Patents by Inventor Wei-Ming Wang

Wei-Ming Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11600543
    Abstract: A semiconductor memory device and method of making the same are disclosed. The semiconductor memory device includes a substrate that includes a memory region and a peripheral region, a transistor including a metal gate located in the peripheral region, a composite dielectric film structure located over the metal gate of the transistor, the composite dielectric film structure including a first dielectric layer and a second dielectric layer over the first dielectric layer, where the second dielectric layer has a greater density than a density of the first dielectric layer, and at least one memory cell located in the memory region. The composite dielectric film structure provides enhanced protection of the metal gate against etching damage and thereby improves device performance.
    Type: Grant
    Filed: September 14, 2021
    Date of Patent: March 7, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Sheng-Chieh Chen, Chih-Ren Hsieh, Ming-Lun Lee, Wei-Ming Wang, Ming Chyi Liu
  • Publication number: 20220376175
    Abstract: A memory cell includes: a first contact feature partially embedded in a first dielectric layer; a barrier layer, lining the first contact feature, that comprises a first portion disposed between the first contact feature and first dielectric layer, and a second portion disposed above the first dielectric layer; a resistive material layer disposed above the first contact feature, the resistive material layer coupled to the first contact feature through the second portion of the barrier layer; and a second contact feature embedded in a second dielectric layer above the first dielectric layer.
    Type: Application
    Filed: August 4, 2022
    Publication date: November 24, 2022
    Inventors: Huei-Tsz WANG, Po-Shu Wang, Wei-Ming Wang
  • Patent number: 11430953
    Abstract: A memory cell includes: a first contact feature partially embedded in a first dielectric layer; a barrier layer, lining the first contact feature, that comprises a first portion disposed between the first contact feature and first dielectric layer, and a second portion disposed above the first dielectric layer; a resistive material layer disposed above the first contact feature, the resistive material layer coupled to the first contact feature through the second portion of the barrier layer; and a second contact feature embedded in a second dielectric layer above the first dielectric layer.
    Type: Grant
    Filed: January 4, 2021
    Date of Patent: August 30, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Huei-Tsz Wang, Po-Shu Wang, Wei-Ming Wang
  • Publication number: 20220270943
    Abstract: A semiconductor memory device and method of making the same are disclosed. The semiconductor memory device includes a substrate that includes a memory region and a peripheral region, a transistor including a metal gate located in the peripheral region, a composite dielectric film structure located over the metal gate of the transistor, the composite dielectric film structure including a first dielectric layer and a second dielectric layer over the first dielectric layer, where the second dielectric layer has a greater density than a density of the first dielectric layer, and at least one memory cell located in the memory region. The composite dielectric film structure provides enhanced protection of the metal gate against etching damage and thereby improves device performance.
    Type: Application
    Filed: September 14, 2021
    Publication date: August 25, 2022
    Inventors: Sheng-Chieh CHEN, Chih-Ren HSIEH, Ming-Lun LEE, Wei-Ming WANG, Ming Chyi LIU
  • Publication number: 20220146115
    Abstract: There is provided an auto detection system including a thermal detection device and a host. The host controls an indication device to indicate a prompt message or detection results according to a slope variation of voltage values or 2D distribution of temperature values detected by the thermal detection device, wherein the voltage values include the detected voltage of a single pixel or the sum of detected voltages of multiple pixels of a thermal sensor.
    Type: Application
    Filed: January 26, 2022
    Publication date: May 12, 2022
    Inventors: CHIH-MING SUN, MING-HAN TSAI, CHIUNG-WEN LIN, PO-WEI YU, WEI-MING WANG, SEN-HUANG HUANG
  • Patent number: 11280500
    Abstract: There is provided an auto detection system including a thermal detection device and a host. The host controls an indication device to indicate a prompt message or detection results according to a slope variation of voltage values or 2D distribution of temperature values detected by the thermal detection device, wherein the voltage values include the detected voltage of a single pixel or the sum of detected voltages of multiple pixels of a thermal sensor.
    Type: Grant
    Filed: March 13, 2020
    Date of Patent: March 22, 2022
    Assignee: PIXART IMAGING INC.
    Inventors: Chih-Ming Sun, Ming-Han Tsai, Chiung-Wen Lin, Po-Wei Yu, Wei-Ming Wang, Sen-Huang Huang
  • Publication number: 20210327693
    Abstract: A system and method for reducing particle contamination on substrates during a deposition process using a particle control system is disclosed here. In one embodiment, a film deposition system includes: a processing chamber sealable to create a pressurized environment and configured to contain a plasma, a target and a substrate in the pressurized environment; and a particle control unit, wherein the particle control unit is configured to provide an external force to each of at least one charged atom and at least one contamination particle in the plasma, wherein the at least one charged atom and the at last one contamination particle are generated by the target when it is in direct contact with the plasma, wherein the external force is configured to direct the at least one charged atom to a top surface of the substrate and to direct the at least one contamination particle away from the top surface of the substrate.
