Abstract: A local polishing system comprises: a particle estimation unit (30) for estimating the film thickness distribution of a wafer; a local polishing region setting unit (11) for setting a local polishing region on the wafer based on the film thickness distribution; a polishing head selection unit (12) for selecting a polishing head based on the size of the local polishing region; a model storage (20) holding a recipe generating model that defines the relation between an input node and an output node, the input node being an attribute of the local polishing region, the output node comprising a recipe for a polishing process; a polishing recipe generator (13) that puts an attribute of the local polishing region set by the local polishing region setting unit (11) into the input node of the recipe generating model and determines a polishing recipe for polishing the local polishing region; and a polishing recipe transmitter (15) for transmitting data of the polishing recipe to a local polishing module (200) that perfo

Abstract: A lens barrel and an imaging device which can be miniaturized, the lens barrel with a movable cylinder that moves along the optical axis with a change in focal length; first and second drive units in the movable cylinder; and first and second lens driven by the first and second drive units respectively to move along the optical axis relative to the movable cylinder. The movement amount of the first lens relative to the cylinder when the focal length is changed to a second focal length from a first state where the first lens is at a position closest to a subject with a first focal length is less than the movement amount of the first lens relative to the cylinder when the focal length is changed to the second focal length from a second state where the first lens is closer to an image plane than the first state.

Abstract: A local polishing system comprises: a particle estimation unit (30) for estimating the film thickness distribution of a wafer; a local polishing region setting unit (11) for setting a local polishing region on the wafer based on the film thickness distribution; a polishing head selection unit (12) for selecting a polishing head based on the size of the local polishing region; a model storage (20) holding a recipe generating model that defines the relation between an input node and an output node, the input node being an attribute of the local polishing region, the output node comprising a recipe for a polishing process; a polishing recipe generator (13) that puts an attribute of the local polishing region set by the local polishing region setting unit (11) into the input node of the recipe generating model and determines a polishing recipe for polishing the local polishing region; and a polishing recipe transmitter (15) for transmitting data of the polishing recipe to a local polishing module (200) that perfo

Abstract: A lens barrel and an imaging device which can be miniaturized, the lens barrel with a movable cylinder that moves along the optical axis with a change in focal length; first and second drive units in the movable cylinder; and first and second lens driven by the first and second drive units respectively to move along the optical axis relative to the movable cylinder. The movement amount of the first lens relative to the cylinder when the focal length is changed to a second focal length from a first state where the first lens is at a position closest to a subject with a first focal length is less than the movement amount of the first lens relative to the cylinder when the focal length is changed to the second focal length from a second state where the first lens is closer to an image plane than the first state.

Abstract: A zoom optical system includes a plurality of lens groups, and upon zooming distances between adjacent lens groups change. The zoom optical system has a focusing lens group that moves upon focusing and an image-side lens group disposed adjacent to an image side of the focusing lens group. The zoom optical system satisfies the conditional expression 0.000<dL0t/dL1t<1.000, where dL0t denotes a distance on an optical axis between the focusing lens group and the image-side lens group upon focusing on an infinity object in a telephoto end state, and dL1t denotes a distance on the optical axis between the focusing lens group and the image-side lens group upon focusing on a short-distance object in the telephoto end state.

Abstract: A lens barrel and an imaging device which can be miniaturized, the lens barrel with a movable cylinder that moves along the optical axis with a change in focal length; first and second drive units in the movable cylinder; and first and second lens driven by the first and second drive units respectively to move along the optical axis relative to the movable cylinder. The movement amount of the first lens relative to the cylinder when the focal length is changed to a second focal length from a first state where the first lens is at a position closest to a subject with a first focal length is less than the movement amount of the first lens relative to the cylinder when the focal length is changed to the second focal length from a second state where the first lens is closer to an image plane than the first state.

Abstract: A zoom optical system (ZL) comprises a plurality of lens groups (G1-G7), and upon zooming distances between adjacent lens groups change. The zoom optical system comprises a focusing lens group (G5,G6) that moves upon focusing and an image-side lens group ((G7) disposed adjacent to an image side of the focusing lens group. The zoom optical system satisfies a following conditional expression. 0.000<dL0t/dL1t<1.000 where dL0t: a distance on an optical axis between the focusing lens group and the image-side lens group upon focusing on an infinity object in a telephoto end state, and dL1t: a distance on the optical axis between the focusing lens group and the image-side lens group upon focusing on a short-distance object in the telephoto end state.

Abstract: A plant monitoring apparatus according to an embodiment includes a determiner and a display processor. The determiner compares a first process value acquired in time series from a first point of a monitoring target in a plant and a limit value corresponding to the first process value to determine a time when the first process value exceeds the limit value. The display processor causes a display device to display, in time series, the first process value within a time range decided on the basis of the time obtained by the determiner and the limit value corresponding to the first process value.

Abstract: Novel tricyclic compounds which have JAK inhibitory activities are useful for prevention, treatment or improvement of autoimmune diseases, inflammatory diseases and allergic diseases are provided. Novel tricyclic compound represented by the formula (I), the formula (II) or the formula (III) (wherein: each of A1, A2 and A3 is a cyclohexane-1,4-diyl group or the like; each of L1, L2 and L3 is a methylene group or the like; each of X1 and X3 is O or NH; each of R1 and R3 is a cyano C1-6 haloalkyl group or the like; and R2 is an aromatic heterocyclic group), a tautomer or pharmaceutically acceptable salt of the compound or a solvate thereof.

