Abstract: There are disclosed novel sulfamate compounds containing N-substituted carbomoyl group including their racemates and (R)- and (S)-optical isomers represented by Formulas I, II and III, pharmaceutically useful for the prophylaxis and treatment of the disorders of the central nervous system, especially for nervous myalgia, epilepsy and minimal brain dysfunction: ##STR1## (III).

Abstract: A phase shift mask is fabricated by forming a radiation blocking layer on a phase shift mask substrate and forming a photoresist layer on the radiation blocking layer. First portions of the photoresist layer are exposed at a first exposure dose. Second portions of the photoresist layer are exposed at a second exposure dose that is greater than the first exposure dose, such that the second portions of the photoresist layer are wider than the first portions of the photoresist layer. The radiation blocking layer is etched using the photoresist layer as an etch mask, to thereby produce first apertures in the radiation blocking layer beneath the first portions of the photoresist layer and second apertures in the radiation blocking layer which are wider than the first apertures, beneath the second portions of the photoresist layer. The phase shift mask substrate is then etched beneath the second apertures.

Abstract: The optically pure forms of monoocarbamates of halogenated 2-phenyl-1,2-ethanediol and dicarbamates of 2-phenly-1,2-ethaniediol have been found to be effective in the treatment of disorders of the central nervous system, especially as anti-convulsive or anti-epileptic agents.

Abstract: (S)-2-Aryl-1,3-propanediol monocarbamate and its intermediate, (S)-3-acetoxy-2-aryl-propanol carbamate, represented by the following formulas I and II, respectively, have pharmaceutically useful activity against for central nervous system disorders including nervous myalgia, epilepsy and cerebral apoplexy: ##STR1## wherein, R is ##STR2## wherein X is an oxygen atom or a sulfur atom; and Y represents a halogen element, trifluoromethyl, or a lower alkyl group containing one to three carbon atoms.

Abstract: There is disclosed 3-N-substituted thiocarbamoyl-2-phenyl-1,3-propanediol carbamate, represented by the following structural formula I, that is very effective for prophylaxis and treatment of central nervous system disorders including nervous muscular pain, epilepsy and cerebral apoplexy: ##STR1## wherein R.sub.1 and R.sub.2 may be the same or different from each other and are independently selected from the group consisting of hydrogen, lower alkyl containing 1 to 8 carbon atoms and 5 to 7-membered aliphatic cyclic compound which may comprise two or less nitrogen or oxygen atoms directly unconnected, with a proviso that R.sub.1 and R.sub.2 both should not be hydrogen and the total number of carbon atoms of R.sub.1 and R.sub.2 ranges from 1 to 16.

Abstract: A phase-shifting mask is provided for irradiating a microelectronic wafer having first and second wafer regions wherein the first wafer region has a large step difference relative to the second wafer region. The phase-shifting mask includes a substrate which transmits light therethrough and a patterned layer of a phase shifting material which shifts a phase of light transmitted by the substrate. The phase-shifting mask also includes a layer which controls the transmissivity of light through the phase-shifting mask so that a transmissivity of light through a first mask region is small relative to a transmissivity of light through a second mask region wherein the first mask region corresponds to the first wafer region and the second mask region corresponds to the second wafer region. Related masks and structures are also discussed.

Abstract: The present invention relates to a racemic or enantiomerically enriched O-carbamoyl-phenylalaninol compound represented by the following structural formula V and pharmaceutically acceptable salts thereof to treat diseases of the central nervous system: ##STR1## wherein Ph is a phenyl group as described as follows: ##STR2## wherein R is a member selected from the group consisting of hydrogen, lower alkyl of 1 to 8 carbon atoms, halogen selected from F, Cl, Br and I, alkoxy containing 1 to 3 carbon atoms, nitro, hydroxy, trifluoromethyl, and thioalkoxy containing 1 to 3 carbon atoms, and x is an integer from 1 to 3, with the proviso that R is the same or different when x is 2 or 3, R.sup.1 and R.sup.2 may be the same or different from each other and are independently selected from the group consisting of hydrogen, lower alkyl of 1 to 8 carbon atoms, aryl, arylalkyl, cyclic propyl and 5 to 7-membered aliphatic cyclic compounds, and R.sup.1 and R.sup.

Abstract: Methods of forming half-tone phase-shift masks include the steps of forming a series of layers on a face of a transparent substrate such as quartz. These layers include a phase-shift layer of MoSiON, a layer of opaque material (e.g., chrome) for blocking light on the phase-shift layer and a photoresist layer on the layer of opaque material. The photoresist layer is then patterned to define a mask having openings therein which expose the layer of opaque material. The layer of opaque material is then patterned using a wet etchant, to expose portions of the phase-shift layer. The patterned photoresist layer is then stripped and a cleaning step is then performed to remove residual defects and marks from the patterned layer of opaque material. The patterned layer of opaque material is then used as a mask during the step of anisotropically dry etching the phase-shift layer using a gas containing CF.sub.4 and O.sub.2, but not CHF.sub.3. The use of a gas containing CF.sub.4 and O.sub.

Abstract: The present invention relates to O-carbamoyl-(D)-phenylalaninol compound represented by the following structural formula V and pharmaceutically acceptable salts thereof to treat diseases of the central nervous system: ##STR1## wherein R.sup.1 and R.sup.2 may be the same with or different from each other and are independently selected from the group consisting of hydrogen, lower alkyl containing 1 to 8 carbon atoms, and 5 to 7-membered aliphatic cyclic compounds which may comprise not more than two nitrogen or oxygen atoms directly unconnected, the total number of carbon atom of R.sup.1 and R.sup.2 ranging from 0 to 16.

Abstract: The pure enantiomeric forms, as well as enantiomeric mixtures excluding the racemic mixture of monocarbamates of 2-phenyl-1,2-ethanediol substituted with more than one halogen atom on the phenyl ring and dicarbamates of 2-phenyl-1,2-ethanediol substituted with more than one halogen atom on the phenyl ring have been found to be effective in the treatment of disorders of the central nervous system.

Abstract: 3-O-Carbamoyl-2-phenyl-1,3-propanediol sulfamate racemate, represented by the following structural formula I: ##STR1## and its (R)- and (S)-optical isomers, which are very effective for prophylaxis and the treatment of central nervous system disorders including nervous muscular pain, epilepsy and minimal brain dysfunctions, are disclosed. They are prepared from 2-phenyl-1,3-propanediol monocarbamate and its optical isomers, respectively.