Patents by Inventor Yen-Hao Shih

Yen-Hao Shih has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7754553
    Abstract: A charge trapping memory device with two separated non-conductive charge trapping inserts is disclosed. The charge trapping memory device has a silicon substrate with two junctions. A gate oxide (GOX) is formed on top of the silicon substrate and between the two junctions. A polysilicon gate is defined over the GOX. A layer of bottom oxide (BOX) is grown on top of the silicon substrate and a conformal layer of top oxide (TOX) is grown along the bottom and the sidewalls of the polysilicon gate. Two charge trapping inserts are located beside the GOX and between the BOX and the TOX. The polysilicon gate needs to be at least partially over each of the two charge trapping inserts. The charge trapping inserts are made from a non-conductive charge trapping material. A method for fabricating such a device is also described.
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: July 13, 2010
    Assignee: Macronix International Co., Ltd.
    Inventor: Yen-Hao Shih
  • Publication number: 20100165728
    Abstract: Memory devices are described herein along with method for operating the memory device. A memory cell as described herein includes a first electrode and a second electrode. The memory cell also comprises phase change material having first and second active regions arranged in series along an inter-electrode current path between the first and second electrode.
    Type: Application
    Filed: March 4, 2010
    Publication date: July 1, 2010
    Applicant: Macronix International Co., Ltd.
    Inventors: YEN-HAO SHIH, Chieh-Fang Chen, Hsiang-Lan Lung
  • Publication number: 20100117048
    Abstract: A memory device includes a driver comprising a pn-junction in the form of a multilayer stack including a first doped semiconductor region having a first conductivity type, and a second doped semiconductor region having a second conductivity type opposite the first conductivity type, the first and second doped semiconductors defining a pn-junction therebetween, in which the first doped semiconductor region is formed in a single-crystalline semiconductor, and the second doped semiconductor region includes a polycrystalline semiconductor. Also, a method for making a memory device includes forming a first doped semiconductor region of a first conductivity type in a single-crystal semiconductor, such as on a semiconductor wafer; and forming a second doped polycrystalline semiconductor region of a second conductivity type opposite the first conductivity type, defining a pn-junction between the first and second regions.
    Type: Application
    Filed: November 7, 2008
    Publication date: May 13, 2010
    Applicant: Macronix International Co., Ltd.
    Inventors: Hsiang-Lan Lung, Erh-Kun Lai, Yen-Hao Shih, Yi-Chou Chen, Shih-Hung Chen
  • Publication number: 20100117049
    Abstract: A memory device includes a driver comprising a pn-junction in the form of a multilayer stack including a first doped semiconductor region having a first conductivity type, and a second doped semiconductor plug having a second conductivity type opposite the first conductivity type, the first and second doped semiconductors defining a pn junction therebetween, in which the first doped semiconductor region is formed in a single-crystalline semiconductor, and the second doped semiconductor region includes a polycrystalline semiconductor. Also, a method for making a memory device includes forming a first doped semiconductor region of a first conductivity type in a single-crystal semiconductor, such as on a semiconductor wafer; and forming a second doped polycrystalline semiconductor region of a second conductivity type opposite the first conductivity type, defining a pn junction between the first and second regions.
    Type: Application
    Filed: November 7, 2008
    Publication date: May 13, 2010
    Applicant: Macronix International Co., Ltd.
    Inventors: HSIANG-LAN LUNG, Erh-Kun Lai, Yen-Hao Shih, Yi-Chou Chen, Shih-Hung Chen
  • Patent number: 7704865
    Abstract: Methods of forming charge-trapping dielectric layer structures in semiconductor memory devices which comprise: (a) providing a semiconductor substrate; (b) forming an oxide layer on at least a portion of the substrate; (c) forming two or more source/drain regions in the substrate below the oxide layer; (d) re-oxidizing the oxide layer; (e) forming a charge-trapping dielectric layer on the oxide layer; and (f) forming an insulating layer on the charge-trapping dielectric layer; as well as methods which comprise: (a) providing a semiconductor substrate; (b) forming an oxide layer on at least a portion of the substrate in a dry atmosphere; (c) forming two or more source/drain regions in the substrate below the oxide layer; (d) forming a charge-trapping dielectric layer on the oxide layer; (e) forming an insulating layer on the charge-trapping dielectric layer; and (f) annealing the insulating layer in an atmosphere having a hydrogen content of less than about 0.01% are described.
    Type: Grant
    Filed: August 23, 2005
    Date of Patent: April 27, 2010
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Yen-Hao Shih, Shih-Chin Lee, Jung-Yu Hsieh, Erh-Kun Lai, Kuang Yeu Hsieh
  • Publication number: 20100096689
    Abstract: In a non-volatile memory structure, the source/drain regions are surrounded by a nitrogen-doped region. As a result, an interface between the substrate and the charge trapping layer above the nitrogen-doped region is passivated by a plurality of nitrogen atoms. The nitrogen atoms can improve data retention, and performance of cycled non-volatile memory devices.
