Abstract: A sample observation apparatus includes a light source unit, an illumination optical system, an observation optical system, a light detection element, a scanning unit, a holding member, and an image processing device. A light spot is formed by the illumination optical system. The scanning unit moves the light spot and the holding member relative to each other. A pupil of the observation optical system and the light detection element are positioned at a position conjugate to a pupil position of the illumination optical system. The image processing device generates an image of a sample based on a predetermined image and a filter, and the predetermined image is an image based on a signal output from the light detection element. The filter includes a first region and a second region, and a value in the first region is greater than a value in the second region.

Abstract: A sample observation apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and an image processing apparatus. The scanning unit relatively moves the light spot and the sample. An optical member is disposed. The illumination optical system and the detection optical system are disposed such that an image of a pupil of the illumination optical system is formed at a pupil position of the detection optical system. The image of the pupil of the illumination optical system is decentered relative to a pupil of the detection optical system due to refraction caused by the sample. The illumination optical system, the detection optical system, and the optical member are configured such that quantity of light passing through the pupil of the detection optical system changes by decentering.

Abstract: A measurement apparatus includes a laser apparatus, a branch that branches a frequency-modulated laser beam into a reference light and a measurement light, a beat signal generator that generates a beat signal by mixing the reference light and a reflected light that is the measurement light radiated onto an object to be measured, a first analyzer that analyses a first signal component corresponding to a difference in a propagation distance between the reference light and the measurement light on the basis of the beat signal, a second analyzer that analyses a second signal component corresponding to a cavity frequency of an optical cavity on the basis of the beat signal, and calculation circuitry that calculates the difference in the propagation distance between the reference light and the measurement light.

Abstract: A data acquisition apparatus includes a light source, a first beam splitter, a predetermined beam splitter, a first light deflector, a second light deflector, a first measuring unit, a second measuring unit, a second beam splitter, and a photodetector. A second measurement optical path is positioned in a first direction and a reference optical path is positioned in a second direction. The predetermined beam splitter is disposed in the second measurement optical path or the reference optical path. A first measurement optical path is positioned between the predetermined beam splitter and the photodetector. The first light deflector and the first measuring unit are disposed in the first measurement optical path, and the second light deflector and the second measuring unit are disposed in the second measurement optical path. The first measurement optical path and the second measurement optical path intersect.

Abstract: A measurement apparatus includes a laser apparatus, a branching part that branches a frequency-modulated laser beam output by the laser apparatus into a reference light and a measurement light; a beat signal generation part that generates a beat signal by mixing a reflected light and the reference light, a conversion part that converts the beat signal into a digital signal at a first sampling rate and frequency-analyses it, an extraction part that extracts a signal component corresponding to a cavity frequency from the frequency-modulated laser beam, a digital filter that digitally filters the extracted signal component at a second sampling rate; and a calculation part that calculates a difference in a propagation distance between the reference light and the measurement light.

Abstract: A measurement apparatus, including: a laser apparatus that outputs a frequency-modulated laser beam with a plurality of modes; a branching part that branches the frequency-modulated laser beam into a reference light and a measurement light; a beat signal generation part that generates a plurality of beat signals by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured; a conversion part that converts the plurality of beat signals into digital signals by sampling the beat signals at a frequency greater than or equal to four times a resonator frequency of the laser resonator; and a calculation part that calculates a distance from the measurement apparatus to the object to be measured on the basis of the digital signals is provided.

Abstract: A focusing method includes a step of preparing a microscope, a step of mounting a sample, and a predetermined processing step, the predetermined processing step includes a step of receiving light emitted from the observation optical system, a step of obtaining the quantity of light based on light from a predetermined region of the received light, a step of calculating a difference or a ratio between the quantity of light in the predetermined region and the quantity of light as a reference, a step of comparing a calculation result with a threshold, and a step of changing the distance between the sample and the observation optical system, and in the step of preparing, a partial region of illumination light is shielded or darkened, and when the result of the calculation is equal to or smaller than the threshold, the predetermined processing step is terminated.

Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as to include an optical axis at a pupil position of an illumination optical system. Light transmitted through the sample is incident on the observation optical system. The predetermined processing step includes a step of receiving light emerged from the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.

Abstract: A specimen observation apparatus includes: a light source; an illumination optical system; a stage; an imaging optical system; and a reflection member disposed at a position opposed to the imaging optical system across the stage. The illumination optical system is disposed so as to apply illumination light from the light source to a specimen. The imaging optical system is disposed at a position at which the illumination light that is transmitted through the specimen and thereafter reflected by the reflection member to be transmitted through the specimen again enters, and is configured to form an optical image of the specimen. The optical image is formed in a state in which a position of the specimen and a focus position of the imaging optical system are different from each other.

