Patents by Inventor Yongjun Jeff Hu

Yongjun Jeff Hu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10418554
    Abstract: A memory cell comprising a threshold switching material over a first electrode on a substrate. The memory cell includes a second electrode over the threshold switching material and at least one dielectric material between the threshold switching material and at least one of the first electrode and the second electrode. A memory material overlies the second electrode. The dielectric material may directly contact the threshold switching material and each of the first electrode and the second electrode. Memory cells including only one dielectric material between the threshold switching material and an electrode are disclosed. A memory device including the memory cells and methods of forming the memory cells are also described.
    Type: Grant
    Filed: October 26, 2018
    Date of Patent: September 17, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Tsz W. Chan, D. V. Nirmal Ramaswamy, Qian Tao, Yongjun Jeff Hu, Everett A. McTeer
  • Publication number: 20190267390
    Abstract: Some embodiments include an integrated structure having semiconductor material within a region between two parallel surfaces. The semiconductor material has grain boundaries parallel to the parallel surfaces. At least one circuit component utilizes a region of the semiconductor material in a gated device. The semiconductor material has little if any metal therein so that the gated device has Ion/Ioff characteristics similar to if the semiconductor material had no metal therein. Some embodiments include a method in which semiconductor material is provided between a pair of parallel surfaces, and in which the parallel surfaces and semiconductor material extend between a first end and a second end. Metal is formed adjacent the first end, and gettering material is formed adjacent the second end. Thermal processing induces crystallization of the semiconductor material and drives the metal along the semiconductor material and into the gettering material. The gettering material is then removed.
    Type: Application
    Filed: May 8, 2019
    Publication date: August 29, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Yongjun Jeff Hu, Allen McTeer
  • Patent number: 10381072
    Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming a memory stack out of a plurality of elements. A sidewall liner is formed on a sidewall of the memory stack using a physical vapor deposition (PVD) process, including an adhesion species and a dielectric, such that the adhesion species intermixes with an element of the memory stack to terminate unsatisfied atomic bonds of the element and the dielectric forms a dielectric film with the adhesive species on the sidewall.
    Type: Grant
    Filed: April 30, 2014
    Date of Patent: August 13, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Yongjun Jeff Hu, Tsz W. Chan, Christopher W. Petz, Everett Allen McTeer
  • Patent number: 10354989
    Abstract: An integrated assembly having an insulative mass with a first region adjacent to a second region. The first region has a greater amount of one or more inert interstitial elements incorporated therein than does the second region. Also, an integrated assembly which has vertically-extending channel material pillars, and which has memory cells along the channel material pillars. A conductive structure is under the channel material pillars. The conductive structure includes doped semiconductor material in direct contact with bottom regions of the channel material pillars. An insulative mass is along the bottom regions of the channel material pillars. The insulative mass has an upper region over a lower region. The lower region has a greater amount of one or more inert interstitial elements incorporated therein than does the upper region. Also, methods of forming integrated assemblies.
    Type: Grant
    Filed: May 16, 2018
    Date of Patent: July 16, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Daniel Billingsley, Everett A. McTeer, Christopher W. Petz, Haoyu Li, John Mark Meldrim, Yongjun Jeff Hu
  • Patent number: 10355014
    Abstract: Some embodiments include an assembly which has channel material pillars, and which has memory cells along the channel material pillars. A conductive structure is under the channel material pillars. The conductive structure has doped semiconductor material in direct contact with bottom regions of the channel material pillars. One or more of magnesium, scandium, yttrium and lanthanide elements is along the bottom regions of the channel material pillars. Some embodiments include methods of forming assemblies. A structure is formed, and a mass is formed against an upper surface of the structure. Plugs are formed within openings in the mass. The plugs comprise a second material over a first material. The first material includes one or more of magnesium, scandium, yttrium and lanthanide elements. Openings are formed to terminate on the first material, and are then extended through the first material. Channel material pillars are formed within the openings.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: July 16, 2019
    Assignee: Micron Technology, Inc.
    Inventors: David Ross Economy, John Mark Meldrim, Haoyu Li, Yongjun Jeff Hu, Christopher W. Petz, Daniel Billingsley, Everett A. McTeer
  • Patent number: 10344398
    Abstract: Various embodiments include methods and apparatuses comprising methods for formation of and apparatuses including a source material for electronic devices. One such apparatus includes a vertical string of memory cells comprising a plurality of alternating levels of conductor and dielectric material, a semiconductor material extending through the plurality of alternating levels of conductor material and dielectric material, and a source material coupled to the semiconductor material. The source material includes a titanium nitride layer and a source polysilicon layer in direct contact with the titanium nitride layer. Other methods and apparatuses are disclosed.
    Type: Grant
    Filed: January 6, 2016
    Date of Patent: July 9, 2019
    Assignee: Micron Technology, Inc.
