Patents by Inventor Yao-Wen Chang

Yao-Wen Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240381797
    Abstract: The present disclosure is directed towards an integrated chip including a first memory cell overlying a substrate. The first memory cell comprises a first data storage layer. A second memory cell is adjacent to the first memory cell. A dielectric layer is disposed laterally between the first memory cell and the second memory cell. An air gap is disposed within the dielectric layer. The air gap is spaced laterally between the first memory cell and the second memory cell.
    Type: Application
    Filed: July 25, 2024
    Publication date: November 14, 2024
    Inventors: Ching Ju Yang, Huan-Chieh Chen, Yao-Wen Chang
  • Publication number: 20240371685
    Abstract: In some embodiments, the present disclosure relates to a process tool that includes a chamber housing defining a processing chamber. Within the processing chamber is a wafer chuck configured to hold a substrate. Further, a bell jar structure is arranged over the wafer chuck such that an opening of the bell jar structure faces the wafer chuck. A plasma coil is arranged over the bell jar structure. An oxygen source coupled to the processing chamber and configured to input oxygen gas into the processing chamber.
    Type: Application
    Filed: July 17, 2024
    Publication date: November 7, 2024
    Inventors: Yen-Liang Lin, Chia-Wen Zhong, Yao-Wen Chang, Min-Chang Ching, Kuo-Liang Lu, Cheng-Yuan Tsai, Ru-Liang Lee
  • Publication number: 20240355358
    Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a lower electrode disposed within a dielectric structure over a substrate. A ferroelectric data storage structure is disposed over the lower electrode and an upper electrode is disposed over the ferroelectric data storage structure. One or more stressed sidewall spacers are arranged on opposing sides of the upper electrode. The ferroelectric data storage structure has an orthorhombic phase concentration that varies from directly below the one or more stressed sidewall spacers to laterally outside of the one or more stressed sidewall spacers.
    Type: Application
    Filed: July 3, 2024
    Publication date: October 24, 2024
    Inventors: Tzu-Yu Lin, Yao-Wen Chang
  • Publication number: 20240345211
    Abstract: An electronic device and a control method thereof are provided. The electronic device includes a DSP (Digital Signal Processor). The DSP receives a digital signal. The digital signal includes a plurality of frames. The DSP divides the plurality of frames into a vital group and a non-vital group according to a criterion. The DSP compares a total number of frames of the vital group with a threshold value. In response to the total number of frames of the vital group being greater than the threshold value, the DSP may calculate signal strength of the vital group.
    Type: Application
    Filed: June 8, 2023
    Publication date: October 17, 2024
    Inventors: Chuan Yen KAO, Yu Wen HUANG, Wei Rong TSENG, Yao Tsung CHANG, Yin Yu CHEN
  • Patent number: 12119035
    Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a lower electrode disposed within a dielectric structure over a substrate. A ferroelectric data storage structure is disposed over the lower electrode and an upper electrode is disposed over the ferroelectric data storage structure. One or more stressed sidewall spacers are arranged on opposing sides of the upper electrode. The ferroelectric data storage structure has an orthorhombic phase concentration that varies from directly below the one or more stressed sidewall spacers to laterally outside of the one or more stressed sidewall spacers.
    Type: Grant
    Filed: January 5, 2023
    Date of Patent: October 15, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzu-Yu Lin, Yao-Wen Chang
  • Patent number: 12087826
    Abstract: The present disclosure provides a method for forming a semiconductor structure. The method includes the following operations. A metal layer is formed. An adhesion-enhancing layer is formed over the metal layer. A dielectric stack is formed over the adhesion-enhancing layer. A trench is formed in the dielectric stack. A barrier layer is formed conforming to the sidewall of the trench. A high-k dielectric layer is formed conforming to the barrier layer. A sacrificial layer is formed conforming to the high-k dielectric layer.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: September 10, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yao-Wen Chang, Gung-Pei Chang, Ching-Sheng Chu, Chern-Yow Hsu
  • Publication number: 20240298555
    Abstract: A semiconductor device that includes a semiconductor substrate, a bottom electrode over the semiconductor substrate, a switching layer over the bottom electrode, a metal ion source layer over the switching layer, and a top electrode over the metal ion source layer. The switching layer includes a compound having aluminum, oxygen, and nitrogen.
