Abstract: An inspection apparatus and a semiconductor device manufacturing method using the same. The inspection apparatus is used for defect inspection, line width measurement, surface potential measurement or the like of a sample such as a wafer. In the inspection apparatus, a plurality of charged particles is delivered from a primary optical system to the sample, and secondary charged particles emitted from the sample are separated from the primary optical system and introduced through a secondary optical system to a detector. Irradiation of the charged particles is conducted while moving the sample. Irradiation spots of the charged particles are arranged by N rows along a moving direction of the sample and by M columns along a direction perpendicular thereto. Every row of the irradiation spots of the charged particles is shifted successively by a predetermined amount in a direction perpendicular to the moving direction of the sample.

Abstract: An information providing device installed in a leader vehicle that leads a follower vehicle, for providing the follower vehicle with guidance prepared by the leader vehicle, the information providing device that includes a state detector configured to detect a state change in the leader vehicle to output a detecting signal and a guidance generator configured to receive the detecting signal from the state detector, the guidance generator configured to prepare, in response to the detecting signal, guidance to guide the follower vehicle, the guidance including a photographed image of a view ahead of the leader vehicle.

Abstract: An inspection apparatus and a semiconductor device manufacturing method using the same. The inspection apparatus is used for defect inspection, line width measurement, surface potential measurement or the like of a sample such as a wafer. In the inspection apparatus, a plurality of charged particles is delivered from a primary optical system to the sample, and secondary charged particles emitted from the sample are separated from the primary optical system and introduced through a secondary optical system to a detector. Irradiation of the charged particles is conducted while moving the sample. Irradiation spots of the charged particles are arranged by N rows along a moving direction of the sample and by M columns along a direction perpendicular thereto. Every row of the irradiation spots of the charged particles is shifted successively by a predetermined amount in a direction perpendicular to the moving direction of the sample.

Abstract: A navigation system, portable information processing device and its control program, data server, information processing server, navigation method, traveling route establishing method, information providing method, and area information providing method are disclosed having a portable terminal (10,54,210) to read out code data, indicative of area information of a destination and routed spots, from a print product (112,114). The code data are converted into area information and stored in a storage unit (23,66,72, 123,223,232,323), from which particular area information is retrieved and transmitted to an on-vehicle navigation device (30,58,104,230) by which a traveling route of the vehicle is established on the basis of area information to guide the vehicle to the destination.

Abstract: The present invention provides an electron beam apparatus for evaluating a sample surface, which has a primary electro-optical system for irradiating a sample with a primary electron beam, a detecting system, and a secondary electro-optical system for directing secondary electron beams emitted from the sample surface by the irradiation of the primary electron beam to the detecting system.

Abstract: A mobile body information system comprises a center system and a vehicle-mounted terminal device. The vehicle-mounted terminal device is configured to determine a density of communication areas of narrow area wireless base stations along a travel route of a vehicle based on a current position of the vehicle and installation data of the narrow area wireless base stations. When the density of communication areas is high, the vehicle-mounted terminal device is configured to recommend to a user a divided download format in which the information is intermittently distributed through a plurality of the narrow area wireless base stations while the vehicle is travelling. When the density of the communication areas is low, the vehicle-mounted terminal device is configured to recommend a batch download format in which the information is distributed through one of the narrow area wireless base stations while the vehicle remains in one communication area.

Abstract: An inspection apparatus and a semiconductor device manufacturing method using the same. The inspection apparatus is used for defect inspection, line width measurement, surface potential measurement or the like of a sample such as a wafer. In the inspection apparatus, a plurality of charged particles is delivered from a primary optical system to the sample, and secondary charged particles emitted from the sample are separated from the primary optical system and introduced through a secondary optical system to a detector. Irradiation of the charged particles is conducted while moving the sample. Irradiation spots of the charged particles are arranged by N rows along a moving direction of the sample and by M columns along a direction perpendicular thereto. Every row of the irradiation spots of the charged particles is shifted successively by a predetermined amount in a direction perpendicular to the moving direction of the sample.

