Patents by Inventor Yongjun Jeff Hu

Yongjun Jeff Hu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9960258
    Abstract: Some embodiments include methods of forming charge storage transistor gates and standard FET gates in Which common processing is utilized for fabrication of at least some portions of the different types of gates. FET and charge storage transistor gate stacks may be formed. The gate stacks may each include a gate material, an insulative material, and a sacrificial material. The sacrificial material is removed from the FET and charge storage transistor gate stacks. The insulative material of the FET gate stacks is etched through. A conductive material is formed over the FET gate stacks and over the charge storage transistor gate stacks. The conductive material physically contacts the gate material of the FET gate stacks, and is separated from the gate material of the charge storage transistor gate stacks by the insulative material remaining in the charge storage transistor gate stacks. Some embodiments include gate structures.
    Type: Grant
    Filed: July 11, 2016
    Date of Patent: May 1, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Yongjun Jeff Hu
  • Patent number: 9893282
    Abstract: A resistive memory element comprises a first electrode, an active material over the first electrode, a buffer material over the active material and comprising longitudinally extending, columnar grains of crystalline material, an ion reservoir material over the buffer material, and a second electrode over the ion reservoir material. A memory cell, a memory device, an electronic system, and a method of forming a resistive memory element are also described.
    Type: Grant
    Filed: December 5, 2016
    Date of Patent: February 13, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Christopher W. Petz, Yongjun Jeff Hu, Scott E. Sills, D. V. Nirmal Ramaswamy
  • Patent number: 9882015
    Abstract: A method for fabricating a transistor gate with a conductive element that includes cobalt silicide includes use of a sacrificial material as a place-holder between sidewall spacers of the transistor gate until after high temperature processes, such as the fabrication of raised source and drain regions, have been completed. In addition, semiconductor devices (e.g., DRAM devices and NAND flash memory devices) with transistor gates that include cobalt silicide in their conductive elements are also disclosed, as are transistors with raised source and drain regions and cobalt silicide in the transistor gates thereof. Intermediate semiconductor device structures that include transistor gates with sacrificial material or a gap between upper portions of sidewall spacers are also disclosed.
    Type: Grant
    Filed: February 18, 2014
    Date of Patent: January 30, 2018
    Assignee: Micron Technology, Inc.
    Inventor: Yongjun Jeff Hu
  • Publication number: 20170373076
    Abstract: Some embodiments include an integrated structure having semiconductor material within a region between two parallel surfaces. The semiconductor material has grain boundaries parallel to the parallel surfaces. At least one circuit component utilizes a region of the semiconductor material in a gated device. The semiconductor material has little if any metal therein so that the gated device has Ion/Ioff characteristics similar to if the semiconductor material had no metal therein. Some embodiments include a method in which semiconductor material is provided between a pair of parallel surfaces, and in which the parallel surfaces and semiconductor material extend between a first end and a second end. Metal is formed adjacent the first end, and gettering material is formed adjacent the second end. Thermal processing induces crystallization of the semiconductor material and drives the metal along the semiconductor material and into the gettering material. The gettering material is then removed.
    Type: Application
    Filed: August 24, 2017
    Publication date: December 28, 2017
    Inventors: Yongjun Jeff Hu, Allen McTeer
  • Publication number: 20170358629
    Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such memory device includes a first electrode material formed on a word line material. A selector device material is formed on the first electrode material. A second electrode material is formed on the selector device material. A phase change material is formed on the second electrode material. A third electrode material is formed on the phase change material. An adhesion species is plasma doped into sidewalls of the memory stack and a liner material is formed on the sidewalls of the memory stack. The adhesion species intermixes with an element of the memory stack and the sidewall liner to terminate unsatisfied atomic bonds of the element and the sidewall liner.
    Type: Application
    Filed: June 5, 2017
    Publication date: December 14, 2017
    Inventors: Yongjun Jeff Hu, Tsz W. Chan, Swapnil Lengade, Everett Allen McTeer, Shu Qin
  • Publication number: 20170309818
    Abstract: A memory cell comprising a threshold switching material over a first electrode on a substrate. The memory cell includes a second electrode over the threshold switching material and at least one dielectric material between the threshold switching material and at least one of the first electrode and the second electrode. A memory material overlies the second electrode. The dielectric material may directly contact the threshold switching material and each of the first electrode and the second electrode. Memory cells including only one dielectric material between the threshold switching material and an electrode are disclosed. A memory device including the memory cells and methods of forming the memory cells are also described.
