Patents by Inventor Ying Kit Tsui

Ying Kit Tsui has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200020813
    Abstract: Present disclosure provides a semiconductor structure, including a semiconductor substrate having a top surface, a first well region of a first conductivity type in the semiconductor substrate, a second well region of a second conductivity type in the semiconductor substrate, laterally surrounding the first well region, and an isolation region in the first well region and the second well region in proximity to the top surface. The first well region includes a first lighter doped region in proximity to the top surface, and a heavier doped region under the first lighter doped region. Present disclosure also provides a method for manufacturing the semiconductor structure described herein.
    Type: Application
    Filed: July 13, 2018
    Publication date: January 16, 2020
    Inventors: WEN-SHUN LO, FELIX YING-KIT TSUI
  • Patent number: 10515845
    Abstract: A method for manufacturing a semiconductor structure including isolations includes receiving a substrate including a first region and a second region; forming a patterned hard mask, the patterned hard mask including a first opening exposing a portion of the first region and a second opening exposing a portion of the second region; removing portions of the substrate to form a first trench in the first region and to form a second trench in the second region; performing an ion implantation to a portion of the patterned hard mask in the first region and a portion of the substrate exposed from the first trench; enlarging the first opening to form a third opening over the first trench and enlarging the second opening to form a fourth opening over the second trench; and forming a first isolation by filling the first trench and a second isolation by filling the second trench.
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: December 24, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wen-Shun Lo, Yu-Chi Chang, Felix Ying-Kit Tsui
  • Patent number: 10509008
    Abstract: A biological device includes a substrate, a gate electrode, and a sensing well. The substrate includes a source region, a drain region, a channel region, a body region, and a sensing region. The channel region is disposed between the source region and the drain region. The sensing region is at least disposed between the channel region and the body region. The gate electrode is at least disposed on or above the channel region of the substrate. The sensing well is at least disposed adjacent to the sensing region.
    Type: Grant
    Filed: April 29, 2015
    Date of Patent: December 17, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ta-Chuan Liao, Chien-Kuo Yang, Yi-Shao Liu, Tung-Tsun Chen, Chan-Ching Lin, Jui-Cheng Huang, Felix Ying-Kit Tsui, Jing-Hwang Yang
  • Patent number: 10510902
    Abstract: Representative methods of manufacturing memory devices include forming a transistor with a gate disposed over a workpiece, and forming an erase gate with a tip portion extending towards the workpiece. The transistor includes a source region and a drain region disposed in the workpiece proximate the gate. The erase gate is coupled to the gate of the transistor.
    Type: Grant
    Filed: August 6, 2018
    Date of Patent: December 17, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Alexander Kalnitsky, Hsiao-Chin Tuan, Felix Ying-Kit Tsui, Hau-Yan Lu
  • Patent number: 10478797
    Abstract: An integrated circuit includes two or more rows of heating elements, two or more columns of heating elements, and a plurality of sensing areas. Each sensing area is between two adjacent rows of the rows of heating elements, between two adjacent columns of the columns of heating elements, and includes a bio-sensing device and a temperature-sensing device.
    Type: Grant
    Filed: January 9, 2018
    Date of Patent: November 19, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tung-Tsun Chen, Yi-Shao Liu, Jui-Cheng Huang, Chin-Hua Wen, Felix Ying-Kit Tsui, Yung-Chow Peng
  • Publication number: 20190326400
    Abstract: A semiconductor device includes a semiconductor substrate, a gate electrode, a channel region, a pair of source/drain regions and a threshold voltage adjusting region. The gate electrode is over the semiconductor substrate. The channel region is between the semiconductor substrate and the gate electrode. The channel region includes a pair of first sides opposing to each other in a channel length direction, and a pair of second sides opposing to each other in a channel width direction. The source/drain regions are adjacent to the pair of first sides of the channel region in the channel length direction. The threshold voltage adjusting region covers the pair of second sides of the channel region in the channel width direction, and exposing the pair of first sides of the channel region in the channel length direction.
    Type: Application
    Filed: July 1, 2019
    Publication date: October 24, 2019
    Inventors: WEN-SHUN LO, YU-CHI CHANG, FELIX YING-KIT TSUI
  • Publication number: 20190245031
    Abstract: A capacitor structure and method of forming the capacitor structure is provided, including a providing a doped region of a substrate having a two-dimensional trench array with a plurality of segments defined therein. Each of the plurality of segments has an array of a plurality of recesses extending along the substrate, where the plurality of segments are rotationally symmetric about a center of the two-dimensional trench array. A first conducting layer is presented over the surface and a bottom and sidewalls of the recesses and is insulated from the substrate by a first dielectric layer. A second conducting layer is presented over the first conducting layer and is insulated by a second dielectric layer. First and second contacts respectively connect to an exposed top surface of the first conducting layer and second conducting layer. A third contact connects to the substrate within a local region to the capacitor structure.
