Patents by Inventor Wen Wu

Wen Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240371938
    Abstract: A semiconductor structure includes semiconductor fins disposed over a substrate, an epitaxial source/drain (S/D) feature disposed over the semiconductor fins, where a top surface portion of the epitaxial S/D feature includes two surfaces slanted downward toward each other at an angle, a silicide layer disposed conformally over the top portion of the epitaxial S/D feature, and an S/D contact disposed over the silicide layer, where a bottom portion of the S/D contact extends into the epitaxial S/D feature.
    Type: Application
    Filed: July 18, 2024
    Publication date: November 7, 2024
    Inventors: Jia-Heng Wang, I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang
  • Publication number: 20240363428
    Abstract: A semiconductor structure includes a channel member, a gate structure disposed over the channel member, a source/drain feature connected to the channel member and adjacent to the gate structure, a source/drain contact disposed below and connected to the source/drain feature, a backside dielectric feature disposed below the channel member, and a first dielectric layer and a second dielectric layer disposed between the backside dielectric feature and the source/drain contact. The first dielectric layer includes a low-k dielectric material.
    Type: Application
    Filed: July 9, 2024
    Publication date: October 31, 2024
    Inventors: Po-Yu Huang, I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang
  • Publication number: 20240363733
    Abstract: The present disclosure provides semiconductor devices and methods of forming the same. A semiconductor device according to one embodiment of the present disclosure includes a first fin-shaped structure extending lengthwise along a first direction over a substrate, a first epitaxial feature over a source/drain region of the first fin-shaped structure, a gate structure disposed over a channel region of the first fin-shaped structure and extending along a second direction perpendicular to the first direction, and a source/drain contact over the first epitaxial feature. The bottom surface of the gate structure is closer to the substrate than a bottom surface of the source/drain contact.
    Type: Application
    Filed: July 11, 2024
    Publication date: October 31, 2024
    Inventors: Jia-Heng Wang, Chun-Han Chen, I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang
  • Publication number: 20240363533
    Abstract: A package structure is provided. The package structure includes a first interconnect structure, a die structure over the first interconnect structure, and a dam structure on the die structure. The package structure also includes a second interconnect structure over the die structure and the dam structure. The package structure further includes a ring structure over the first interconnect structure and surrounding the die structure and the dam structure. In addition, the package structure includes a plurality of connectors electrically connected to the first interconnect structure and the second interconnect structure. A top surface of the ring structure is higher than a top surface of the first interconnect structure and lower than a top surface of each of the plurality of connectors.
    Type: Application
    Filed: July 10, 2024
    Publication date: October 31, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Po-Hao TSAI, Techi WONG, Meng-Liang LIN, Yi-Wen WU, Po-Yao CHUANG, Shin-Puu JENG
  • Publication number: 20240360548
    Abstract: In some implementations, one or more semiconductor processing tools may deposit cobalt material within a cavity of the semiconductor device. The one or more semiconductor processing tools may polish an upper surface of the cobalt material. The one or more semiconductor processing tools may perform a hydrogen soak on the semiconductor device. The one or more semiconductor processing tools may deposit tungsten material onto the upper surface of the cobalt material.
    Type: Application
    Filed: July 11, 2024
    Publication date: October 31, 2024
    Inventors: Chi-Cheng HUNG, Pei-Wen WU, Yu-Sheng WANG, Pei-Shan CHANG
  • Publication number: 20240363705
    Abstract: A semiconductor structure and a method of forming the same are provided. In an embodiment, an exemplary semiconductor structure includes a gate structure disposed over a channel region of an active region, a drain feature disposed over a drain region of the active region; a source feature disposed over a source region of the active region, a backside source contact disposed under the source feature, an isolation feature disposed on and in contact with the source feature, a drain contact disposed over and electrically coupled to the drain feature, and a gate contact via disposed over and electrically coupled to the gate structure. A distance between the gate contact via and the drain contact is greater than a distance between the gate contact via and the isolation feature. The exemplary semiconductor structure would have a reduced parasitic capacitance and an enlarged leakage window.
    Type: Application
    Filed: July 12, 2024
    Publication date: October 31, 2024
    Inventors: Po-Yu Huang, Chen-Ming Lee, I-Wen Wu, Fu-Kai Yang, Mei-Yun Wang
  • Publication number: 20240355708
    Abstract: One aspect of the present disclosure pertains to a method of forming a semiconductor device. The method includes forming a gate stack over a channel region and forming a first source/drain (S/D) trench adjacent the channel region and extending into the substrate below a top surface of an isolation structure. The method includes forming a first epitaxial S/D feature in the first S/D trench and forming a first frontside metal contact over the first epitaxial S/D feature. The method further includes forming a first backside trench that exposes a bottom surface of the first epitaxial S/D feature and forming a first backside conductive feature in the first backside trench and on the exposed bottom surface of the first epitaxial S/D feature. A top surface of the first backside conductive feature is under a bottommost surface of the gate stack.
