Abstract: An object of the present invention is to provide an exhaust pipe in which a peeling of a constituent member does not occur and reliability thereof is excellent, and an exhaust pipe allowing exhaust gases to flow through the exhaust pipe of the present invention includes a heat-releasing layer containing a crystalline inorganic material and an amorphous inorganic material and having infrared emissivity higher than infrared emissivity of a base, wherein irregularities are formed on a surface of the base on which the heat-releasing layer is to be formed.

Abstract: In an X-ray tube, a rotary anode formed into a hollow disk-like shape is fixedly supported by a rotating body formed into a hollow cylindrical shape. A fixed shaft has fixed ends, columnar bearing portions and a disk part, and a flow path of a cooling medium formed along a central axis thereof. The bearing portions are inserted into the rotating body with a first gap between the columnar bearing portion and the rotating body, so that the rotating body is rotatably supported. The disk part is arranged in the rotary anode with a second gap between the disk part and the rotary anode. The first and second gaps are filled with a lubricant, bearing grooves are formed in the bearing portion, thereby forming dynamic pressure bearings, and a center of gravity of the rotary anode is arranged between the first and second dynamic pressure bearings.

Abstract: In a rotary anode X-ray tube, a disc portion is fitted into a rotary anode with a first gap therebetween and a fixed shaft is fitted into a rotary shaft to support the anode with a second gap therebetween. The disc portion and the fixed shaft are formed integral with each other to have a hollow portion therein. A cooling liquid is allowed to flow through the hollow portion. A liquid metal is filled in the first and second gaps. Dynamic pressure type bearings is formed in the second gap. A passage is formed to directly communicate the first gap to the second gap, whereby the liquid metal being directly supplied from the second gap to the first gap. Thus, the liquid metal can be fed rapidly and surely into the gap between the anode target and a cooling vessel.

Abstract: The inorganic fiber article according to the present invention is an inorganic fiber article comprising an inorganic coating layer having foams, the inorganic coating layer formed on at least a portion of the surface of an inorganic fiber molded body.

Abstract: A rotating anode X-ray tube includes a fixed body having a radial sliding bearing surface and a channel therein through which a coolant flows, a rotor including a discoid large-diameter portion, which has a recess fitted with one end portion of the fixed body with a clearance therebetween and constitutes an anode target, and a small-diameter portion, which has on an inner surface thereof a radial sliding bearing surface which faces the aforesaid radial sliding bearing surface with a clearance, and is united with the large-diameter portion at one end portion thereof, a lubricant filling the clearances, a cathode arranged opposite to the anode target, and a vacuum envelope which contains the fixed body, the rotor, the lubricant and the cathode, and fixes the fixed body at another end portion of the fixed body situated opposite the one end portion of the fixed body fitted in the recess.

Abstract: In an X-ray tube, a rotary anode formed into a hollow disk-like shape is fixedly supported by a rotating body formed into a hollow cylindrical shape. A fixed shaft has fixed ends, columnar bearing portions and a disk part, and a flow path of a cooling medium formed along a central axis thereof. The bearing portions are inserted into the rotating body with a first gap between the columnar bearing portion and the rotating body, so that the rotating body is rotatably supported. The disk part is arranged in the rotary anode with a second gap between the disk part and the rotary anode. The first and second gaps are filled with a lubricant, bearing grooves are formed in the bearing portion, thereby forming dynamic pressure bearings, and a center of gravity of the rotary anode is arranged between the first and second dynamic pressure bearings.

Abstract: A rotating anode X-ray tube includes a fixed body having a radial sliding bearing surface and a channel therein through which a coolant flows, a rotor including a discoid large-diameter portion, which has a recess fitted with one end portion of the fixed body with a clearance therebetween and constitutes an anode target, and a small-diameter portion, which has on an inner surface thereof a radial sliding bearing surface which faces the aforesaid radial sliding bearing surface with a clearance, and is united with the large-diameter portion at one end portion thereof, a lubricant filling the clearances, a cathode arranged opposite to the anode target, and a vacuum envelope which contains the fixed body, the rotor, the lubricant and the cathode, and fixes the fixed body at another end portion of the fixed body situated opposite the one end portion of the fixed body fitted in the recess.

Abstract: In a rotary anode X-ray tube, a disc portion is fitted into a rotary anode with a first gap therebetween and a fixed shaft is fitted into a rotary shaft to support the anode with a second gap therebetween. The disc portion and the fixed shaft are formed integral with each other to have a hollow portion therein. A cooling liquid is allowed to flow through the hollow portion. A liquid metal is filled in the first and second gaps. Dynamic pressure type bearings is formed in the second gap. A passage is formed to directly communicate the first gap to the second gap, whereby the liquid metal being directly supplied from the second gap to the first gap. Thus, the liquid metal can be fed rapidly and surely into the gap between the anode target and a cooling vessel.

