Patents by Inventor Ting-Chun Wang

Ting-Chun Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10529863
    Abstract: Operations in fabricating a Fin FET include providing a substrate having a fin structure, where an upper portion of the fin structure has a first fin surface profile. An isolation region is formed on the substrate and in contact with the fin structure. A portion of the isolation region is recessed by an etch process to form a recessed portion and to expose the upper portion of the fin structure, where the recessed portion has a first isolation surface profile. A thermal hydrogen treatment is applied to the fin structure and the recessed portion. A gate dielectric layer is formed with a substantially uniform thickness over the fin structure, where the recessed portion is adjusted from the first isolation surface profile to a second isolation surface profile and the fin structure is adjusted from the first fin surface profile to a second fin surface profile, by the thermal hydrogen treatment.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: January 7, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Ta Wu, Cheng-Wei Chen, Shiu-Ko Jangjian, Ting-Chun Wang
  • Patent number: 10504998
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes: a substrate; a fin structure protruding from the substrate, the fin structure extending along a first direction; isolation features disposed on both sides of the fin structure; a gate structure over the fin structure and extending on the isolation features along a second direction perpendicular to the first direction; and wherein the gate structure includes a first segment and a second segment, the second segment being over the first segment and including a greater dimension in the first direction than that of the first segment.
    Type: Grant
    Filed: September 12, 2017
    Date of Patent: December 10, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Cheng-Ta Wu, Yi-Hsien Lee, Wei-Ming You, Ting-Chun Wang
  • Patent number: 10483112
    Abstract: Gate stacks for improving integrated circuit device performance and methods for fabricating such gate stacks are disclosed herein. An exemplary method includes forming a gate stack over a substrate and at least partially removing the gate stack, thereby forming an opening. A multi-function layer is deposited in the opening and a work function layer is deposited over the multi-function layer. The multi-function layer includes nitrogen and one of titanium or tantalum. The work function layer includes nitrogen and one of titanium or tantalum. A concentration of the nitrogen of the work function layer is different than a concentration of the nitrogen of the multi-function layer. In some implementations, the concentration of the nitrogen of the work function layer from about 2% to about 5% and the concentration of the nitrogen of the multi-function layer from about 5% to about 15%.
    Type: Grant
    Filed: July 23, 2018
    Date of Patent: November 19, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
    Inventors: Shiu-Ko Jangjian, Ting-Chun Wang, Chi-Cherng Jeng, Chi-Wen Liu
  • Patent number: 10453933
    Abstract: A semiconductor device having a high-k gate dielectric, and a method of manufacture, is provided. A gate dielectric layer is formed over a substrate. An interfacial layer may be interposed between the gate dielectric layer and the substrate. A barrier layer, such as a TiN layer, having a higher concentration of nitrogen along an interface between the barrier layer and the gate dielectric layer is formed. The barrier layer may be formed by depositing, for example, a TiN layer and performing a nitridation process on the TiN layer to increase the concentration of nitrogen along an interface between the barrier layer and the gate dielectric layer. A gate electrode is formed over the barrier layer.
    Type: Grant
    Filed: October 27, 2016
    Date of Patent: October 22, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Wen Chen, Yu-Ting Lin, Che-Hao Chang, Wei-Ming You, Ting-Chun Wang
  • Patent number: 10438893
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a first inter-metal dielectric (IMD) layer thereon; forming a first metal interconnection and a second metal interconnection in the first IMD layer; removing part of the first IMD layer to form a recess between the first metal interconnection and the second metal interconnection; performing a curing process; and forming a second IMD layer on the first metal interconnection and the second metal interconnection.
    Type: Grant
    Filed: October 15, 2017
    Date of Patent: October 8, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Hsien Chen, Meng-Jun Wang, Ting-Chun Wang, Chih-Sheng Chang
  • Publication number: 20190295228
    Abstract: A neural network architecture is disclosed for performing image in-painting using partial convolution operations. The neural network processes an image and a corresponding mask that identifies holes in the image utilizing partial convolution operations, where the mask is used by the partial convolution operation to zero out coefficients of the convolution kernel corresponding to invalid pixel data for the holes. The mask is updated after each partial convolution operation is performed in an encoder section of the neural network. In one embodiment, the neural network is implemented using an encoder-decoder framework with skip links to forward representations of the features at different sections of the encoder to corresponding sections of the decoder.
    Type: Application
    Filed: March 21, 2019
    Publication date: September 26, 2019
    Inventors: Guilin Liu, Fitsum A. Reda, Kevin Shih, Ting-Chun Wang, Andrew Tao, Bryan Catanzaro
  • Publication number: 20190244060
    Abstract: A style transfer neural network may be used to generate stylized synthetic images, where real images provide the style (e.g., seasons, weather, lighting) for transfer to synthetic images. The stylized synthetic images may then be used to train a recognition neural network. In turn, the trained neural network may be used to predict semantic labels for the real images, providing recognition data for the real images. Finally, the real training dataset (real images and predicted recognition data) and the synthetic training dataset are used by the style transfer neural network to generate stylized synthetic images. The training of the neural network, prediction of recognition data for the real images, and stylizing of the synthetic images may be repeated for a number of iterations. The stylization operation more closely aligns a covariate of the synthetic images to the covariate of the real images, improving accuracy of the recognition neural network.