    Type: Application
    Filed: April 21, 2023
    Publication date: October 24, 2024
    Inventors: Po-Yu HUANG, Shih-Chieh WU, Chen-Ming LEE, I-Wen WU, Fu-Kai YANG, Mei-Yun WANG
  • Patent number: 12125879
    Abstract: A method of semiconductor fabrication includes providing a semiconductor structure having a substrate and first, second, third, and fourth fins above the substrate. The method further includes forming an n-type epitaxial source/drain (S/D) feature on the first and second fins, forming a p-type epitaxial S/D feature on the third and fourth fins, and performing a selective etch process on the semiconductor structure to remove upper portions of the n-type epitaxial S/D feature and the p-type epitaxial S/D feature such that more is removed from the n-type epitaxial S/D feature than the p-type epitaxial S/D feature.
    Type: Grant
    Filed: July 27, 2023
    Date of Patent: October 22, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang, Chun-An Lin, Wei-Yuan Lu, Guan-Ren Wang, Peng Wang
  • Patent number: 12119378
    Abstract: A semiconductor structure includes semiconductor fins disposed over a substrate, an epitaxial source/drain (S/D) feature disposed over the semiconductor fins, where a top surface portion of the epitaxial S/D feature includes two surfaces slanted downward toward each other at an angle, a silicide layer disposed conformally over the top portion of the epitaxial S/D feature, and an S/D contact disposed over the silicide layer, where a bottom portion of the S/D contact extends into the epitaxial S/D feature.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: October 15, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jia-Heng Wang, I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang
  • Publication number: 20240332211
    Abstract: A package structure includes a redistribution structure, a first semiconductor die, a first passive component, a second semiconductor die, a first insulating encapsulant, a second insulating encapsulant, a second passive component and a global shielding structure. The redistribution structure includes dielectric layers and conductive layers alternately stacked. The first semiconductor die, the first passive component and the second semiconductor die are disposed on a first surface of the redistribution structure. The first insulating encapsulant is encapsulating the first semiconductor die and the first passive component. The second insulating encapsulant is encapsulating the second semiconductor die, wherein the second insulating encapsulant is separated from the first insulating encapsulant. The second passive component is disposed on a second surface of the redistribution structure.
    Type: Application
    Filed: June 11, 2024
    Publication date: October 3, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Wen Wu, Shin-Puu Jeng, Shih-Ting Hung, Po-Yao Chuang
  • Publication number: 20240332374
    Abstract: A method and structure for forming semiconductor device includes forming a first opening in a dielectric layer to expose a source/drain region. In some embodiments, the method further includes depositing a first metal layer in the opening and over the source/drain region. Thereafter, in some examples, the method further includes performing an annealing process to modulate a grain size of the first metal layer. In various embodiments, the method further includes depositing a second metal layer over the annealed first metal layer. In some embodiments, the second metal layer has a substantially uniform phase.
    Type: Application
    Filed: October 23, 2023
    Publication date: October 3, 2024
    Inventors: Chi-Cheng HUNG, Pei-Wen WU, Pei Shan CHANG
  • Patent number: 12097599
    Abstract: A dustproof magazine to be mounted in a nail gun including a muzzle unit includes a magazine body, a nail-pressing member, and a scroll spring connected therebetween. The magazine body includes spaced-apart first and second rail walls extending transverse to the muzzle unit, and disposed respectively distal from and adjacent to the muzzle unit. The nail-pressing member is mounted movably along and between the first and second rail walls, and includes a main body and a scraper set extending therefrom. Movement of the nail-pressing member away from the muzzle unit drives the scroll spring to resiliently convert from a winding state into an unwinding state, where a strip portion of the scroll spring unwinds and extends along the second rail wall. The scraper set is in contact with the strip portion during the movement of the nail-pressing member for scrapping foreign matters off the strip portion.
    Type: Grant
    Filed: January 18, 2023
    Date of Patent: September 24, 2024
    Assignee: Basso Industry Corp.
    Inventors: Jian-Rung Wu, Rui-Wen Wu
  • Publication number: 20240307007
    Abstract: An alarm system an alarm method for a medical emergency are provided. The alarm method includes: obtaining a physiological signal of a user by a sensor of a portable electronic device; receiving the physiological signal from the portable electronic device, determining whether an abnormal event has occurred according to the physiological signal, and transmitting first feedback information corresponding to the physiological signal to a server in response to the abnormal event by the terminal device; and outputting an alarm message according to the first feedback information by the server.
