Abstract: A method of manufacturing an ink jet print head is provided. The method forms, on a silicon monocrystailine substrate, a first etching pattern for forming pressure generating chambers and a second etching pattern located opposite to the first etching pattern with respect to ink supply ports. The second etching pattern is narrower than the first etching pattern and is located within opposite lines defining the first etching pattern. The method also anisotropically etches the silicon monocrystailline from the surface thereof, on which the first and second etching patterns are formed, to the other surface thereof and anisotropically etches areas of the silicon monocrystalline substrate. Also, each of the areas is located between the first and second etching patterns, to a depth suitable for the ink supply ports.

Abstract: A liquid jet head includes: a passage-forming substrate provided with at least two rows of pressure generating chambers each communicating with a nozzle orifice; and piezoelectric elements for causing pressure change in the pressure generating chambers. The piezoelectric elements are provided on one side of the passage-forming substrate with a vibration plate interposed therebetween. On a joint plate joined to the piezoelectric element side of the passage-forming substrate, driving ICs for driving the piezoelectric elements are provided in regions facing the respective rows of the pressure generating chambers. For each row of the pressure generating chambers, at least one penetrated hole, in which lead electrodes led from the piezoelectric elements are exposed, is provided in a region of the joint plate, the region corresponding to a region between the rows of the pressure generating chambers. A beam portion is formed between the adjacent penetrated holes.

Abstract: Disclosed are a liquid-jet apparatus, and the liquid-jet head unit including: a liquid-jet head in which nozzle orifices for ejecting ink droplets are arranged in parallel lines; and a head case fixed to the liquid-jet head. A linear expansion coefficient in a reference direction, which is a direction in which the nozzle orifices of the head case are arranged in parallel lines, is set less than a linear expansion coefficient thereof in a direction orthogonal to the reference direction.

Abstract: The present invention includes a passage-forming substrate on which pressure generating chambers communicating with nozzle orifices ejecting a liquid are respectively formed separately from each other, and actuator devices each including a vibration plate provided on the passage-forming substrate, wherein, a protective plate is jointed to a side of the passage-forming substrate, the side facing the actuator devices, and driver circuits for driving the actuator devices are provided on the protective plate, and wherein each of the driver circuits is provided with individual terminals to which individual electrodes of the respective actuator devices are electrically connected, and connection terminals to which an external wiring line is directly connected, and each of the driver circuits is also provided with a common terminal electrically connected to a common electrode common to more than one of the actuator devices, and with a common connection terminal which is connected to the common terminal through a cond

Abstract: A liquid-jet head is provided. In the liquid-jet head, a lower electrode, as a common electrode common to a plurality of piezoelectric elements, is continuously formed as far as an outer region opposite the piezoelectric elements, an auxiliary electrode layer is provided which comprises the same layers as layers constituting a lead-out electrode, and which is electrically connected to the lower electrode located outwardly of the region opposite the piezoelectric elements, a first insulation film at least in the vicinity of an end portion of a passage-forming substrate in a direction parallel to the arrangement of the piezoelectric elements is provided with a penetrated portion in a region opposite the auxiliary electrode layer, and the auxiliary electrode layer is in contact with the lower electrode via the penetrated portion provided in the first insulation film.

Abstract: A bonding structure comprising bonding wires having a diameter A, bonding pads to which the bonding wires are connected, and bonding portions which, as sites of connection, are arranged on a straight line, and wherein the pitch P of the bonding portions is set at XA+? or more where 1.80?X?2.1, A is as defined above, and ? denotes a variation for the bonding procedure.

Abstract: An ink jet recording head comprises a nozzle forming member provided with a plurality of nozzle orifices for jetting ink, a channel forming substrate provided with a plurality of pressure generating chambers communicated with the associated nozzle orifices, one face of which is bonded to the nozzle forming member, a plurality of piezoelectric elements provided on an face of the channel forming substrate which is opposed to the face bonded to the nozzle forming substrate for causing pressure change to occur in the associated pressure generating chambers, and a reservoir forming member bonded to the face of the channel forming substrate on which the piezoelectric elements are provided, the reservoir forming member having a reservoir section forming at least a part of a reservoir communicated with the pressure generating chambers for supplying ink thereto and a piezoelectric element holding section for defining a space in an area facing the piezoelectric elements such an extent that motion of the respective piez

Abstract: Disclosed are a method f manufacturing a silicon device and a method of manufacturing a liquid jet head, which are capable of surely preventing damage of a piezoelectric element in manufacturing. In forming a thin-film pattern on one surface of a silicon wafer 100, a first moisture permeation preventive layer 96, which is so as to surround the entire thin-film pattern of the silicon wafer 100, is formed in the same layer as a first conductive layer 96 on the silicon wafer 100, a second moisture permeation preventive layer 114 having a narrower width than the first moisture permeation preventive layer 96 is formed in the same layer as an insulation layer 100 on the first moisture permeation preventive layer 96, and a third moisture permeation preventive layer 121 is formed in the same layer as a second conductive layer 120 on the second moisture permeation preventive layer 114 so as to cover the second moisture permeation preventive layer 114. Thus, a moisture permeation preventive pattern 130 is formed.

Abstract: Disclosed is a liquid-jet head and a Liquid-jet apparatus, which are capable of reliably supplying a driving voltage to a driving IC, increasing the number of arrays of nozzle orifices, and being made small-sized.

Abstract: In order to provide a silicon wafer break pattern that stabilizes the location and shape of the breaks at weak spots of the break pattern and that reduces waste, the through-holes of the break pattern is disposed along a scribe line, a first group of the through-holes are substantially disposed on only a first side of the scribe line, and a second group of the through-holes are substantially disposed on only a second side of the scribe line.

