abstract: Various embodiments of the present application are directed towards a resistive random-access memory (RRAM) cell comprising a barrier layer to constrain the movement of metal cations during operation of the RRAM cell. In some embodiments, the RRAM cell further comprises a bottom electrode, a top electrode, a switching layer, and an active metal layer. The switching layer, the barrier layer, and the active metal layer are stacked between the bottom and top electrodes, and the barrier layer is between the switching and active metal layers. The barrier layer is conductive and between has a lattice constant less than that of the active metal layer.Type: ApplicationFiled: March 13, 2023Publication date: July 6, 2023Inventors: Fu-Chen Chang, Kuo-Chi Tu, Wen-Ting Chu, Chu-Jie Huang
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Patent number: 11696521Abstract: Various embodiments of the present disclosure are directed towards a memory cell comprising a high electron affinity dielectric layer at a bottom electrode. The high electron affinity dielectric layer is one of multiple different dielectric layers vertically stacked between the bottom electrode and a top electrode overlying the bottom electrode. Further, the high electrode electron affinity dielectric layer has a highest electron affinity amongst the multiple different dielectric layers and is closest to the bottom electrode. The different dielectric layers are different in terms of material systems and/or material compositions. It has been appreciated that by arranging the high electron affinity dielectric layer closest to the bottom electrode, the likelihood of the memory cell becoming stuck during cycling is reduced at least when the memory cell is RRAM. Hence, the likelihood of a hard reset/failure bit is reduced.Type: GrantFiled: July 27, 2020Date of Patent: July 4, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chao-Yang Chen, Chun-Yang Tsai, Kuo-Ching Huang, Wen-Ting Chu, Cheng-Jun Wu
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Patent number: 11683999Abstract: The present disclosure relates to a memory device. The memory device includes an access device arranged on or within a substrate and coupled to a word-line and a source line. A plurality of lower interconnects are disposed within a lower dielectric structure over the substrate. A first electrode is coupled to the plurality of lower interconnects. The plurality of lower interconnects couple the access device to the first electrode. A second electrode is over the first electrode. One or more upper interconnects are disposed within an upper dielectric structure laterally surrounding the second electrode. The one or more upper interconnects couple the second electrode to a bit-line. A data storage structure is disposed between the first electrode and the second electrode. The data storage structure includes one or more metals having non-zero concentrations that change as a distance from the substrate varies.Type: GrantFiled: June 7, 2022Date of Patent: June 20, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hai-Dang Trinh, Cheng-Yuan Tsai, Hsing-Lien Lin, Wen-Ting Chu
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Patent number: 11682456Abstract: Methods for programming memory cells of a resistive memory device include applying a voltage pulse sequence to a memory cell to set a logic state of the memory cell. An initial set sequence of voltage pulses may be applied to the memory cell, followed by a reform voltage pulse having an amplitude greater than the amplitudes of the initial set sequence, and within ±5% of the amplitude of a voltage pulse used in an initial forming process. Additional voltage pulses having amplitudes that are less than the amplitude of the reform voltage pulse may be subsequently applied. By applying a reform voltage pulse in the middle of, or at the end of, a memory set sequence including multiple voltage pulses, a resistive memory device may have a larger memory window and improved data retention relative to resistive memory devices programmed using conventional programming methods.Type: GrantFiled: August 28, 2021Date of Patent: June 20, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Fu-Chen Chang, Chu-Jie Huang, Nai-Chao Su, Kuo-Chi Tu, Wen-Ting Chu
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Patent number: 11678592Abstract: The present disclosure is directed to a method for the formation of resistive random-access memory (RRAM) structures with a low profile between or within metallization layers. For example, the method includes forming, on a substrate, a first metallization layer with conductive structures and a first dielectric layer abutting sidewall surfaces of the conductive structures; etching a portion of the first dielectric layer to expose a portion of the sidewall surfaces of the conductive structures; depositing a memory stack on the first metallization layer, the exposed portion of the sidewall surfaces, and a top surface of the conductive structures; patterning the memory stack to form a memory structure that covers the exposed portion of the sidewall surfaces and the top surface of the conductive structures; depositing a second dielectric layer to encapsulate the memory stack; and forming a second metallization layer on the second dielectric layer.Type: GrantFiled: May 25, 2021Date of Patent: June 13, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-Ming Wang, Chia-Wei Liu, Jen-Sheng Yang, Wen-Ting Chu, Yu-Wen Liao, Huei-Tzu Wang
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Patent number: 11678494Abstract: Various embodiments of the present application are directed a memory layout for reduced line loading. In some embodiments, a memory device comprises an array of bit cells, a first conductive line, a second conductive line, and a plurality of conductive bridges. The first and second conductive lines may, for example, be source lines or some other conductive lines. The array of bit cells comprises a plurality of rows and a plurality of columns, and the plurality of columns comprise a first column and a second column. The first conductive line extends along the first column and is electrically coupled to bit cells in the first column. The second conductive line extends along the second column and is electrically coupled to bit cells in the second column. The conductive bridges extend from the first conductive line to the second conductive line and electrically couple the first and second conductive lines together.Type: GrantFiled: July 21, 2020Date of Patent: June 13, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Yang Chang, Wen-Ting Chu