    Type: Application
    Filed: July 6, 2017
    Publication date: October 26, 2017
    Inventors: Tsz W. Chan, D.V. Nirmal Ramaswamy, Qian Tao, Yongjun Jeff Hu, Everett A. McTeer
  • Patent number: 9780103
    Abstract: Some embodiments include an integrated structure having semiconductor material within a region between two parallel surfaces. The semiconductor material has grain boundaries parallel to the parallel surfaces. At least one circuit component utilizes a region of the semiconductor material in a gated device. The semiconductor material has little if any metal therein so that the gated device has Ion/Ioff characteristics similar to if the semiconductor material had no metal therein. Some embodiments include a method in which semiconductor material is provided between a pair of parallel surfaces, and in which the parallel surfaces and semiconductor material extend between a first end and a second end. Metal is formed adjacent the first end, and gettering material is formed adjacent the second end. Thermal processing induces crystallization of the semiconductor material and drives the metal along the semiconductor material and into the gettering material. The gettering material is then removed.
    Type: Grant
    Filed: November 16, 2015
    Date of Patent: October 3, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Yongjun Jeff Hu, Allen McTeer
  • Patent number: 9716225
    Abstract: A memory cell comprising a threshold switching material over a first electrode on a substrate. The memory cell includes a second electrode over the threshold switching material and at least one dielectric material between the threshold switching material and at least one of the first electrode and the second electrode. A memory material overlies the second electrode. The dielectric material may directly contact the threshold switching material and each of the first electrode and the second electrode. Memory cells including only one dielectric material between the threshold switching material and an electrode are disclosed. A memory device including the memory cells and methods of forming the memory cells are also described.
    Type: Grant
    Filed: September 3, 2014
    Date of Patent: July 25, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Tsz W. Chan, D. V. Nirmal Ramaswamy, Qian Tao, Yongjun Jeff Hu, Everett A. McTeer
  • Patent number: 9673256
    Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such memory device includes a first electrode material formed on a word line material. A selector device material is formed on the first electrode material. A second electrode material is formed on the selector device material. A phase change material is formed on the second electrode material. A third electrode material is formed on the phase change material. An adhesion species is plasma doped into sidewalls of the memory stack and a liner material is formed on the sidewalls of the memory stack. The adhesion species intermixes with an element of the memory stack and the sidewall liner to terminate unsatisfied atomic bonds of the element and the sidewall liner.
    Type: Grant
    Filed: March 7, 2016
    Date of Patent: June 6, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Yongjun Jeff Hu, Tsz W. Chan, Swapnil Lengade, Everett Allen McTeer, Shu Qin
  • Publication number: 20170141119
    Abstract: Some embodiments include an integrated structure having semiconductor material within a region between two parallel surfaces. The semiconductor material has grain boundaries parallel to the parallel surfaces. At least one circuit component utilizes a region of the semiconductor material in a gated device. The semiconductor material has little if any metal therein so that the gated device has Ion/Ioff characteristics similar to if the semiconductor material had no metal therein. Some embodiments include a method in which semiconductor material is provided between a pair of parallel surfaces, and in which the parallel surfaces and semiconductor material extend between a first end and a second end. Metal is formed adjacent the first end, and gettering material is formed adjacent the second end. Thermal processing induces crystallization of the semiconductor material and drives the metal along the semiconductor material and into the gettering material. The gettering material is then removed.
    Type: Application
    Filed: November 16, 2015
    Publication date: May 18, 2017
    Inventors: Yongjun Jeff Hu, Allen McTeer
  • Publication number: 20170133587
    Abstract: A resistive memory element comprises a first electrode, an active material over the first electrode, a buffer material over the active material and comprising longitudinally extending, columnar grains of crystalline material, an ion reservoir material over the buffer material, and a second electrode over the ion reservoir material. A memory cell, a memory device, an electronic system, and a method of forming a resistive memory element are also described.
    Type: Application
    Filed: December 5, 2016
    Publication date: May 11, 2017
    Inventors: Christopher W. Petz, Yongjun Jeff Hu, Scott E. Sills, D.V. Nirmal Ramaswamy
  • Publication number: 20170117449
    Abstract: A composition and method for formation of ohmic contacts on a semiconductor structure are provided. The composition includes a TiAlxNy material at least partially contiguous with the semiconductor structure. The TiAlxNy material can be TiAl3. The composition can include an aluminum material, the aluminum material being contiguous to at least part of the TiAlxNy material, such that the TiAlxNy material is between the aluminum material and the semiconductor structure. The method includes annealing the composition to form an ohmic contact on the semiconductor structure.
    Type: Application
    Filed: January 5, 2017
    Publication date: April 27, 2017
    Inventors: Yongjun Jeff Hu, John Mark Meldrim, Shanming Mou, Everett Allen McTeer
  • Patent number: 9608185
    Abstract: A composition and method for formation of ohmic contacts on a semiconductor structure are provided. The composition includes a TiAlxNy material at least partially contiguous with the semiconductor structure. The TiAlxNy material can be TiAl3. The composition can include an aluminum material, the aluminum material being contiguous to at least part of the TiAlxNy material, such that the TiAlxNy material is between the aluminum material and the semiconductor structure. The method includes annealing the composition to form an ohmic contact on the semiconductor structure.
