Patents by Inventor Xuefeng Liu

Xuefeng Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11899338
    Abstract: A nonlinear crystal including stacked strontium tetraborate SrB4O7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency doubling stage of a laser assembly to generate laser output light having a wavelength in the range of about 180 nm to 200 nm. One or more fundamental laser beams are frequency doubled, down-converted and/or summed using one or more frequency conversion stages to generate an intermediate frequency light with a corresponding wavelength in the range of about 360 nm to 400 nm, and then the final frequency converting stage utilizes the nonlinear crystal to double the frequency of the intermediate frequency light to generate the desired laser output light at high power. Methods, inspection systems, lithography systems and cutting systems incorporating the laser assembly are also described.
    Type: Grant
    Filed: November 21, 2022
    Date of Patent: February 13, 2024
    Assignee: KLA Corporation
    Inventors: Yung-Ho Alex Chuang, Kelly Mauser, Baigang Zhang, Xuefeng Liu, John Fielden, Yinying Xiao-Li, Elena Loginova
  • Publication number: 20240040940
    Abstract: Embodiments of present invention provide a resistive random-access memory (RRAM) cell. The RRAM cell includes a bottom electrode; a metal oxide layer, the metal oxide layer having a central portion that is in direct contact with the bottom electrode, a peripheral portion that is nonplanar with the central portion, and a vertical portion between the central portion and the peripheral portion; and a top electrode directly above the metal oxide layer. A method of manufacturing the RRAM cell is also provided.
    Type: Application
    Filed: July 28, 2022
    Publication date: February 1, 2024
    Inventors: Soon-Cheon Seo, Min Gyu Sung, Takashi Ando, CHANRO PARK, Mary Claire Micaller Silvestre, Xuefeng Liu
  • Patent number: 11879853
    Abstract: An inspection system may include an illumination source to generate an illumination beam, illumination optics to direct the illumination beam to a sample at an off-axis angle along an illumination direction, and collection optics to collect scattered light from the sample in a dark-field mode, where the scattered light from the sample includes surface haze associated with light scattered from a surface of the sample, and where at least a at least a portion of the surface haze has elliptical polarizations. The system may further include pupil-plane optics to convert the polarizations of the surface haze across the pupil to linear polarization that is aligned parallel to a selected haze orientation direction. The system may include a linear polarizer to reject the surface haze aligned parallel to this haze orientation direction and a detector to generate a dark-field image of the sample based on light passed by the linear polarizer.
    Type: Grant
    Filed: February 16, 2022
    Date of Patent: January 23, 2024
    Assignee: KLA Corporation
    Inventors: Xuefeng Liu, Jenn-Kuen Leong, Yung-Ho Alex Chuang, John Fielden
  • Patent number: 11855262
    Abstract: An electronic device includes a cell, a circuit board, and a cell protection unit. The circuit board is provided in the electronic device and configured to control the electronic device. The circuit board is electrically coupled to the cell, and the cell protection unit is provided on the circuit board. The cell protection unit is integrated with the circuit board, so as to facilitate heat dissipation of the cell, prolong the service life of the cell, speed up the production cycle of the cell, and reduce the production cost of the cell.
    Type: Grant
    Filed: January 3, 2023
    Date of Patent: December 26, 2023
    Assignee: DONGGUAN NVT TECHNOLOGY LIMITED
    Inventors: Liming Wang, Nini Chen, Guanghui Chen, Xuefeng Liu
  • Publication number: 20230378258
    Abstract: A method including forming an oxide layer on a first substrate and forming a second substrate on the oxide layer. Doping a first section of the second substrate while not doping a second section of the second substrate. Forming a first nano device on the second section of the second substrate and forming a second nano device on first section of the second substrate. Flipping the first substrate over to allow for backside processing of the substrate and forming at least one backside contact connected to the first nano device while backside contacts are not formed or connected to the second nano device.