    Type: Application
    Filed: June 30, 2021
    Publication date: October 21, 2021
    Inventors: Tsung-Han KUO, Po-Shu WANG, Wei-Ming WANG
  • Publication number: 20210280783
    Abstract: The present disclosure is directed to a method for the formation of resistive random-access memory (RRAM) structures with a low profile between or within metallization layers. For example, the method includes forming, on a substrate, a first metallization layer with conductive structures and a first dielectric layer abutting sidewall surfaces of the conductive structures; etching a portion of the first dielectric layer to expose a portion of the sidewall surfaces of the conductive structures; depositing a memory stack on the first metallization layer, the exposed portion of the sidewall surfaces, and a top surface of the conductive structures; patterning the memory stack to form a memory structure that covers the exposed portion of the sidewall surfaces and the top surface of the conductive structures; depositing a second dielectric layer to encapsulate the memory stack; and forming a second metallization layer on the second dielectric layer.
    Type: Application
    Filed: May 25, 2021
    Publication date: September 9, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Ming Wang, Chia-Wei Liu, Jen-Sheng Yang, Wen-Ting Chu, Yu-Wen Liao, Huei-Tzu Wang
  • Patent number: 11056324
    Abstract: A system and method for reducing particle contamination on substrates during a deposition process using a particle control system is disclosed here. In one embodiment, a film deposition system includes: a processing chamber sealable to create a pressurized environment and configured to contain a plasma, a target and a substrate in the pressurized environment; and a particle control unit, wherein the particle control unit is configured to provide an external force to each of at least one charged atom and at least one contamination particle in the plasma, wherein the at least one charged atom and the at last one contamination particle are generated by the target when it is in direct contact with the plasma, wherein the external force is configured to direct the at least one charged atom to a top surface of the substrate and to direct the at least one contamination particle away from the top surface of the substrate.
    Type: Grant
    Filed: August 2, 2019
    Date of Patent: July 6, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsung-Han Kuo, Po-Shu Wang, Wei-Ming Wang
  • Patent number: 11038108
    Abstract: The present disclosure is directed to a method for the formation of resistive random-access memory (RRAM) structures with a low profile between or within metallization layers. For example, the method includes forming, on a substrate, a first metallization layer with conductive structures and a first dielectric layer abutting sidewall surfaces of the conductive structures; etching a portion of the first dielectric layer to expose a portion of the sidewall surfaces of the conductive structures; depositing a memory stack on the first metallization layer, the exposed portion of the sidewall surfaces, and a top surface of the conductive structures; patterning the memory stack to form a memory structure that covers the exposed portion of the sidewall surfaces and the top surface of the conductive structures; depositing a second dielectric layer to encapsulate the memory stack; and forming a second metallization layer on the second dielectric layer.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: June 15, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Ming Wang, Chia-Wei Liu, Jen-Sheng Yang, Wen-Ting Chu, Yu-Wen Liao, Huei-Tzu Wang
  • Publication number: 20210135103
    Abstract: A memory cell includes: a first contact feature partially embedded in a first dielectric layer; a barrier layer, lining the first contact feature, that comprises a first portion disposed between the first contact feature and first dielectric layer, and a second portion disposed above the first dielectric layer; a resistive material layer disposed above the first contact feature, the resistive material layer coupled to the first contact feature through the second portion of the barrier layer; and a second contact feature embedded in a second dielectric layer above the first dielectric layer.
    Type: Application
    Filed: January 4, 2021
    Publication date: May 6, 2021
    Inventors: Huei-Tsz WANG, Po-Shu Wang, Wei-Ming Wang
  • Patent number: 10886465
    Abstract: A memory cell includes: a first contact feature partially embedded in a first dielectric layer; a barrier layer, lining the first contact feature, that comprises a first portion disposed between the first contact feature and first dielectric layer, and a second portion disposed above the first dielectric layer; a resistive material layer disposed above the first contact feature, the resistive material layer coupled to the first contact feature through the second portion of the barrier layer; and a second contact feature embedded in a second dielectric layer above the first dielectric layer.
    Type: Grant
    Filed: February 28, 2018
    Date of Patent: January 5, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Huei-Tsz Wang, Po-Shu Wang, Wei-Ming Wang
  • Publication number: 20200373487
    Abstract: The present disclosure is directed to a method for the formation of resistive random-access memory (RRAM) structures with a low profile between or within metallization layers. For example, the method includes forming, on a substrate, a first metallization layer with conductive structures and a first dielectric layer abutting sidewall surfaces of the conductive structures; etching a portion of the first dielectric layer to expose a portion of the sidewall surfaces of the conductive structures; depositing a memory stack on the first metallization layer, the exposed portion of the sidewall surfaces, and a top surface of the conductive structures; patterning the memory stack to form a memory structure that covers the exposed portion of the sidewall surfaces and the top surface of the conductive structures; depositing a second dielectric layer to encapsulate the memory stack; and forming a second metallization layer on the second dielectric layer.