    Inventors: John Mark Meldrim, Yushi Hu, Yongjun Jeff Hu, Everett Allen McTeer
  • Publication number: 20190198519
    Abstract: Some embodiments include an assembly which has channel material pillars, and which has memory cells along the channel material pillars. A conductive structure is under the channel material pillars. The conductive structure has doped semiconductor material in direct contact with bottom regions of the channel material pillars. One or more of magnesium, scandium, yttrium and lanthanide elements is along the bottom regions of the channel material pillars. Some embodiments include methods of forming assemblies. A structure is formed, and a mass is formed against an upper surface of the structure. Plugs are formed within openings in the mass. The plugs comprise a second material over a first material. The first material includes one or more of magnesium, scandium, yttrium and lanthanide elements. Openings are formed to terminate on the first material, and are then extended through the first material. Channel material pillars are formed within the openings.
    Type: Application
    Filed: December 22, 2017
    Publication date: June 27, 2019
    Inventors: David Ross Economy, John Mark Meldrim, Haoyu Li, Yongjun Jeff Hu, Christopher W. Petz, Daniel Billingsley, Everett A. McTeer
  • Patent number: 10325917
    Abstract: Some embodiments include an integrated structure having semiconductor material within a region between two parallel surfaces. The semiconductor material has grain boundaries parallel to the parallel surfaces. At least one circuit component utilizes a region of the semiconductor material in a gated device. The semiconductor material has little if any metal therein so that the gated device has Ion/Ioff characteristics similar to if the semiconductor material had no metal therein. Some embodiments include a method in which semiconductor material is provided between a pair of parallel surfaces, and in which the parallel surfaces and semiconductor material extend between a first end and a second end. Metal is formed adjacent the first end, and gettering material is formed adjacent the second end. Thermal processing induces crystallization of the semiconductor material and drives the metal along the semiconductor material and into the gettering material. The gettering material is then removed.
    Type: Grant
    Filed: August 24, 2017
    Date of Patent: June 18, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Yongjun Jeff Hu, Allen McTeer
  • Patent number: 10325653
    Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming a memory stack out of a plurality of elements. A sidewall liner is formed on a sidewall of the memory stack using a physical vapor deposition (PVD) process, including an adhesion species and a dielectric, such that the adhesion species intermixes with an element of the memory stack to terminate unsatisfied atomic bonds of the element and the dielectric forms a dielectric film with the adhesive species on the sidewall.
    Type: Grant
    Filed: December 28, 2017
    Date of Patent: June 18, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Yongjun Jeff Hu, Tsz W. Chan, Christopher W. Petz, Everett Allen McTeer
  • Publication number: 20190140023
    Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such memory device includes a first electrode material formed on a word line material. A selector device material is formed on the first electrode material. A second electrode material is formed on the selector device material. A phase change material is formed on the second electrode material. A third electrode material is formed on the phase change material. An adhesion species is plasma doped into sidewalls of the memory stack and a liner material is formed on the sidewalls of the memory stack. The adhesion species intermixes with an element of the memory stack and the sidewall liner to terminate unsatisfied atomic bonds of the element and the sidewall liner.
    Type: Application
    Filed: January 7, 2019
    Publication date: May 9, 2019
    Inventors: Yongjun Jeff Hu, Tsz W. Chan, Swapnil Lengade, Everett Allen McTeer, Shu Qin
  • Publication number: 20190088867
    Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming the memory stack out of a plurality of elements. An adhesion species is formed on at least one sidewall of the memory stack wherein the adhesion species has a gradient structure that results in the adhesion species intermixing with an element of the memory stack to terminate unsatisfied atomic bonds of the element. The gradient structure further comprises a film of the adhesion species on an outer surface of the at least one sidewall.
    Type: Application
    Filed: January 29, 2018
    Publication date: March 21, 2019
    Inventors: Tsz W. Chan, Yongjun Jeff Hu, Swapnil Lengade, Shu Qin, Everett Allen McTeer
  • Patent number: 10224479
    Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming the memory stack out of a plurality of elements. An adhesion species is formed on at least one sidewall of the memory stack wherein the adhesion species has a gradient structure that results in the adhesion species intermixing with an element of the memory stack to terminate unsatisfied atomic bonds of the element. The gradient structure further comprises a film of the adhesion species on an outer surface of the at least one sidewall. A dielectric material is implanted into the film of the adhesion species to form a sidewall liner.
    Type: Grant
    Filed: January 29, 2018
    Date of Patent: March 5, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Tsz W. Chan, Yongjun Jeff Hu, Swapnil Lengade, Shu Qin, Everett Allen McTeer
  • Publication number: 20190067573
    Abstract: A memory cell comprising a threshold switching material over a first electrode on a substrate. The memory cell includes a second electrode over the threshold switching material and at least one dielectric material between the threshold switching material and at least one of the first electrode and the second electrode. A memory material overlies the second electrode. The dielectric material may directly contact the threshold switching material and each of the first electrode and the second electrode. Memory cells including only one dielectric material between the threshold switching material and an electrode are disclosed. A memory device including the memory cells and methods of forming the memory cells are also described.
