Abstract: A semiconductor device includes a semiconductor substrate, a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, a first semiconductor region of the first conductivity type, a second semiconductor region of the second conductivity type, a gate electrode, a first electrode, and a gate electrode pad. A first lower region opposing the gate electrode pad in a depth direction has a carrier recombination rate that is lower than that of a second lower region opposing the first electrode in the depth direction. With such a configuration, when high electric potential is applied to a source electrode and a built-in PN diode is driven, the generation of crystal defects may be suppressed.

Abstract: A semiconductor device having a metal oxide semiconductor that includes a semiconductor substrate, a first semiconductor layer provided on a the semiconductor substrate, a plurality of second semiconductor layers selectively provided on the first semiconductor layer, a plurality of first semiconductor regions selectively provided in the second semiconductor layers at a surface thereof, a plurality of gate insulating films with a plurality of gate electrodes provided thereon, a plurality of first electrodes provided on the second semiconductor layers and the first semiconductor regions, and a second electrode provided on a back surface of the semiconductor substrate. The MOS structure configures an active region and a current detecting region of the semiconductor device. The semiconductor substrate and the first semiconductor layer are in both the active region and the current detecting region.

Abstract: A semiconductor device includes an active region, a gate ring region surrounding a periphery of the active region, and a source ring region surrounding a periphery of the gate ring region. The semiconductor device has a semiconductor substrate of a first conductivity type, a first semiconductor layer of the first conductivity type, a second semiconductor layer of a second conductivity type, and a second electrode. The semiconductor device has, in the active region, first semiconductor regions of the first conductivity type, a gate insulating film, first gate electrodes, an interlayer insulating film and a first first-electrode, and has, in the source ring region, a third semiconductor region and a second first-electrode. In the source ring region, a second semiconductor region of the first or second conductivity type is provided at a bottom of the third semiconductor region, directly below the second first-electrode in a depth direction of the semiconductor device.

Abstract: A semiconductor device has an active region through which a main current flows, a gate ring region surrounding a periphery of the active region, a source ring region surrounding a periphery of the gate ring region, and a termination region surrounding a periphery of the source ring region. The semiconductor device has a semiconductor substrate of a first conductivity type, a first semiconductor layer of the first conductivity type, a second semiconductor layer of a second conductivity type, and further, in the active region, first semiconductor regions of the first conductivity type, a gate insulating film, first gate electrodes, an interlayer insulating film, a first first-electrode, a first plating film, and a second electrode. The semiconductor device has, in the source ring region, a second first-electrode provided at a surface of the second semiconductor layer, and a second plating film provided on the second first-electrode.

Abstract: A silicon carbide semiconductor device has a rectangle-shaped active region in which a main current flows, and a termination region surrounding the active region in a plan view. The device includes a silicon carbide semiconductor substrate of a first conductivity type, a first semiconductor layer of the first conductivity type on the front surface of the substrate, a second semiconductor layer of a second conductivity type, at a surface at the first semiconductor layer, a first semiconductor region of the first conductivity type, selectively provided in the second semiconductor layer, the second semiconductor region disposed from a periphery of the active region to reach the termination region, and extending along each of directions of four sides of the active region. At the four sides of the active region, a cross-sectional structure of each layer and each region of the device is identical to one another.

Abstract: A semiconductor device includes a MOS structure part and first to third temperature sensing portions. The MOS structure part has a semiconductor substrate of a first conductivity type, a first semiconductor layer of the first conductivity type, a second semiconductor layer of a second conductivity type, first semiconductor regions of the first conductivity type, trenches, and gate electrodes provided in the trenches via a gate insulating film. The first to the third temperature sensing portions are provided in plural and each includes the semiconductor substrate, the first semiconductor layer, a temperature sensing trench, a first polysilicon layer of the first conductivity type and a second polysilicon layer of the second conductivity type provided in the temperature sensing trench via an insulating film, a cathode electrode connected to the first polysilicon layer, and an anode electrode connected to the second polysilicon layer.

