Patents by Inventor Yen-Hao Shih

Yen-Hao Shih has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20110121411
    Abstract: The invention provides a semiconductor cell comprising a gate, a dielectric layer, a channel layer, a source region, a drain region and an oxide region. The dielectric layer is adjacent to the gate. The channel layer is adjacent to the dielectric layer and is formed above a source region, a drain region, and an oxide region.
    Type: Application
    Filed: February 7, 2011
    Publication date: May 26, 2011
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Ming-Hsiu Lee, Yen-Hao Shih
  • Publication number: 20110089480
    Abstract: A memory having isolated dual memory cells is provided. A first isolation wall and a second isolation wall are separately disposed between a source and a drain on a substrate. An isolation bottom layer and a polysilicon layer are orderly disposed on the substrate between the first and the second isolation walls. A first charge storage structure and a first gate are orderly disposed on the substrate between the first isolation wall and the source. A second charge storage structure and a second gate are orderly disposed on the substrate between the second isolation wall and the drain. A word line disposed on the polysilicon layer, the first gate, the second gate, the first isolation wall and the second isolation wall is electrically connected to the first gate, the second gate and the polysilicon layer.
    Type: Application
    Filed: December 21, 2010
    Publication date: April 21, 2011
    Applicant: Macronix International Co., Ltd.
    Inventors: Erh-Kun Lai, Yen-Hao Shih, Ling-Wu Yang, Chun-Min Cheng
  • Publication number: 20110073937
    Abstract: A method for fabricating a charge trapping memory device includes providing a substrate; forming a first oxide layer on the substrate; forming a number of BD regions in the substrate; nitridizing the interface of the first oxide layer and the substrate via a process; forming a charge trapping layer on the first oxide layer; and forming a second oxide layer on the charge trapping layer.
    Type: Application
    Filed: December 7, 2010
    Publication date: March 31, 2011
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Yen-Hao Shih, Chi-Pin Lu, Jung-Yu Hsieh
  • Patent number: 7911856
    Abstract: A method of accessing memory cells is disclosed. A first signal is sent to at least one layer select transistor. The at least one layer select transistor is activated based on the first signal. Signals are communicated to or from one or more memory cells based on the activated at least layer select transistor.
    Type: Grant
    Filed: May 25, 2009
    Date of Patent: March 22, 2011
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Ming-Hsiu Lee, Yen-Hao Shih
  • Publication number: 20110049456
    Abstract: A memory device is described using a composite doped phase change material between a first electrode and a second electrode. A memory element of phase change material, such as a chalcogenide, is between the first and second electrodes and has an active region. The phase change material has a first dopant, such as silicon oxide, characterized by tending to segregate from the phase change material on grain boundaries in the active region, and has a second dopant, such as silicon, characterized by causing an increase in recrystallization temperature of, and/or suppressing void formation in, the phase change material in the active region.
    Type: Application
    Filed: September 3, 2009
    Publication date: March 3, 2011
    Applicants: Macronix International Co., Ltd., International Business Machines Corporation
    Inventors: HSIANG-LAN LUNG, CHIEH-FANG CHEN, YEN-HAO SHIH, HUAI-YU CHENG, ERH-KUN LAI, MING HSIU LEE, MATTHEW J. BREITWISCH, SIMONE RAO, CHUNG HON LAM
  • Patent number: 7879706
    Abstract: A memory having isolated dual memory cells is provided. A first isolation wall and a second isolation wall are separately disposed between a source and a drain on a substrate. An isolation bottom layer and a polysilicon layer are orderly disposed on the substrate between the first and the second isolation walls. A first charge storage structure and a first gate are orderly disposed on the substrate between the first isolation wall and the source. A second charge storage structure and a second gate are orderly disposed on the substrate between the second isolation wall and the drain. A word line disposed on the polysilicon layer, the first gate, the second gate, the first isolation wall and the second isolation wall is electrically connected to the first gate, the second gate and the polysilicon layer.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: February 1, 2011
    Assignee: Macronix International Co., Ltd.
    Inventors: Erh-Kun Lai, Yen-Hao Shih, Ling-Wu Yang, Chun-Min Cheng
  • Publication number: 20110012192
    Abstract: A vertical channel transistor structure is provided. The structure includes a substrate, a channel, a cap layer, a charge trapping layer, a source and a drain. The channel is formed in a fin-shaped structure protruding from the substrate. The cap layer is deposited on the fin-shaped structure. The cap layer and the fin-shaped structure have substantially the same width. The charge trapping layer is deposited on the cap layer and on two vertical surfaces of the fin-shaped structure. The gate is deposited on the charge trapping layer and on two vertical surfaces of the fin-shaped structure. The source and the drain are respectively positioned on two sides of the fin-shaped structure and opposite the gate.
    Type: Application
    Filed: September 28, 2010
    Publication date: January 20, 2011
    Applicant: Macronix International Co., Ltd.