    Type: Application
    Filed: October 26, 2018
    Publication date: February 28, 2019
    Inventors: Tsz W. Chan, D. V. Nirmal Ramaswamy, Qian Tao, Yongjun Jeff Hu, Everett A. McTeer
  • Patent number: 10193064
    Abstract: A memory cell comprising a threshold switching material over a first electrode on a substrate. The memory cell includes a second electrode over the threshold switching material and at least one dielectric material between the threshold switching material and at least one of the first electrode and the second electrode. A memory material overlies the second electrode. The dielectric material may directly contact the threshold switching material and each of the first electrode and the second electrode. Memory cells including only one dielectric material between the threshold switching material and an electrode are disclosed. A memory device including the memory cells and methods of forming the memory cells are also described.
    Type: Grant
    Filed: July 6, 2017
    Date of Patent: January 29, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Tsz W. Chan, D. V. Nirmal Ramaswamy, Qian Tao, Yongjun Jeff Hu, Everett A. McTeer
  • Patent number: 10177198
    Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such memory device includes a first electrode material formed on a word line material. A selector device material is formed on the first electrode material. A second electrode material is formed on the selector device material. A phase change material is formed on the second electrode material. A third electrode material is formed on the phase change material. An adhesion species is plasma doped into sidewalls of the memory stack and a liner material is formed on the sidewalls of the memory stack. The adhesion species intermixes with an element of the memory stack and the sidewall liner to terminate unsatisfied atomic bonds of the element and the sidewall liner.
    Type: Grant
    Filed: June 5, 2017
    Date of Patent: January 8, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Yongjun Jeff Hu, Tsz W. Chan, Swapnil Lengade, Everett Allen McTeer, Shu Qin
  • Patent number: 10079340
    Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming the memory stack out of a plurality of elements. An adhesion species is formed on at least one sidewall of the memory stack wherein the adhesion species has a gradient structure that results in the adhesion species intermixing with an element of the memory stack to terminate unsatisfied atomic bonds of the element. The gradient structure further comprises a film of the adhesion species on an outer surface of the at least one sidewall. A dielectric material is implanted into the film of the adhesion species to form a sidewall liner.
    Type: Grant
    Filed: April 4, 2016
    Date of Patent: September 18, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Tsz W. Chan, Yongjun Jeff Hu, Swapnil Lengade, Shu Qin, Everett Allen McTeer
  • Publication number: 20180254334
    Abstract: Some embodiments include methods of forming charge storage transistor gates and standard FET gates in which common processing is utilized for fabrication of at least some portions of the different types of gates. FET and charge storage transistor gate stacks may be formed. The gate stacks may each include a gate material, an insulative material, and a sacrificial material. The sacrificial material is removed from the FET and charge storage transistor gate stacks. The insulative material of the FET gate stacks is etched through. A conductive material is formed over the FET gate stacks and over the charge storage transistor gate stacks. The conductive material physically contacts the gate material of the FET gate stacks, and is separated from the gate material of the charge storage transistor gate stacks by the insulative material remaining in the charge storage transistor gate stacks. Some embodiments include gate structures.
    Type: Application
    Filed: April 30, 2018
    Publication date: September 6, 2018
    Inventor: Yongjun Jeff Hu
  • Publication number: 20180166629
    Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming the memory stack out of a plurality of elements. An adhesion species is formed on at least one sidewall of the memory stack wherein the adhesion species has a gradient structure that results in the adhesion species intermixing with an element of the memory stack to terminate unsatisfied atomic bonds of the element. The gradient structure further comprises a film of the adhesion species on an outer surface of the at least one sidewall.
    Type: Application
    Filed: January 29, 2018
    Publication date: June 14, 2018
    Inventors: Tsz W. Chan, Yongjun Jeff Hu, Swapnil Lengade, Shu Qin, Everett Allen McTeer
  • Publication number: 20180144795
    Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming a memory stack out of a plurality of elements. A sidewall liner is formed on a sidewall of the memory stack using a physical vapor deposition (PVD) process, including an adhesion species and a dielectric, such that the adhesion species intermixes with an element of the memory stack to terminate unsatisfied atomic bonds of the element and the dielectric forms a dielectric film with the adhesive species on the sidewall.
    Type: Application
    Filed: December 28, 2017
    Publication date: May 24, 2018
    Inventors: Yongjun Jeff Hu, Tsz W. Chan, Christopher W. Petz, Everett Allen McTeer
  • Publication number: 20180145254
    Abstract: A resistive memory element comprises a first electrode, an active material over the first electrode, a buffer material over the active material and comprising longitudinally extending, columnar grains of crystalline material, an ion reservoir material over the buffer material, and a second electrode over the ion reservoir material. A memory cell, a memory device, an electronic system, and a method of forming a resistive memory element are also described.
    Type: Application
    Filed: January 17, 2018
    Publication date: May 24, 2018
    Inventors: Christopher W. Petz, Yongjun Jeff Hu, Scott E. Sills, Durai Vishak Nirmal Ramaswamy