Patents by Inventor Ting PAN

Ting PAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11114529
    Abstract: A method of forming a semiconductor device includes forming semiconductor strips protruding above a substrate and isolation regions between the semiconductor strips; forming hybrid fins on the isolation regions, the hybrid fins comprising dielectric fins and dielectric structures over the dielectric fins; forming a dummy gate structure over the semiconductor strip; forming source/drain regions over the semiconductor strips and on opposing sides of the dummy gate structure; forming nanowires under the dummy gate structure, where the nanowires are over and aligned with respective semiconductor strips, and the source/drain regions are at opposing ends of the nanowires, where the hybrid fins extend further from the substrate than the nanowires; after forming the nanowires, reducing widths of center portions of the hybrid fins while keeping widths of end portions of the hybrid fins unchanged, and forming an electrically conductive material around the nanowires.
    Type: Grant
    Filed: August 23, 2019
    Date of Patent: September 7, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Cheng Chiang, Huan-Chieh Su, Shi Ning Ju, Kuan-Ting Pan, Chih-Hao Wang
  • Publication number: 20210273075
    Abstract: A semiconductor structure includes a plurality of fin structures extending along a first direction, a plurality of gate structure segments positioned along a line extending in a second direction, the second direction being orthogonal to the first direction, wherein the gate structure segments are separated by dummy fin structures. The semiconductor structure further includes a conductive layer disposed over both the gate structure segments and the dummy fin structures to electrically connect at least some of the gate structure segments, and a cut feature aligned with one of the dummy fin structures and positioned to electrically isolate gate structure segments on both sides of the one of the dummy fin structures.
    Type: Application
    Filed: November 6, 2020
    Publication date: September 2, 2021
    Inventors: Kuan-Ting Pan, Huan-Chieh Su, Jia-Chuan You, Shi Ning Ju, Kuo-Cheng Chiang, Yi-Ruei Jhan, Li-Yang Chuang, Chih-Hao Wang
  • Publication number: 20210272856
    Abstract: A method of fabricating a device includes forming a dummy gate over a plurality of fins. Thereafter, a first portion of the dummy gate is removed to form a first trench that exposes a first hybrid fin and a first part of a second hybrid fin. The method further includes filling the first trench with a dielectric material disposed over the first hybrid fin and over the first part of the second hybrid fin. Thereafter, a second portion of the dummy gate is removed to form a second trench and the second trench is filled with a metal layer. The method further includes etching-back the metal layer, where a first plane defined by a first top surface of the metal layer is disposed beneath a second plane defined by a second top surface of a second part of the second hybrid fin after the etching-back the metal layer.
    Type: Application
    Filed: July 30, 2020
    Publication date: September 2, 2021
    Inventors: Kuan-Ting PAN, Huan-Chieh SU, Zhi-Chang LIN, Shi Ning JU, Yi-Ruei JHAN, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Publication number: 20210265508
    Abstract: A semiconductor device structure is provided, which includes a first fin structure over a semiconductor substrate. The first fin structure has multiple first semiconductor nanostructures suspended over the semiconductor substrate. The semiconductor device structure includes a second fin structure over the semiconductor substrate, and the second fin structure has multiple second semiconductor nanostructures suspended over the semiconductor substrate. The semiconductor device structure includes a dielectric fin between the first fin structure and the second fin structure. In addition, the semiconductor device structure includes a metal gate stack wrapping around the first fin structure, the second fin structure, and the dielectric fin. The semiconductor device structure includes a dielectric protection structure over the metal gate stack.
    Type: Application
    Filed: February 26, 2020
    Publication date: August 26, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Cheng CHIANG, Huan-Chieh SU, Kuan-Ting PAN, Shi-Ning JU, Chih-Hao WANG
  • Publication number: 20210265485
    Abstract: A semiconductor device includes a substrate, a first dielectric fin, a semiconductor fin, a metal gate structure, an epitaxy structure, and a contact etch stop layer. The first dielectric fin is disposed over the substrate. The semiconductor fin is disposed over the substrate, in which along a lengthwise direction of the first dielectric fin and the semiconductor fin, the first dielectric fin is in contact with a first sidewall of the semiconductor fin. The metal gate structure crosses the first dielectric fin and the semiconductor fin. The epitaxy structure is over and in contact with the semiconductor fin. The contact etch stop layer is over and in contact with first dielectric fin.