    Inventors: Tzu-Hsuan Hsu, Yen-Hao Shih, Chia-Wei Wu
  • Patent number: 7863132
    Abstract: A method for fabricating a charge trapping memory device includes providing a substrate; forming a first oxide layer on the substrate; forming a number of BD regions in the substrate; nitridizing the interface of the first oxide layer and the substrate via a process; forming a charge trapping layer on the first oxide layer; and forming a second oxide layer on the charge trapping layer.
    Type: Grant
    Filed: June 20, 2006
    Date of Patent: January 4, 2011
    Assignee: Macronix International Co., Ltd.
    Inventors: Yen-Hao Shih, Chi-Pin Lu, Jung-Yu Hsieh
  • Publication number: 20100328996
    Abstract: A phase change memory device with a memory element including a basis phase change material, such as a chalcogenide, and one or more additives, where the additive or additives have a non-constant concentration profile along an inter-electrode current path through a memory element. The use of “non-constant” concentration profiles for additives enables doping the different zones with different materials and concentrations, according to the different crystallographic, thermal and electrical conditions, and different phase transition conditions.
    Type: Application
    Filed: March 23, 2010
    Publication date: December 30, 2010
    Applicants: Macronix International Co., Ltd., International Business Machines Corporation
    Inventors: YEN-HAO SHIH, Huai-Yu Cheng, Chieh-Fang Chen, Chao-I Wu, Ming-Hsiu Lee, Hsiang-Lan Lung, Matthew J. Breitwisch, Simone Raoux, Chung Hon Lam
  • Publication number: 20100328995
    Abstract: Phase change memory devices and methods for operating described herein are based on the discovery that, following an initial high current operation applied to a phase change memory cell to establish the high resistance reset state, the current-voltage (I-V) behavior of the memory cell under different bias voltages can be used to detect if the memory cell is a defect cell having poor data retention characteristics.
    Type: Application
    Filed: March 2, 2010
    Publication date: December 30, 2010
    Applicants: Macronix International Co., Ltd., International Business Machines Corporation
    Inventors: YEN-HAO SHIH, Ming-Hsiu Lee, Chao-I Wu, Hsiang-Lan Lung, Chung Hon Lam, Roger Cheek, Matthew J. Breitwisch, Bipin Rajendran
  • Publication number: 20100321987
    Abstract: A programmable resistance memory device with a margin cell detection and refresh resources. Margin cell detection and refresh can comprise reading a selected cell, measuring a time interval which correlates with resistance of the selected cell during said reading, and enabling a refresh process if the measured time falls within a pre-specified range. The refresh process includes determining a data value stored in the selected cell, using for example a destructive read process, and refreshing the data value in the selected cell. The time interval can be measured by detecting timing within the sensing interval of a transition of voltage or current on a bit line across a threshold.
    Type: Application
    Filed: June 22, 2009
    Publication date: December 23, 2010
    Applicant: Macronix International Co., Ltd.
    Inventors: Hsiang-Lan Lung, Yen-Hao Shih
  • Patent number: 7824991
    Abstract: A MOSFET fabrication process comprises nitridation of the dielectric silicon interface so that silicon-dangling bonds are connected with nitrogen atoms creating silicon—nitrogen bonds, which are stronger than silicon-hydrogen bonds. A tunnel dielectric is formed on the substrate. A nitride layer is then formed over the tunnel dielectric layer. The top of the nitride layer is then converted to an oxide and the interface between the substrate and the tunnel dielectric is nitrided simultaneously with conversion of the nitride layer to oxide.
    Type: Grant
    Filed: January 18, 2006
    Date of Patent: November 2, 2010
    Assignee: Macronix International Co., Ltd.
    Inventors: Yen-Hao Shih, Shih-Chin Lee
  • Publication number: 20100265773
    Abstract: A 3D memory device includes an array of semiconductor body pillars and bit line pillars, dielectric charge trapping structures, and a plurality of levels of word line structures arranged orthogonally to the array of semiconductor body pillars and bit line pillars. The semiconductor body pillars have corresponding bit line pillars on opposing first and second sides, providing source and drain terminals. The semiconductor body pillars have first and second channel surfaces on opposing third and fourth sides. Dielectric charge trapping structures overlie the first and second channel surfaces, providing data storage sites on two sides of each semiconductor body pillar in each level of the 3D array. The device can be operated as a 3D AND-decoded flash memory.
    Type: Application
    Filed: February 12, 2010
    Publication date: October 21, 2010
    Applicant: Macronix International Co., Ltd.
    Inventors: HSIANG-LAN LUNG, Yen-Hao Shih, Erh-Kun Lai, Ming Hsiu Lee, Hang-Ting Lue
  • Patent number: 7811890
    Abstract: A vertical channel transistor structure is provided. The structure includes a substrate, a channel, a cap layer, a charge trapping layer, a source and a drain. The channel is formed in a fin-shaped structure protruding from the substrate. The cap layer is deposited on the fin-shaped structure. The cap layer and the fin-shaped structure have substantially the same width. The charge trapping layer is deposited on the cap layer and on two vertical surfaces of the fin-shaped structure. The gate is deposited on the charge trapping layer and on two vertical surfaces of the fin-shaped structure. The source and the drain are respectively positioned on two sides of the fin-shaped structure and opposite the gate.
