Abstract: In order to provide a silicon wafer break pattern that stabilizes the location and shape of the breaks at weak spots of the break pattern and that reduces waste, the through-holes of the break pattern is disposed along a scribe line, a first group of the through-holes are substantially disposed on only a first side of the scribe line, and a second group of the through-holes are substantially disposed on only a second side of the scribe line.

Abstract: Disclosed is a liquid-jet head and a Liquid-jet apparatus, which are capable of reliably supplying a driving voltage to a driving IC, increasing the number of arrays of nozzle orifices, and being made small-sized.

Abstract: Disclosed are a liquid-jet head that is capable of maintaining ejection characteristics of liquid droplets, obtaining stable ink ejection characteristics, and arraying piezoelectric elements in high density, and a liquid-jet apparatus. An ink-jet recording head includes: a passage-forming substrate in which pressure generating chambers communicating with nozzle orifices are formed; and piezoelectric elements for generating pressure changes in the pressure generating chambers, which are provided on one surface side of the passage-forming substrate with vibration plate interposed therebetween. In the ink-jet recording head, a resistance reduction portion is provided to reduce a resistance of a common electrode common to the plurality of piezoelectric elements when a voltage is applied to the piezoelectric elements.

Abstract: Disclosed are an ink-jet recording head, in which nozzles can be arrayed in high density and a manufacturing cost thereof is reduced, and an ink-jet recording apparatus.

Abstract: Disclosed are a liquid-jet recording head and a liquid-jet recording apparatus, which are capable of retaining a fine liquid ejecting characteristic and obtaining a stable liquid ejecting characteristic.

Abstract: An ink jet recording head comprises a nozzle forming member provided with a plurality of nozzle orifices for jetting ink, a channel forming substrate provided with a plurality of pressure generating chambers communicated with the associated nozzle orifices, one face of which is bonded to the nozzle forming member, a plurality of piezoelectric elements provided on an face of the channel forming substrate which is opposed to the face bonded to the nozzle forming substrate for causing pressure change to occur in the associated pressure generating chambers, and a reservoir forming member bonded to the face of the channel forming substrate on which the piezoelectric elements are provided, the reservoir forming member having a reservoir section forming at least a part of a reservoir communicated with the pressure generating chambers for supplying ink thereto and a piezoelectric element holding section for defining a space in an area facing the piezoelectric elements such an extent that motion of the respective piez

Abstract: An ink jet recording head comprises a nozzle forming member provided with a plurality of nozzle orifices for jetting ink, a channel forming substrate provided with a plurality of pressure generating chambers communicated with the associated nozzle orifices, one face of which is bonded to the nozzle forming member, a plurality of piezoelectric elements provided on an face of the channel forming substrate which is opposed to the face bonded to the nozzle forming substrate for causing pressure change to occur in the associated pressure generating chambers, and a reservoir forming member bonded to the face of the channel forming substrate on which the piezoelectric elements are provided, the reservoir forming member having a reservoir section forming at least a part of a reservoir communicated with the pressure generating chambers for supplying ink thereto and a piezoelectric element holding section for defining a space in an area facing the piezoelectric elements such an extent that motion of the respective piez

Abstract: Disclosed are a liquid-jet head that is capable of arraying pressure generating chambers in high density and achieving miniaturization thereof and a liquid-jet apparatus. In the liquid-jet head, a joining plate 30 joined onto a piezoelectric element 300 side of a passage-forming substrate 10 is provided, on which a drive circuit 110 for driving the piezoelectric elements 300 is mounted, a penetrated hole 33 penetrating the joining plate 30 in a thickness direction is provided in a portion corresponding to a space between rows of pressure generating chambers 12 of the joining plate 30, extracted wiring 90 extracted from individual piezoelectric elements 300 is extended to a portion corresponding to the penetrated hole33, and the extracted wiring 90 and a drive circuit 110 are electrically connected to each other with conductive wires 120 extended through the penetrated hole 33. Thus, the area of the penetrated hole33 is suppressed to be small.

Abstract: Disclosed are an ink-jet recording head, a method of manufacturing the ink-jet recording head, and an ink-jet recording apparatus, which prevents operational malfunctions owing to external environments, such as humidity, around a piezoelectric element.

Abstract: Disclosed are an ink-jet recording head, in which the rigidity of the compartment wall is improved, pressure generating chambers can be arranged in a high density, and cross talk between the pressure generating chambers is reduced, and a manufacturing method of the same and an ink-jet recording apparatus.

