Abstract: A semiconductor integrated circuit includes: a semiconductor base body of a first conductivity-type; a bottom surface electrode to which a first potential is applied, the bottom surface electrode being provided on a bottom surface of the semiconductor base body; a first well of a second conductivity-type to which a second potential lower than the first potential is applied, the first well being provided on a top surface side of the semiconductor base body; a second well of the first conductivity-type provided in the first well; and an edge structure provided in the first well and configured to supply a third potential higher than the second potential to the second well.

Abstract: A semiconductor device includes an output-stage element and a detection element, each of the output-stage element and the detection element including: a channel-formation region deposited at an upper part of a drift region; a main electrode region deposited at an upper part of the channel-formation region; and a gate electrode buried via a gate insulating film in one or more first trenches in contact with the main electrode region, the channel-formation region, and the drift region, wherein the first trenches used in common with the detection element and the output-stage element extend in a planar pattern, and a plurality of second trenches extending in parallel to each other in a direction perpendicular to the first trenches interpose the detection element so as to separate the channel-formation region of the output-stage element and the channel-formation region of the detection element from each other.

Abstract: A semiconductor device includes: a substrate of a first conductivity type; a first diffusion layer of a second conductivity type provided in an upper part of the substrate; a conductive layer embedded in a trench provided in an upper part of the first diffusion layer via an insulating film, the conductive layer forming a capacitive element together with the first diffusion layer and the insulating film; and a second diffusion layer of the first conductivity type provided in an upper part of the first diffusion layer so as to be shallower than the trench and to constitute a resistive element, wherein at least a part of the trench and at least a part of the second diffusion layer are alternately arranged side by side in a plan view.

Abstract: A semiconductor resistance device includes a polysilicon resistance region; a first contact region in the resistance region, the first contact region having the same conductivity type as the resistance region and having a higher impurity concentration than the resistance region; a first wiring electrically connected to one end of the resistance region via a plurality of first vias; and a second wiring electrically connected to the other end of the resistance region via a plurality of second vias. At least one of the plurality of first vias and the plurality of second vias is in contact with the first contact region so as to form a low resistance contact structure, and at least another one of the plurality of first vias and the plurality of second vias forms a high resistance contact structure that has a contact resistance higher than a contact resistance of the low resistance contact structure.

Abstract: A semiconductor device includes: a semiconductor base body of a first conductivity-type; a first electrode electrically connected to the semiconductor base body; a first semiconductor region of a second conductivity-type provided at an upper part of the semiconductor base body; a second semiconductor region of the first conductivity-type provided at an upper part of the first semiconductor region; a second electrode electrically connected to the first semiconductor region; an insulating film provided on a top surface of the second semiconductor region; and a passive element provided on a top surface of the insulating film.

Abstract: A semiconductor device includes: a semiconductor base body of a first conductivity type; a high-potential-side terminal connected to the semiconductor base body; a horizontal control circuit element deposited at an upper part of the semiconductor base body; a signal input terminal connected to a control electrode of the control circuit element; a low-potential-side terminal connected to a main electrode region of the control circuit element; an input-side diode connected in a forward direction between the signal input terminal and the semiconductor base body; and a vertical protective element connected between the semiconductor base body and the low-potential-side terminal.

Abstract: A method of manufacturing a semiconductor integrated circuit includes forming a body region having a second conductivity type in an upper portion of a support layer having a first conductivity type and forming a well region having a second conductivity type in an upper portion of the support layer. An output side buried layer is formed inside the body region and a circuit side buried layer is formed inside the well region. A trench is dug to penetrate through the body region and a control electrode structure is buried in the gate trench. First and second terminal regions are formed on the well region and an output terminal region is formed on the body region. An output stage element having the output terminal region is controlled by a circuit element including the first and second terminal regions.