    Type: Application
    Filed: May 17, 2022
    Publication date: November 23, 2023
    Inventors: Ruilong Xie, Anthony I. Chou, Brent A. Anderson, John Christopher Arnold, Junli Wang, Kai Zhao, Terence Hook, Julien Frougier, Xuefeng Liu
  • Patent number: 11815784
    Abstract: A nonlinear crystal grating assembly including two integral nonlinear crystal grating structures having inverted crystal axes and having parallel spaced-apart mesas with predetermined mesa widths arranged such that, when assembled in an interdigitated configuration, the mesas of the two grating structures form an alternating grating pattern that is aligned with a propagation direction of input light, thereby creating a periodic structure for quasi-phase-matching (QPM). The nonlinear crystal grating structures are formed using strontium tetraborate, lithium triborate or another nonlinear crystal material. The nonlinear crystal grating assembly is utilized in a laser assembly in which fundamental wavelengths are doubled and/or summed using intermediate frequency conversion stages, and then a final frequency converting stage utilizes the nonlinear crystal grating assembly to double or sum one or more intermediate light beam frequencies to generate laser output light at high power and photon energy levels.
    Type: Grant
    Filed: December 22, 2022
    Date of Patent: November 14, 2023
    Assignee: KLA Corporation
    Inventors: Yung-Ho Alex Chuang, Yinying Xiao-Li, Elena Loginova, John Fielden, Baigang Zhang, Xuefeng Liu, Kelly Ann Weekley Mauser
  • Publication number: 20230185158
    Abstract: A nonlinear crystal including stacked strontium tetraborate SrB4O7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency doubling stage of a laser assembly to generate laser output light having a wavelength in the range of about 180 nm to 200 nm. One or more fundamental laser beams are frequency doubled, down-converted and/or summed using one or more frequency conversion stages to generate an intermediate frequency light with a corresponding wavelength in the range of about 360 nm to 400 nm, and then the final frequency converting stage utilizes the nonlinear crystal to double the frequency of the intermediate frequency light to generate the desired laser output light at high power. Methods, inspection systems, lithography systems and cutting systems incorporating the laser assembly are also described.
    Type: Application
    Filed: November 21, 2022
    Publication date: June 15, 2023
    Inventors: Yung-Ho Alex Chuang, Kelly Mauser, Baigang Zhang, Xuefeng Liu, John Fielden, Yinying Xiao-Li, Elena Loginova
  • Publication number: 20230161221
    Abstract: A nonlinear crystal grating assembly including two integral nonlinear crystal grating structures having inverted crystal axes and having parallel spaced-apart mesas with predetermined mesa widths arranged such that, when assembled in an interdigitated configuration, the mesas of the two grating structures form an alternating grating pattern that is aligned with a propagation direction of input light, thereby creating a periodic structure for quasi-phase-matching (QPM). The nonlinear crystal grating structures are formed using strontium tetraborate, lithium triborate or another nonlinear crystal material. The nonlinear crystal grating assembly is utilized in a laser assembly in which fundamental wavelengths are doubled and/or summed using intermediate frequency conversion stages, and then a final frequency converting stage utilizes the nonlinear crystal grating assembly to double or sum one or more intermediate light beam frequencies to generate laser output light at high power and photon energy levels.
    Type: Application
    Filed: December 22, 2022
    Publication date: May 25, 2023
    Inventors: Yung-Ho Alex Chuang, Yinying Xiao-Li, Elena Loginova, John Fielden, Baigang Zhang, Xuefeng Liu, Kelly Ann Weekley Mauser
  • Publication number: 20230148373
    Abstract: An electronic device includes a cell, a circuit board, and a cell protection unit. The circuit board is provided in the electronic device and configured to control the electronic device. The circuit board is electrically coupled to the cell, and the cell protection unit is provided on the circuit board. The cell protection unit is integrated with the circuit board, so as to facilitate heat dissipation of the cell, prolong the service life of the cell, speed up the production cycle of the cell, and reduce the production cost of the cell.
    Type: Application
    Filed: January 3, 2023
    Publication date: May 11, 2023
    Inventors: Liming WANG, Nini CHEN, Guanghui CHEN, Xuefeng LIU
  • Publication number: 20230110825
    Abstract: In one embodiment a semiconductor structure comprises a semiconductor substrate, a trench dielectric layer disposed in a trench of the semiconductor substrate, a first source/drain region disposed in contact with the semiconductor substrate, a gate and a second source/drain region. The gate is disposed between the first source/drain region and the second source/drain region. The semiconductor structure further comprises a dielectric isolation layer disposed between the semiconductor substrate and the second source/drain region.
