Patents by Inventor Tung-Ying Lee

Tung-Ying Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220149177
    Abstract: A semiconductor device includes source and a drain above a substrate and spaced apart along a first direction, and a semiconductor channel extending between the source and the drain. The semiconductor device further includes gate spacers, an interfacial layer, and a metal gate structure. The gate spacers are disposed on the semiconductor channel and spaced apart by a spacer-to-spacer distance along the first direction. The interfacial layer is on the semiconductor channel. The interfacial layer extends a length along the first direction, and the length is less than a minimum of the spacer-to-spacer distance along the first direction. The metal gate structure is over the interfacial layer.
    Type: Application
    Filed: January 27, 2022
    Publication date: May 12, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY, NATIONAL TAIWAN NORMAL UNIVERSITY
    Inventors: Tung-Ying LEE, Tse-An CHEN, Tzu-Chung WANG, Miin-Jang CHEN, Yu-Tung YIN, Meng-Chien YANG
  • Patent number: 11322619
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a first fin structure and a second fin structure formed over a substrate. The semiconductor device structure includes a first gate structure formed over the first fin structure, and the first gate structure includes a first portion of a gate dielectric layer and a first portion of a filling layer. The semiconductor device structure also includes a second gate structure formed over the second fin structure, and a first isolation sealing layer between the first gate structure and the second gate structure. The first isolation sealing layer is in direct contact with the first portion of the gate dielectric layer and the first portion of the filling layer.
    Type: Grant
    Filed: June 18, 2020
    Date of Patent: May 3, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Chao Lin, Wei-Sheng Yun, Tung-Ying Lee
  • Patent number: 11302695
    Abstract: In a method for forming an integrated semiconductor device, a first transistor over is formed on a substrate; an inter-layer dielectric (ILD) layer is deposited over the first transistor; a gate conductive layer is deposited over the ILD layer; a gate dielectric layer is deposited over the gate conductive layer; the gate dielectric layer and the gate conductive layer are etched to form a gate stack; and a 2D material layer that has a first portion extending along a top surface and sidewalls of the gate stack and a second portion extending along a top surface of the ILD layer.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: April 12, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Yi Peng, Chun-Chieh Lu, Meng-Hsuan Hsiao, Ling-Yen Yeh, Carlos H. Diaz, Tung-Ying Lee
  • Patent number: 11283011
    Abstract: A phase change memory device includes a bottom electrode, a bottom memory layer, a top memory layer, and a top electrode. The bottom memory layer is over the bottom electrode. The bottom memory layer has a first height and includes a tapered portion and a neck portion. The tapered portion has a second height. A ratio of the second height to the first height is in a range of about 0.2 to about 0.5. The neck portion is between the tapered portion and the bottom electrode. The top memory layer is over the bottom memory layer. The tapered portion of the bottom memory layer tapers in a direction from the top memory layer toward the neck portion. The top electrode is over the top memory layer.
    Type: Grant
    Filed: November 17, 2020
    Date of Patent: March 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tung-Ying Lee, Shao-Ming Yu, Yu-Chao Lin
  • Publication number: 20220076015
    Abstract: A method for object recognition at an interactive information system (IIS) includes capturing, using an imaging device of the IIS, a first image of a first representative object which represents a first one or more object disposed about the IIS; analyzing, by a computer processor of the IIS and based on a category model, the first image to determine a first representative category of the first one or more object; retrieving, by the computer processor and based on the first representative category, a first representative object model of a plurality of object models that are stored on a remote server; and analyzing, by the computer processor and based on the first representative object model, the first image to determine a first representative inventory identifier of the first representative object, which represents a first one or more inventory identifier corresponding to the first one or more object respectively.
    Type: Application
    Filed: September 10, 2020
    Publication date: March 10, 2022
    Applicant: Flytech Technology Co., Ltd.
    Inventors: Tung-Ying Lee, Yi-Heng Tseng, Tzu-Wei Huang, Che-Wei Lin
  • Patent number: 11271095
    Abstract: An integrated circuit structure includes a semiconductor substrate, insulation regions extending into the semiconductor substrate, with the insulation regions including first top surfaces and second top surfaces lower than the first top surfaces, a semiconductor fin over the first top surfaces of the insulation regions, a gate stack on a top surface and sidewalls of the semiconductor fin, and a source/drain region on a side of the gate stack. The source/drain region includes a first portion having opposite sidewalls that are substantially parallel to each other, with the first portion being lower than the first top surfaces and higher than the second top surfaces of the insulation regions, and a second portion over the first portion, with the second portion being wider than the first portion.
