Patents by Inventor Wen-Chuan Tai

Wen-Chuan Tai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INLINE PROCESS CONTROL STRUCTURES
    Publication number: 20120091454
    Abstract: A method for process control is disclosed. The method includes performing an etching process on a semiconductor substrate forming a structure and a test structure having a pattern and a releasing mechanism coupled to the pattern; and monitoring the pattern of the test structure to determine whether the etching process is complete.
    Type: Application
    Filed: October 19, 2010
    Publication date: April 19, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kai-Chih Liang, Wen-Chuan Tai, Chun-Ren Cheng