    Type: Application
    Filed: September 27, 2021
    Publication date: April 13, 2023
    Inventors: Huimei Zhou, Julien Frougier, Xuefeng Liu, Jingyun Zhang, Lan Yu, Heng Wu, Miaomiao Wang, Veeraraghavan S. Basker
  • Patent number: 11575184
    Abstract: An electronic device includes a cell, a circuit board, and a cell protection unit. The circuit board is provided in the electronic device and configured to control the electronic device. The circuit board is electrically coupled to the cell, and the cell protection unit is provided on the circuit board. The cell protection unit is integrated with the circuit board, so as to facilitate heat dissipation of the cell, prolong the service life of the cell, speed up the production cycle of the cell, and reduce the production cost of the cell.
    Type: Grant
    Filed: March 17, 2020
    Date of Patent: February 7, 2023
    Assignee: DONGGUAN NVT TECHNOLOGY LIMITED
    Inventors: Liming Wang, Nini Chen, Guanghui Chen, Xuefeng Liu
  • Patent number: 11567391
    Abstract: A nonlinear crystal grating assembly including two integral nonlinear crystal grating structures having inverted crystal axes and having parallel spaced-apart mesas with predetermined mesa widths arranged such that, when assembled in an interdigitated configuration, the mesas of the two grating structures form an alternating grating pattern that is aligned with a propagation direction of input light, thereby creating a periodic structure for quasi-phase-matching (QPM). The nonlinear crystal grating structures are formed using strontium tetraborate, lithium triborate or another nonlinear crystal material. The nonlinear crystal grating assembly is utilized in a laser assembly in which fundamental wavelengths are doubled and/or summed using intermediate frequency conversion stages, and then a final frequency converting stage utilizes the nonlinear crystal grating assembly to double or sum one or more intermediate light beam frequencies to generate laser output light at high power and photon energy levels.
    Type: Grant
    Filed: December 18, 2021
    Date of Patent: January 31, 2023
    Assignee: KLA Corporation
    Inventors: Yung-Ho Alex Chuang, Yinying Xiao-Li, Elena Loginova, John Fielden, Baigang Zhang, Xuefeng Liu, Kelly Ann Weekley Mauser
  • Patent number: 11525862
    Abstract: A method for calculating a short-circuit current of a battery. includes: obtaining an integral state of charge and a current state of charge of the battery; calculating a first difference based on the integral state of charge and the current state of charge; calculating the short-circuit current of the battery based on the first difference; obtaining a first real state of charge and a second real state of charge; updating the first real state of charge and the second real state of charge based on a temperature-impedance table and the short-circuit current of the battery; calculating a second difference based on the updated first real state of charge and the updated second real state of charge; and updating the short-circuit current of the battery based on the second difference.
    Type: Grant
    Filed: April 8, 2020
    Date of Patent: December 13, 2022
    Assignee: NINGDE AMPEREX TECHNOLOGY LIMITED
    Inventors: Hong Xie, Xuefeng Liu, Guanghui Chen
  • Publication number: 20220268710
    Abstract: An inspection system may include an illumination source to generate an illumination beam, illumination optics to direct the illumination beam to a sample at an off-axis angle along an illumination direction, and collection optics to collect scattered light from the sample in a dark-field mode, where the scattered light from the sample includes surface haze associated with light scattered from a surface of the sample, and where at least a at least a portion of the surface haze has elliptical polarizations. The system may further include pupil-plane optics to convert the polarizations of the surface haze across the pupil to linear polarization that is aligned parallel to a selected haze orientation direction. The system may include a linear polarizer to reject the surface haze aligned parallel to this haze orientation direction and a detector to generate a dark-field image of the sample based on light passed by the linear polarizer.
    Type: Application
    Filed: February 16, 2022
    Publication date: August 25, 2022
    Inventors: Xuefeng Liu, Jenn-Kuen Leong, Yung-Ho Alex Chuang, John Fielden
  • Publication number: 20220213705
    Abstract: This invention relates to a method for entire removal of a space truss, and an assistive support mechanism therefor. The assistive support mechanism is arranged on a vertical support rod of a truss structure, the assistive support mechanism comprises an assistive support assembly, a lattice support member, and a conversion platform. The lifting assembly is arranged at a top of the conversion platform and comprises a stranded wire, a lifting member, and a control member. The method for entire removal of a space truss comprises mounting the assistive support mechanism, and performing initial removal of the truss structure; lowering the truss structure; and then performing secondary removal of the entire space truss. The major removal work is done on the ground, thereby reducing the requirement for removal-assisting measures and the operational risks, and improving the working efficiency.