Abstract: A structure of the present invention is the structure which is formed of a base made of a metal and an inorganic material surface layer made of crystalline and amorphous inorganic materials, wherein thermal conductivity of the inorganic material surface layer is lower than the thermal conductivity of the base, infrared emissivity of the inorganic material surface layer is higher than the infrared emissivity of the base, and the base is an annular body.

Abstract: The inorganic fiber article according to the present invention is an inorganic fiber article comprising an inorganic coating layer having foams, the inorganic coating layer formed on at least a portion of the surface of an inorganic fiber molded body.

Abstract: A ceramic board is provided which, when used as a heater, heats a silicon wafer uniformly throughout and, hence, does not damage the wafer and, when used as an electrostatic chuck, provides a sufficient chucking force. A ceramic board is provided for semiconductor manufacture apparatuses comprising a ceramic substrate and a semiconductor wafer mounted thereon directly or supported indirectly at a fixed distance from its surface, wherein the surface of said ceramic substrate, where said semiconductor wafer is to be mounted or supported, is controlled to a flatness of 1 to 50 ?m over a measurement range of [(diametric end-to-end length)?10 mm].

Abstract: A ceramic substrate for semiconductor manufacture and/or inspection which is conducive to decrease in ?-rays radiated to prevent electrical errors, and to decrease an electrostatic chucking force such as heater or wafer prober, generation of particles, and circuit defects. The ceramic substrate is configured such that the level of ?-rays radiated from the surface of the ceramic substrate is not higher than 0.250 c/cm2.hr.

Abstract: A semiconductor-producing/examining device that can maintain a preferable connection state for a predetermined period of time and that can easily remove a ceramic substrate from a supporting case. The semiconductor producing/examining device includes a ceramic substrate having a conductor layer formed on the surface thereof or inside thereof and a supporting case. An external terminal is connected to the conductor layer. A connection between the conductor layer and the external terminal is performed such that the external terminal is pressed on the conductor layer or the external terminal is pressed on another conductor layer connected to the conductor layer by using the elastic force and the like of an elastic body.

Abstract: A ceramic plate for a semiconductor producing/examining device, including a ceramic substrate having a heating surface for receiving a semiconductor wafer thereon or facing the semiconductor wafer at a given distance apart therefrom. The ceramic substrate has a surface roughness Rmax of about 0.1 to 250 ?m according to JIS R 0601, and a difference between a surface roughness of the heating surface and a surface roughness of the bottom surface is 50% or less.

Abstract: An objective of the present invention is to provide an aluminum nitride sintered body making it possible to keep a volume resistivity of 108 ?·cm or more, and guarantee covering-up capability, a large radiant heat amount and measurement accuracy with a thermoviewer. A carbon-containing aluminum nitride sintered body of the present invention of the present invention comprising: carbon whose peak cannot be detected on its X-ray diffraction chart or whose peak is below its detection limit thereon; in a matrix made of aluminum nitride.

Abstract: The object of the present invention is to provide a ceramic substrate that can provide a substantially uniform temperature distribution to a surface of the ceramic substrate where a semiconductor wafer is treated. A ceramic substrate for a semiconductor-producing/examining device according to the present invention is a ceramic substrate having a conductor formed on a surface of the ceramic substrate or inside the ceramic substrate, wherein said substrate is containing oxygen and having a disc form, the diameter thereof exceeding 250 mm and a thickness thereof being 25 mm or less.

Abstract: An object of the present invention is to provide a hot plate which is superior in thermal conductivity, is superior in temperature-rising/dropping property, particularly in temperature-dropping property, and has high cooling thermal efficiency at the time of cooling. The hot plate of the present invention is a hot plate comprising: a ceramic substrate; and a resistance heating element formed on the surface of said ceramic substrate or inside said ceramic substrate, wherein said ceramic substrate has a leakage quantity of 10?7 Pa·m3/sec (He) or less by measurement with a helium leakage detector.

Abstract: A process for producing a ceramic heater includes forming a resistance heating element on a surface of a ceramic substrate. The resistance heating element is divided into plural sections. Resistivities of the plural sections are measured, respectively. Each of the plural sections is trimmed according to a comparison between the resistivities of the plural sections.

Abstract: An objective of the present invention is to provide an aluminum nitride sintered body making it possible to keep a volume resistivity of 108 ?·cm or more, and guarantee covering-up capability, a large radiant heat amount and measurement accuracy with a thermoviewer. A carbon-containing aluminum nitride sintered body of the present invention of the present invention comprising: carbon whose peak cannot be detected on its X-ray diffraction chart or whose peak is below its detection limit thereon; in a matrix made of aluminum nitride.

Abstract: A ceramic substrate for a semiconductor-producing/examining device, in which it is possible to promptly raise its temperature, a heating face thereof has a small temperature variation, and no semiconductor wafer and the like is damaged or distorted by thermal impact. The ceramic substrate for a semiconductor-producing/examining device has a resistance heating element formed on a surface thereof or inside thereof, wherein a projected portion for fitting a semiconductor wafer is formed along the periphery thereof and a large number of convex bodies, which make contact with the semiconductor wafer, are formed inside the projected portion.