    Type: Application
    Filed: April 18, 2019
    Publication date: August 8, 2019
    Inventors: Jyun-Ying Lin, Hsin-Li Cheng, Jing-Hwang Yang, Felix Ying-Kit Tsui, Chien-Li Kuo
  • Patent number: 10340343
    Abstract: A semiconductor device includes a semiconductor substrate, a gate electrode, a pair of source/drain regions and a a threshold voltage adjusting region. The gate electrode is over the semiconductor substrate. The channel region is between the semiconductor substrate and the gate electrode. The source/drain regions are adjacent to two opposing sides of the channel region in a channel length direction. The threshold voltage adjusting region is adjacent to two opposing sides of the channel region in a channel width direction, wherein the threshold voltage adjusting region and the channel region have the same doping type.
    Type: Grant
    Filed: January 4, 2018
    Date of Patent: July 2, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wen-Shun Lo, Yu-Chi Chang, Felix Ying-Kit Tsui
  • Publication number: 20190164982
    Abstract: A memory device is disclosed. The memory device includes: a first memory cell, including: a first transistor; a second transistor; and a first capacitor; a second memory cell, including: a third transistor; a fourth transistor; and a second capacitor; a third memory cell, including: a fifth transistor; a sixth transistor; and a third capacitor; and a fourth memory cell, including: a seventh transistor; an eighth transistor; and a fourth capacitor; wherein an electrode of the first capacitor, an electrode of the second capacitor, an electrode of the third capacitor, and an electrode of the fourth capacitor are electrically connected to a conductor. An associated manufacturing method is also disclosed.
    Type: Application
    Filed: September 20, 2018
    Publication date: May 30, 2019
    Inventors: HAU-YAN LU, CHUN-YAO KO, FELIX YING-KIT TSUI
  • Publication number: 20190148481
    Abstract: A semiconductor structure and a method of manufacturing the same are provided. According to an embodiment, a method includes: providing a semiconductive substrate; forming a doped region in the semiconductive substrate; forming a trench in the doped region; forming a capacitor in the trench, the capacitor comprising alternatingly arranged electrodes and dielectric layers; depositing a first dielectric material in the trench and over the capacitor; etching the first dielectric material to form a spacer on a sidewall of a topmost dielectric layer of the capacitor; and depositing a core portion in the trench and laterally surrounded by the spacer.
    Type: Application
    Filed: December 21, 2018
    Publication date: May 16, 2019
    Inventors: FELIX YING-KIT TSUI, SHIH-FEN HUANG
  • Publication number: 20190139816
    Abstract: A method for manufacturing a semiconductor structure including isolations includes receiving a substrate including a first region and a second region; forming a patterned hard mask, the patterned hard mask including a first opening exposing a portion of the first region and a second opening exposing a portion of the second region; removing portions of the substrate to form a first trench in the first region and to form a second trench in the second region; performing an ion implantation to a portion of the patterned hard mask in the first region and a portion of the substrate exposed from the first trench; enlarging the first opening to form a third opening over the first trench and enlarging the second opening to form a fourth opening over the second trench; and forming a first isolation by filling the first trench and a second isolation by filling the second trench.
    Type: Application
    Filed: February 22, 2018
    Publication date: May 9, 2019
    Inventors: WEN-SHUN LO, YU-CHI CHANG, FELIX YING-KIT TSUI
  • Publication number: 20190140045
    Abstract: The present disclosure provides a method of manufacturing a Schottky diode. The method includes: providing a substrate; forming a first well region in the substrate; defining a first portion and a second portion on a surface of the first well region and performing a first ion implantation on the first portion while keeping the second portion from being implanted; forming a first doped region by heating the substrate to cause dopant diffusion between the first portion and the second portion; and forming a metal-containing layer on the first doped region to obtain a Schottky barrier interface.
    Type: Application
    Filed: December 17, 2018
    Publication date: May 9, 2019
    Inventors: WEN-SHUN LO, YU-CHI CHANG, FELIX YING-KIT TSUI
  • Publication number: 20190131401
    Abstract: A semiconductor device includes a semiconductor substrate, a gate electrode, a pair of source/drain regions and a a threshold voltage adjusting region. The gate electrode is over the semiconductor substrate. The channel region is between the semiconductor substrate and the gate electrode. The source/drain regions are adjacent to two opposing sides of the channel region in a channel length direction. The threshold voltage adjusting region is adjacent to two opposing sides of the channel region in a channel width direction, wherein the threshold voltage adjusting region and the channel region have the same doping type.
    Type: Application
    Filed: January 4, 2018
    Publication date: May 2, 2019
    Inventors: WEN-SHUN LO, YU-CHI CHANG, FELIX YING-KIT TSUI
  • Patent number: 10276651
    Abstract: A capacitor structure and method of forming the capacitor structure is provided, including a providing a doped region of a substrate having a two-dimensional trench array with a plurality of segments defined therein. Each of the plurality of segments has an array of a plurality of recesses extending along the substrate, where the plurality of segments are rotationally symmetric about a center of the two-dimensional trench array. A first conducting layer is presented over the surface and a bottom and sidewalls of the recesses and is insulated from the substrate by a first dielectric layer. A second conducting layer is presented over the first conducting layer and is insulated by a second dielectric layer. First and second contacts respectively connect to an exposed top surface of the first conducting layer and second conducting layer. A third contact connects to the substrate within a local region to the capacitor structure.