    Type: Application
    Filed: November 16, 2009
    Publication date: April 22, 2010
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventor: Yen-Hao Shih
  • Patent number: 7701750
    Abstract: Memory devices are described herein along with method for operating the memory device. A memory cell as described herein includes a first electrode and a second electrode. The memory cell also comprises phase change material having first and second active regions arranged in series along an inter-electrode current path between the first and second electrode.
    Type: Grant
    Filed: May 8, 2008
    Date of Patent: April 20, 2010
    Assignee: Macronix International Co., Ltd.
    Inventors: Yen-Hao Shih, Chieh Fang Chen, Hsiang-Lan Lung
  • Publication number: 20100084624
    Abstract: A method for manufacturing a memory device, and a resulting device, is described using silicon oxide doped chalcogenide material. A first electrode having a contact surface; a body of phase change memory material in a polycrystalline state including a portion in contact with the contact surface of the first electrode, and a second electrode in contact with the body of phase change material are formed. The process includes melting and cooling the phase change memory material one or more times within an active region in the body of phase change material without disturbing the polycrystalline state outside the active region. A mesh of silicon oxide in the active region with at least one domain of chalcogenide material results. Also, the grain size of the phase change material in the polycrystalline state outside the active region is small, resulting in a more uniform structure.
    Type: Application
    Filed: October 2, 2008
    Publication date: April 8, 2010
    Applicants: Macronix International Co., Ltd., International Business Machines Corporation
    Inventors: Hsiang-Lan Lung, Chieh Fang Chen, Yen-Hao Shih, Ming Hsiu Lee, Matthew J. Breitwisch, Chung Hon Lam, Frieder H. Baumann, Philip Flaitz, Simone Raoux
  • Patent number: 7638393
    Abstract: In a non-volatile memory structure, the source/drain regions are surrounded by a nitrogen-doped region. As a result, an interface between the substrate and the charge trapping layer above the nitrogen-doped region is passivated by a plurality of nitrogen atoms. The nitrogen atoms can improve data retention, and performance of cycled non-volatile memory devices.
    Type: Grant
    Filed: May 2, 2006
    Date of Patent: December 29, 2009
    Assignee: Macronix International Co., Ltd.
    Inventor: Yen-Hao Shih
  • Publication number: 20090279349
    Abstract: Memory devices are described herein along with method for operating the memory device. A memory cell as described herein includes a first electrode and a second electrode. The memory cell also comprises phase change material having first and second active regions arranged in series along an inter-electrode current path between the first and second electrode.
    Type: Application
    Filed: May 8, 2008
    Publication date: November 12, 2009
    Applicant: Macronix International Co., Ltd.
    Inventors: Yen-Hao Shih, Chieh Fang Chen, Hsiang-Lan Lung
  • Publication number: 20090231942
    Abstract: A method of accessing memory cells is disclosed. A first signal is sent to at least one layer select transistor. The at least one layer select transistor is activated based on the first signal. Signals are communicated to or from one or more memory cells based on the activated at least layer select transistor.
    Type: Application
    Filed: May 25, 2009
    Publication date: September 17, 2009
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Ming-Hsiu Lee, Yen-Hao Shih
  • Patent number: 7582526
    Abstract: A method for manufacturing a plurality of memory devices and a plurality of high voltage devices on a substrate are provided. The substrate has a memory region and a high voltage region. The method comprises steps of forming a first dielectric layer on the substrate and then performing a thermal process so as to enlarge the thickness of the first dielectric layer in the high voltage region. A buried diffusion region is formed in the substrate in the memory region and a charge trapping layer and a blocking dielectric layer are formed over the substrate in the memory region. A patterned conductive layer is formed over the substrate so as to form gates the memory region and the high voltage region respectively and then a source/drain region is formed adjacent to the gates in the high voltage region in the substrate.
    Type: Grant
    Filed: June 2, 2006
    Date of Patent: September 1, 2009
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Yen-Hao Shih, Erh-Kun Lai
  • Publication number: 20090215256
    Abstract: A memory device having a floating gate with a non-rectangular cross-section is disclosed. The non-rectangular cross-section may be an inverted T shape, a trapezoid shape, or a double inverted T shape. Methods are disclosed for producing a floating gate memory device having an improved coupling ratio due to an increased surface area of the floating gate. The memory device has a floating gate having a cross-sectional shape, such as an inverted T shape, such that a top contour is not a flat line segment.
