Abstract: A coating and developing system includes a resist film forming unit block and antireflection film forming unit blocks stacked up in layers to form a resist film and an antireflection film underlying the resist film and an antireflection film overlying the resist film in a small space. The coating and developing system is capable of coping with either of a case where antireflection films are formed and a case where any antireflection film is not formed and needs simple software. Film forming unit blocks, namely, a TCT layer B3, a COT layer B4 and a BCT layer B5, and developing unit blocks, namely, DEV layers B1 and B2, are stacked up in layers in a processing block S2. The TCT layer B3, the COT layer B4 and the BCT layer B5 are used selectively in the case where antireflection films are formed and the case where any antireflection film is not formed. The coating and developing system is controlled by a simple carrying program and simple software.

Abstract: A communication unit of the invention has a ciphering section which ciphers a content signal with a cipher key and outputs a ciphered content signal, a key ciphering section which ciphers the cipher key with the static device key and the dynamic device key preliminarily stored and outputs a ciphered cipher key, communication sections which makes communication in order to record the ciphered content signal in a predetermined unit on the network and record the ciphered cipher key in a predetermined region on the network, and a key updating section which, when the cipher key is abolished, updates the stored dynamic device key.

Abstract: A communication device comprises a decoding unit which encodes a content signal C by an encoding key Kc and outputs an encoded content signal Kc•C, a key encoding unit which encodes the encoding key Kc by use of a static device key k and a dynamic device key K1 stored in advance, and outputs an encoded encoding key k•K1•Kc, communicating units which communicate so as to record the encoded encoding key k•K1•Kc output by the key encoding unit into a predetermined area on a network, and further record in duplication the encoded encoding key together with an encoded content signal Kc•C into a predetermined device on the network, and a key updating unit which updates the stored dynamic device key, when the encoding key Kc is abolished.

Abstract: A resist pattern forming method using a coating and developing apparatus and an aligner being connected thereto which are controlled to form a resist film on a surface of a substrate with a base film and a base pattern formed thereon, followed by inspecting at least one of a plurality of measurement items selected from: reflection ratio and film thickness of the base film and the resist film, line width after a development, an accuracy that the base pattern matches with a resist pattern, a defect on the surface after the development, etc. A parameter subject to amendment is selected based on corresponding data of each measurement item, such as the film thickness of the resist and the line width after the development, and amendment of the parameter is performed. This results in a reduced workload of an operator, and an appropriate amendment can be performed.

Abstract: A print system which are capable of inhibiting simultaneous use of the encrypted print and the box storage to thereby increase the security of print data. A host computer has an encryption function of encrypting print data, and issues a print job for the print data encrypted by the encryption function. A print server receives the issued print job, and has a decryption function of decrypting the encrypted print data of the received print job. A printer has a storage function of storing the print data decrypted by the decryption function, and outputs the stored print data. At least one of the host computer and the print server inhibits simultaneous use of the encryption function and the storage function.

Abstract: A resist pattern forming apparatus comprising a controller having a controlling portion that controls a processing of a coating and developing apparatus with a coating unit and a developing unit being provided therewith and an aligner being connected thereto, while an inspecting portion and the like measures at least one of a plurality of measurement items selected from, a reflection ratio and a film thickness of a base film and a resist film, a line width after the development, an accuracy that the base film matches with a resist pattern, a defect after the development, and so on. The measured data is transmitted to the controller. At the controller, a parameter subject to an amendment is selected based on the corresponding data of each of the measurement item such as the film thickness of the resist and the line width after the development, and the amendment of the parameters subject to the amendment is performed.

Abstract: A printing system which can obtain a print result at a proper quality without a variation in quality from any printer while freely corresponding to a fluctuation of output image characteristics of each printer is provided. A density correction processor obtains correction data to correct the output image characteristics from a printer, forms a density correction table to correct an output density of print information from each data processing apparatus every printer, stores each of the formed density correction tables into a memory medium, and manages them.

Abstract: An information processing apparatus connected to a printing apparatus via a network encrypts print data if identification information is input, and does not encrypt print data if identification information is not input. If identification information is input and the print data has been encrypted, the information processing apparatus sends a print job including the encrypted print data to the printing apparatus via the network; otherwise, the information processing apparatus sends unencrypted print data to the printing apparatus via the network.

Abstract: A hydrogen-storage container which demonstrates a high hydrogen-storage capacity, which is reduced in mass, and which is suited to be installed in an automobile is provided. In a hydrogen-storage container holding a hydrogen-occlusion alloy in which hydrogen is occluded, an air gap portion formed in the container is filled with hydrogen gas whose pressure is above a plateau equilibrium pressure of hydrogen gas contained in the hydrogen-occlusion alloy at a temperature of a location where the hydrogen-storage container is installed. This hydrogen-storage container has a liner made of metal or resin, and a fiber-reinforced resin layer provided outside the liner.

Abstract: In order to maintain high security of a job that requires a high security level even after a print interrupt factor has been removed, and to achieve both the effect of maintaining high security of a job that requires a high security level even after the print process is interrupted, and the effect of improving the productivity of jobs other than a job of this type, when a print apparatus which can process a plurality of print jobs including a print job of a first type and that of a second type restarts a print operation of a print job, which is interrupted in the print apparatus, and when the print job is a print of the first type, the print apparatus is controlled to execute an authentication process, and then allowed to restart the print operation of the print job.

