Patents by Inventor Yao-Wen Chang

Yao-Wen Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230276633
    Abstract: The present disclosure describes a semiconductor device having a ferroelectric memory with improved retention after cycling (RAC) memory window (MW) performance. The semiconductor device includes an interconnect structure on a substrate, a first electrode on the interconnect structure, a ferroelectric layer on the first electrode, and a second electrode on the ferroelectric layer. The first electrode includes a metal nitride conductive material having a nitrogen concentration greater than a metal concentration. The ferroelectric layer includes a ferroelectric material. The second electrode includes the metal nitride conductive material.
    Type: Application
    Filed: July 25, 2022
    Publication date: August 31, 2023
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tzu-Yu LIN, Yao-Wen CHANG
  • Publication number: 20230274056
    Abstract: A method for a parallelism-aware wavelength-routed optical networks-on-chip design is proposed, which is executed by a computer, the method comprising using the computer to perform the following: providing a WRONoC netlist, design specs and design rules; performing a network construction such that potential positions of each core of a plurality of cores, a plurality of waveguides and a plurality of microring resonators (MRRs) are determined to create a topology; performing a message routing to minimize MRR type usage of the MRRs in the topology; and performing a MRR radius selection to select a radius from MRR-radius options for each MRR type in said topology based on a simulated annealing.
    Type: Application
    Filed: February 28, 2022
    Publication date: August 31, 2023
    Inventors: Kuan-Cheng Chen, Yan-Lin Chen, Yu-Sheng Lu, Yao-Wen Chang, Yu-Tsang Hsieh
  • Publication number: 20230270024
    Abstract: The present disclosure is directed towards an integrated chip including a first memory cell overlying a substrate. The first memory cell comprises a first data storage layer. A second memory cell is adjacent to the first memory cell. A dielectric layer is disposed laterally between the first memory cell and the second memory cell. An air gap is disposed within the dielectric layer. The air gap is spaced laterally between the first memory cell and the second memory cell.
    Type: Application
    Filed: February 22, 2022
    Publication date: August 24, 2023
    Inventors: Ching Ju Yang, Huan-Chieh Chen, Yao-Wen Chang
  • Publication number: 20230268016
    Abstract: A memory device and an operation method thereof are provided. The operation method includes: when a read operation or a write-verify operation is completed, during a word line voltage lowering phase, synchronously applying a plurality of different gradually lowering signal line reference voltages to a plurality of ground select lines and a plurality of string select lines, wherein values of the different gradually lowering signal line reference voltages are corresponding to a plurality of signal line positions of the ground select lines and the string select lines.
    Type: Application
    Filed: February 24, 2022
    Publication date: August 24, 2023
    Inventors: Guan-Wei WU, Yao-Wen CHANG, I-Chen YANG
  • Patent number: 11721794
    Abstract: A method for manufacturing reflective structure is provided. The method includes the operations as follows. A metallization structure is received. A plurality of conductive pads are formed over the metallization structure. A plurality of dielectric stacks are formed over the conductive pads, respectively, wherein the thicknesses of the dielectric stacks are different. The dielectric stacks are isolated by forming a plurality of trenches over a plurality of intervals between each two adjacent dielectric stacks.
    Type: Grant
    Filed: February 18, 2022
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chia-Hua Lin, Yao-Wen Chang, Chii-Ming Wu, Cheng-Yuan Tsai, Eugene I-Chun Chen, Tzu-Chung Tsai
  • Publication number: 20230225125
    Abstract: A three-dimensional memory structure and a manufacturing method for the same are provided. The three-dimensional memory structure includes a channel layer, gate electrode layers and charge trapping layers. The charge trapping layers are between a channel sidewall surface of the channel layer and electrode sidewall surfaces of the gate electrode layers. The charge trapping layers are arranged in a discontinuous manner along a direction.
    Type: Application
    Filed: January 13, 2022
    Publication date: July 13, 2023
    Inventors: I-Chen YANG, Yao-Wen CHANG, Guan-Wei WU
  • Publication number: 20230198986
    Abstract: During operation, a computer system may receive, from an electronic device, a login request, where the login request includes or specifies an authentication realm in a network. Then, the computer system may compute whether the authentication realm at least partially matches a predefined authentication realm in the network, where the predefined authentication realm in the network includes at least one wildcard element, and where the partial match is for elements in the predefined authentication realm other than the at least one wildcard element. When there is a partial match, the computer system may provide, to a second computer system, an authentication request based at least in part on the login request. Next, the computer system may receive, from the second computer system, an authentication response. When the authentication response indicates successful authentication, the computer system may provide, to the electronic device, a login response.