    Type: Grant
    Filed: October 11, 2006
    Date of Patent: October 12, 2010
    Assignee: Macronix International Co., Ltd.
    Inventors: Tzu-Hsuan Hsu, Yen-Hao Shih, Chia-Wei Wu
  • Patent number: 7795088
    Abstract: A method for manufacturing memory cells is provided. First, a substrate is provided, wherein a liner layer and a material layer have already been sequentially formed on the substrate. Thereafter, a patterned mask layer is formed on the substrate. Then, the patterned mask layer is trimmed. Subsequently, a portion of the material layer, a portion of the liner layer and a portion of the substrate are removed by using the patterned mask layer as a mask to define a plurality of fin-structures in the substrate. Afterward, the patterned mask layer is removed and a plurality of isolation structures among the fin structures is formed. The surface of the isolation structures is lower than that of the fin structures. Following that, charge trapping structures are formed on the substrate, covering the fin structures. Succeeding, a portion of the charge trapping structures is removed to expose the material layer. Then, the treatment process turns the material layer into a protection layer.
    Type: Grant
    Filed: May 25, 2007
    Date of Patent: September 14, 2010
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Tzu-Hsuan Hsu, Ming-Hsiang Hsueh, Yen-Hao Shih, Chia-Wei Wu
  • Patent number: 7785963
    Abstract: A memory device having a floating gate with a non-rectangular cross-section is disclosed. The non-rectangular cross-section may be an inverted T shape, a trapezoid shape, or a double inverted T shape. Methods are disclosed for producing a floating gate memory device having an improved coupling ratio due to an increased surface area of the floating gate. The memory device has a floating gate having a cross-sectional shape, such as an inverted T shape, such that a top contour is not a flat line segment.
    Type: Grant
    Filed: February 22, 2008
    Date of Patent: August 31, 2010
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Ming-Hsiang Hsueh, Yen-Hao Shih, Erh-Kun Lai
  • Patent number: 7778072
    Abstract: A manufacturing method of a charge-trapping memory device is provided. This method includes forming a stacked structure having at least a charge-trapping medium. An annealing process in a hydrogen gas is then performed on the stacked structure subsequent to the device fabrication process. The annealing process is conducted at a temperature of about 350° C. to 450° C. and with the concentration of the hydrogen gas greater than 0.5 mole percent.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: August 17, 2010
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Yen-Hao Shih, Jung-Yu Hsieh, Yi-Lin Yang, Chia-Hua Chang, Jenn-Gwo Hwu
  • Patent number: 7763935
    Abstract: A method of fabricating a non-volatile memory device at least comprises steps as follows. First, a substrate on which a bottom dielectric layer is formed is provided. Then, impurities are introduced through the bottom dielectric layer to the substrate, so as to form a plurality of spaced doped regions on the substrate. The structure is thermally annealed for pushing the spaced doped regions to diffuse outwardly. After annealing, a charge trapping layer is formed on the bottom dielectric layer, and a top dielectric layer is formed on the charge trapping layer. Finally, a gate structure (such as a polysilicon layer and a silicide) is formed on the top dielectric layer.
    Type: Grant
    Filed: June 23, 2005
    Date of Patent: July 27, 2010
    Assignee: Macronix International Co., Ltd.
    Inventors: Yen-Hao Shih, Shih-Chin Lee, Jung-Yu Hsieh, Erh-Kun Lai, Kuang-Yeu Hsieh
  • Publication number: 20100177553
    Abstract: Memory devices described herein are programmed and erased by physical segregation of an electrically insulating layer out of a memory material to establish a high resistance state, and by re-absorption of at least a portion of the electrically insulating layer into the memory material to establish a low resistance state. The physical mechanism of programming and erasing includes movement of structure vacancies to form voids, and/or segregation of doping material and bulk material, to create the electrically insulating layer consisting of voids and/or dielectric doping material along an inter-electrode current path between electrodes.
    Type: Application
    Filed: June 22, 2009
    Publication date: July 15, 2010
    Applicants: Macronix International Co., Ltd., International Business Machines Corporation
    Inventors: MING-HSIU LEE, CHIEH-FANG CHEN, YEN-HAO SHIH, YU ZHU
  • Patent number: 7754545
    Abstract: A semiconductor device and a method of fabricating the same are provided. First, a first oxide layer and a nitride layer are formed on a base having a first region and a second region. Next, the nitride layer is oxidized. A part of nitride in the nitride layer moves to the first oxide layer and the base. An upper portion of the nitride layer is converted to an upper oxide layer. Then, the upper oxide layer, the nitride layer and the first oxide layer in the second region are removed. Thereon, a second oxide layer is grown on the base in the second region. Nitride in the second region moves to the second oxide layer.
    Type: Grant
    Filed: December 3, 2007
    Date of Patent: July 13, 2010
    Assignee: Macronix International Co., Ltd.
    Inventors: Erh-Kun Lai, Yen-Hao Shih