    Type: Application
    Filed: February 1, 2019
    Publication date: August 8, 2019
    Inventors: Aysegul Dundar, Ming-Yu Liu, Ting-Chun Wang, John Zedlewski, Jan Kautz
  • Publication number: 20190198672
    Abstract: Operations in fabricating a Fin FET include providing a substrate having a fin structure, where an upper portion of the fin structure has a first fin surface profile. An isolation region is formed on the substrate and in contact with the fin structure. A portion of the isolation region is recessed by an etch process to form a recessed portion and to expose the upper portion of the fin structure, where the recessed portion has a first isolation surface profile. A thermal hydrogen treatment is applied to the fin structure and the recessed portion. A gate dielectric layer is formed with a substantially uniform thickness over the fin structure, where the recessed portion is adjusted from the first isolation surface profile to a second isolation surface profile and the fin structure is adjusted from the first fin surface profile to a second fin surface profile, by the thermal hydrogen treatment.
    Type: Application
    Filed: December 21, 2018
    Publication date: June 27, 2019
    Inventors: Cheng-Ta WU, Cheng-Wei CHEN, Shiu-Ko JANGJIAN, Ting-Chun WANG
  • Publication number: 20190148522
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a dielectric structure over a transistor. The method includes forming a first recess in the dielectric structure. The method includes forming a first barrier layer over a first inner wall of the first recess. The first barrier layer has a first opening over a first portion of the dielectric structure, and the first barrier layer close to a first bottom surface of the first recess is thicker than the first barrier layer close to a top surface of the dielectric structure. The method includes removing the first portion through the first opening to form a second recess in the dielectric structure. The method includes forming a second barrier layer over a second inner wall of the second recess. The method includes forming a contact layer in the first opening and the second opening.
    Type: Application
    Filed: October 30, 2018
    Publication date: May 16, 2019
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Yang WU, Shiu-Ko JANGJIAN, Ting-Chun WANG, Yung-Si YU
  • Publication number: 20190147296
    Abstract: A method, computer readable medium, and system are disclosed for creating an image utilizing a map representing different classes of specific pixels within a scene. One or more computing systems use the map to create a preliminary image. This preliminary image is then compared to an original image that was used to create the map. A determination is made whether the preliminary image matches the original image, and results of the determination are used to adjust the computing systems that created the preliminary image, which improves a performance of such computing systems. The adjusted computing systems are then used to create images based on different input maps representing various object classes of specific pixels within a scene.
    Type: Application
    Filed: November 13, 2018
    Publication date: May 16, 2019
    Inventors: Ting-Chun Wang, Ming-Yu Liu, Bryan Christopher Catanzaro, Jan Kautz, Andrew J. Tao
  • Publication number: 20190096819
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a first inter-metal dielectric (IMD) layer thereon; forming a first metal interconnection and a second metal interconnection in the first IMD layer; removing part of the first IMD layer to form a recess between the first metal interconnection and the second metal interconnection; performing a curing process; and forming a second IMD layer on the first metal interconnection and the second metal interconnection.
    Type: Application
    Filed: October 15, 2017
    Publication date: March 28, 2019
    Inventors: Shih-Hsien Chen, Meng-Jun Wang, Ting-Chun Wang, Chih-Sheng Chang
  • Publication number: 20190067436
    Abstract: The present disclosure describes a silicide formation process which employs the formation of an amorphous layer in the SiGe S/D region via an application of a substrate bias voltage during a metal deposition process. For example, the method includes a substrate with a gate structure disposed thereon and a source/drain region adjacent to the gate structure. A dielectric is formed over the gate structure and the source-drain region. A contact opening is formed in the dielectric to expose a portion of the gate structure and a portion of the source/drain region. An amorphous layer is formed in the exposed portion of the source/drain region with a thickness and a composition which is based on an adjustable bias voltage applied to the substrate. Further, an anneal is performed to form a silicide on the source/drain region.
    Type: Application
    Filed: August 30, 2017
    Publication date: February 28, 2019
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Yang WU, Shiu-Ko JANG-JIAN, Ting-Chun WANG, Chuan-Pu LIU
  • Patent number: 10192985
    Abstract: A method for manufacturing a semiconductor device is provided including forming one or more fins over a substrate and forming an isolation insulating layer over the one or more fins. A dopant is introduced into the isolation insulating layer. The isolation insulating layer containing the dopant is annealed, and a portion of the oxide layer is removed so as to expose a portion of the fins.