    Type: Application
    Filed: May 24, 2019
    Publication date: November 26, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Ming Wang, Chia-Wei Liu, Jen-Sheng Yang, Wen-Ting Chu, Yu-Wen Liao, Huei-Tzu Wang
  • Publication number: 20200224886
    Abstract: There is provided an auto detection system including a thermal detection device and a host. The host controls an indication device to indicate a prompt message or detection results according to a slope variation of voltage values or 2D distribution of temperature values detected by the thermal detection device, wherein the voltage values include the detected voltage of a single pixel or the sum of detected voltages of multiple pixels of a thermal sensor.
    Type: Application
    Filed: March 13, 2020
    Publication date: July 16, 2020
    Inventors: Chih-Ming SUN, Ming-Han TSAI, Chiung-Wen LIN, Po-Wei YU, Wei-Ming WANG, Sen-Huang HUANG
  • Publication number: 20200051799
    Abstract: A system and method for reducing particle contamination on substrates during a deposition process using a particle control system is disclosed here. In one embodiment, a film deposition system includes: a processing chamber sealable to create a pressurized environment and configured to contain a plasma, a target and a substrate in the pressurized environment; and a particle control unit, wherein the particle control unit is configured to provide an external force to each of at least one charged atom and at least one contamination particle in the plasma, wherein the at least one charged atom and the at last one contamination particle are generated by the target when it is in direct contact with the plasma, wherein the external force is configured to direct the at least one charged atom to a top surface of the substrate and to direct the at least one contamination particle away from the top surface of the substrate.
    Type: Application
    Filed: August 2, 2019
    Publication date: February 13, 2020
    Inventors: Tsung-Han KUO, Po-Shu WANG, Wei-Ming WANG
  • Publication number: 20190267544
    Abstract: A memory cell includes: a first contact feature partially embedded in a first dielectric layer; a barrier layer, lining the first contact feature, that comprises a first portion disposed between the first contact feature and first dielectric layer, and a second portion disposed above the first dielectric layer; a resistive material layer disposed above the first contact feature, the resistive material layer coupled to the first contact feature through the second portion of the barrier layer; and a second contact feature embedded in a second dielectric layer above the first dielectric layer.
    Type: Application
    Filed: February 28, 2018
    Publication date: August 29, 2019
    Inventors: Huei-Tsz WANG, Po-Shu WANG, Wei-Ming WANG
  • Patent number: 9972465
    Abstract: A keyboard device includes an upper housing, a conductive membrane, a key top including a bottom surface and an actuator disposed on the bottom surface, a lower housing and a soft elastic element located on the conductive membrane, wherein the actuator penetrates the upper housing, and the soft elastic element has an engaging part to engage with the key top such that the key top is prevented from being separated from the soft elastic element when the key top rebounds.
    Type: Grant
    Filed: March 9, 2016
    Date of Patent: May 15, 2018
    Inventor: Wei-Ming Wang
  • Publication number: 20170221655
    Abstract: A keyboard device with an upper housing and an under housing is disclosed, which includes a stopping piece integrally formed on the upper housing and having an upper surface and a lower surface, a key top having a side portion and an operating piece having an operating portion, and a first silencing pad disposed between the operating portion and the lower surface.
    Type: Application
    Filed: January 28, 2016
    Publication date: August 3, 2017
    Inventor: WEI-MING WANG
  • Publication number: 20170069445
    Abstract: A keyboard device is disclosed, which includes an upper housing, a conductive membrane, a key top including a bottom surface and an actuator disposed on the bottom surface, a lower housing and a soft elastic element located on the conductive membrane, wherein the actuator penetrates the upper housing, and the soft elastic element has an engaging part to engage with the key top such that the key top is prevented from being separated from the soft elastic element when the key top rebounds.
    Type: Application
    Filed: March 9, 2016
    Publication date: March 9, 2017
    Inventor: WEI-MING WANG
  • Publication number: 20170066463
    Abstract: The foldable truck includes a carrier, a retractable frame and a handle pole. The carrier has a first platform and a second platform connected thereto. The first platform is provided with two front wheels. The second platform is provided with a rod slidably mounted by two rear wheels. The retractable frame has two first retractable frames, two second retractable frames, a third retractable frame and a fourth retractable frame. The handle pole has a first end formed into a handle and a second end rotatably connected to the third retractable frame.
    Type: Application
    Filed: April 8, 2016
    Publication date: March 9, 2017
    Inventor: Wei-Ming Wang