Abstract: A sample shape measuring apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and a processing apparatus. A scanning unit relatively moves a light spot and the sample. Illumination light applied to the sample is transmitted through the sample, and light transmitted through the sample is incident on the detection optical system. The light detection element receives light. The illumination optical system or the detection optical system includes an optical member. The processing apparatus obtains a quantity of light based on a received light, calculates at least one of a difference and a ratio between the quantity of light and a reference quantity of light, calculates an amount of tilt at a surface of the sample, and calculates a shape of the sample from the amount of tilt.

Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as not to include the optical axis at a pupil position of the illumination optical system and is set such that the illumination light is applied to part of the inside of the pupil and the outside of the pupil at a pupil position of the observation optical system. The predetermined processing step includes a step of receiving light, a step of obtaining the quantity of light, a step of calculating the difference or the ratio between the quantity of light and a reference quantity of light, and a step of calculating the amount of tilt in the surface of the sample from the difference or the ratio.

Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set such that the illumination light is applied to part of inside of a pupil and outside of the pupil, a light intensity of the illumination light incident on the predetermined illumination region differs between a center and a periphery. The predetermined processing step includes a step of receiving light transmitted through the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.

Abstract: A porous material according to an embodiment of the present invention is a porous material having a large number of fibrous skeletons containing polytetrafluoroethylene as a main component, in which another fluororesin is evenly present on outer peripheral surfaces of fibers of the large number of fibrous skeletons, and the other fluororesin is a tetrafluoroethylene/perfluorodioxole copolymer, a tetrafluoroethylene/perfluoromethyl vinyl ether copolymer, a tetrafluoroethylene/perfluoroethyl vinyl ether copolymer, a tetrafluoroethylene/perfluoropropyl vinyl ether copolymer, or a combination of these.

Abstract: A sample observation apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and an image processing apparatus. The scanning unit relatively moves the light spot and the sample. An optical member is disposed. The illumination optical system and the detection optical system are disposed such that an image of a pupil of the illumination optical system is formed at a pupil position of the detection optical system. The image of the pupil of the illumination optical system is decentered relative to a pupil of the detection optical system due to refraction caused by the sample. The illumination optical system, the detection optical system, and the optical member are configured such that quantity of light passing through the pupil of the detection optical system changes by decentering.

Abstract: A sample shape measuring apparatus includes a light source unit, an illumination optical system, a detection optical system, a light detection element, and a processing apparatus. A scanning unit relatively moves a light spot and the sample. Illumination light applied to the sample is transmitted through the sample, and light transmitted through the sample is incident on the detection optical system. The light detection element receives light. The illumination optical system or the detection optical system includes an optical member. The processing apparatus obtains a quantity of light based on a received light, calculates at least one of a difference and a ratio between the quantity of light and a reference quantity of light, calculates an amount of tilt at a surface of the sample, and calculates a shape of the sample from the amount of tilt.

Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set so as to include an optical axis at a pupil position of an illumination optical system. Light transmitted through the sample is incident on the observation optical system. The predetermined processing step includes a step of receiving light emerged from the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.

Abstract: A sample observation device includes an illumination optical system and an observation optical system, and the illumination optical system includes a light source, a condenser lens, and an aperture member, and the observation optical system includes an objective lens and an imaging lens, and the aperture member has a light-shielding part or a darkening part, and a transmission part, and the transmission part is located outside of an outer edge of the light-shielding part or the darkening part, and an image of an inner edge of the transmission part is formed inside of an outer edge of a pupil of the objective lens, and an image of an outer edge of the transmission part is formed outside of the outer edge of the pupil of the objective lens, and the following conditional expression is satisfied. 0.005?Ratio?0.9.

Abstract: A sample observation device includes an illumination optical system and an observation optical system. The illumination optical system includes a light source, a condenser lens, and an aperture member. The observation optical system includes an objective lens and an imaging lens. The aperture member has a light-shielding part or a darkening part, and a transmission part. The transmission part is disposed asymmetrically with respect to an optical axis of the illumination optical system. An image of an inner edge of the transmission part is formed inside of an outer edge of a pupil of the objective lens. An image of an outer edge of the transmission part is formed outside of the outer edge of the pupil of the objective lens.

Abstract: A sample observation method includes an acquisition of for acquiring an electronic image of a sample, and a subtraction step of subtracting a DC component from a signal of the electronic image, and the acquisition step is performed in a state of bright-field observation, the electronic image at the subtraction step is an image acquired in a first predetermined state, and in the first predetermined state, at least a position of the sample and a in-focus position of an image forming optical system are different.

Abstract: A sample shape measuring method includes a step of preparing illumination light that is to be passed through a predetermined illumination region, a step of irradiating the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set such that an area of a region of the illumination light passing through a pupil of an observation optical system is smaller than an area of the pupil of the observation optical system. The predetermined processing step includes a step of receiving light emerged from the observation optical system, a step of computing a position of an image of the predetermined illumination region from light received, a step of computing a difference between the position of the image of the predetermined illumination region and a reference position, and a step of calculating an amount of inclination at a surface of the sample, from the difference calculated.