Abstract: A semiconductor device includes: a semiconductor base body of a first conductivity-type; a first electrode electrically connected to the semiconductor base body; a first semiconductor region of a second conductivity-type provided at an upper part of the semiconductor base body; a second semiconductor region of the first conductivity-type provided at an upper part of the first semiconductor region; a second electrode electrically connected to the first semiconductor region; an insulating film provided on a top surface of the second semiconductor region; and a passive element provided on a top surface of the insulating film.

Abstract: A semiconductor device includes an output-stage element and a detection element, each of the output-stage element and the detection element including: a channel-formation region deposited at an upper part of a drift region; a main electrode region deposited at an upper part of the channel-formation region; and a gate electrode buried via a gate insulating film in one or more first trenches in contact with the main electrode region, the channel-formation region, and the drift region, wherein the first trenches used in common with the detection element and the output-stage element extend in a planar pattern, and a plurality of second trenches extending in parallel to each other in a direction perpendicular to the first trenches interpose the detection element so as to separate the channel-formation region of the output-stage element and the channel-formation region of the detection element from each other.

Abstract: A method of manufacturing a semiconductor integrated circuit, includes: forming a first well region having a second conductivity type in an upper portion of a support layer having a first conductivity type; forming an oxide film on the first well region by a thermal oxidation method to decrease a concentration of impurities at an top surface of top surface side of the first well region; removing the oxide film; forming a second well region having the first conductivity type in an upper portion of the first well region; and merging a semiconductor element having a main electrode region having the second conductivity type in the second well region.

Abstract: A semiconductor integrated circuit includes: implanting impurity ions of a p-type at different implantation positions by multiple implantation in a part of an upper portion of a semiconductor layer of an n?-type to form first ion implantation regions; implanting the impurity ions of the p-type at different implantation positions by multiple implantation in another part of the upper portion of the semiconductor layer to form second ion implantation regions; activating the impurity ions in the first ion implantation regions to form a well region, and activating the impurity ions in the second ion implantation regions to form a body region; forming a control element including first and second terminal regions of the n+-type in an upper portion of the well region; and forming an output-stage element including an output terminal region of the n+-type in an upper portion of the body region to be controlled by the control element.

Abstract: A semiconductor integrated circuit includes: a semiconductor base body of a first conductivity-type; a bottom surface electrode to which a first potential is applied, the bottom surface electrode being provided on a bottom surface of the semiconductor base body; a first well of a second conductivity-type to which a second potential lower than the first potential is applied, the first well being provided on a top surface side of the semiconductor base body; a second well of the first conductivity-type provided in the first well; and an edge structure provided in the first well and configured to supply a third potential higher than the second potential to the second well.

Abstract: A method of manufacturing a semiconductor integrated circuit includes forming a body region having a second conductivity type in an upper portion of a support layer having a first conductivity type and forming a well region having a second conductivity type in an upper portion of the support layer. An output side buried layer is formed inside the body region and a circuit side buried layer is formed inside the well region. A trench is dug to penetrate through the body region and a control electrode structure is buried in the gate trench. First and second terminal regions are formed on the well region and an output terminal region is formed on the body region. An output stage element having the output terminal region is controlled by a circuit element including the first and second terminal regions.

Abstract: In a method of manufacturing a semiconductor device, selectively forming a first semiconductor region and a fourth semiconductor region to be away from each other in a surface layer of a first principal surface of a semiconductor substrate at a same impurity implantation and impurity diffusion process, selectively forming a second semiconductor region in the first semiconductor region and selectively forming a fifth semiconductor region in the fourth semiconductor region at a same impurity implantation and impurity diffusion process, and selectively forming a third semiconductor region that penetrates the first semiconductor region in a depth direction and selectively forming a sixth semiconductor region that penetrates the fourth semiconductor region in the depth direction at a same impurity implantation and impurity diffusion process.