    Type: Application
    Filed: March 2, 2023
    Publication date: September 5, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Siang Ruan, Chia-Wen Zhong, Tzu-Yu Lin, Yao-Wen Chang, Ching Ju Yang, Chin I Wang
  • Publication number: 20240284808
    Abstract: A phase-change material (PCM) switching device includes: a base dielectric layer; a spreader element disposed in the base dielectric layer, wherein the spreader element extends in a first horizontal direction and comprises: a central portion extending in the first horizontal direction and having a first width in a second horizontal direction perpendicular to the first horizontal direction; a first end portion at a first end of the central portion and having a second width in the second horizontal direction; and a second end portion at a second end of the central portion and having a third width in the second horizontal direction, and wherein at least one of the second width and the third width is larger than the first width; a heater element disposed over the spreader element; a thermal barrier element disposed on the heater element; and a PCM layer disposed on the thermal barrier element.
    Type: Application
    Filed: February 20, 2023
    Publication date: August 22, 2024
    Inventors: Huan-Chieh Chen, Yao-Wen Chang
  • Publication number: 20240268120
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first substrate, a first circuit layer, a memory array structure, a bonding layer, a second circuit layer, and a second substrate. The first circuit layer is disposed on the first substrate. The memory array structure is disposed on the first circuit layer. The bonding layer is disposed on the memory array structure. The second circuit layer is disposed on the bonding layer. The second substrate is disposed on the second circuit layer.
    Type: Application
    Filed: February 8, 2023
    Publication date: August 8, 2024
    Inventors: Yung-Hsiang CHEN, Tao-Cheng LU, Yao-Wen CHANG
  • Publication number: 20240265186
    Abstract: A method for routing of redistribution layers in IC package is proposed, which is executed by a computer, the method comprising using the computer to perform the following: providing design rules, a set of I/O pads and bump pads and a pre-assignment netlist; performing a global routing which generates the guides for any non-acute angle RDL routing; and performing a detailed routing which adjusts the access point for shorter wirelength and finishes the routing. After the access points are located, the nets tile by tile are routed.
    Type: Application
    Filed: February 2, 2023
    Publication date: August 8, 2024
    Inventors: Min-Hsuan Chung, Je-Wei Chuang, Yao-Wen Chang, Yu-Tsang Hsieh
  • Publication number: 20240256012
    Abstract: An immersion cooling tank includes a tank body and a liquid flow tube. The tank body holds a coolant and an electronic device. The tank body defines an inlet and an outlet. The inlet and the outlet are respectively located at opposite ends of the electronic device for inputting and outputting the coolant. The coolant flows through the electronic device. The liquid flow tube includes at least one adjuster. The liquid flow tube is located inside the tank body and coupled to at least one of the inlet or the outlet. The at least one adjuster faces the electronic device for controlling an amount of the coolant flowing in or out of the tank body.
    Type: Application
    Filed: April 11, 2024
    Publication date: August 1, 2024
    Inventors: TZE-CHERN MAO, Yen-Chun Fu, Chih-Hung Chang, Yao-Ting Chang, Li-Wen Chang, Chao-Ke Wei
  • Publication number: 20240243180
    Abstract: A semiconductor device includes a substrate, a gate structure, a first doped region and a second doped region. The substrate has a plurality of recesses therein. A gate structure covers the plurality of recesses and a surface of the substrate between the plurality of recesses. The gate structure includes a gate dielectric layer and a gate conductive layer. The gate dielectric layer covers bottom surfaces and sidewalls of the plurality of recesses and the surface of the substrate between the plurality of recesses. The gate conductive layer is formed on the gate dielectric layer, fills in the plurality of recesses and covers the surface of the substrate between the plurality of recesses. The first doped region and the second doped region are located at two sides of the gate structure.
    Type: Application
    Filed: January 12, 2023
    Publication date: July 18, 2024
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: I-Chen Yang, Chun Liang Lu, Yung-Hsiang Chen, Yao-Wen Chang
  • Patent number: 12002522
    Abstract: A memory device and an operation method thereof are provided. The operation method includes: in a programming operation, programming a plurality of threshold voltages of a plurality of switches on a plurality of string select lines and a plurality of ground select lines as a first reference threshold voltage, and programming a plurality of threshold voltages of a plurality of dummy memory cells on a plurality of dummy word lines as being gradually increased along a first direction or a second direction, and the threshold voltages of the dummy memory cells being higher than the first reference threshold voltage; wherein the first direction being from the string select lines to a plurality of word lines and the second direction being from the ground select lines to the word lines.
    Type: Grant
    Filed: May 13, 2022
    Date of Patent: June 4, 2024
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Tao-Yuan Lin, I-Chen Yang, Yao-Wen Chang
  • Publication number: 20240151900
    Abstract: A method for manufacturing a semiconductor device includes: forming a first waveguide structure and a second waveguide structure on a substrate in which the first waveguide structure and the second waveguide structure is spaced apart from each other by a recess; conformally forming an un-doped dielectric layer to cover the first and second waveguide structures and to form a gap between two corresponding portions of the un-doped dielectric layer laterally covering the first waveguide structure and the second waveguide structure, respectively; and forming a doped filling layer to fill the gap.