    Type: Application
    Filed: May 7, 2021
    Publication date: August 26, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng CHING, Shi-Ning JU, Kuan-Ting PAN, Kuan-Lun CHENG, Chih-Hao WANG
  • Publication number: 20210257480
    Abstract: A method includes forming a semiconductor fin extruding from a substrate; forming a sacrificial capping layer on sidewalls of the semiconductor fin; forming first and second dielectric fins sandwiching the semiconductor fin; forming a sacrificial gate stack over the semiconductor fin, the sacrificial capping layer, and the first and second dielectric fins; forming gate spacers on sidewalls of the sacrificial gate stack; removing the sacrificial gate stack to form a gate trench, wherein the gate trench exposes the semiconductor fin, the sacrificial capping layer, and the first and second dielectric fins; removing the sacrificial capping layer from the gate trench, thereby exposing the sidewalls of the semiconductor fin; and forming a metal gate stack in the gate trench engaging the semiconductor fin.
    Type: Application
    Filed: April 23, 2021
    Publication date: August 19, 2021
    Inventors: Yi-Ruei Jhan, Kuan-Ting Pan, Kuo-Cheng Chiang, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20210257259
    Abstract: A method of forming first and second fin field effect transistors (finFETs) on a substrate includes forming first and second fin structures of the first and second finFETs, respectively, on the substrate and forming first and second oxide regions having first and second thicknesses on top surfaces of the first and second fin structures, respectively. The method further includes forming third and fourth oxide regions having third and fourth thicknesses on sidewalls on the first and second fin structures, respectively. The first and second thicknesses are greater than the third and fourth thicknesses, respectively. The method further includes forming a first polysilicon structure on the first and third oxide regions and forming a second polysilicon structure on the second and fourth oxide regions.
    Type: Application
    Filed: April 19, 2021
    Publication date: August 19, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Cheng CHIANG, Chih-Hao WANG, Kuan-Ting PAN
  • Publication number: 20210244758
    Abstract: Use of phosphorus-based material in preparation of medicament for treating tumors. The phosphorus-based material is selected from a material which is convertible to produce phosphate ions in an acidic environment, and the phosphorus-based material can be converted by tumor cells phagocytosis to produce a large number of phosphate ions to change the intraceullar environment and extracellular environment, thereby inhibiting proliferation of tumor cells and inducing death of tumor cells. This process has no significant effect on normal cell activities. By applying the phosphorus-based material to the preparation of a medicament for treating tumor in a manner as mentioned above, the amplification and metastasis of tumor cells can be effectively inhibited, thereby the metastasis of the tumor cells and recurrence of the tumor can be prevented more effectively, improving the therapeutic effect of the tumor.
    Type: Application
    Filed: July 20, 2018
    Publication date: August 12, 2021
    Applicant: HUBEI MOPHOS TECHNOLOGY CO., LTD.
    Inventors: Xuefeng Yu, Wenhua Zhou, Ting Pan, Haodong Cui
  • Publication number: 20210234036
    Abstract: A semiconductor device structure includes a fin structure, a semiconductive capping layer, an oxide layer, and a gate structure. The fin structure protrudes above a substrate. The semiconductive capping layer wraps around three sides of a channel region of the fin structure. The oxide layer wraps around three sides of the semiconductive capping layer. A thickness of a top portion of the semiconductive capping layer is less than a thickness of a top portion of the oxide layer. The gate structure wraps around three sides of the oxide layer.
    Type: Application
    Filed: April 17, 2021
    Publication date: July 29, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng CHING, Kuan-Ting PAN, Kuan-Lun CHENG, Chih-Hao WANG
  • Publication number: 20210226036
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes an isolation structure formed over a substrate, and a first stacked nanostructure and a second stacked nanostructure extending above the isolation structure. The semiconductor device structure includes an inner spacer layer surrounding the first stacked nanostructure, and a dummy fin structure formed over the isolation structure. The dummy fin structure is between the first stacked nanostructure and the second stacked nanostructure, and a capping layer formed over the dummy fin structure. The inner spacer layer is in direct contact with the dummy fin structure and the capping layer.
