Patents by Inventor Tomohide Terashima

Tomohide Terashima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11670634
    Abstract: There are provided a transistor including a first semiconductor layer of a first conductivity type, a second semiconductor layer thereabove, a first impurity region of a second conductivity type provided in an upper layer part of the second semiconductor layer, a second impurity region of a first conductivity type provided in an upper layer part of the first impurity region, a gate electrode facing the first impurity region and the second semiconductor layer with a gate insulating film interposed in between, and first and second main electrodes; a parasitic transistor with the second impurity region as a collector, the first and the second semiconductor layers as an emitter, and the first impurity region as a base; a parasitic diode with the first impurity region as an anode, and the first and the second semiconductor layers as a cathode; and a pn junction diode with the first impurity region as an anode, and the second impurity region as a cathode.
    Type: Grant
    Filed: January 7, 2020
    Date of Patent: June 6, 2023
    Assignee: Mitsubishi Electric Corporation
    Inventor: Tomohide Terashima
  • Patent number: 11552073
    Abstract: A semiconductor device includes a main IGBT, a sense, a resistor, a MOSFET and a diode, as main components. The sense IGBT and the main IGBT are connected in parallel with each other. The drain of MOSFET is connected to the gate of the sense IGBT, the source thereof is connected to the gate of the main IGBT, and the gate thereof is connected to the emitter of the sense IGBT and the cathode of diode. One end of the resistor is connected to the gate of the main IGBT and the source of the MOSFET, and the other end of the resistor is connected to the emitter of the main IGBT and the anode of the diode.
    Type: Grant
    Filed: November 4, 2021
    Date of Patent: January 10, 2023
    Assignee: Mitsubishi Electric Corporation
    Inventors: Sho Tanaka, Tomohide Terashima
  • Publication number: 20220246603
    Abstract: A semiconductor device includes a main IGBT, a sense, a resistor, a MOSFET and a diode, as main components. The sense IGBT and the main IGBT are connected in parallel with each other. The drain of MOSFET is connected to the gate of the sense IGBT, the source thereof is connected to the gate of the main IGBT, and the gate thereof is connected to the emitter of the sense IGBT and the cathode of diode. One end of the resistor is connected to the gate of the main IGBT and the source of the MOSFET, and the other end of the resistor is connected to the emitter of the main IGBT and the anode of the diode.
    Type: Application
    Filed: November 4, 2021
    Publication date: August 4, 2022
    Applicant: Mitsubishi Electric Corporation
    Inventors: Sho TANAKA, Tomohide TERASHIMA
  • Patent number: 11217449
    Abstract: There is provided a technique for suppressing the operation of a parasitic transistor in a semiconductor device having a voltage sense structure. The semiconductor device includes: a semiconductor layer; a first impurity region; a second impurity region; a first semiconductor region; a second semiconductor region; a first electrode; a second electrode; and a third electrode. The second impurity region includes a low lifetime region at least under the second semiconductor region. The low lifetime region is a region having a defect density higher than that in a surface layer of the second impurity region or a region in which a heavy metal is diffused.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: January 4, 2022
    Assignee: Mitsubishi Electric Corporation
    Inventors: Tomohide Terashima, Yasuhiro Kagawa, Kensuke Taguchi
  • Patent number: 11183386
    Abstract: There is provided a technique for suppressing the operation of a parasitic transistor in a semiconductor device having a voltage sense structure. The semiconductor device includes: a semiconductor layer; a first impurity region; a second impurity region; a first semiconductor region; a second semiconductor region; a first electrode; a second electrode; and a third electrode. The second impurity region includes a low lifetime region at least under the second semiconductor region. The low lifetime region is a region having a defect density higher than that in a surface layer of the second impurity region or a region in which a heavy metal is diffused.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: November 23, 2021
    Assignee: Mitsubishi Electric Corporation
    Inventors: Tomohide Terashima, Yasuhiro Kagawa, Kensuke Taguchi
  • Publication number: 20200335496
    Abstract: There are provided a transistor including a first semiconductor layer of a first conductivity type, a second semiconductor layer thereabove, a first impurity region of a second conductivity type provided in an upper layer part of the second semiconductor layer, a second impurity region of a first conductivity type provided in an upper layer part of the first impurity region, a gate electrode facing the first impurity region and the second semiconductor layer with a gate insulating film interposed in between, and first and second main electrodes; a parasitic transistor with the second impurity region as a collector, the first and the second semiconductor layers as an emitter, and the first impurity region as a base; a parasitic diode with the first impurity region as an anode, and the first and the second semiconductor layers as a cathode; and a pn junction diode with the first impurity region as an anode, and the second impurity region as a cathode.