    Type: Grant
    Filed: September 1, 2017
    Date of Patent: April 30, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jyun-Ying Lin, Hsin-Li Cheng, Jing-Hwang Yang, Felix Ying-Kit Tsui, Chien-Li Kuo
  • Patent number: 10269894
    Abstract: A semiconductor structure and a method of manufacturing the same are provided. According to an embodiment, a method includes: providing a semiconductive substrate; forming a doped region in the semiconductive substrate; forming a trench in the doped region; forming a capacitor in the trench, the capacitor comprising alternatingly arranged electrodes and dielectric layers; depositing a first dielectric material in the trench and over the capacitor; etching the first dielectric material to form a spacer on a sidewall of a topmost dielectric layer of the capacitor; and depositing a core portion in the trench and laterally surrounded by the spacer.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: April 23, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Felix Ying-Kit Tsui, Shih-Fen Huang
  • Publication number: 20190096903
    Abstract: A semiconductor device is provided. The semiconductor device comprises a first active region, a second active region and a third active region, a first poly region, a second poly region, a third poly region, a first doped region and a second doped region. The first active region, the second active region and the third active region are separated and parallel with each other. The first poly region is arranged over the first and second active regions. The second poly region is arranged over the first and second active regions. The third poly region is arranged over the second and third active regions. The first doped region is in the second active region and between the first poly region and the second poly region. The second doped region is in the second active region and between the second poly region and the third poly region.
    Type: Application
    Filed: November 26, 2018
    Publication date: March 28, 2019
    Inventors: Hau-Yan LU, Shih-Hsien CHEN, Chun-Yao KO, Felix Ying-Kit TSUI
  • Publication number: 20190088666
    Abstract: The present disclosure provides an integrated circuit. The integrated circuit includes a substrate; a field effect transistor disposed in a periphery region of the substrate, the field effect transistor including a gate electrode, a first source, a first drain; a floating gate non-volatile memory device disposed in a memory region of the substrate, the floating gate non-volatile memory device including a second source, a third source, and a second drain, wherein the second source, the third source, and the second drain are disposed along an axis; and a floating gate electrode in the memory region including a first portion, a second portion, and a third portion, wherein the first portion, the second portion, and the third portion are electrically connected, wherein the first portion, the second portion and the third portion extend perpendicular to the axis.
    Type: Application
    Filed: November 19, 2018
    Publication date: March 21, 2019
    Inventors: Felix Ying-Kit Tsui, Huang-Wen Tseng
  • Publication number: 20190074349
    Abstract: A capacitor structure and method of forming the capacitor structure is provided, including a providing a doped region of a substrate having a two-dimensional trench array with a plurality of segments defined therein. Each of the plurality of segments has an array of a plurality of recesses extending along the substrate, where the plurality of segments are rotationally symmetric about a center of the two-dimensional trench array. A first conducting layer is presented over the surface and a bottom and sidewalls of the recesses and is insulated from the substrate by a first dielectric layer. A second conducting layer is presented over the first conducting layer and is insulated by a second dielectric layer. First and second contacts respectively connect to an exposed top surface of the first conducting layer and second conducting layer. A third contact connects to the substrate within a local region to the capacitor structure.
    Type: Application
    Filed: September 1, 2017
    Publication date: March 7, 2019
    Inventors: Jyun-Ying Lin, Hsin-Li Cheng, Jing-Hwang Yang, Felix Ying-Kit Tsui, Chien-Li Kuo
  • Patent number: 10164005
    Abstract: The present disclosure provides a semiconductor structure which comprises a semiconductive substrate and a doped region in the semiconductive substrate. The doped region has a conductivity type opposite to the semiconductive substrate. The semiconductor structure also includes a capacitor in the doped region where the capacitor comprises a plurality of electrodes and the plurality of electrodes are insulated with one another. The semiconductor structure further includes a plug in the capacitor and surrounded by the plurality of electrodes.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: December 25, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Felix Ying-Kit Tsui, Shih-Fen Huang
  • Patent number: 10157980
    Abstract: The present disclosure provides a method of manufacturing a Schottky diode. A substrate is provided. A first well region of a first conductive type is formed in the substrate. A first ion implantation of a second conductive type is performed on a first portion of the first well region while keeping a second portion of the first well region from being implanted. A first doped region is formed by heating the substrate to cause dopant diffusion between the first portion and the second portion. A metal-containing layer is formed on the first doped region to obtain a Schottky barrier interface.
    Type: Grant
    Filed: October 25, 2017
    Date of Patent: December 18, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wen-Shun Lo, Yu-Chi Chang, Felix Ying-Kit Tsui