    Type: Grant
    Filed: June 24, 2020
    Date of Patent: March 8, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Lien Huang, Tung Ying Lee
  • Publication number: 20220069012
    Abstract: A semiconductor device includes a semiconductor substrate and an interconnection structure. The interconnection structure is disposed over the semiconductor substrate. The interconnection structure includes first conductive lines, second conductive lines, and ovonic threshold switches. The first conductive lines extend parallel to each other in a first direction. The second conductive lines are stacked over the first conductive lines and extend parallel to each other in a second direction perpendicular to the first direction. The ovonic threshold switches are disposed between the first conductive lines and the second conductive lines. The ovonic threshold switches include a ternary GeCTe material. The ternary GeCTe material consists substantially of carbon, germanium, and tellurium. In the ternary GeCTe material, a content of carbon is in a range from 10 to 30 atomic percent and a content of germanium is in a range from 10 to 65 atomic percent.
    Type: Application
    Filed: April 27, 2021
    Publication date: March 3, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Min Lee, Tung-Ying Lee, Cheng-Hsien Wu, Xinyu BAO, Hengyuan Lee, Ying-Yu Chen
  • Patent number: 11254911
    Abstract: Provided herein are isolated neural stem cells. Also provided are methods for treatment of neurodegenerative diseases using suitable preparations comprising the isolated neural stem cells.
    Type: Grant
    Filed: November 29, 2016
    Date of Patent: February 22, 2022
    Assignee: ACCELERATED BIOSCIENCES CORP.
    Inventors: Jau-Nan Lee, Tony Tung-Ying Lee, Yuta Lee, Eing-Mei Tsai
  • Patent number: 11245024
    Abstract: A method of manufacturing a semiconductor device includes forming a fin structure comprising alternately stacked first semiconductor layers and second semiconductor layers over a substrate. A sacrificial gate structure is formed over the fin structure. Spacers are formed on either side of the sacrificial gate structure. The sacrificial gate structure is removed to form a trench between the spacers. The first semiconductor layers are removed from the trench, while leaving the second semiconductor layers suspended in the trench. A self-assembling monolayer is formed on sidewalls of the spacers in the trench. Interfacial layers are formed encircling the suspended second semiconductor layers, respectively. A high-k dielectric layer is deposited at a faster deposition rate on the interfacial layers than on the self-assembling monolayer. A metal gate structure is formed over the high-k dielectric layer.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: February 8, 2022
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY, NATIONAL TAIWAN NORMAL UNIVERSITY
    Inventors: Tung-Ying Lee, Tse-An Chen, Tzu-Chung Wang, Miin-Jang Chen, Yu-Tung Yin, Meng-Chien Yang
  • Patent number: 11244867
    Abstract: A semiconductor device includes a plurality of fins on a substrate, a fin end spacer plug on an end surface of each of the plurality of fins and a fin liner layer, an insulating layer on the plurality of fins, and a source/drain epitaxial layer in a source/drain recess in each of the plurality of fins.
    Type: Grant
    Filed: August 8, 2019
    Date of Patent: February 8, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tzu-Chung Wang, Tung Ying Lee
  • Patent number: 11245071
    Abstract: Provided are a memory cell and a method of forming the same. The memory cell includes a bottom electrode, an etching stop layer, a variable resistance layer, and a top electrode. The etching stop layer is disposed on the bottom electrode. The variable resistance layer is embedded in the etching stop layer and in contact with the bottom electrode. The top electrode is disposed on the variable resistance layer. A semiconductor device having the memory cell is also provided.
    Type: Grant
    Filed: January 8, 2020
    Date of Patent: February 8, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Carlos H. Diaz, Shao-Ming Yu, Tung-Ying Lee
  • Publication number: 20220037202
    Abstract: Provided is a method of forming an interconnect structure including: forming a via; forming a first barrier layer to at least cover a top surface and a sidewall of the via; forming a first dielectric layer on the first barrier layer; performing a planarization process to remove a portion of the first dielectric layer and a portion of the first barrier layer, thereby exposing the top surface of the via; forming a second dielectric layer on the first dielectric layer, wherein the second dielectric layer has an opening exposing the top surface of the via; forming a blocking layer on the top surface of the via; forming a second barrier layer on the second dielectric layer; removing the blocking layer to expose the top surface of the via; and forming a conductive feature in the opening, wherein the conductive feature is in contact with the top surface of the via.
    Type: Application
    Filed: July 30, 2020
    Publication date: February 3, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Bo-Jiun Lin, Tung-Ying Lee, Yu-Chao Lin
  • Publication number: 20220037399
    Abstract: A memory cell includes a bottom electrode, a memory element, spacers, a selector and a top electrode. The memory element is located on the bottom electrode and includes a first conductive layer, a second conductive layer and a storage layer. The first conductive layer is electrically connected to the bottom electrode. The second conductive layer is located on the first conductive layer, wherein a width of the first conductive layer is smaller than a width of the second conductive layer. The storage layer is located in between the first conductive layer and the second conductive layer. The spacers are located aside the second conductive layer and the storage layer. The selector is disposed on the spacers and electrically connected to the memory element. The top electrode is disposed on the selector.