    Type: Application
    Filed: January 7, 2020
    Publication date: October 22, 2020
    Applicant: Mitsubishi Electric Corporation
    Inventor: Tomohide TERASHIMA
  • Publication number: 20200203166
    Abstract: There is provided a technique for suppressing the operation of a parasitic transistor in a semiconductor device having a voltage sense structure. The semiconductor device includes: a semiconductor layer; a first impurity region; a second impurity region; a first semiconductor region; a second semiconductor region; a first electrode; a second electrode; and a third electrode. The second impurity region includes a low lifetime region at least under the second semiconductor region. The low lifetime region is a region having a defect density higher than that in a surface layer of the second impurity region or a region in which a heavy metal is diffused.
    Type: Application
    Filed: September 30, 2019
    Publication date: June 25, 2020
    Applicant: Mitsubishi Electric Corporation
    Inventors: Tomohide TERASHIMA, Yasuhiro KAGAWA, Kensuke TAGUCHI
  • Patent number: 9159563
    Abstract: A semiconductor device manufacturing method according to the present invention includes a step of arranging a plurality of processing objects on a first tray and a second tray adjacent to the first tray, a plurality of application steps in which application of an application substance to the plurality of processing objects is repeated a certain number of times by emitting the application substance from an application device formed right above a contact position at which the first tray and the second tray contact each other, by swinging the application device along a first direction across the contact position, and by moving the first tray and the second tray in a second direction perpendicular to the first direction, and an interchange step of interchanging the first tray and the second tray in position without changing the directions of the first tray and the second tray corresponding to the second direction, the interchange step being executed at least one time among the plurality of application steps.
    Type: Grant
    Filed: September 26, 2012
    Date of Patent: October 13, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventors: Tomohide Terashima, Yasuhiro Yoshiura, Eiko Otsuki
  • Publication number: 20150228488
    Abstract: A semiconductor device manufacturing method according to the present invention includes a step of arranging a plurality of processing objects on a first tray and a second tray adjacent to the first tray, a plurality of application steps in which application of an application substance to the plurality of processing objects is repeated a certain number of times by emitting the application substance from an application device formed right above a contact position at which the first tray and the second tray contact each other, by swinging the application device along a first direction across the contact position, and by moving the first tray and the second tray in a second direction perpendicular to the first direction, and an interchange step of interchanging the first tray and the second tray in position without changing the directions of the first tray and the second tray corresponding to the second direction, the interchange step being executed at least one time among the plurality of application steps.
    Type: Application
    Filed: September 26, 2012
    Publication date: August 13, 2015
    Applicant: Mitsubishi Electric Corporation
    Inventors: Tomohide Terashima, Yasuhiro Yoshiura, Eiko Otsuki
  • Patent number: 9048111
    Abstract: A semiconductor device includes a substrate, a buried insulating film formed on the substrate, an SOI layer formed on the buried insulating film, an insulating film formed to extend from a top surface of the SOI layer to the buried insulating film and to divide the SOI layer into a first SOI layer and a second SOI layer isolated from the first SOI layer, an element formed in the first SOI layer, and an electrode having at one end thereof a pad located directly above the second SOI layer, the other end of the electrode being connected to the first SOI layer. A cavity region is formed between the buried insulating film and the substrate directly below the first SOI layer. The portion of the buried insulating film directly below the second SOI layer is at least partially in direct contact with the substrate.
