Abstract: A substrate processing method includes: providing a substrate including a mask; forming a film on the mask; forming a reaction layer on a surface layer of the film; and removing the reaction layer by applying energy to the reaction layer.

Abstract: An apparatus includes a memory cell array including a plurality of word lines each coupled to a plurality of memory cells, and a control circuit which is configured to activate first and second internal signals in a time-division manner in response to a first external command A first number of the word lines arc selected in response to the first internal signal, and a second number of the word line is selected in response to the second internal signal. The second number is smaller than the first number.

Abstract: Apparatuses and methods for 1T and 2T memory cell architectures. A memory array includes a word line which has both 1T and 2T portions. In the 1T portion, each sense amplifier is coupled to one memory cell along the word line. In the 2T portion, sense amplifiers are coupled to more than one memory cell along the word line each. For example, each sense amplifier in the 2T portion may be coupled to two bit lines, each of which intersect a memory cell along the word line. In some embodiments, the 2T portion may store a count value which represents an access count to the word line.

Abstract: Charge transfer between gate terminals of sub-threshold current reduction circuit (SCRC) transistors and related apparatuses and methods are disclosed. An apparatus includes a first output terminal electrically connected to a pull-up gate terminal of at least one pull-up SCRC transistor and a second output terminal electrically connected to a pull-down gate terminal of at least one pull-down SCRC transistor. The apparatus also includes a first resistive path between a first input terminal and the first output terminal and a second resistive path between the second input terminal and the second output terminal. The apparatus further includes a charge transfer gate electrically connected between the first resistive path and the second resistive path.

Abstract: Apparatuses, systems, and methods for error correction. A memory array may be coupled to an error correction code (ECC) circuit along a read bus and a write bus. The ECC circuit includes a read portion and a write portion. As part of a mask write operation, read data and read parity may be read out along the read bus to the read portion of the ECC circuit and write data may be received along data terminals by the write portion of the ECC circuit. The write portion of the ECC circuit may generate amended write data based on the write data and the read data, and may generate amended parity based on the read parity and the amended write data. The amended write data and amended parity may be written back to the memory array along the write bus.

Abstract: An error correction code (ECC) circuit receives a plurality of data hits and provides a one or more parity bits. The parity bits are used to locate and/or correct errors in the data bits. The ECC circuit splits the plurality of data bits into multiple portions and then processes these portions sequentially to generate preliminary parity bits. Once the portions of the data have been sequentially processed, the preliminary parity bits are combined to generate the parity bits.

Abstract: Apparatuses and methods for 1T and 2T memory cell architectures. A memory array includes a word line which has both 1T and 2T portions. In the 1T portion, each sense amplifier is coupled to one memory cell along the word line. In the 2T portion, sense amplifiers are coupled to more than one memory cell along the word line each. For example, each sense amplifier in the 2T portion may be coupled to two bit lines, each of which intersect a memory cell along the word line. In some embodiments, the 2T portion may store a count value which represents an access count to the word line.

Abstract: Apparatuses, systems, and methods for error correction. A memory device may have a number of memory cells each of which stores a bit of information. One or more error correction code (ECC) may be used to determine if the bits of information contain any errors. To mitigate the effects of failures of adjacent memory cells, the information may be divided into a first group and a second group, where each group contains information from memory cells which are non-adjacent to other memory cells of that group. Each group of information may include data bits and parity bits used to correct those data bits. For example, as part of a read operation, a first ECC circuit may receive information from even numbered memory cells, while a second ECC circuit may receive information from odd numbered memory cells.

Abstract: Methods of operating a memory device are disclosed. A method may include enabling a first and second row section units a number of row section units of a memory device in response to a row address. The method may also include comparing a selected column address to a number of column addresses of defective memory cells of a first row section of the first row section unit. Moreover, in response to the selected column address matching a first column address of the number of column addresses, the method may include activating a second row section of the second row section unit, conveying a redundant column select signal to the memory array to select a redundant memory cell of the second row section. Memory devices and systems are also disclosed.

Abstract: Disclosed herein is an apparatus that includes first and second digit lines, a sense amplifier configured to amplify a potential difference between the first and second digit lines, a driver circuit configured to drive each of the first and second digit lines to different one of first and second logic levels from each other, a first transistor coupled between the driver circuit and the first digit line, a second transistor coupled between the driver circuit and the second digit line, and a control circuit configured to supply a first potential to control electrodes of the first and second transistors in response to a write command, and supply a second potential different from the first potential to the control electrodes of the first and second transistors in response to a read command.