Abstract: In an edge termination region, a second gate runner for a current sensor is formed between a first gate runner for a main semiconductor device and an active region. The second gate runner surrounds the periphery of the active region in a substantially rectangular shape having an opening. One end of the second gate runner is connected to all of the gate electrodes of the current sensor, and the other end is connected to the first gate runner at between a gate pad and an OC pad. This makes it possible to increase the gate capacitance of the current sensor as the current sensor switches ON and OFF when a pulse-shaped gate voltage is applied to the gate pad by an amount proportional to the surface area of the second gate runner.

Abstract: A semiconductor device having, in a main non-operating region that is free of unit cells of a main semiconductor element, a gate insulating film and a gate electrode of a current sensing portion extending on a front surface of a semiconductor substrate, to thereby form a planar gate structure. A gate capacitance of the planar gate structure is a gate capacitance of the current sensing portion. Directly beneath the planar gate structure, at the front surface of the semiconductor substrate, a structure is provided in which, from a front side of the semiconductor substrate, a p-type region, an n-type region, and a p-type region are stacked, whereby electric field is not applied to the extended portions of the gate insulating film.

Abstract: A semiconductor device includes a semiconductor substrate, a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, a third semiconductor layer of the second conductivity type, a first semiconductor region of the first conductivity type, a second semiconductor region of the first conductivity type, a gate insulating film, and a gate electrode. A threshold voltage of the semiconductor device is higher than forward voltage of a built-in PN diode constituted by the second semiconductor layer, the semiconductor substrate, and the first semiconductor layer. Thus, when high electric potential is applied to a source electrode and the built-in PN diode is driven, the generation of crystal effects may be suppressed.

Abstract: A semiconductor device has first second-conductivity-type high-concentration regions, second second-conductivity-type high-concentration regions, third second-conductivity-type high-concentration regions, and fourth second-conductivity-type high-concentration regions. The first connecting regions each connect a portion of each of the first second-conductivity-type high-concentration regions and a portion of each of the second second-conductivity-type high-concentration regions. The second connecting regions each connect a portion of each of the third second-conductivity-type high-concentration regions and a portion of each of the fourth second-conductivity-type high-concentration regions. A ratio of a mathematical area of the first connecting regions to a mathematical area of the second second-conductivity-type high-concentration regions is greater than a ratio of a mathematical area of the second connecting regions to a mathematical area of the fourth second-conductivity-type high-concentration regions.

Abstract: A region of a portion directly beneath an OC pad is a sensing effective region in which unit cells of a current sensing portion are disposed. A p-type low-dose region is provided on a front surface of a semiconductor substrate and surrounds a periphery of the sensing effective region. The p-type low-dose region is fixed at an electric potential of a source pad of a main semiconductor element. The p-type low-dose region is disposed to be separated from a p-type base region of the sensing effective region by an n?-type region between the p-type low-dose region and the sensing effective region. A total dose of impurities in the p-type low-dose region is lower than a total dose of impurities in a p-type region of a front side of a semiconductor substrate in a main effective region in which unit cells of the main semiconductor element are disposed.

Abstract: In a transistor region of an active region, trench-gate MOS gates for a vertical MOSFET are formed on the front surface side of a semiconductor substrate. In a non-effective/pad region of the active region, a gate pad is formed on the front surface of the semiconductor substrate with an interlayer insulating film interposed therebetween. An n-type region is formed spanning across the entire non-effective region in the surface layer of the front surface of the semiconductor substrate. The portion directly beneath the gate pad is only an n-type region constituted by an n+ starting substrate, an n? drift region, and the n-type region, with the interlayer insulating film sandwiched thereabove. No n+ source region is formed in a p-type base region extension which is the portion of a p-type base region that extends into the non-effective region.

Abstract: Unit cells of a current sensing portion are disposed in a sensing effective region of a main non-operating region. In a sensing non-operating region of the main non-operating region excluding the sensing effective region, an n?-type region that surrounds a periphery of the sensing effective region is disposed in a surface region of the front surface of the semiconductor substrate. In the main non-operating region, a p-type base region disposed in a surface region of the front surface of the semiconductor substrate opposes the sensing effective region across the n?-type region. The p-type base region is fixed at a source potential of the main semiconductor element 11. A field insulating film on the front surface of the semiconductor substrate is thicker at a portion that covers the n?-type region that in other portions.