    Type: Grant
    Filed: July 21, 2015
    Date of Patent: January 29, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Ta Wu, Ting-Chun Wang, Wei-Ming You, J. W. Wu
  • Patent number: 10192988
    Abstract: Operations in fabricating a Fin FET include providing a substrate having a fin structure, where an upper portion of the fin structure has a first fin surface profile. An isolation region is formed on the substrate and in contact with the fin structure. A portion of the isolation region is recessed by an etch process to form a recessed portion and to expose the upper portion of the fin structure, where the recessed portion has a first isolation surface profile. A thermal hydrogen treatment is applied to the fin structure and the recessed portion. A gate dielectric layer is formed with a substantially uniform thickness over the fin structure, where the recessed portion is adjusted from the first isolation surface profile to a second isolation surface profile and the fin structure is adjusted from the first fin surface profile to a second fin surface profile by the thermal hydrogen treatment.
    Type: Grant
    Filed: July 26, 2017
    Date of Patent: January 29, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Ta Wu, Shiu-Ko Jangjian, Cheng-Wei Chen, Ting-Chun Wang
  • Publication number: 20190006183
    Abstract: Gate stacks for improving integrated circuit device performance and methods for fabricating such gate stacks are disclosed herein. An exemplary method includes forming a gate stack over a substrate and at least partially removing the gate stack, thereby forming an opening. A multi-function layer is deposited in the opening and a work function layer is deposited over the multi-function layer. The multi-function layer includes nitrogen and one of titanium or tantalum. The work function layer includes nitrogen and one of titanium or tantalum. A concentration of the nitrogen of the work function layer is different than a concentration of the nitrogen of the multi-function layer. In some implementations, the concentration of the nitrogen of the work function layer from about 2% to about 5% and the concentration of the nitrogen of the multi-function layer from about 5% to about 15%.
    Type: Application
    Filed: July 23, 2018
    Publication date: January 3, 2019
    Inventors: SHIU-KO JANGJIAN, TING-CHUN WANG, CHI-CHERNG JENG, CHI-WEN LIU
  • Patent number: 10164095
    Abstract: A method for manufacturing a semiconductor device is provided including forming one or more fins over a substrate and forming an isolation insulating layer over the one or more fins. A dopant is introduced into the isolation insulating layer. The isolation insulating layer containing the dopant is annealed, and a portion of the oxide layer is removed so as to expose a portion of the fins.
    Type: Grant
    Filed: July 21, 2015
    Date of Patent: December 25, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Ta Wu, Ting-Chun Wang, Wei-Ming You, J. W. Wu
  • Patent number: 10141413
    Abstract: Some embodiments relate to a silicon wafer having a disc-like silicon body. The wafer includes a central portion circumscribed by a circumferential edge region. A plurality of sampling locations, which are arranged in the circumferential edge region, have a plurality of wafer property values, respectively, which correspond to a wafer property. The plurality of wafer property values differ from one another according to a pre-determined statistical edge region profile.
    Type: Grant
    Filed: June 22, 2015
    Date of Patent: November 27, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: I-Che Huang, Pu-Fang Chen, Ting-Chun Wang
  • Patent number: 10103267
    Abstract: A semiconductor device includes a semiconductor fin, a first silicon nitride based layer, a lining oxide layer, a second silicon nitride based layer and a gate oxide layer. The semiconductor fin has a top surface, a first side surface adjacent to the top surface, and a second side surface which is disposed under and adjacent to the first side surface. The first silicon nitride based layer peripherally encloses the second side surface of the semiconductor fin. The lining oxide layer is disposed conformal to the first silicon nitride based layer. The second silicon nitride based layer is disposed conformal to the lining oxide layer. The gate oxide layer is disposed conformal to the top surface and the first side surface of the semiconductor fin.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: October 16, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Ta Wu, Ting-Chun Wang, Yuan-Nien Chen
  • Patent number: 10062787
    Abstract: A FinFET includes a fin structure, a gate, a source-drain region and an inter layer dielectric (ILD). The gate crosses over the fin structure. The source-drain region is in the fin structure. The ILD is laterally adjacent to the gate and includes a dopant, in which a dopant concentration of the ILD adjacent to the gate is lower than a dopant concentration of the ILD away from the gate.
    Type: Grant
    Filed: January 25, 2017
    Date of Patent: August 28, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Ting Hsiao, Cheng-Ta Wu, Lun-Kuang Tan, Liang-Yu Yen, Ting-Chun Wang, Tsung-Han Wu, Wei-Ming You
  • Patent number: 10032634
    Abstract: A method includes forming a gate stack over a semiconductor substrate; forming an interlayer dielectric layer surrounding the gate stack; and at least partially removing the gate stack, thereby forming an opening. The method further includes forming a multi-function wetting/blocking layer in the opening, a work function layer over the multi-function blocking/wetting layer, and a conductive layer over the work function layer. The work function layer, the multi-function wetting/blocking layer, and the conductive layer fill the opening. The multi-function wetting/blocking layer includes aluminum, carbon, nitride, and one of: titanium and tantalum.
    Type: Grant
    Filed: May 9, 2016
    Date of Patent: July 24, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
    Inventors: Shiu-Ko Jangjian, Ting-Chun Wang, Chi-Cherng Jeng, Chi-Wen Liu