Abstract: An ink jet recording head includes pressure generating chambers communicating with associated nozzle orifices and piezoelectric elements provided in a one-to-one correspondence with the pressure generating chambers. Each of the piezoelectric elements includes a lower electrode provided in an area corresponding to the pressure generating chamber via an insulating layer, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on a surface of the piezoelectric layer. Each of the piezoelectric elements includes an active part provided in an area facing the pressure generating chamber to be driven substantially, and an inactive part not to be driven even having the piezoelectric layer continued from the active part.

Abstract: In order to provide a silicon wafer break pattern that stabilizes the location and shape of the breaks at weak spots of the break pattern and that reduces waste, the through-holes of the break pattern is disposed along a scribe line, a first group of the through-holes are substantially disposed on only a first side of the scribe line, and a second group of the through-holes are substantially disposed on only a second side of the scribe line.

Abstract: Provided is an ink-jet recording head that prevents a vibration plate thereof from damage attributed to drive of a piezoelectric element, and an ink-jet recording apparatus. There are provided within a region facing the pressure generating chamber 12 a piezoelectric active portion 320 as a substantial drive portion of the piezoelectric element 300 and a piezoelectric non-active portions 330 having the piezoelectric layer continuous from the piezoelectric active portion but not being substantially driven, the piezoelectric non-active portions being provided on both end portions of the piezoelectric active portion in a longitudinal direction thereof, electrode wiring 90 drawn out of the upper electrode 80 is provided on one end portion in the longitudinal direction of the pressure generating chamber 12.

Abstract: In a micro device including a through hole for piercing a substrate and a fragile part provided around or across a part corresponding to a through hole of a multilayer film and relatively thinner than the other part, an opening can be formed in the multilayer film by cutting the multilayer film along or inside the fragile part and a through hole can be formed.

Abstract: Disclosed are an ink-jet recording head, in which nozzles can be arrayed in high density and a manufacturing cost thereof is reduced, and an ink-jet recording apparatus.

Abstract: Disclosed are an ink-jet recording head in which rigidity of a compartment wall is improved and pressure generating chambers are arranged in a high density, a manufacturing method and an ink-jet recording apparatus thereof. An ink-jet recording head includes: a passage-forming substrate 10 having at least silicon layer that consists of single crystal silicon and pressure generating chambers 12 defined thereon, which communicate with a nozzle orifice 21; and a piezoelectric element 300 for generating a pressure change in the pressure generating chamber 12, the piezoelectric element 300 being provided in a region opposite the pressure generating chamber 12 via a vibration plate, which constitutes a portion of the pressure generating chamber 12. The ink-jet recording head further includes a joining plate 20 joined to the passage-forming substrate 10 on the surface where the piezoelectric element 300 is formed, and the nozzle orifice 21 is provided on the joining plate 20.

Abstract: Disclosed are an ink-jet recording head, a method of manufacturing the ink-jet recording head, and an ink-jet recording apparatus, which prevents operational malfunctions owing to external environments, such as humidity, around a piezoelectric element.

Abstract: An ink jet recording head comprises a pressure generating chamber communicating with a nozzle opening, and a piezoelectric element a lower electrode provided on an area facing the pressure generating chamber via an insulating layer, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on the piezoelectric layer. At least both ends of the lower electrode in a width direction thereof are positioned within the area facing the pressure generating chamber, and the piezoelectric layer covers sides of both ends of the lower electrode in the width direction thereof.

Abstract: In an ink jet print head, a fluid passage forming substrate includes pressure generating chambers being trapezoidal in shape, each pressure generating chamber having walls substantially parallel to the flowing direction of ink, and no stagnation of ink is present in the pressure generating chambers. The pressure generating chambers′ walls include first walls vertical to the surface of the silicon monocrystalline substrate and oriented in the orientation of the pressure generating chambers, and second walls slanted at an angle of 35° with respect to the surface of the substrate, the second walls being formed at both ends of each pressure generating chamber. An elastic plate is fastened onto first opening-formed sides of the pressure generating chambers and piezoelectric layers for expanding and contracting the pressure generating chambers are mounted on the surface of the elastic plate.

Abstract: The present invention relates to an ink-jet recording head and an ink-jet recording device wherein peeling, a crack etc. at the end of a piezoelectric active part can be prevented. In an ink-jet recording head provided with a diaphragm constituting a part of a pressure generating chamber communicating with a nozzle aperture and a piezoelectric element formed on the diaphragm and provided with the piezoelectric active part of the piezoelectric element in an area opposite to the pressure generating chamber, a vibration regulating part for partially regulating vibration at least in a part of the diaphragm in the vicinity of a boundary with the peripheral wall of the pressure generating chamber is provided.