Abstract: Charged-particle-beam (CPB) mapping projection-optical systems and adjustment methods for such systems are disclosed that can be performed quickly and accurately. In a typical system, an irradiation beam is emitted from a source, passes through an irradiation-optical system, and enters a Wien filter (“E×B”). Upon passing through the E×B, the irradiation beam passes through an objective-optical system and is incident on an object surface. Such impingement generates an observation beam that returns through the objective-optical system and the E×B in a different direction to a detector via an imaging-optical system. An adjustment-beam source emits an adjustment beam used for adjusting and aligning the position of, e.g., the object surface and/or the Wien's condition of the E×B. The adjustment beam can be off-axis relative to the objective-optical system. For such adjusting and aligning, fiducial marks (situated, e.g.

Abstract: A vehicular communications apparatus is configured to calculate information on relative positions, relative velocities, and relative moving directions between own vehicle and other vehicles at a point such as a junction where other vehicles tend to affect running of the own vehicle, and to search for and decide other vehicles which are to be opponents of radio communications, based on a calculated result, and communication opponents are decided from among the searched other vehicles, and radio communications are conducted therewith, and then, the vehicular communications apparatus obtains information on the other vehicles, in a time-sequential manner and by radio communications, and present the information to a driver of the own vehicle from time to time, thereby causing the driver to recognize dynamic information on the other vehicles, enabling the own vehicle to smoothly join a flow of traffic at a junction, for example.

Abstract: A navigation system, portable information processing device and its control program, data server, information processing server, navigation method, traveling route establishing method, information providing method, and area information providing method are disclosed having a portable terminal (10,54,210) to read out code data, indicative of area information of a destination and routed spots, from a print product (112,114). The code data are converted into area information and stored in a storage unit (23,66,72, 123,223,232,323), from which particular area information is retrieved and transmitted to an on-vehicle navigation device (30,58,104,230) by which a traveling route of the vehicle is established on the basis of area information to guide the vehicle to the destination.

Abstract: An inspection apparatus and a semiconductor device manufacturing method using the same. The inspection apparatus is used for defect inspection, line width measurement, surface potential measurement or the like of a sample such as a wafer. In the inspection apparatus, a plurality of charged particles is delivered from a primary optical system to the sample, and secondary charged particles emitted from the sample are separated from the primary optical system and introduced through a secondary optical system to a detector. Irradiation of the charged particles is conducted while moving the sample. Irradiation spots of the charged particles are arranged by N rows along a moving direction of the sample and by M columns along a direction perpendicular thereto. Every row of the irradiation spots of the charged particles is shifted successively by a predetermined amount in a direction perpendicular to the moving direction of the sample.

Abstract: Charged-particle-beam (CPB) mapping projection-optical systems and adjustment methods for such systems are disclosed that can be performed quickly and accurately. In a typical system, an irradiation beam is emitted from a source, passes through an irradiation-optical system, and enters a Wien filter (“E×B”). Upon passing through the E×B, the irradiation beam passes through an objective-optical system and is incident on an object surface. Such impingement generates an observation beam that returns through the objective-optical system and the E×B in a different direction to a detector via an imaging-optical system. An adjustment-beam source emits an adjustment beam used for adjusting and aligning the position of, e.g., the object surface and/or the Wien's condition of the E×B. The adjustment beam can be off-axis relative to the objective-optical system. For such adjusting and aligning, fiducial marks (situated, e.g.

Abstract: A navigation system, portable information processing device and its control program, data server, information processing server, navigation method, traveling route establishing method, information providing method, and area information providing method are disclosed having a portable terminal (10,54,210) to read out code data, indicative of area information of a destination and routed spots, from a print product (112,114). The code data are converted into area information and stored in a storage unit (23,66,72, 123,223,232,323), from which particular area information is retrieved and transmitted to an on-vehicle navigation device (30,58,104,230) by which a traveling route of the vehicle is established on the basis of area information to guide the vehicle to the destination.