    Type: Application
    Filed: April 1, 2021
    Publication date: July 22, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Cheng CHING, Zhi-Chang LIN, Kuan-Ting PAN, Chih-Hao WANG, Shi-Ning JU
  • Patent number: 11064629
    Abstract: A device casing includes a casing body and a detachable bracket. The casing body has first and second supporting frames opposite to each other, and first and second guiding slots formed on the first supporting frame. The first guiding slot has a first open end and a first closed end. The second guiding slot has a second open end and a second closed end. The detachable bracket is detachably disposed between the first and second supporting frames and has first and second sliding posts. The first sliding post is rotatably disposed at the first closed end. The second sliding post is slidably disposed at the second closed end. By the structural constraint between the first and second guiding slots and the first and second sliding posts respectively, the detachable bracket can stably rotate relative to the casing body and can be installed onto the casing body easily.
    Type: Grant
    Filed: December 9, 2019
    Date of Patent: July 13, 2021
    Assignees: Inventec (Pudong) Technology Corp., Inventec Corporation
    Inventors: Yuan-Chang Yang, Jeng-Ting Pan
  • Publication number: 20210193531
    Abstract: The present disclosure relates to a semiconductor device and a manufacturing method, and more particularly to a semiconductor device having self-aligned isolation structures. The present disclosure provides self-aligned isolation fins that can be formed by depositing dielectric material in openings formed in a spacing layer or by replacing portions of fins with dielectric material. The self-aligned isolation fins can be separated from each other by a critical dimension of the utilized photolithography process. The separation between self-aligned isolation fins or between the self-aligned isolation fins and active fins can be approximately equal to or larger than the separations of the active fins.
    Type: Application
    Filed: March 8, 2021
    Publication date: June 24, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Cheng CHIANG, Chih-Hao Wang, Shi Ning Ju, Kuan-Lun Cheng, Kuan-Ting Pan
  • Patent number: 11004959
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes an isolation structure formed over a substrate, and a first stacked wire structure and a second stacked wire structure extending above the isolation structure. The semiconductor device structure includes a dummy fin structure formed over the isolation structure, and the dummy fin structure is between the first stacked wire structure and the second stacked wire structure. The semiconductor device structure also includes a capping layer formed over the dummy fin structure. The isolation structure has a first width, the dummy fin structure has a second width, and the second width is smaller than the first width.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: May 11, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Cheng Ching, Zhi-Chang Lin, Kuan-Ting Pan, Chih-Hao Wang, Shi-Ning Ju
  • Patent number: 11004960
    Abstract: A semiconductor device includes a substrate, a first dielectric fin, a second dielectric fin, a semiconductor fin, an epitaxy structure, and a metal gate structure. The first dielectric fin and the second dielectric fin disposed over the substrate. The semiconductor fin is disposed over the substrate, in which the semiconductor fin is between the first dielectric fin and the second dielectric fin. The epitaxy structure covers at least two surfaces of the semiconductor fin, in which the epitaxy structure is in contact with the first dielectric fin and is separated from the second dielectric fin. The metal gate structure crosses the first dielectric fin, the second dielectric fin, and the semiconductor fin.
    Type: Grant
    Filed: December 13, 2019
    Date of Patent: May 11, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng Ching, Shi-Ning Ju, Kuan-Ting Pan, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20210134677
    Abstract: A semiconductor device includes a semiconductor substrate, a first semiconductor stack, a second semiconductor stack, a first gate structure, and a second gate structure. The semiconductor substrate comprising a first device region and a second device region. The first semiconductor stack is located on the semiconductor substrate over the first device region, and has first channels. The second semiconductor stack is located on the semiconductor substrate over the second device region, and has second channels. A total number of the first channels is greater than a total number of the second channels. The first gate structure encloses the first semiconductor stack. The second gate structure encloses the second semiconductor stack.