    Type: Application
    Filed: December 13, 2022
    Publication date: June 22, 2023
    Applicant: ARRIS Enterprises LLC
    Inventors: Liangyi Huang, Ya-Ling Yang, Yao Wen Chang, Pin Hsiao
  • Publication number: 20230200254
    Abstract: A semiconductor structure includes an Nth metal layer, a diffusion barrier layer over the Nth metal layer, a first deposition of bottom electrode material over the diffusion barrier layer, a second deposition of bottom electrode material over the first deposition of bottom electrode material, a magnetic tunneling junction (MTJ) layer over the second deposition of bottom electrode material, a top electrode over the MTJ layer; and an (N+1)th metal layer over the top electrode; wherein the diffusion barrier layer and the first deposition of bottom electrode material are laterally in contact with a dielectric layer, the first deposition of bottom electrode material spacing the diffusion barrier layer and the second deposition of bottom electrode material apart, and N is an integer greater than or equal to 1. An associated electrode structure and method are also disclosed.
    Type: Application
    Filed: February 13, 2023
    Publication date: June 22, 2023
    Inventors: CHUNG-YEN CHOU, FU-TING SUNG, YAO-WEN CHANG, SHIH-CHANG LIU
  • Patent number: 11682692
    Abstract: In some embodiments, the present disclosure relates to a display device that includes a reflector electrode coupled to an interconnect structure. An isolation structure is disposed over the reflector electrode, and a transparent electrode is disposed over the isolation structure. Further, an optical emitter structure is disposed over the transparent electrode. A via structure extends from a top surface of the isolation structure to the reflector electrode and comprises an outer portion that directly overlies the top surface of the isolation structure. A hard mask layer is arranged directly between the top surface of the isolation structure and the outer portion of the via structure.
    Type: Grant
    Filed: May 11, 2020
    Date of Patent: June 20, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Hua Lin, Hsun-Chung Kuang, Yu-Hsing Chang, Yao-Wen Chang
  • Publication number: 20230169196
    Abstract: During operation, a computer system may receive, from an electronic device, an access request to access a shared network in a multi-tenant system, where the electronic device associated with a tenant in the multi-tenant system. Then, the computer system may identify a second computer system, which may be associated with an MSP of the shared network and that provides authentication and/or authorization to the shared network for users associated with the tenant. Moreover, the computer system may provide, to the second computer system, an authorization request for the electronic device. Next, the computer system may receive, from the second computer system, an authorization response, where the authorization response approves access by the electronic device to the shared network. Furthermore, the computer system may provide, to the electronic device, an access response, where the access response includes information specifying access privileges of the electronic device in the shared network.
    Type: Application
    Filed: November 22, 2022
    Publication date: June 1, 2023
    Applicant: ARRIS Enterprises LLC
    Inventors: Liangyi Huang, Yao Wen Chang
  • Publication number: 20230134560
    Abstract: The present disclosure relates an integrated chip structure. The integrated chip structure includes a bottom electrode disposed within a dielectric structure over a substrate. A top electrode is disposed within the dielectric structure over the bottom electrode. A switching layer and an ion source layer are between the bottom electrode and the top electrode. A barrier structure is between the bottom electrode and the top electrode. The barrier structure includes a metal nitride configured to mitigate a thermal diffusion of metal during a high temperature fabrication process.
    Type: Application
    Filed: March 14, 2022
    Publication date: May 4, 2023
    Inventors: Chia-Wen Zhong, Yen-Liang Lin, Yao-Wen Chang
  • Publication number: 20230062974
    Abstract: In some embodiments, the present disclosure relates to a process tool that includes a chamber housing defining a processing chamber. Within the processing chamber is a wafer chuck configured to hold a substrate. Further, a bell jar structure is arranged over the wafer chuck such that an opening of the bell jar structure faces the wafer chuck. A plasma coil is arranged over the bell jar structure. An oxygen source coupled to the processing chamber and configured to input oxygen gas into the processing chamber.
    Type: Application
    Filed: August 27, 2021
    Publication date: March 2, 2023
    Inventors: Yen-Liang Lin, Chia-Wen Zhong, Yao-Wen Chang, Min-Chang Ching, Kuo Liang Lu, Cheng-Yuan Tsai, Ru-Liang Lee
  • Patent number: 11581484
    Abstract: A semiconductor structure includes an Nth metal layer, a diffusion barrier layer over the Nth metal layer, a first deposition of bottom electrode material over the diffusion barrier layer, a second deposition of bottom electrode material over the first deposition of bottom electrode material, a magnetic tunneling junction (MTJ) layer over the second deposition of bottom electrode material, a top electrode over the MTJ layer; and an (N+1)th metal layer over the top electrode; wherein the diffusion barrier layer and the first deposition of bottom electrode material are laterally in contact with a dielectric layer, the first deposition of bottom electrode material spacing the diffusion barrier layer and the second deposition of bottom electrode material apart, and N is an integer greater than or equal to 1. An associated electrode structure and method are also disclosed.
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: February 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chung-Yen Chou, Fu-Ting Sung, Yao-Wen Chang, Shih-Chang Liu
  • Publication number: 20220405458
    Abstract: A method, a system, and non-transitory computer readable medium for power and ground (P/G) routing for an integrated circuit (IC) design are provided. The method includes generating input features for a machine-learning (ML) model based on IR drop and routing congestion analysis for a P/G network for the IC design, and modifying a set of P/G vias or a set of P/G wires in the P/G network according to modifications identified by the ML model. The ML model comprises a feature extractor pre-trained using a plurality of images of P/G vias and P/G wires.