    Type: Application
    Filed: August 28, 2020
    Publication date: July 7, 2022
    Inventors: ZHENMING CHEN, SUMEI ZHANG, XUEFENG LIU, ZHAN WANG, YONGQING ZHAO, SHITAO HUANG
  • Patent number: 11243175
    Abstract: A system may include illumination optics to direct an illumination beam to a sample at an off-axis angle, collection optics to collect scattered light from the sample, and a phase mask located at a first pupil plane to provide different phase shifts for light in two or more pupil regions of a collection area to reshape a point spread function of light scattered from one or more particles on a surface of the sample. The system may further include a polarization rotator located at a second pupil plane, where the polarization rotator provides a spatially-varying polarization rotation angle selected to rotate light scattered from the surface of the sample to a selected polarization angle, a polarizer to reject light polarized along the selected polarization angle, and a detector to generate a dark-field image of the sample based on light passed by the polarizer.
    Type: Grant
    Filed: February 12, 2021
    Date of Patent: February 8, 2022
    Assignee: KLA Corporation
    Inventors: Xuefeng Liu, Jenn-Kuen Leong, Daniel Kavaldjiev, John Fielden
  • Patent number: 11231362
    Abstract: A system includes a light source, a Fourier transform infrared reflectometer (FTIR) spectrometer, and broadband reflectometer optics. The system is configured to measure polarized light and unpolarized reflectivities in a wavelength range from 2 ?m to 20 ?m. The light source can be a laser-driven light source. The spectroscopic reflectometer can include a single channel or two channels.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: January 25, 2022
    Assignee: KLA Corporation
    Inventors: Guorong V. Zhuang, Shankar Krishnan, David Y. Wang, Xuefeng Liu, Mengmeng Ye, Dawei Hu
  • Patent number: 11205808
    Abstract: A method for detecting a lithium separation phenomenon of a battery of a terminal device is provided. The method includes detecting a working state of the battery, and collecting a first voltage of the battery when the working state of the battery is the resting state. The method further include collecting a second voltage of the battery when the battery is left to stand for a preset period of time, and determining whether the lithium separation phenomenon has occurred according to the first voltage and the second voltage. The implementation of the application can detect whether the lithium separation phenomenon has occurred in the battery and trigger a protection circuit of the battery in time when the lithium separation phenomenon has occurred in the battery.
    Type: Grant
    Filed: August 2, 2019
    Date of Patent: December 21, 2021
    Assignee: DONGGUAN AMPEREX TECHNOLOGY LIMITED
    Inventors: Chao Yang, XueFeng Liu, Jianchang Luo, JinHui Chen, Ying Wang, Guanghui Chen, ChunHua Bian
  • Publication number: 20210376631
    Abstract: A battery detection system includes a battery assembly and an electronic device. The battery assembly includes a first connector and a detection module connected to the first connector. The electronic device includes a second connector and a control module connected to the second connector. When the first connector is connected to the second connector, the detection module is configured to output first identification information to the electronic device through the first connector. When the second connector receives the first identification information, the control module confirms that the battery assembly is in a connected state. After the first connector is disconnected from the second connector, the detection module generates and outputs second identification information. When information received by the second connector changes from the first identification information to the second identification information, the control module confirms that the battery assembly is disconnected.
    Type: Application
    Filed: June 21, 2021
    Publication date: December 2, 2021
    Inventors: Hong XIE, Guanghui Chen, Xuefeng Liu
  • Publication number: 20210224912
    Abstract: Techniques to use deep learning to forecast future orders for a financial service provider to execute by a future date. These techniques leverage a variety of features to predict an appropriate number of orders to execute, for example, on a next trading day. Some features correspond to market indices including their reconstitution schedule while others may correspond to historical orders by the financial service provider. By segregating the features and filtering individual features, these techniques are able to eliminate some noise and focus on a particular feature for insight into the future orders. Other embodiments are described and claimed.
    Type: Application
    Filed: March 15, 2019
    Publication date: July 22, 2021
    Inventors: Dajun Wang, Xuefeng Liu, Ji Zhou, Tianshi Wang