    Type: Application
    Filed: April 23, 2020
    Publication date: May 6, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuan-Ting Pan, Chih-Hao Wang, Kuo-Cheng Chiang, Yi-Bo Liao, Yi-Ruei Jhan
  • Patent number: 10985277
    Abstract: A method includes forming a first semiconductor layer over a substrate. A second semiconductor layer is formed over the first semiconductor layer. The first semiconductor layer and the second semiconductor layer are etched to form a fin structure that extends from the substrate. The fin structure has a remaining portion of first semiconductor layer and a remaining portion of the second semiconductor layer atop the remaining portion of the first semiconductor layer. A capping layer is formed to wrap around three sides of the fin structure. At least a portion of the capping layer and at least a portion of the remaining portion of the second semiconductor layer in the fin structure are oxidized to form an oxide layer wrapping around three sides of the fin structure.
    Type: Grant
    Filed: April 27, 2020
    Date of Patent: April 20, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng Ching, Kuan-Ting Pan, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 10985072
    Abstract: A method of forming first and second fin field effect transistors (finFETs) on a substrate includes forming first and second fin structures of the first and second finFETs, respectively, on the substrate and forming first and second oxide regions having first and second thicknesses on top surfaces of the first and second fin structures, respectively. The method further includes forming third and fourth oxide regions having third and fourth thicknesses on sidewalls on the first and second fin structures, respectively. The first and second thicknesses are greater than the third and fourth thicknesses, respectively. The method further includes forming a first polysilicon structure on the first and third oxide regions and forming a second polysilicon structure on the second and fourth oxide regions.
    Type: Grant
    Filed: May 18, 2020
    Date of Patent: April 20, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Cheng Chiang, Chih-Hao Wang, Kuan-Ting Pan
  • Publication number: 20210103529
    Abstract: A method for performing adaptive locking range management, an associated data storage device and a controller thereof are provided. The method may include: receiving a security command from outside of the data storage device, wherein the security command is related to changing an old locking range into a new locking range; obtaining a start Logical Block Address (LBA) and a length value of the new locking range according to the security command; determining whether the start LBA of the new locking range is less than an end LBA of the old locking range, and determining whether an end LBA of the new locking range is greater than a start LBA of the old locking range; and in response to both determination results being true, performing data trimming on any respective non-overlapped portions of the new locking range and the old locking range.
    Type: Application
    Filed: November 30, 2020
    Publication date: April 8, 2021
    Inventors: Chih-Yu Lin, Hung-Ting Pan, Sung-Ling Hsu
  • Publication number: 20210076528
    Abstract: A device casing includes a casing body and a detachable bracket. The casing body has first and second supporting frames opposite to each other, and first and second guiding slots formed on the first supporting frame. The first guiding slot has a first open end and a first closed end. The second guiding slot has a second open end and a second closed end. The detachable bracket is detachably disposed between the first and second supporting frames and has first and second sliding posts. The first sliding post is rotatably disposed at the first closed end. The second sliding post is slidably disposed at the second closed end. By the structural constraint between the first and second guiding slots and the first and second sliding posts respectively, the detachable bracket can stably rotate relative to the casing body and can be installed onto the casing body easily.
    Type: Application
    Filed: December 9, 2019
    Publication date: March 11, 2021
    Inventors: Yuan-Chang Yang, Jeng-Ting Pan
  • Patent number: 10943830
    Abstract: The present disclosure relates to a semiconductor device and a manufacturing method, and more particularly to a semiconductor device having self-aligned isolation structures. The present disclosure provides self-aligned isolation fins that can be formed by depositing dielectric material in openings formed in a spacing layer or by replacing portions of fins with dielectric material. The self-aligned isolation fins can be separated from each other by a critical dimension of the utilized photolithography process. The separation between self-aligned isolation fins or between the self-aligned isolation fins and active fins can be approximately equal to or larger than the separations of the active fins.
    Type: Grant
    Filed: October 4, 2017
    Date of Patent: March 9, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuo-Cheng Chiang, Chih-Hao Wang, Shi Ning Ju, Kuan-Lun Cheng, Kuan-Ting Pan