Abstract: A method of etching a silicon substrate includes providing a silicon substrate including a first surface and a second surface. A plurality of grooves spaced apart from each other are etched from the first surface of the silicon substrate. A dielectric material is deposited on the first surface of the silicon substrate and into the plurality of grooves. A hole through the silicon substrate is etched from the second surface of the substrate to the dielectric material. A portion of the hole is located between the plurality of grooves.

Abstract: A MEMS device includes a silicon substrate. The silicon substrate includes a plurality of dielectric material grooves spaced apart from each other. The silicon substrate also includes a through hole with a portion of the through hole being located between the plurality of dielectric material grooves when viewed from a direction perpendicular to a surface of the silicon substrate.

Abstract: A printhead includes a plurality of liquid channels and a nozzle plate. The nozzle plate includes a plurality of nozzles and an acoustic dampening structure. The acoustic dampening structure includes a plurality of sets of air pockets and liquid flow restrictors. Each set of air pockets and liquid flow restrictors is in fluid communication with a respective one of the plurality of nozzles. Each liquid channel is in fluid communication with the respective one of the plurality of nozzles through the associated liquid flow restrictor. A common liquid supply manifold is in fluid communication with the plurality of liquid chambers.

Abstract: A method of etching a silicon substrate includes providing a silicon substrate including a first surface and a second surface. A plurality of grooves spaced apart from each other are etched from the first surface of the silicon substrate. A dielectric material is deposited on the first surface of the silicon substrate and into the plurality of grooves. A hole through the silicon substrate is etched from the second surface of the substrate to the dielectric material. A portion of the hole is located between the plurality of grooves.

Abstract: A continuous liquid ejection printhead includes a plurality of nozzles having a nozzle to nozzle spacing of X. Each nozzle of the plurality of nozzles is in fluid communication with a liquid supply channel through a liquid dispensing channel. The liquid supply channel includes a liquid inlet. The liquid inlets of the liquid supply channels have a center to center inlet to inlet spacing that is greater than X.

Abstract: A liquid dispenser array structure includes a substrate including a plurality of liquid dispensers. The plurality of liquid dispensers includes a liquid supply channel, a liquid dispensing channel including an outlet opening, and a liquid return channel including a vent located downstream relative to the location of the outlet opening of the liquid dispensing channel. A selectively actuatable first heater heats a portion of the liquid flowing through the liquid supply channel. A selectively actuatable second heater diverts the portion of the liquid previously heated by the first heater toward the outlet opening of the liquid dispensing channel. A liquid supply provides liquid under pressure to the plurality of liquid dispensers.

Abstract: A printhead includes a nozzle plate including a plurality of nozzles and a plurality of liquid chambers. Each liquid chamber is in fluid communication with a respective one of the plurality of nozzles. An acoustic dampening structure includes a plurality of sets of air pockets and liquid flow restrictors. Each liquid chamber is in fluid communication with one of the sets of air pockets and liquid flow restrictors. A common liquid supply manifold is in fluid communication with each liquid chamber through the liquid flow restrictor associated with the liquid chamber.

Abstract: A liquid dispenser includes a first liquid chamber including a nozzle and a second liquid chamber. A flexible membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber. A heater is associated with the second liquid chamber. A liquid supply channel is in fluid communication with the second chamber. A liquid return channel is in fluid communication with the second chamber. A liquid supply provides a liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply. A fluidic impedance structure is positioned in the second liquid chamber between the heater and the liquid return channel.

Abstract: A MEMS device fabrication method includes providing a substrate and a chamber wall material layer on a first surface of the substrate, the chamber wall material layer including a chamber cavity having a sacrificial material located therein. A mask material is deposited on the chamber wall material layer and the sacrificial material and patterned to form a mask pattern including a plurality of discrete portions. The mask material and some of the sacrificial material are removed to transfer the mask pattern including the plurality of discrete portions to the sacrificial material. A membrane material layer is deposited on the chamber wall material layer and the sacrificial material that includes the transferred mask pattern including the plurality of discrete portions. Some of the substrate and the sacrificial material are removed to release the membrane material layer using at least one process initiated from a second surface of the substrate.

Abstract: A method of manufacturing a printhead includes providing a substrate and a filter membrane structure. A first portion of the substrate defines a plurality of nozzles and a second portion of the substrate defines a plurality of liquid chambers. Each liquid chamber of the plurality of liquid chambers is in fluid communication with a respective one of the plurality of nozzles. The filter membrane structure is adhered, for example, laminated, to the second portion of the substrate. Each liquid chamber of the plurality of liquid chambers is in fluid communication with a distinct portion of the filter membrane structure. Pores are formed in the filter membrane structure using a photo-lithography process.

Abstract: A method of dispensing liquid includes providing a carrier liquid under pressure using a first liquid supply that flows from the first liquid supply through a first liquid supply channel through a liquid dispensing channel through a liquid return channel and back to the first liquid supply continuously during a drop dispensing operation. A functional liquid is provided to the liquid dispensing channel through a second liquid supply channel using a second liquid supply. A drop formation device is selectively actuated to form a discrete drop of the functional liquid in the carrier liquid flowing through the liquid dispensing channel. The functional liquid is immiscible in the carrier liquid. The drop ejection device is selectively actuated to divert the discrete drop of the functional liquid and a portion of the carrier liquid flowing through the liquid dispensing channel toward an outlet opening of the liquid dispensing channel.