    Type: Application
    Filed: February 22, 2008
    Publication date: August 27, 2009
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Ming-Hsiang HSUEH, Yen-Hao SHIH, Erh-Kun LAI
  • Patent number: 7560762
    Abstract: A NAND-type flash memory device includes asymmetric floating gates overlying respective wordlines. A given floating gate is sufficiently coupled to its respective wordline such that a large gate (i.e., wordline) bias voltage will couple the floating gate with a voltage which can invert the channel under the floating gate. The inversion channel under the floating gate can thus serve as the source/drain. As a result, the memory device does not need a shallow junction, or an assist-gate. In addition, the memory device exhibits relatively low floating gate-to-floating gate (FG-FG) interference.
    Type: Grant
    Filed: August 23, 2005
    Date of Patent: July 14, 2009
    Assignee: Macronix International Co., Ltd.
    Inventors: Yen-Hao Shih, Chia-Hua Ho, Hang-Ting Lue, Erh-Kun Lai, Kuang Yeu Hsieh
  • Patent number: 7556999
    Abstract: A method for fabrication a memory having a memory area and a peripheral area includes forming a first gate insulating layer with a first thickness over a substrate of a first region in the peripheral area and a second insulating layer with a second thickness over the substrate of the memory region. Thereafter, a buried diffusion region is formed in the substrate of the memory area. A charge trapping layer and a third insulating layer are formed over the substrate. A gate insulating layer is formed in the second region in the peripheral area, wherein the first thickness is greater than a second thickness after removing the charge trapping layer and third insulating layer on the first and second region in the peripheral area. A conductive layer is formed over the substrate of the memory area and the peripheral area substantially after the gate insulating layer is formed.
    Type: Grant
    Filed: September 12, 2006
    Date of Patent: July 7, 2009
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Yen-Hao Shih, Erh-Kun Lai
  • Patent number: 7554873
    Abstract: A memory device includes a plurality of planes of memory arrays, each memory array including a plurality of memory cells. The memory device also includes a plurality of word lines and bit lines coupled to the memory cells in each plane, and at least one transistor to select at least one of the memory arrays.
    Type: Grant
    Filed: March 21, 2006
    Date of Patent: June 30, 2009
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Ming Hsiu Lee, Yen Hao Shih
  • Publication number: 20090140321
    Abstract: A semiconductor device and a method of fabricating the same are provided. First, a first oxide layer and a nitride layer are formed on a base having a first region and a second region. Next, the nitride layer is oxidized. A part of nitride in the nitride layer moves to the first oxide layer and the base. An upper portion of the nitride layer is converted to an upper oxide layer. Then, the upper oxide layer, the nitride layer and the first oxide layer in the second region are removed. Thereon, a second oxide layer is grown on the base in the second region. Nitride in the second region moves to the second oxide layer.
    Type: Application
    Filed: December 3, 2007
    Publication date: June 4, 2009
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Yen-Hao Shih
  • Publication number: 20090130835
    Abstract: A memory device having a floating gate with a non-rectangular cross-section is disclosed. The non-rectangular cross-section may be an inverted T-shape, a U-shape, a trapezoid shape, or a double inverted T-shape. Methods are disclosed for producing a floating gate memory device having an improved coupling ratio due to an increased surface area of the floating gate. The memory device has a floating gate having a cross-sectional shape, such as an inverted T-shape, such that a top contour is a non-flat segment.
    Type: Application
    Filed: November 16, 2007
    Publication date: May 21, 2009
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun LAI, Yen-Hao SHIH, Ming-Hsiang HSUEH
  • Publication number: 20090108331
    Abstract: A memory having isolated dual memory cells is provided. A first isolation wall and a second isolation wall are separately disposed between a source and a drain on a substrate. An isolation bottom layer and a polysilicon layer are orderly disposed on the substrate between the first and the second isolation walls. A first charge storage structure and a first gate are orderly disposed on the substrate between the first isolation wall and the source. A second charge storage structure and a second gate are orderly disposed on the substrate between the second isolation wall and the drain. A word line disposed on the polysilicon layer, the first gate, the second gate, the first isolation wall and the second isolation wall is electrically connected to the first gate, the second gate and the polysilicon layer.
    Type: Application
    Filed: October 31, 2007
    Publication date: April 30, 2009
    Applicant: Macronix International Co., Ltd.
    Inventors: Erh-Kun Lai, Yen-Hao Shih, Ling-Wu Yang, Chun-Min Cheng
  • Patent number: 7521321
    Abstract: The present invention relates to a memory device and a method of fabricating the same. The memory device comprises a substrate, a tunnel dielectric film on the substrate, pairs of source and drain regions formed in the substrate, and a number of separate storage blocks between each pair of the source and drain regions. Each storage wire block includes a storage medium and a silicon dioxide layer. Two storage blocks are separated by an interval of at least 100 angstroms.
    Type: Grant
    Filed: March 30, 2007
    Date of Patent: April 21, 2009
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Yen-Hao Shih, Ming-Hsiang Hsueh, Erh-Kun Lai, Chia-Wei Wu, Chi-Pin Lu, Jung-Yu Hsieh