    Type: Application
    Filed: November 21, 2023
    Publication date: September 19, 2024
    Applicants: Acer Incorporated, Far Eastern Memorial Hospital
    Inventors: Sheng-Wei Chu, Tsung-Hsien Tsai, Ke-Han Pan, Yueh-Yarng Tsai, Pei-Jung Chen, Jun-Hong Chen, Yen-Wen Wu, Jen-Tang Sun
  • Patent number: 12094819
    Abstract: A method for forming a package structure is provided. The method includes forming a first interconnect structure over a carrier substrate and disposing a first die structure over the first interconnect structure. The method includes forming a dam structure over the first die structure. The method also includes forming a protection layer over a second interconnect structure. The method further includes bonding the second interconnect structure over the dam structure. In addition, the method includes forming a package layer between the first interconnect structure and the second interconnect structure. The method also includes removing the protection layer.
    Type: Grant
    Filed: August 18, 2021
    Date of Patent: September 17, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Hao Tsai, Techi Wong, Meng-Liang Lin, Yi-Wen Wu, Po-Yao Chuang, Shin-Puu Jeng
  • Publication number: 20240304471
    Abstract: In an embodiment, an apparatus comprising: a heater configured to heat a wafer located on a wafer staging area of the heater, the heater comprising a heater shaft extending below the wafer staging area; and a heater lift assembly comprising: a lift shaft configured to move the heater shaft in a vertical direction; a clamp that connects the heater shaft to the lift shaft; and a damper disposed on top of the clamp.
    Type: Application
    Filed: May 16, 2024
    Publication date: September 12, 2024
    Inventors: Kai-Wen WU, Chun-Ta CHEN, Chin-Shen HSIEH, Cheng-Yi HUANG
  • Patent number: 12080769
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a source/drain region formed in a semiconductor substrate, a source/drain contact structure formed over the source/drain region, and a gate electrode layer formed adjacent to the source/drain contact structure. The semiconductor device structure also includes a first spacer and a second spacer laterally and successively arranged from the sidewall of the gate electrode layer to the sidewall of the source/drain contact structure. The semiconductor device structure further includes a silicide region formed in the source/drain region. The top width of the silicide region is greater than the bottom width of the source/drain contact structure and less than the top width of the source/drain region.
    Type: Grant
    Filed: February 15, 2022
    Date of Patent: September 3, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kai-Hsuan Lee, Shih-Che Lin, Po-Yu Huang, Shih-Chieh Wu, I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang
  • Publication number: 20240292590
    Abstract: A semiconductor device includes a fin structure. A source/drain region is formed on the fin structure. A first gate structure is disposed over the fin structure. A source/drain contact is disposed over the source/drain region. The source/drain contact has a protruding segment that protrudes at least partially over the first gate structure. The source/drain contact electrically couples together the source/drain region and the first gate structure.
    Type: Application
    Filed: April 22, 2024
    Publication date: August 29, 2024
    Inventors: Jui-Lin Chen, Chao-Yuan Chang, Ping-Wei Wang, Fu-Kai Yang, Ting Fang, I-Wen Wu, Shih-Hao Lin
  • Patent number: 12070842
    Abstract: An electric nail gun includes a cylinder unit, a valve, a pushed rod, a safety assembly and an adjusting assembly. The cylinder unit defines a cylinder space and a gas space. The valve is disposed between the cylinder space and the gas space, and is movable among a closed position, in which the valve closes the cylinder space, and a plurality of open positions. The safety assembly has a first end that is adapted to be pressed and moved by an object, and a second end. When the first end is not pressed against the object, a distance between the second end and the pushed constituent is defined as a first actuating distance. When the first end is moved by the object, the pushed rod is urged to move by the second end such that the valve moves from the closed position to one of the open positions.
    Type: Grant
    Filed: December 14, 2022
    Date of Patent: August 27, 2024
    Assignee: Basso Industry Corp.
    Inventors: Jian-Rung Wu, Rui-Wen Wu
  • Patent number: 12068396
    Abstract: The present disclosure provides semiconductor devices and methods of forming the same. A semiconductor device according to one embodiment of the present disclosure includes a first fin-shaped structure extending lengthwise along a first direction over a substrate, a first epitaxial feature over a source/drain region of the first fin-shaped structure, a gate structure disposed over a channel region of the first fin-shaped structure and extending along a second direction perpendicular to the first direction, and a source/drain contact over the first epitaxial feature. The bottom surface of the gate structure is closer to the substrate than a bottom surface of the source/drain contact.
    Type: Grant
    Filed: July 24, 2023
    Date of Patent: August 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jia-Heng Wang, Chun-Han Chen, I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang
  • Patent number: D1047917
    Type: Grant
    Filed: October 17, 2022
    Date of Patent: October 22, 2024
    Assignee: TELEBOX INDUSTRIES CORP.
    Inventors: Fu-Wen Wu, Ching-Yi Hsu, Hung Yu Wu