Abstract: A semiconductor integrated circuit includes: an n?-type support layer; a p-type well region provided in an upper portion of the support layer; a p+-type circuit side buried layer provided inside the well region; an n+-type first and second terminal regions provided in an upper portion of the well region and above the circuit side buried layer; a p-type body region provided in an upper portion of the support layer; a control electrode structure provided in a gate trench; a p+-type output side buried layer provided inside the body region so as to be in contact with the control electrode structure; and an n+-type output terminal region provided in an upper portion of the body region and above the output side buried layer, wherein an output stage element having the output terminal region is controlled by a circuit element including the first and second terminal regions.

Abstract: In a method of manufacturing a semiconductor device, selectively forming a first semiconductor region and a fourth semiconductor region to be away from each other in a surface layer of a first principal surface of a semiconductor substrate at a same impurity implantation and impurity diffusion process, selectively forming a second semiconductor region in the first semiconductor region and selectively forming a fifth semiconductor region in the fourth semiconductor region at a same impurity implantation and impurity diffusion process, and selectively forming a third semiconductor region that penetrates the first semiconductor region in a depth direction and selectively forming a sixth semiconductor region that penetrates the fourth semiconductor region in the depth direction at a same impurity implantation and impurity diffusion process.

Abstract: A semiconductor integrated circuit includes: implanting impurity ions of a p-type at different implantation positions by multiple implantation in a part of an upper portion of a semiconductor layer of an n?-type to form first ion implantation regions; implanting the impurity ions of the p-type at different implantation positions by multiple implantation in another part of the upper portion of the semiconductor layer to form second ion implantation regions; activating the impurity ions in the first ion implantation regions to form a well region, and activating the impurity ions in the second ion implantation regions to form a body region; forming a control element including first and second terminal regions of the n?-type in an upper portion of the well region; and forming an output-stage element including an output terminal region of the n+-type in an upper portion of the body region to be controlled by the control element.

Abstract: In a circuit portion, a p+-type diffusion region penetrates, in the depth direction, an n?-type base region on the front side of a base substrate and surrounds a MOSFET. In a protective element portion on the same substrate, a p++-type contact region, an n+-type diffusion region, and a p+-type diffusion region are selectively provided in a p+-type diffusion region on the front side of the base substrate. The p+-type diffusion region penetrates the p?-type diffusion region in the depth direction, on the outer periphery of the p?-type diffusion region. An n+-type source region, the p+-type diffusion region, the p++-type contact region, and the n+-type diffusion region are connected to a GND terminal. The rear surface of the substrate is connected to a VCC terminal. A snapback start voltage of a parasitic bipolar element of the protective element portion is lower than that of the circuit portion.

Abstract: A p+-type anode region that forms a contact of an anode electrode on a front surface of a semiconductor substrate and a p+-type starting substrate of a rear surface of the semiconductor substrate is formed on the front surface of the semiconductor substrate, whereby an up-anode type vertical diode is configured. The semiconductor substrate has a p?-type epitaxial layer stacked on the p+-type starting substrate, and a p-type transition layer in a surface layer of the p?-type epitaxial layer, facing the p+-type starting substrate. A p-type anode diffusion region is provided between a p+-type surface anode region and the p-type transition layer, and contacts the p+-type surface anode region and the p-type transition layer. A p-type impurity concentration of the p-type anode diffusion region decreases from an interface with the p+-type surface anode region toward an interface with the p-type transition layer.

Abstract: A semiconductor integrated circuit includes: an n?-type support layer; a p-type well region provided in an upper portion of the support layer; a p+-type circuit side buried layer provided inside the well region; an n+-type first and second terminal regions provided in an upper portion of the well region and above the circuit side buried layer; a p-type body region provided in an upper portion of the support layer; a control electrode structure provided in a gate trench; a p+-type output side buried layer provided inside the body region so as to be in contact with the control electrode structure; and an n+-type output terminal region provided in an upper portion of the body region and above the output side buried layer, wherein an output stage element having the output terminal region is controlled by a circuit element including the first and second terminal regions.