Abstract: Provided is an ink-jet recording head that prevents a vibration plate thereof from damage attributed to drive of a piezoelectric element, and an ink-jet recording apparatus. There are provided within a region facing the pressure generating chamber, a piezoelectric active portion, and a piezoelectric non-active portions, the piezoelectric non-active portions being provided on both end portions of the piezoelectric active portion in a longitudinal direction thereof. An electrode wiring is drawn out of an upper electrode which is provided on one end portion in the longitudinal direction of the pressure generating chamber. There is also provided a protection layer on the other end portion in the longitudinal direction of the pressure generating chamber for protecting the vibration plate. Rigidity of the vibration plate is thereby increased.

Abstract: A liquid jet head includes: a passage-forming substrate provided with at least two rows of pressure generating chambers each communicating with a nozzle orifice; and piezoelectric elements for causing pressure change in the pressure generating chambers. The piezoelectric elements are provided on one side of the passage-forming substrate with a vibration plate interposed therebetween. On a joint plate joined to the piezoelectric element side of the passage-forming substrate, driving ICs for driving the piezoelectric elements are provided in regions facing the respective rows of the pressure generating chambers. For each row of the pressure generating chambers, at least one penetrated hole, in which lead electrodes led from the piezoelectric elements are exposed, is provided in a region of the joint plate, the region corresponding to a region between the rows of the pressure generating chambers. A beam portion is formed between the adjacent penetrated holes.

Abstract: In an ink jet print head, a fluid passage forming substrate includes pressure generating chambers being trapezoidal in shape, each pressure generating chamber having walls substantially parallel to the flowing direction of ink, and no stagnation of ink is present in the pressure generating chambers. The pressure generating chambers' walls include first walls vertical to the surface of the silicon monocrystalline substrate and oriented in the orientation of the pressure generating chambers, and second walls slanted at an angle of 35° with respect to the surface of the substrate, the second walls being formed at both ends of each pressure generating chamber. An elastic plate is fastened onto first opening-formed sides of the pressure generating chambers and piezoelectric layers for expanding and contracting the pressure generating chambers are mounted on the surface of the elastic plate.

Abstract: Disclosed are a liquid-jet recording head and a liquid-jet recording apparatus, which are capable of retaining a fine liquid ejecting characteristic and obtaining a stable liquid ejecting characteristic.

Abstract: Disclosed are a liquid-jet head that is capable of maintaining ejection characteristics of liquid droplets, obtaining stable ink ejection characteristics, and arraying piezoelectric elements in high density, and a liquid-jet apparatus. An ink-jet recording head includes: a passage-forming substrate in which pressure generating chambers communicating with nozzle orifices are formed; and piezoelectric elements for generating pressure changes in the pressure generating chambers, which are provided on one surface side of the passage-forming substrate with vibration plate interposed therebetween. In the ink-jet recording head, a resistance reduction portion is provided to reduce a resistance of a common electrode common to the plurality of piezoelectric elements when a voltage is applied to the piezoelectric elements.

Abstract: Disclosed are a liquid-jet head that is capable of arraying pressure generating chambers in high density and achieving miniaturization thereof and a liquid-jet apparatus. In the liquid-jet head, a joining plate 30 joined onto piezoelectric elements 300 side of a passage-forming substrate 10 are provided, on which a drive circuit 110 for driving the piezoelectric elements 300 is mounted, a penetrated hole 33 penetrating the joining plate 30 in a thickness direction is provided in a portion corresponding to a space between rows of pressure generating chambers 12 of the joining plate 30, extracted wirings 90 extracted from individual piezoelectric elements 300 are extended to a portion corresponding to the penetrated hole 33, and the extracted wirings 90 and a drive circuit 110 are electrically connected to each other with conductive wires 120 extended through the penetrated hole 33. Thus, the area of the penetrated hole 33 is suppressed to be small.

Abstract: A method for manufacturing an ink jet print head includes forming a fluid passage forming substrate. The substrate has pressure generating chambers that are trapezoidal in shape and are formed by anisotropically etching a silicon monocrystalline substrate.

Abstract: Disclosed are an ink-jet recording head, in which nozzles can be arrayed in high density and a manufacturing cost thereof is reduced, and an ink-jet recording apparatus.

Abstract: In order to provide a silicon wafer break pattern that stabilizes the location and shape of the breaks at weak spots of the break pattern and that reduces waste, the through-holes of the break pattern is disposed along a scribe line, a first group of the through-holes are substantially disposed on only a first side of the scribe line, and a second group of the through-holes are substantially disposed on only a second side of the scribe line.

Abstract: Disclosed are a method f manufacturing a silicon device and a method of manufacturing a liquid jet head, which are capable of surely preventing damage of a piezoelectric element in manufacturing, In forming a thin-film pattern on one surface of a silicon wafer 100, a first moisture permeation preventive layer 96, which is so as to surround the entire thin-film pattern of the silicon wafer 100, is formed in the same layer as a first conductive layer 96 on the silicon wafer 100, a second moisture permeation preventive layer 114 having a narrower width than the first moisture permeation preventive layer 96 is formed in the same layer as an insulation layer 100 on the first moisture permeation preventive layer 96, and a third moisture permeation preventive layer 121 is formed in the same layer as a second conductive layer 120 on the second moisture permeation preventive layer 114 so as to cover the second moisture permeation preventive layer 114. Thus, a moisture permeation preventive pattern 130 is formed.