Abstract: A region of a portion directly beneath an OC pad is a sensing effective region where unit cells of a current sensing portion are disposed. Directly beneath the OC pad, a region surrounding a periphery of the sensing effective region is a sensing non-operating region in which no unit cells of the current sensing portion are disposed. In the sensing non-operating region, a first p-type base region that floats is provided in a surface region of the front surface of the semiconductor substrate and is separated from a second p-type base region of the sensing effective region by an n?-type region that surrounds a periphery of the sensing effective region. The n?-type region has a surface area that is greater than that of the sensing effective region. A distance between the first and the second p-type base regions is at least 0.1 ?m and is as small as possible.

Abstract: A semiconductor device includes a plurality of semiconductor switching elements disposed on a single semiconductor substrate comprising a semiconductor having a bandgap that is wider than that of silicon; and a plurality of electrode pads that are disposed in a predetermined planar layout on a front surface of the semiconductor substrate, the plurality of electrode pads each being electrically connected to the plurality of semiconductor switching elements. A plurality of terminal pins to externally carry out voltage of the electrode pads is bonded through a plated film to all of the plurality of electrode pads by solder.

Abstract: In an effective region of an active region, main semiconductor elements that are vertical MOSFETs and a source pad of the main semiconductor elements are provided. In a non-operating region of the active region, a gate pad of the main semiconductor elements is provided on a front surface of a semiconductor substrate. Directly beneath the gate pad, in a surface region of the front surface of the semiconductor substrate, a p-type region is provided spanning the non-operating region of the active region overall. The p-type region of the non-operating region of the active region is electrically connected to the source pad and forms a parasitic diode by a pn junction with an n?-type drift region when the main semiconductor elements are OFF. The p-type region of the non-operating region of the active region has a rectangular planar shape with rounded or chamfered corner portions in a planar view.

Abstract: A semiconductor device includes an active region having: a first semiconductor layer of a first conductivity type provided on a semiconductor substrate, a second semiconductor layer of a second conductivity type, a first semiconductor region of the first conductivity type, a gate electrode embedded in a trench, an interlayer insulating film on the gate electrode, having an overhanging portion overhanging a part of the second semiconductor layer beyond the trench, a first electrode pad; and a gate electrode pad region having: the substrate, the first semiconductor layer, the second semiconductor layer, the first electrode pad, and a gate electrode pad. A distance from a contact area end, which is an end located furthest from the gate electrode pad in a contact area where the second semiconductor layer contacts the first electrode pad, to a second semiconductor layer end in a plan view is at least twice a width of the overhanging portion.

Abstract: A method of manufacturing a semiconductor device includes providing a silicon carbide (SiC) substrate, forming a SiC layer on a front surface of the SiC substrate, selectively forming a first region in the SiC layer at a surface thereof, forming a source region and a contact region in the first region, forming a gate insulating film on the SiC layer and on a portion of the first region between the SiC layer and the source region, forming a gate electrode on the gate insulating film above the portion of the first region, forming an interlayer insulating film covering the gate electrode, forming a source electrode electrically connected to the source region and the contact region, forming a drain electrode on a back surface of the SiC substrate, forming a barrier film on and covering the interlayer insulating film, and forming a metal electrode on the source electrode and the barrier film.

Abstract: A silicon carbide semiconductor device includes a semiconductor substrate of a first conductivity type; an active region in which a main current flows provided on the semiconductor substrate; a termination region disposed outside of the active region and in which a voltage withstanding structure is formed; and a damaged region disposed outside the termination region and in which crystallinity is impaired, the damaged region being exposed at a cut surface that is formed when singulation is performed.

Abstract: A semiconductor device, including a semiconductor substrate, a semiconductor layer disposed on a surface of the semiconductor substrate, a first semiconductor region disposed in the semiconductor layer at a surface thereof, a source region and a second semiconductor region disposed in the first semiconductor region at a surface thereof, a source electrode contacting the source region and the second semiconductor region, a gate insulating film disposed on the surface of the semiconductor layer and covering a portion of the first semiconductor region between the source region and the semiconductor layer, a gate electrode disposed on a surface of the gate insulating film, a drain electrode disposed on another surface of the semiconductor substrate, and a third semiconductor region, which has an impurity concentration higher than that of the first semiconductor region, formed in the semiconductor layer at the surface thereof and being electrically connected to the source electrode.