    Type: Application
    Filed: February 22, 2023
    Publication date: May 9, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wei-Li LO, Huan-Chieh CHEN, Yao-Wen CHANG, Chih-Ming CHEN
  • Publication number: 20240142629
    Abstract: A shielding structure may be applied on an electronic device. The electronic device includes a camera and a TOF sensor having a transmitter and a receiver. The shielding structure includes a base, a shutter movably connected with the base, and a barrier movably connected with the base. At least a part of the barrier is disposed between the transmitter and the receiver, and the barrier may block a signal transmitted by the transmitter. An elastic member is fixed on the base. When the shutter is moved to abut the barrier, the barrier is pushed to press the elastic member, wherein the elastic member is deformed allowing at least a portion of the shutter disposing and abutting on the barrier, and the camera and the TOF sensor may be covered by the shutter at the same time.
    Type: Application
    Filed: November 1, 2023
    Publication date: May 2, 2024
    Inventor: YAO-WEN CHANG
  • Patent number: 11973050
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes an interconnect structure overlying a semiconductor substrate and comprising a conductive wire. A passivation structure overlies the interconnect structure. An upper conductive structure overlies the passivation structure and comprises a first conductive layer, a dielectric layer, and a second conductive layer. The first conductive layer is disposed between the dielectric layer and the passivation structure. The second conductive layer extends along a top surface of the dielectric layer and penetrates through the first conductive layer and the passivation structure to the conductive wire.
    Type: Grant
    Filed: June 2, 2021
    Date of Patent: April 30, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzu-Yu Lin, Yao-Wen Chang, Chia-Wen Zhong, Yen-Liang Lin
  • Publication number: 20240071813
    Abstract: A dielectric structure is formed over a layer than contains a conductive component. An opening is formed in the dielectric structure. The opening exposes an upper surface of the conductive component. A first deposition process is performed that deposits a first conductive layer over the dielectric structure and partially in the opening. A treatment process is performed on a first portion of the first conductive layer formed over the dielectric structure. The treatment process introduces a non-metal material to the first portion of the first conductive layer. After the treatment process has been performed, a second deposition process is performed that at least partially fills the opening with a second conductive layer without trapping a gap therein.
    Type: Application
    Filed: August 25, 2022
    Publication date: February 29, 2024
    Inventors: Tzu-Yu Lin, Yao-Wen Chang
  • Publication number: 20240038265
    Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a lower electrode disposed within a dielectric structure over a substrate. A ferroelectric data storage structure is disposed over the lower electrode and an upper electrode is disposed over the ferroelectric data storage structure. One or more stressed sidewall spacers are arranged on opposing sides of the upper electrode. The ferroelectric data storage structure has an orthorhombic phase concentration that varies from directly below the one or more stressed sidewall spacers to laterally outside of the one or more stressed sidewall spacers.
    Type: Application
    Filed: January 5, 2023
    Publication date: February 1, 2024
    Inventors: Tzu-Yu Lin, Yao-Wen Chang
  • Publication number: 20240021561
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes an interconnect structure overlying a semiconductor substrate and comprising a conductive wire. A passivation structure overlies the interconnect structure. An upper conductive structure overlies the passivation structure and comprises a first conductive layer, a dielectric layer, and a second conductive layer. The first conductive layer is disposed between the dielectric layer and the passivation structure. The second conductive layer extends along a top surface of the dielectric layer and penetrates through the first conductive layer and the passivation structure to the conductive wire.
    Type: Application
    Filed: August 9, 2023
    Publication date: January 18, 2024
    Inventors: Tzu-Yu Lin, Yao-Wen Chang, Chia-Wen Zhong, Yen-Liang Lin
  • Publication number: 20230420493
    Abstract: A metal-insulator-metal (MIM) capacitor and methods of forming the same are described. In some embodiments, the method includes forming an opening having a first depth in one or more dielectric layers, depositing a layer in the opening and on the one or more dielectric layers, performing an anisotropic etch process to remove portions of the layer formed on horizontal surfaces, extending the opening to a second depth in the one or more dielectric layers, removing the layer, extending the opening to a third depth in the one or more dielectric layers, and forming a MIM capacitor in the opening.
    Type: Application
    Filed: June 27, 2022
    Publication date: December 28, 2023
    Inventors: Hsing-Lien LIN, Hai-Dang TRINH, Yao-Wen CHANG, Jui-Lin CHU, Cheng-Te LEE