Abstract: A printing system which can obtain a print result at a proper quality without a variation in quality from any printer while freely corresponding to a fluctuation of output image characteristics of each printer is provided. A density correction processor obtains correction data to correct the output image characteristics from a printer, forms a density correction table to correct an output density of print information from each data processing apparatus every printer, stores each of the formed density correction tables into a memory medium, and manages them.

Abstract: A client server system which enables the user of a client computer to obtain the optimum printing result only by designating desired print settings, and to perform printing according to common print settings even if printers are modified or a new printer is added on a network. A favorite display module displays a print setting designating screen relating a printer. A data sending and receiving module transmits the print settings designated on the print setting designating screen by a user and an ID of a client computer to a server. A data sending and receiving module receives a printer driver adapted to the printer and print setting information from the server. A favorite setting changing module changes print settings of the printer driver according to the print setting information sent from the server. A favorite setting completion display module indicates that the changing of the print settings has been completed.

Abstract: A thermophotovoltaic power generating apparatus that heats an emitter by a combustion gas produced by fuel and air, and converts light radiated from the emitter into electric power by using photoelectric conversion elements. An air pipe is disposed in an internal hollow portion of the emitter, and a combustion gas supplier for supplying the combustion gas toward the emitter is disposed outside the emitter. The photoelectric conversion elements that receive radiated light are disposed further outside of the emitter. Therefore, residual heat of the combustion gas that has heated the emitter is utilized to heat the air needed for the combustion of fuel, and light radiated from the heated emitter is received by the photoelectric conversion elements. Thus, electric power generating efficiency can be improved.

Abstract: A substrate processing apparatus comprises a processing section for performing processing for a substrate, a substrate carrier transfer section into/out of which a substrate carrier holding a plurality of substrates is carried, and a substrate transfer mechanism for taking an unprocessed substrate out of the substrate carrier carried into the substrate carrier transfer section to deliver it to the processing section and for receiving a processed substrate from the processing section to deliver it into the substrate carrier placed on the substrate carrier transfer section. The substrate carrier transfer section shifts the position of the substrate carrier between a first position at which the substrate carrier is carried to/from the outside and a second position at which the substrate in the substrate carrier is delivered to/from the substrate transfer mechanism.

Abstract: A solution having a photosensitive radical is applied onto a resist film, a developing solution is applied thereonto, and the entire surface of the solution having the photosensitive radical is exposed all at once. Developing of the resist film progresses all at once after a coating film of the solution having the photosensitive radical dissolves in the developing solution, and hence time difference in the start time of developing does not occur in the surface of a substrate, thereby enabling uniform developing and an improvement in line width uniformity (CD value uniformity) in the surface of the substrate.

Abstract: A cassette station, a processing station having a coating unit and a developing unit, and an inspecting station having a film thickness inspecting apparatus and a defect inspecting apparatus are disposed in the direction approximately perpendicular to the direction of the disposition of cassettes of the cassette station in such a manner that the inspecting station is disposed midway between the cassette station and the processing station. In the structure, the inspecting station and the processing station are connected and wafers are automatically transferred among the stations, operations from the substrate process to the inspection can be simplified and the time period necessary therefore can be shortened.

Abstract: An apparatus for the coating treatment comprises a coating section for coating a substrate with a process solution, a heating section for heating the substrate coated with the process solution, and a recovery section for recovering at least a part of the solvent vapor contained in the hot exhaust gas discharged from the heating section. The recovery section includes a cooling apparatus, and the hot exhaust gas containing a solvent vapor generated from the substrate when the substrate is subjected to a heating treatment is passed through the cooling apparatus so as to cool and condense at least a part of the solvent vapor contained in the hot exhaust gas so as to recover the solvent in the form of a liquid.

Abstract: A printing system which can obtain a print result at a proper quality without a variation in quality from any printer while freely corresponding to a fluctuation of output image characteristics of each printer is provided. A density correction processor obtains correction data to correct the output image characteristics from a printer, forms a density correction table to correct an output density of print information from each data processing apparatus every printer, stores each of the formed density correction tables into a memory medium, and manages them.

Abstract: A hair clip comprises a first clip body with one end thereof formed as a first handling portion and the other end formed as a first hair clipping portion, a second clip body with one end thereof formed as a second handling portion and the other end formed as a second hair clipping portion, a coupler for coupling the first clip body and the second clip body with each other so that the first hair clipping portion and the second hair clipping portion are made opened and closed by operating the first handling portion and the second handling portion, and an urging device for urging the first hair clipping portion and the second hair clipping portion in a direction of closing them, and at least one of the first handling portion and the second handling portion has a first part made of a first material and a second part made of a second material as a flexible material more flexible than the first material.

Abstract: An antistatic fluororesin tube includes conductive portions made of a thermofusible fluororesin composition containing a conductive material, and a transparent portion made of thermofusible fluororesin. Each of the conductive portions extends like a stripe in a longitudinal direction of a tube body, which is made of the transparent portion. The conductive portions are embedded in an outer circumferential surface of the tube body so as to be exposed partially, and a thickness of each of the conductive portions is not smaller than 0.01 mm and not larger than 20% of a thickness of the tube body.