    Type: Application
    Filed: June 15, 2022
    Publication date: December 22, 2022
    Inventors: Ping-Wei HUANG, Hsiang-Wen CHANG, Yao-Wen CHANG
  • Patent number: 11532511
    Abstract: A method for forming a semiconductor structure includes following operations. A first substrate including a first side, a second side opposite to the first side, and a metallic pad disposed over the first side is received. A dielectric structure including a first trench directly above the metallic pad is formed. A second trench is formed in the dielectric structure and a portion of the first substrate. A sacrificial layer is formed to fill the first trench and the second trench. A third trench is formed directly above the metallic pad. A barrier ring and a bonding structure are formed in the third trench. A bonding layer is disposed to bond the first substrate to a second substrate. A portion of the second side of the first substrate is removed to expose the sacrificial layer. The sacrificial layer is removed by an etchant.
    Type: Grant
    Filed: September 10, 2020
    Date of Patent: December 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Gung-Pei Chang, Yao-Wen Chang, Hai-Dang Trinh
  • Patent number: 11527713
    Abstract: The present disclosure, in some embodiments, relates to a memory device. The memory device includes a bottom electrode disposed over a lower interconnect within a lower inter-level dielectric (ILD) layer over a substrate. A data storage structure is over the bottom electrode. A first top electrode layer is disposed over the data storage structure, and a second top electrode layer is on the first top electrode layer. The second top electrode layer is less susceptible to oxidation than the first top electrode layer. A top electrode via is over and electrically coupled to the second top electrode layer.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: December 13, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bi-Shen Lee, Hai-Dang Trinh, Hsun-Chung Kuang, Tzu-Chung Tsai, Yao-Wen Chang
  • Publication number: 20220367646
    Abstract: The present disclosure provides a method for forming a semiconductor structure. The method includes the following operations. A metal layer is formed. An adhesion-enhancing layer is formed over the metal layer. A dielectric stack is formed over the adhesion-enhancing layer. A trench is formed in the dielectric stack. A barrier layer is formed conforming to the sidewall of the trench. A high-k dielectric layer is formed conforming to the barrier layer. A sacrificial layer is formed conforming to the high-k dielectric layer.
    Type: Application
    Filed: July 29, 2022
    Publication date: November 17, 2022
    Inventors: YAO-WEN CHANG, GUNG-PEI CHANG, CHING-SHENG CHU, CHERN-YOW HSU
  • Publication number: 20220359609
    Abstract: In some embodiments, the present disclosure relates to a display device that includes a reflector electrode coupled to an interconnect structure. An isolation structure is disposed over the reflector electrode, and a transparent electrode is disposed over the isolation structure. Further, an optical emitter structure is disposed over the transparent electrode. A via structure extends from a top surface of the isolation structure to the reflector electrode and comprises an outer portion that directly overlies the top surface of the isolation structure. A hard mask layer is arranged directly between the top surface of the isolation structure and the outer portion of the via structure.
    Type: Application
    Filed: July 26, 2022
    Publication date: November 10, 2022
    Inventors: Chia-Hua Lin, Hsun-Chung Kuang, Yu-Hsing Chang, Yao-Wen Chang
  • Publication number: 20220359823
    Abstract: The present disclosure, in some embodiments, relates to a method of forming a memory device. The method includes forming a data storage layer on a bottom electrode layer over a substrate, forming a first top electrode layer over the data storage layer, and forming a second top electrode layer over the first top electrode layer. The first top electrode layer has a smaller corrosion potential than the second top electrode layer. A first patterning process is performed on the first top electrode layer and the second top electrode layer to define a multi-layer top electrode. A second patterning process is performed on the data storage layer and the bottom electrode layer to define a data storage structure and a bottom electrode.
    Type: Application
    Filed: July 20, 2022
    Publication date: November 10, 2022
    Inventors: Bi-Shen Lee, Hai-Dang Trinh, Hsun-Chung Kuang, Tzu-Chung Tsai, Yao-Wen Chang
  • Patent number: 11476337
    Abstract: The present disclosure provides a method for forming a semiconductor structure. The method includes the following operations. A metal layer is formed. An adhesion-enhancing layer is formed over the metal layer by a silicide operation. A dielectric stack is formed over the adhesion-enhancing layer. A trench is formed in the dielectric stack by removing a portion of dielectric stack aligning with the metal layer. A barrier layer is formed conforming to the sidewall of the trench. A high-k dielectric layer is formed conforming to the barrier layer. A contact is formed in the trench and be connected to the metal layer.
    Type: Grant
    Filed: September 15, 2020
    Date of Patent: October 18, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yao-Wen Chang, Gung-Pei Chang, Ching-Sheng Chu, Chern-Yow Hsu