    Type: Grant
    Filed: April 15, 2014
    Date of Patent: June 2, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventors: Junichi Yamashita, Tomohide Terashima
  • Publication number: 20150008557
    Abstract: A semiconductor device includes a substrate, a buried insulating film formed on the substrate, an SOI layer formed on the buried insulating film, an insulating film formed to extend from a top surface of the SOI layer to the buried insulating film and to divide the SOI layer into a first SOI layer and a second SOI layer isolated from the first SOI layer, an element formed in the first SOI layer, and an electrode having at one end thereof a pad located directly above the second SOI layer, the other end of the electrode being connected to the first SOI layer. A cavity region is formed between the buried insulating film and the substrate directly below the first SOI layer. The portion of the buried insulating film directly below the second SOI layer is at least partially in direct contact with the substrate.
    Type: Application
    Filed: April 15, 2014
    Publication date: January 8, 2015
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Junichi YAMASHITA, Tomohide TERASHIMA
  • Patent number: 8878239
    Abstract: On a main surface of a semiconductor substrate, an N? semiconductor layer is formed with a dielectric portion including relatively thin and thick portions interposed therebetween. In a predetermined region of the N? semiconductor layer, an N-type impurity region and a P-type impurity region are formed. A gate electrode is formed on a surface of a portion of the P-type impurity region located between the N-type impurity region and the N? semiconductor layer. In a predetermined region of the N? semiconductor layer located at a distance from the P-type impurity region, another P-type impurity region is formed. As a depletion layer block portion, another N-type impurity region higher in impurity concentration than the N? semiconductor layer is formed from the surface of the N? semiconductor layer to the dielectric portion.
    Type: Grant
    Filed: May 3, 2013
    Date of Patent: November 4, 2014
    Assignee: Mitsubishi Electric Corporation
    Inventor: Tomohide Terashima
  • Patent number: 8772903
    Abstract: A semiconductor device includes a plurality of floating regions, an insulating layer and a capacitance forming portion. The plurality of floating regions are arranged on a surface of a semiconductor substrate in a row, wherein the plurality of floating regions are provided with insulating regions therebetween. The plurality of floating regions include a first floating region and a second floating region. The second floating region is located farther than the first floating region from an island region of a predetermined potential on the semiconductor substrate. The insulating layer is interposed between each of the plurality of floating regions and a semiconductor material layer of the semiconductor substrate. The capacitance forming portion forms an external capacitance in parallel with the capacitance of the insulating region between the first floating region and the island region of the predetermined potential.
    Type: Grant
    Filed: July 13, 2011
    Date of Patent: July 8, 2014
    Assignee: Mitsubishi Electric Corporation
    Inventor: Tomohide Terashima
  • Patent number: 8710617
    Abstract: In a region located between a collector electrode and a semiconductor substrate, there are a portion where a hollow region is located and a portion where no hollow region is located. Between the collector electrode and the portion where no hollow region is located in the semiconductor substrate, a floating silicon layer electrically isolated by insulating films is formed.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: April 29, 2014
    Assignee: Mitsubishi Electric Corporation
    Inventors: Junichi Yamashita, Tomohide Terashima
  • Patent number: 8674471
    Abstract: A semiconductor device supplying a charging current to a charging-target element includes: a semiconductor layer of a first conductivity type; a first semiconductor region of a second conductivity type formed on a main surface of the semiconductor layer and having a first node coupled to a first electrode of the charging-target element and a second node coupled to a power supply potential node supplied with a power supply voltage; a second semiconductor region of the first conductivity type formed in a surface of the first semiconductor region at a distance from the semiconductor layer and having a third node coupled to the power supply potential node; and a charge carrier drift restriction portion restricting drift of charge carrier from the third node to the semiconductor layer.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: March 18, 2014
    Assignee: Mitsubishi Electric Corporation
    Inventor: Tomohide Terashima
  • Publication number: 20140015004
    Abstract: On a main surface of a semiconductor substrate, an N? semiconductor layer is formed with a dielectric portion including relatively thin and thick portions interposed therebetween. In a predetermined region of the N? semiconductor layer, an N-type impurity region and a P-type impurity region are formed. A gate electrode is formed on a surface of a portion of the P-type impurity region located between the N-type impurity region and the N? semiconductor layer. In a predetermined region of the N? semiconductor layer located at a distance from the P-type impurity region, another P-type impurity region is formed. As a depletion layer block portion, another N-type impurity region higher in impurity concentration than the N? semiconductor layer is formed from the surface of the N? semiconductor layer to the dielectric portion.