Abstract: An equipment safety management device for managing safety of equipment capable of holding fluid is provided. The equipment safety management device includes: a safety means configured to be in fluid communication with an outlet of the equipment, the safety means being brought into a released state when pressure of the equipment reaches a previously set pressure, the safety means delivering the fluid to a flare pipe, which is fluidly communicated; and, as the flare pipe, at least one first flare pipe allowing a low-temperature fluid to flow therethrough and at least one second flare pipe allowing an aqueous fluid to flow therethrough. The safety means can deliver the fluid to both the first flare pipe and the second flare pipe.

Abstract: Novel tricyclic compounds which have JAK inhibitory activities are useful for prevention, treatment or improvement of autoimmune diseases, inflammatory diseases and allergic diseases are provided. Novel tricyclic compound represented by the formula (I), the formula (II) or the formula (III) (wherein: each of A1, A2 and A3 is a cyclohexane-1,4-diyl group or the like; each of L1, L2 and L3 is a methylene group or the like; each of X1 and X3 is 0 or NH; each of R1 and R3 is a cyano C1-6 haloalkyl group or the like; and R2 is an aromatic heterocyclic group), a tautomer or pharmaceutically acceptable salt of the compound or a solvate thereof.

Abstract: Novel tricyclic compounds which have JAK inhibitory activities are useful for prevention, treatment or improvement of autoimmune diseases, inflammatory diseases and allergic diseases are provided. Novel tricyclic compound represented by the formula (I), the formula (II) or the formula (III) (wherein: each of A1, A2 and A3 is a cyclohexane-1,4-diyl group or the like; each of L1, L2 and L3 is a methylene group or the like; each of X1 and X3 is O or NH; each of R1 and R3 is a cyano C1-6 haloalkyl group or the like; and R2 is an aromatic heterocyclic group), a tautomer or pharmaceutically acceptable salt of the compound or a solvate thereof.

Abstract: An equipment safety management device for managing safety of equipment capable of holding fluid is provided. The equipment safety management device includes: a safety means configured to be in fluid communication with an outlet of the equipment, the safety means being brought into a released state when pressure of the equipment reaches a previously set pressure, the safety means delivering the fluid to a flare pipe, which is fluidly communicated; and, as the flare pipe, at least one first flare pipe allowing a low-temperature fluid to flow therethrough and at least one second flare pipe allowing an aqueous fluid to flow therethrough. The safety means can deliver the fluid to both the first flare pipe and the second flare pipe.

Abstract: A plant monitoring apparatus according to an embodiment includes a determiner and a display processor. The determiner compares a first process value acquired in time series from a first point of a monitoring target in a plant and a limit value corresponding to the first process value to determine a time when the first process value exceeds the limit value. The display processor causes a display device to display, in time series, the first process value within a time range decided on the basis of the time obtained by the determiner and the limit value corresponding to the first process value.

Abstract: In one embodiment, a plant monitoring system includes a threshold acquiring module, a judging module, and a warning module. The threshold acquiring module acquires in advance, based on a value obtained by leveling the dispersion in first process values corresponding to output values at a first point in a monitoring object and a value representing the dispersion, first thresholds representing a first range of the dispersion in the first process values and second thresholds representing a second range. The judging module compares the first process values chronologically acquired based on the output values at the first point with the corresponding first thresholds and second thresholds. The warning module creates alert information containing information on at least a time point when the first process value exceeds one of the first thresholds and the second thresholds.

Abstract: Novel tricyclic compounds which have JAK inhibitory activities are useful for prevention, treatment or improvement of autoimmune diseases, inflammatory diseases and allergic diseases are provided. Novel tricyclic compound represented by the formula (I), the formula (II) or the formula (III) (wherein each of A1, A2 and A3 is a cyclohexane-1,4-diyl group or the like; each of L1, L2 and L3 is a methylene group or the like: each of X1 and X3 is O or NH; each of R1 and R3 is a cyano C1-6 haloalkyl group or the like; and R2 is an aromatic heterocyclic group), a tautomer or pharmaceutically acceptable salt of the compound or a solvate thereof.

Abstract: This disclosure relates to novel tricyclic pyrimidine compounds and tricyclic pyridine compounds having JAK inhibitory activities. A tricyclic heterocyclic compound represented by the formula (Ib), wherein the rings Ab and Bb, Xb, Yb, R1b, R2b, R3b, L1b, L2b, L3b and nb are as defined in the specification.

Abstract: To provide a novel tricyclic pyrrolopyridine compound having a JAK inhibitory activity and useful for prevention, treatment and/or improvement of particularly autoimmune diseases, inflammatory diseases and allergic diseases. A novel tricyclic pyrrolopyridine compound represented by the formula (I), a tautomer or pharmaceutically acceptable salt of the compound or a solvate thereof: wherein the respective substituents are defined in detail in the specification, and R1 is a C1-6 alkyl group or the like, R2 is a hydrogen atom or the like, R3 is a hydrogen atom or the like, the ring A is C3-11 cycloalkane or the like, L1 is a C1-6 alkylene group or the like, and R4 is NRaRb or the like.

Abstract: In one embodiment, a plant monitoring system includes a threshold acquiring module, a judging module, and a warning module. The threshold acquiring module acquires in advance, based on a value obtained by leveling the dispersion in first process values corresponding to output values at a first point in a monitoring object and a value representing the dispersion, first thresholds representing a first range of the dispersion in the first process values and second thresholds representing a second range. The judging module compares the first process values chronologically acquired based on the output values at the first point with the corresponding first thresholds and second thresholds. The warning module creates alert information containing information on at least a time point when the first process value exceeds one of the first thresholds and the second thresholds.

Abstract: This disclosure relates to novel tricyclic pyrimidine compounds and tricyclic pyridine compounds having JAK inhibitory activities. A tricyclic heterocyclic compound represented by the formula (Ib), wherein the rings Ab and Bb, Xb, Yb, R1b, R2b, R3b, L1b, L2b, L3b and nb are as defined in the specification.