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Publication number: 20230133657Abstract: The use of menthol or an isomer thereof for preparation of a topical composition to improve neurodegenerative diseases and stroke wherein the neurodegenerative diseases are attributed to cerebral neurons impaired or degenerated, shortage of dopamine in a brain. The topical composition is manufactured as patches, liquids, pastes, oily substances, powders, gels, sprays, composite products or other products to be covered on limbs and applied on skin. A product to be covered on limbs can be a glove, a foot muff, a sock or an extended part or a layered object from a garment for continuous contact between skin and menthol. The present invention also provides the use of menthol or an isomer thereof for preparation of a topical composition to improve diseases or symptoms attributed to cerebral neurons impaired or degenerated, shortage of dopamine or stroke.Type: ApplicationFiled: March 24, 2020Publication date: May 4, 2023Inventors: Yi-Hung CHEN, Shiang-Suo HUANG, Shih-Ya HUNG, Hsing-Hui SU, Yi-Hsin WANG, Hsin-Yi CHUNG, Sih-Ting LUO, Chao-Jung CHEN, Yu-Ting CHU, Iona Jean MACDONALD
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Patent number: 11637239Abstract: The present disclosure, in some embodiments, relates to a resistive random access memory (RRAM) cell. The RRAM cell has a bottom electrode over a substrate. A data storage layer is over the bottom electrode and has a first thickness. A capping layer is over the data storage layer. The capping layer has a second thickness that is in a range of between approximately 1.9 and approximately 3 times thicker than the first thickness. A top electrode is over the capping layer.Type: GrantFiled: August 14, 2019Date of Patent: April 25, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Trinh Hai Dang, Hsing-Lien Lin, Cheng-Yuan Tsai, Chin-Chieh Yang, Yu-Wen Liao, Wen-Ting Chu, Chia-Shiung Tsai
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Patent number: 11630728Abstract: An all flash array storage device includes a flash memory array including multiple flash memories and a microprocessor. The flash memories correspond to multiple logical aggregation units. Each logical aggregation unit includes multiple stripes. Each stripe includes multiple storage units, including multiple data units and at least one parity unit. The microprocessor detects a status of the flash memories. In response to a detection result indicating that one of the flash memories has been removed from the flash memory array, the microprocessor sequentially performs a repair operation on the stripes comprised in one or more logical aggregation units that have been written with data. In the repair operation of one stripe, the microprocessor recalculates protection information of the stripe according to content stored in a portion of data units of the stripe and writes the recalculated protection information in one or more storage units of the stripe.Type: GrantFiled: June 4, 2021Date of Patent: April 18, 2023Assignee: Silicon Motion, Inc.Inventor: Ting-Chu Lee
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Patent number: 11631810Abstract: In some embodiments, the present disclosure relates to an integrated chip. The integrated chip includes one or more lower interconnects arranged within a dielectric structure over a substrate. A bottom electrode is disposed over one of the one or more lower interconnects. The bottom electrode includes a first material having a first electronegativity. A data storage layer separates the bottom electrode from a top electrode. The bottom electrode is between the data storage layer and the substrate. A reactivity reducing layer includes a second material and has a second electronegativity that is greater than or equal to the first electronegativity. The second material contacts a lower surface of the bottom electrode that faces the substrate.Type: GrantFiled: April 19, 2021Date of Patent: April 18, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chao-Yang Chen, Chun-Yang Tsai, Kuo-Ching Huang, Wen-Ting Chu, Pili Huang, Cheng-Jun Wu
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Publication number: 20230113903Abstract: A memory architecture includes: a plurality of cell arrays each of which comprises a plurality of bit cells, wherein each of bit cells of the plurality of cell arrays uses a respective variable resistance dielectric layer to transition between first and second logic states; and a control logic circuit, coupled to the plurality of cell arrays, and configured to cause a first information bit to be written into respective bit cells of a pair of cell arrays as an original logic state of the first information bit and a logically complementary logic state of the first information bit, wherein the respective variable resistance dielectric layers are formed by using a same recipe of deposition equipment and have different diameters.Type: ApplicationFiled: December 13, 2022Publication date: April 13, 2023Inventors: Yu-Der CHIH, Chung-Cheng Chou, Wen-Ting Chu
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Patent number: 11611038Abstract: Various embodiments of the present application are directed towards a resistive random-access memory (RRAM) cell comprising a barrier layer to constrain the movement of metal cations during operation of the RRAM cell. In some embodiments, the RRAM cell further comprises a bottom electrode, a top electrode, a switching layer, and an active metal layer. The switching layer, the barrier layer, and the active metal layer are stacked between the bottom and top electrodes, and the barrier layer is between the switching and active metal layers. The barrier layer is conductive and between has a lattice constant less than that of the active metal layer.Type: GrantFiled: February 9, 2021Date of Patent: March 21, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Fu-Chen Chang, Kuo-Chi Tu, Wen-Ting Chu, Chu-Jie Huang