    Type: Application
    Filed: November 8, 2020
    Publication date: February 3, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Tung-Ying Lee, Yuan-Tien Tu, Jung-Piao Chiu
  • Patent number: 11205706
    Abstract: In a method of manufacturing a semiconductor device, a fin structure, in which first semiconductor layers and second semiconductor layers are alternately stacked, is formed. A sacrificial gate structure is formed over the fin structure. A source/drain region of the fin structure, which is not covered by the sacrificial gate structure, is etched, thereby forming a source/drain space. The first semiconductor layers are laterally etched through the source/drain space. A first insulating layer is formed, in the source/drain space, at least on etched first semiconductor layers. A source/drain epitaxial layer is formed in the source/drain space, thereby forming air gaps between the source/drain epitaxial layer and the first semiconductor layers.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: December 21, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Lin Yang, Tung Ying Lee, Shao-Ming Yu, Chao-Ching Cheng, Tzu-Chiang Chen, Chao-Hsien Huang
  • Patent number: 11189726
    Abstract: The various described embodiments provide a transistor with a negative capacitance, and a method of creating the same. The transistor includes a gate structure having a ferroelectric layer. The ferroelectric layer is formed by forming a thick ferroelectric film, annealing the ferroelectric film to have a desired phase, and thinning the ferroelectric film to a desired thickness of the ferroelectric layer. This process ensures that the ferroelectric layer will have ferroelectric properties regardless of its thickness.
    Type: Grant
    Filed: May 14, 2020
    Date of Patent: November 30, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Feng Yuan, Ming-Shiang Lin, Chia-Cheng Ho, Jin Cai, Tzu-Chung Wang, Tung Ying Lee
  • Patent number: 11189522
    Abstract: In a method of forming a semiconductor device including a fin field effect transistor (FinFET), a first sacrificial layer is formed over a source/drain structure of a FinFET structure and an isolation insulating layer. The first sacrificial layer is patterned, thereby forming an opening. A first liner layer is formed on the isolation insulating layer in a bottom of opening and at least side faces of the patterned first sacrificial layer. After the first liner layer is formed, a dielectric layer is formed in the opening. After the dielectric layer is formed, the patterned first sacrificial layer is removed, thereby forming a contact opening over the source/drain structure. A conductive layer is formed in the contact opening.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: November 30, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Meng-Hsuan Hsiao, Yee-Chia Yeo, Tung Ying Lee, Chih Chieh Yeh
  • Patent number: 11183584
    Abstract: A method of manufacturing a semiconductor device includes forming a stacked structure of first semiconductor layers and second semiconductor layers alternately stacked in a first direction over a substrate. A thickness of the first semiconductor layers as formed increases in each first semiconductor layer spaced further apart from the substrate in the first direction. The stacked structure is patterned into a fin structure extending along a second direction substantially perpendicular to the first direction. A portion of the first semiconductor layers between adjacent second semiconductor layers is removed, and a gate structure is formed extending in a third direction over a first portion of the first semiconductor layers so that the gate structure wraps around the first semiconductor layers. The third direction is substantially perpendicular to both the first direction and the second direction.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: November 23, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Meng-Hsuan Hsiao, Tung Ying Lee, Wei-Sheng Yun, Jin Cai
  • Publication number: 20210343588
    Abstract: An embodiment is a method including forming an opening in a mask layer, the opening exposing a conductive feature below the mask layer, forming a conductive material in the opening using an electroless deposition process, the conductive material forming a conductive via, removing the mask layer, forming a conformal barrier layer on a top surface and sidewalls of the conductive via, forming a dielectric layer over the conformal barrier layer and the conductive via, removing the conformal barrier layer from the top surface of the conductive via, and forming a conductive line over and electrically coupled to the conductive via.
    Type: Application
    Filed: September 30, 2020
    Publication date: November 4, 2021
    Inventors: Bo-Jiun Lin, Yu Chao Lin, Tung Ying Lee
  • Publication number: 20210335676
    Abstract: Nanowire devices and fin devices are formed in a first region and a second region of a substrate. To form the devices, alternating layers of a first material and a second material are formed, inner spacers are formed adjacent to the layers of the first material, and then the layers of the first material are removed to form nanowires without removing the layers of the first material within the second region. Gate structures of gate dielectrics and gate electrodes are formed within the first region and the second region in order to form the nanowire devices in the first region and the fin devices in the second region.
    Type: Application
    Filed: July 6, 2021
    Publication date: October 28, 2021
    Inventors: Chao-Ching Cheng, Tzu-Chiang Chen, Chen-Feng Hsu, Yu-Lin Yang, Tung Ying Lee, Chih Chieh Yeh
  • Publication number: 20210336138
    Abstract: A method includes forming a dielectric layer over a substrate, the dielectric layer having a top surface; etching an opening in the dielectric layer; forming a bottom electrode within the opening, the bottom electrode including a barrier layer; forming a phase-change material (PCM) layer within the opening and on the bottom electrode, wherein a top surface of the PCM layer is level with or below the top surface of the dielectric layer; and forming a top electrode on the PCM layer.
    Type: Application
    Filed: August 13, 2020
    Publication date: October 28, 2021
    Inventors: Tung Ying Lee, Yu Chao Lin, Shao-Ming Yu