    Type: Application
    Filed: May 3, 2013
    Publication date: January 16, 2014
    Applicant: Mitsubishi Electric Corporation
    Inventor: Tomohide TERASHIMA
  • Publication number: 20130292740
    Abstract: In a region located between a collector electrode and a semiconductor substrate, there are a portion where a hollow region is located and a portion where no hollow region is located. Between the collector electrode and the portion where no hollow region is located in the semiconductor substrate, a floating silicon layer electrically isolated by insulating films is formed.
    Type: Application
    Filed: March 13, 2013
    Publication date: November 7, 2013
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Junichi YAMASHITA, Tomohide TERASHIMA
  • Patent number: 8466515
    Abstract: On a main surface of a semiconductor substrate, an N? semiconductor layer is formed with a dielectric portion including relatively thin and thick portions interposed therebetween. In a predetermined region of the N? semiconductor layer, an N-type impurity region and a P-type impurity region are formed. A gate electrode is formed on a surface of a portion of the P-type impurity region located between the N-type impurity region and the N? semiconductor layer. In a predetermined region of the N? semiconductor layer located at a distance from the P-type impurity region, another P-type impurity region is formed. As a depletion layer block portion, another N-type impurity region higher in impurity concentration than the N? semiconductor layer is formed from the surface of the N? semiconductor layer to the dielectric portion.
    Type: Grant
    Filed: April 20, 2011
    Date of Patent: June 18, 2013
    Assignee: Mitsubishi Electric Corporation
    Inventor: Tomohide Terashima
  • Patent number: 8395231
    Abstract: A semiconductor device supplying a charging current to a charging-target element includes: a semiconductor layer of a first conductivity type; a first semiconductor region of a second conductivity type formed on a main surface of the semiconductor layer and having a first node coupled to a first electrode of the charging-target element and a second node coupled to a power supply potential node supplied with a power supply voltage; a second semiconductor region of the first conductivity type formed in a surface of the first semiconductor region at a distance from the semiconductor layer and having a third node coupled to the power supply potential node; and a charge carrier drift restriction portion restricting drift of charge carrier from the third node to the semiconductor layer.
    Type: Grant
    Filed: July 31, 2007
    Date of Patent: March 12, 2013
    Assignee: Mitsubishi Electric Corporation
    Inventor: Tomohide Terashima
  • Publication number: 20120319739
    Abstract: A semiconductor device supplying a charging current to a charging-target element includes: a semiconductor layer of a first conductivity type; a first semiconductor region of a second conductivity type formed on a main surface of the semiconductor layer and having a first node coupled to a first electrode of the charging-target element and a second node coupled to a power supply potential node supplied with a power supply voltage; a second semiconductor region of the first conductivity type formed in a surface of the first semiconductor region at a distance from the semiconductor layer and having a third node coupled to the power supply potential node; and a charge carrier drift restriction portion restricting drift of charge carrier from the third node to the semiconductor layer.
    Type: Application
    Filed: August 28, 2012
    Publication date: December 20, 2012
    Applicant: Mitsubishi Electric Corporation
    Inventor: Tomohide TERASHIMA