Abstract: A liquid dispenser includes a first liquid supply that provides a carrier liquid under pressure that flows from the first liquid supply through a first liquid supply channel through a liquid dispensing channel through a liquid return channel and back to the first liquid supply continuously during a drop dispensing operation. A second liquid supply provides a functional liquid to the liquid dispensing channel through a second liquid supply channel. A drop formation device, associated with an interface of the second liquid supply channel and the liquid dispensing channel, is selectively actuated to form a discrete drop of the functional liquid in the carrier liquid flowing through the liquid dispensing channel. The functional liquid is immiscible in the carrier liquid. A drop ejection device is selectively actuated to divert the discrete drop of the functional liquid and a portion of the carrier liquid flowing through the liquid dispensing channel toward the outlet opening of the liquid dispensing channel.

Abstract: A liquid dispenser includes a first liquid chamber and a second liquid chamber. The first liquid chamber includes a nozzle. A heater is associated with the second liquid chamber. A flexible corrugated membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber from each other.

Abstract: A liquid dispensing element array is positioned on a substrate. Each liquid dispensing element includes a liquid dispensing channel positioned on the substrate and an associated diverter member. An outlet opening is positioned on a wall opposite the substrate. Liquid supply and return channels are positioned on the substrate in fluid communication with the liquid dispensing channel. Liquid supply and return passages extend through the substrate in fluid communication with the liquid supply and return channels, respectively. Liquid flows from the supply passage through the supply channel, through the dispensing channel, through the return channel to the return passage in the array of liquid dispensing elements. A liquid drop is ejected through the outlet opening of the liquid dispensing channel of one of the liquid dispensing elements by selectively actuating the diverter member of the liquid dispensing element to divert a portion of the flowing liquid through the outlet opening.

Abstract: A printhead and a method of ejecting liquid droplets are provided. The method includes providing a printhead operable to eject liquid drops having a plurality of drop volumes Vi, for i equal to 1 through n, where n?2, with Vj>Vi when j>i. One of the plurality of drop volumes is a minimum drop volume Vmin, and a difference in drop volumes between successively larger drops equals (Vk+1?Vk) which is less than Vmin, for k equal to 1 through n?1. The method also includes ejecting liquid drops through the printhead.

Abstract: A liquid dispenser includes first and second liquid chambers. The second liquid chamber is in fluid communication with liquid supply and liquid return channels. A flexible membrane separates and fluidically seals the first and second liquid chambers from each other. The flexible membrane, residing in a first position, includes a residual compressive stress that exceeds an onset buckling stress of the flexible membrane. A heater, associated with the second liquid chamber, is selectively actuated to create a pressure pulse in a liquid that causes the flexible membrane to move from the first position to a second position to eject liquid through a nozzle of the first liquid chamber. In one embodiment, a liquid supply provides liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply during a drop dispensing operation.

Abstract: A liquid dispenser includes a first liquid chamber and a second liquid chamber. The first liquid chamber includes a nozzle. A liquid supply channel is in fluid communication with the second chamber. A liquid return channel is in fluid communication with the second chamber. A heater is associated with the second liquid chamber. A flexible membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber relative to each other. A liquid supply provides a liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply.

Abstract: A liquid dispenser includes a first liquid chamber and a second liquid chamber. The first liquid chamber includes a nozzle. The second chamber is in fluid communication with a liquid supply channel and a liquid return channel. A flexible membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber from each other. The flexible membrane includes a bimorph actuator that causes the flexible membrane to move from a first position to a second position to eject liquid through the nozzle of the first liquid chamber. In one example embodiment, a liquid supply provides a liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply during a drop dispensing operation.

Abstract: A printhead includes a substrate and monolithic liquid jetting structure including a nozzle, deflection mechanism, and catcher. The nozzle, through which a liquid jet is ejected in a direction substantially parallel to a first surface of the substrate, includes material layers formed on the first surface of the substrate. At least one of the material layers of the nozzle includes a drop forming mechanism actuated to form liquid drops from the liquid jet. The deflection mechanism is associated with the liquid jet and deflects portions of the liquid jet between first and second paths. Liquid drops formed from portions of the liquid jet following the first path and the second path continue to follow the first path and the second path, respectively. The catcher, including a material layer formed on the first surface of the substrate, collects liquid drops following one of the paths.

Abstract: A printhead includes a substrate, catcher, and monolithic liquid jetting structure including a nozzle and deflection mechanism. A liquid jet is ejected through the nozzle in a direction substantially parallel to a first surface of the substrate. The nozzle includes material layers formed on the first surface of the substrate. At least one of the material layers of the nozzle includes a drop forming mechanism actuated to form liquid drops from the liquid jet. The deflection mechanism is associated with the liquid jet and deflects portions of the liquid jet between first and second paths. The liquid drops formed from portions of the liquid jet following the first path and second path continue to follow the first path and second path, respectively. The catcher includes a liquid drop contact surface including a portion of the first surface of the substrate and collects liquid drops following the second path.