Abstract: Semiconductor processing equipment includes an ID-card removing robot, an ID-card stocking device, and an ID-card attaching robot so that the management of ID cards is performed inside the equipment. Thus, the present invention makes it possible to reduce equipment size and achieve highly efficient factory automation. Furthermore, in a semiconductor processing equipment module according to the present invention, each item of semiconductor processing equipment has its own ID-card stocking device. As a result, the number of case carriers can be reduced and a space reduction with increased factory automation can be easily realized.

Abstract: As a wiring for semiconductor devices, the wiring consisting of an Al-Si-Cu alloy film is excellent in the electromigration resistance but is inferior in the stressmigration resistance. In order to compensate this aspect a laminated film consisting of an Al-Si-Cu alloy film and a refractory metal silicide film began to be used as the wiring, but a wiring thus obtained has a weakness in that its electromigration resistance deteriorates. However, it is possible to suppress the deterioration in the electromigration resistance while maintaining the stressmigration resistance by adding Cu to the refractory metal silicide film. In particular, when the refractory metal silicide film is a tungsten silicide film, the concentration of Cu is preferable that it is in the range of 0.1 to 1.0 wt. %.

Abstract: A plunger pump for supplying solution in accordance with an extrusion action of a plunger within a pump chamber. The plunger pump includes a cleaning chamber sealed by a seal member around and relative to the plunger, with a cleaning liquid inlet-side flow conduit and a cleaning liquid outlet-side flow conduit for communicating with the cleaning chamber, respectively. A mechanism isolates one of the inlet- and outlet-side flow conduits from the atmosphere and releases the other to an atmosphere under a condition where the cleaning liquid inlet- or outlet-side flow conduits are filled with the cleaning liquid. If the seal member in sliding contact with the plunger is degraded or aged, it is possible to observe a leakage of the liquid from the pump chamber along a sealing face between the seal member and the plunger.

Abstract: A veneer clipper is adapted to make successive cuts continuously while a veneer sheet is being moved forward through a nip formed by a pair of constantly rotating anvil rolls disposed with their axes extending in parallel to each other across the direction in which the veneer sheet is fed. The clipper includes a pair of knife blades disposed on the downstream side of the nip, having cutting edges thereof presented along the nip, and adapted to pivot together in alternate directions between two extreme positions where the cutting edges are placed in engagement with the peripheries of the respective anvil rolls. The cutting edges of the knife blades are of substantially the same length and extend obliquely at an angle with respect to an imaginary line parallel to the axes of the anvil rolls.

Abstract: A veneer clipper of rotary type is disclosed wherein a cutting knife carried by an intermittently rotatable knife carrage roll cuts through a veneer sheet moving past an anvil roll. The clipper has a plurality rotatable back-up rolls which are movable reciprocally toward and away from the carriage roll. In their operative position, the back-up rolls are pressed against the circumferential surface of the carriage roll for bracing the same to counteract the reactional pressure exerted by the anvil roll during veneer cutting. There is provided means for driving reciprocally the back-up rolls in conjunction with the intermittent rotation of the knife carriage in such a way that the back-up rolls may be kept in pressing contact with the knife carriage roll at least while the veneer sheet is being cut by the knife and then moved away from the surface after each such cut.

Abstract: A veneer sheet and an adhesive coated sheet are placed on a piling table. Two vertically arranged conveyors each independently conveys one veneer sheet and stops at predetermined position, pressing member presses two sheets simultaneously vertically downwards onto the piling table where the sheets are placed.