Abstract: In an ink jet print head, a fluid passage forming substrate includes pressure generating chambers being trapezoidal in shape, each pressure generating chamber having walls substantially parallel to the flowing direction of ink, and no stagnation of ink is present in the pressure generating chambers. The pressure generating chambers' walls include first walls vertical to the surface of the silicon monocrystalline substrate and oriented in the orientation of the pressure generating chambers, and second walls slanted at an angle of 35° with respect to the surface of the substrate, the second walls being formed at both ends of each pressure generating chamber. An elastic plate is fastened onto first opening-formed sides of the pressure generating chambers and piezoelectric layers for expanding and contracting the pressure generating chambers are mounted on the surface of the elastic plate.

Abstract: In a micro device including a through hole for piercing a substrate and a fragile part provided around or across a part corresponding to a through hole of a multilayer film and relatively thinner than the other part, an opening can be formed in the multilayer film by cutting the multilayer film along or inside the fragile part and a through hole can be formed.

Abstract: To suppress an increase in the pressure of an ink reservoir caused by the ink reversely flowed from an ink cavity without causing a lead wire to be damaged or to get fatigued. A thin portion 13 which becomes resiliently deformed by the ink reversely flowed from an ink cavity 2 is provided in the area of a compliance plate facing an ink reservoir 4.

Abstract: A nozzle plate has a plurality of nozzles for discharging ink which is fed from an ink reservoir to ink cavities through ink supply ports and is pressurized by a pressurizing element. In the nozzle plate, nozzle openings are formed in a silicon monocrystalline substrate with a lattice face (110) by anisotropic etching in such a way that through holes have faces (1-11) and (-11-1) in the direction in which the nozzle opening are arrayed as well as faces (111) and (11-1) in the direction of the axis of the ink cavity. The nozzle openings can be formed so as to have the faces (1-11) and (-11-1) normal to the silicon monocrystalline substrate in the direction in which the nozzle openings are arrayed. The width of the nozzle opening becomes constant irrespective of the time required to etch the substrate.

Abstract: In a micro device including a through hole for piercing a substrate and a fragile part provided around or across a part corresponding to a through hole of a multilayer film and relatively thinner than the other part, an opening can be formed in the multilayer film by cutting the multilayer film along or inside the fragile part and a through hole can be formed.

Abstract: To suppress an increase in the pressure of an ink reservoir caused by the ink reversely flowed from an ink cavity without causing a lead wire to be damaged or to get fatigued. A thin portion 13 which becomes resiliently deformed by the ink reversely flowed from an ink cavity 2 is provided in the area of a compliance plate facing an ink reservoir 4.

Abstract: An ink jet recording head which can compensate for shortage of mechanical strength of an ink reservoir by preventing the piezoelectric film on an ink reservoir from cracking or being broken due to the vibration of a piezoelectric film or flowing or mechanical vibration of ink. The ink reservoir has at least two plane orientations at its bottom and is given different depths.

Abstract: An ink jet type recording head is capable of preventing the occurrence of cracks in a portion close to the circumferential wall of the pressure generating chamber of the piezoelectric active section so as to enhance the durability of the recording head.

Abstract: An ink jet print head includes a plural number of piezoelectric vibrators each consisting of a lower electrode film, a piezoelectric film and an upper electrode film. The piezoelectric film and the upper electrode film of each piezoelectric vibrator are formed within the region facing each pressure generating chamber. The lower electrode films interconnect portions of the regions facing the pressure generating chambers and are electrically continuous to a wiring pattern connected to an external circuit, and in each of the portions of the regions facing the pressure generating chambers, each portion not having the piezoelectric vibrator is removed except a part thereof. Such a structure secures a satisfactory function of the lower electrode layer as a common electrode, increases a quantity of displacement of the piezoelectric vibrator while keeping a low compliance, increases an ink discharging speed, and reduces a drive voltage.

Abstract: An ink jet recording head is provided with a piezoelectric vibrator. The piezoelectric vibrator includes a diaphragm and a piezoelectric active part. The diaphragm includes a pressure generating chamber communicating with a nozzle aperture, at least the upper surface of which acts as a lower electrode. The piezoelectric active part includes a piezoelectric film formed on the surface of the diaphragm and an upper electrode formed on the surface of the piezoelectric film, formed in an area opposite to the pressure generating chamber. A cap member is bonded on one side of the piezoelectric film for sealing a space with a holder to the extent that the motion is secured. The piezoelectric active part is cut off from the outside of the head by sealing dry fluid in the space of the cap member.

Abstract: A nozzle plate has a plurality of nozzles for discharging ink which is fed from an ink reservoir through ink supply ports to ink cavities which are pressurized by a pressurizing element. In the nozzle plate, nozzle openings are formed in a silicon monocrystalline substrate with a lattice face (110) by anisotropic etching in such a way that through holes have faces (1-11) and (-11-1) in the direction in which the nozzle openings are arrayed as well as faces (111) and (11-1) in the direction of the axis of the ink cavity. The nozzle openings can be formed so as to have the faces (1-11) and (-11-1) normal to the silicon monocrystalline substrate in the direction in which the nozzle openings are arrayed. The width of the nozzle opening becomes constant irrespective of the time required to etch the substrate.

Abstract: An ink-jet printing head and an ink-jet printing apparatus using the same, the ink-jet head comprising a piezoelectric element, a vibrating plate constituting a part of a pressure generating chamber communicating with a nozzle aperture, a lower electrode, a piezoelectric layer, and an upper electrode, wherein said vibrating plate in an area opposite to the vicinity of at least one end in the longitudinal direction of a piezoelectric active part which is an area in which said piezoelectric layer substantially drives said vibrating plate is convex on the reverse side to said piezoelectric element.

Abstract: In an ink jet head having: a nozzle plate in which a plurality of nozzle openings are formed; a flow path substrate comprising a reservoir to which ink is externally supplied, and a plurality of pressure chambers which are connected to the reservoir via an ink supply port and which respectively communicate with the nozzle openings; an elastic film which pressurizes ink in the pressure chambers; and driving means located at a position opposing the respective pressure chambers for causing the elastic film to conduct flexural deformation, the pressure chambers are arranged in a single-crystal silicon substrate of a (110) lattice plane and along a <112> lattice orientation.

Abstract: In an ink jet head having: a nozzle plate in which a plurality of nozzle openings are formed; a flow path substrate comprising a reservoir to which ink is externally supplied, and a plurality of pressure chambers which are connected to the reservoir via an ink supply port and which respectively communicate with the nozzle openings; an elastic film which pressurizes ink in the pressure chambers; and driving means located at a position opposing the respective pressure chambers for causing the elastic film to conduct flexural deformation, the pressure chambers are arranged in a single-crystal silicon substrate of a (110) lattice plane and along a <112> lattice orientation.

Abstract: A thermal print head comprises: a thermally resistant insulating substrate; a glazed glass partially formed on the substrate at one end side thereof; a heating element formed on the glazed glass; a first common electrode formed on the heating element; and a protective film formed on the first electrode; a second common electrode a part of which is formed between the insulating substrate and the glazed glass, the first and second electrodes being connected to each other; wherein the insulating substrate has a chamfer on the one end side where the first and second common electrodes are arranged, the chamfer being formed closely from the glazed glass, a part of the first and second common electrode being arranged on the chamfer.