    Type: Grant
    Filed: April 25, 2014
    Date of Patent: March 28, 2017
    Assignee: Micron Technology
    Inventors: Yongjun Jeff Hu, John Mark Meldrim, Shanming Mou, Everett Allen McTeer
  • Patent number: 9553263
    Abstract: A resistive memory element comprises a first electrode, an active material over the first electrode, a buffer material over the active material and comprising longitudinally extending, columnar grains of crystalline material, an ion reservoir material over the buffer material, and a second electrode over the ion reservoir material. A memory cell, a memory device, an electronic system, and a method of forming a resistive memory element are also described.
    Type: Grant
    Filed: November 6, 2015
    Date of Patent: January 24, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Christopher W. Petz, Yongjun Jeff Hu, Scott E. Sills, D. V. Nirmal Ramaswamy
  • Patent number: 9530842
    Abstract: Some embodiments include a device having an n-type diffusion region, and having a boron-doped region within the n-type diffusion region. The boron-doped region extends no deeper than about 10 nanometers from an upper surface of the n-type diffusion region. Some embodiments include a method in which first boron-enhanced regions are formed within upper portions of n-type source/drain regions of an NMOS (n-type metal-oxide-semiconductor) device and second boron-enhanced regions are simultaneously formed within upper portions of p-type source/drain regions of a PMOS (p-type metal-oxide-semiconductor) device. The first and second boron-enhanced regions extend to depths of less than or equal to about 10 nanometers.
    Type: Grant
    Filed: January 15, 2015
    Date of Patent: December 27, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Shu Qin, Yongjun Jeff Hu, Allen McTeer
  • Publication number: 20160372479
    Abstract: Methods for forming a string of memory cells, an apparatus having a string of memory cells, and a system are disclosed. A method for forming the string of memory cells comprises forming a metal silicide source material over a substrate. The metal silicide source material is doped. A vertical string of memory cells is formed over the metal silicide source material. A semiconductor material is formed vertically and adjacent to the vertical string of memory cells and coupled to the metal silicide source material.
    Type: Application
    Filed: September 2, 2016
    Publication date: December 22, 2016
    Inventors: Zhenyu Lu, Roger W. Lindsay, Andrew Bicksler, Yongjun Jeff Hu, Haitao Liu
  • Patent number: 9496495
    Abstract: Some embodiments include a memory cell having a first electrode, and an intermediate material over and directly against the first electrode. The intermediate material includes stabilizing species corresponding to one or both of carbon and boron. The memory cell also has a switching material over and directly against the intermediate material, an ion reservoir material over the switching material, and a second electrode over the ion reservoir material. Some embodiments include methods of forming memory cells.
    Type: Grant
    Filed: June 8, 2016
    Date of Patent: November 15, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Martin Schubert, Shu Qin, Scott E. Sills, Durai Vishak Nirmal Ramaswamy, Allen McTeer, Yongjun Jeff Hu
  • Publication number: 20160322478
    Abstract: Some embodiments include methods of forming charge storage transistor gates and standard FET gates in Which common processing is utilized for fabrication of at least some portions of the different types of gates. FET and charge storage transistor gate stacks may be formed. The gate stacks may each include a gate material, an insulative material, and a sacrificial material. The sacrificial material is removed from the FET and charge storage transistor gate stacks. The insulative material of the FET gate stacks is etched through. A conductive material is formed over the FET gate stacks and over the charge storage transistor gate stacks. The conductive material physically contacts the gate material of the FET gate stacks, and is separated from the gate material of the charge storage transistor gate stacks by the insulative material remaining in the charge storage transistor gate stacks. Some embodiments include gate structures.
    Type: Application
    Filed: July 11, 2016
    Publication date: November 3, 2016
    Inventor: Yongjun Jeff Hu
  • Patent number: 9472663
    Abstract: An n-type field effect transistor includes silicon-comprising semiconductor material comprising a pair of source/drain regions having a channel region there-between. At least one of the source/drain regions is conductively doped n-type with at least one of As and P. A conductivity-neutral dopant is in the silicon-comprising semiconductor material in at least one of the channel region and the at least one source/drain region. A gate construction is operatively proximate the channel region. Methods are disclosed.
    Type: Grant
    Filed: April 6, 2015
    Date of Patent: October 18, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Yongjun Jeff Hu, Allen McTeer
  • Publication number: 20160284996
    Abstract: Some embodiments include a memory cell having a first electrode, and an intermediate material over and directly against the first electrode. The intermediate material includes stabilizing species corresponding to one or both of carbon and boron. The memory cell also has a switching material over and directly against the intermediate material, an ion reservoir material over the switching material, and a second electrode over the ion reservoir material. Some embodiments include methods of forming memory cells.
    Type: Application
    Filed: June 8, 2016
    Publication date: September 29, 2016
    Inventors: Martin Schubert, Shu Qin, Scott E. Sills, Dural Vishak Nirmal Ramaswamy, Allen McTeer, Yongjun Jeff Hu