Abstract: A vehicle information processing system 100 conducts wireless communications between a preceding vehicle 200 and a succeeding vehicle 201, and exhibits information on a winker operation of the preceding vehicle 200 to a driver of the succeeding vehicle 201, and includes vehicle-mounted apparatuses 1 in the preceding and succeeding vehicles, of which one 1 in the preceding vehicle 200 wirelessly transmits information on a winker operation of the preceding vehicle, and the other 1 in the succeed vehicle 201 receives the wirelessly transmitted information on the winker state, and exhibits same to a driver of the succeeding vehicle 201, while the apparatus 1 in the succeeding vehicle 201 estimates a relationship between the preceding vehicle 200 and the succeeding vehicle 201, judges whether an exhibition liming of the information on the winker state is to be hastened or delayed based on an estimation result, and exhibits the information on the winker state at the judged timing.

Abstract: A guide system terminal device is provided to facilitate group operation vehicles. The guide system terminal device has a transceiver that receives the traveling environment information from another vehicle, such as for the turn signal, vehicle speed, running position, a road change judgment module that judges course changes by the other vehicle based on the traveling environment information of the other vehicle, and a user interface that outputs the judgment result obtained by road change judgment module. For example, the road change judgment module judges a left/right turn to have occurred when the blinker information acquired by turn signal sensor lasts longer than a prescribed time, and when the maximum value of the change in vehicle speed exceeds a prescribed level.

Abstract: Charged-particle-beam (CPB) mapping projection-optical systems and adjustment methods for such systems are disclosed that can be performed quickly and accurately. In a typical system, an irradiation beam is emitted from a source, passes through an irradiation-optical system, and enters a Wien filter (“E×B”). Upon passing through the E×B, the irradiation beam passes through an objective-optical system and is incident on an object surface. Such impingement generates an observation beam that returns through the objective-optical system and the E×B in a different direction to a detector via an imaging-optical system. An adjustment-beam source emits an adjustment beam used for adjusting and aligning the position of, e.g., the object surface and/or the Wien's condition of the E×B. The adjustment beam can be off-axis relative to the objective-optical system. For such adjusting and aligning, fiducial marks (situated, e.g.

Abstract: A content providing area presentation system is configured to present content providing area candidates to enable a user to readily select an appropriate content providing area when at least one of the content providing area candidates is presented to the user. The content providing area presentation system comprises a user inputting section and a displaying section. The user inputting section is configured and arranged to request content providing area candidates for presenting at least one of the content providing area candidates to a user based on a selection criterion. The displaying section is configured and arranged to display the at least one of the content providing area candidates in response to the selection criterion established by the user inputting section.

Abstract: A contents reproduction system includes a reproducing section to reproduce a content received via telecommunication when the receiving condition is in an acceptable state, and to reproduce one of recorded contents stored in a storage section when the receiving condition is in an unacceptable state. A preference discriminating section determines a preference of a user by examining at least one content selected by a user for reproduction. A contents selecting section selects one, as a reserve content, from the contents stored in the storage section in accordance with the preference and supplies the reserve content to the reproducing section for reproduction instead of the received content when the receiving condition is in the unacceptable state.

Abstract: A navigation system, portable information processing device and its control program, data server, information processing server, navigation method, traveling route establishing method, information providing method, and area information providing method are disclosed having a portable terminal (10,54,210) to read out code data, indicative of area information of a destination and routed spots, from a print product (112,114). The code data are converted into area information and stored in a storage unit (23,66,72, 123,223,232,323), from which particular area information is retrieved and transmitted to an on-vehicle navigation device (30,58,104,230) by which a traveling route of the vehicle is established on the basis of area information to guide the vehicle to the destination.