Abstract: Apparatuses, systems, and methods for error correction for selected bit pairs. A memory device may include an error correction code (ECC) circuit which may receive data bits as part of a read or write operation and generate parity bits based on the data bits. The parity bits may be used to locate and correct errors in the data bits. The parity bits may be generated based on a syndrome value. Each of the individual data bits may be associated with a syndrome value. In addition, some selected pairs of data bits may also be associated. with a syndrome value. This may allow the ECC circuit to correct errors in individual data bits or in one of the selected pairs of data bits. In some embodiments, the selected pairs may represent adjacent memory cells along a word line.

Abstract: Apparatuses, systems, and methods for error correction for selected bit pairs. A memory device may include an error correction code (ECC) circuit which may receive data bits as part of a read or write operation and generate parity bits based on the data bits. The parity bits may be used to locate and correct errors in the data bits. The parity bits may be generated based on a syndrome value. Each of the individual data bits may be associated with a syndrome value. In addition, some selected pairs of data bits may also be associated with a syndrome value. This may allow the ECC circuit to correct errors in individual data bits or in one of the selected pairs of data bits. In some embodiments, the selected pairs may represent adjacent memory cells along a word line.

Abstract: A device includes a plurality of memory cells, an error detection circuit configured to detect at least one memory cell storing error data and a refresh control circuit including a register configured to store an error address corresponding to the at least one memory cell storing error data. The refresh control circuit is configured to control a refresh cycle of the error address.

Abstract: Apparatuses, systems, and methods for multi-pump error correction. An error correction code (ECC) circuit may receive a plurality of data bits and provide a one or more parity bits. The parity bits may be used to locate and/or correct errors in the data bits. The ECC circuit may split the plurality of data bits into multiple portions and then process these portions sequentially to generate preliminary parity bits. Once the portions of the data have been sequentially processed, the preliminary parity bits may be combined to generate the parity bits.

Abstract: Apparatuses, systems, and methods for error correction. A memory array may be coupled to an error correction code (ECC) circuit along a read bus and a write bus. The ECC circuit includes a read portion and a write portion. As part of a mask write operation, read data and read parity may be read out along the read bus to the read portion of the ECC circuit and write data may be received along data terminals by the write portion of the ECC circuit. The write portion of the ECC circuit may generate amended write data based on the write data and the read data, and may generate amended parity based on the read parity and the amended write data. The amended write data and amended parity may be written back to the memory array along the write bus.

Abstract: Charge transfer between gate terminals of sub-threshold current reduction circuit (SCRC) transistors and related apparatuses and methods are disclosed. An apparatus includes a first output terminal electrically connected to a pull-up gate terminal of at least one pull-up SCRC transistor and a second output terminal electrically connected to a pull-down gate terminal of at least one pull-down SCRC transistor. The apparatus also includes a first resistive path between a first input terminal and the first output terminal and a second resistive path between the second input terminal and the second output terminal. The apparatus further includes a charge transfer gate electrically connected between the first resistive path and the second resistive path.

Abstract: Disclosed herein is an apparatus that includes a memory cell array including a plurality of word lines each coupled to a plurality of memory cells, and a control circuit configured to activate first and second internal signals in a time-division manner in response to a first external command. A first number of the word lines are selected in response to the first internal signal, and a second number of the word line is selected in response to the second internal signal, the second number is smaller than the first number.

Abstract: Apparatuses, systems, and methods for error correction. A memory array may be coupled to an error correction code (ECC) circuit along a read bus and a write bus. The ECC circuit includes a read portion and a write portion. As part of a mask write operation, read data and read parity may be read out along the read bus to the read portion of the ECC circuit and write data may be received along data terminals by the write portion of the ECC circuit. The write portion of the ECC circuit may generate amended write data based on the write data and the read data, and may generate amended parity based on the read parity and the amended write data. The amended write data and amended parity may be written back to the memory array along the write bus.

Abstract: Disclosed herein is an apparatus that includes a memory cell array including a plurality of word lines each coupled to a plurality of memory cells, and a control circuit configured to activate first and second internal signals in a time-division manner in response to a first external command. A first number of the word lines are selected in response to the first internal signal, and a second number of the word line is selected in response to the second internal signal, the second number is smaller than the first number.

Abstract: Charge transfer between gate terminals of sub-threshold current reduction circuit (SCRC) transistors and related apparatuses and methods is disclosed. An apparatus includes a pull-up SCRC transistor, a pull-down SCRC transistor, and a charge transfer circuit. The pull-up SCRC transistor includes a pull-up gate terminal. The pull-down SCRC transistor includes a pull-down gate terminal. The charge transfer circuit is electrically connected between the pull-up gate terminal and the pull-down gate terminal. The charge transfer circuit is configured to transfer charge between the pull-up gate terminal and the pull-down gate terminal.