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Publication number: 20230062850Abstract: Methods for programming memory cells of a resistive memory device include applying a voltage pulse sequence to a memory cell to set a logic state of the memory cell. An initial set sequence of voltage pulses may be applied to the memory cell, followed by a reform voltage pulse having an amplitude greater than the amplitudes of the initial set sequence, and within ±5% of the amplitude of a voltage pulse used in an initial forming process. Additional voltage pulses having amplitudes that are less than the amplitude of the reform voltage pulse may be subsequently applied. By applying a reform voltage pulse in the middle of, or at the end of, a memory set sequence including multiple voltage pulses, a resistive memory device may have a larger memory window and improved data retention relative to resistive memory devices programmed using conventional programming methods.Type: ApplicationFiled: August 28, 2021Publication date: March 2, 2023Inventors: Fu-Chen CHANG, Chu-Jie HUANG, Nai-Chao SU, Kuo-Chi TU, Wen-Ting CHU
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Patent number: 11557344Abstract: A memory architecture includes: a plurality of cell arrays each of which comprises a plurality of bit cells, wherein each of bit cells of the plurality of cell arrays uses a respective variable resistance dielectric layer to transition between first and second logic states; and a control logic circuit, coupled to the plurality of cell arrays, and configured to cause a first information bit to be written into respective bit cells of a pair of cell arrays as an original logic state of the first information bit and a logically complementary logic state of the first information bit, wherein the respective variable resistance dielectric layers are formed by using a same recipe of deposition equipment and have different diameters.Type: GrantFiled: May 25, 2021Date of Patent: January 17, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yu-Der Chih, Chung-Cheng Chou, Wen-Ting Chu
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Publication number: 20230011895Abstract: A method for efficiently waking up ferroelectric memory is provided. A wafer is formed with a plurality of first signal lines, a plurality of second signal lines, a plurality of third signal lines, and a plurality of ferroelectric memory cells that constitute a ferroelectric memory array. Each of the ferroelectric memory cells is electrically connected to one of the first signal lines, one of the second signal lines and one of the third signal lines. Voltage signals are simultaneously applied to the first signal lines, the second signal lines and the third signal lines to induce occurrence of a wake-up effect in the ferroelectric memory cells.Type: ApplicationFiled: July 8, 2021Publication date: January 12, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tzu-Yu CHEN, Sheng-Hung SHIH, Fu-Chen CHANG, Kuo-Chi TU, Wen-Ting CHU
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Patent number: 11551999Abstract: A memory device including a base chip and a memory cube mounted on and connected with the base chip is described. The memory cube includes multiple stacked tiers, and each tier of the multiple stacked tiers includes semiconductor chips laterally wrapped by an encapsulant and a redistribution structure. The semiconductor chips of the multiple stacked tiers are electrically connected with the base chip through the redistribution structures in the multiple stacked tiers. The memory cube includes a thermal path structure extending through the multiple stacked tiers and connected to the base chip. The thermal path structure has a thermal conductivity larger than that of the encapsulant. The thermal path structure is electrically isolated from the semiconductor chips in the multiple stacked tiers and the base chip.Type: GrantFiled: June 10, 2020Date of Patent: January 10, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Lipu Kris Chuang, Chung-Shi Liu, Han-Ping Pu, Hsin-Yu Pan, Ming-Kai Liu, Ting-Chu Ko
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Publication number: 20220395953Abstract: A method includes bonding a first package component on a composite carrier, and performing a first polishing process on the composite carrier to remove a base carrier of the composite carrier. The first polishing process stops on a first layer of the composite carrier. A second polishing process is performed to remove the first layer of the composite carrier. The second polishing process stops on a second layer of the composite carrier. A third polishing process is performed to remove a plurality of layers in the composite carrier. The plurality of layers include the second layer, and the third polishing process stops on a dielectric layer in the first package component.Type: ApplicationFiled: November 16, 2021Publication date: December 15, 2022Inventors: Chun-Wei Chang, Ming-Fa Chen, Chao-Wen Shih, Ting-Chu Ko
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Publication number: 20220384464Abstract: A semiconductor device includes a bottom electrode, a top electrode, a sidewall spacer, and a data storage element. The sidewall spacer is disposed aside the top electrode. The data storage element is located between the bottom electrode and the top electrode, and includes a ferroelectric material. The data storage element has a peripheral region which is disposed beneath the sidewall spacer and which has at least 60% of ferroelectric phase. A method for manufacturing the semiconductor device and a method for transforming a non-ferroelectric phase of a ferroelectric material to a ferroelectric phase are also disclosed.Type: ApplicationFiled: May 27, 2021Publication date: December 1, 2022Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tzu-Yu CHEN, Sheng-Hung SHIH, Fu-Chen CHANG, Kuo-Chi TU, Wen-Ting CHU