Patents by Inventor Yu Ting Lin

Yu Ting Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230160953
    Abstract: An integrated circuit (IC) chip package and a method of fabricating the same are disclosed. The IC chip package includes a device layer on a first surface of a substrate, a first interconnect structure on the device layer, and a second interconnect structure on the second surface of the substrate. The first interconnect structure includes a fault detection line in a first metal line layer and configured to emit an electrical or an optical signal that is indicative of a presence or an absence of a defect in the device layer, a metal-free region on the fault detection line, and a metal line adjacent to the fault detection line in the first metal line layer. The fault detection line is electrically connected to the device layer.
    Type: Application
    Filed: June 3, 2022
    Publication date: May 25, 2023
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Meng-Han WANG, Yu-Ting LIN, Charlis LIN, Coach LIU, Wei-Cheng LIU
  • Patent number: 11630149
    Abstract: The present disclosure provides a method and a system for testing semiconductor device. The method includes the following operations. A wafer having an IC formed thereon is provided. The IC is energized by raising the voltage of the IC to a first voltage level during a first period. A stress signal is applied to the IC. The stress signal includes a plurality of sequences during a second period subsequent to the first period. Each of the sequence has a ramp-up stage and a ramp-down stage. The stress signal causes the voltage of the IC to fluctuate between a second voltage level and a third voltage level. Whether the IC complies with a test criterion is determined after applying the stress signal.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: April 18, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Jun He, Yu-Ting Lin, Wei-Hsun Lin, Yung-Liang Kuo, Yinlung Lu
  • Publication number: 20230109135
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a gate structure formed over a fin structure, and a source/drain (S/D) epitaxial layer formed in the fin structure and adjacent to the gate structure. The semiconductor structure also includes a S/D silicide layer formed on the S/D epitaxial layer, and the S/D silicide layer has a first width, the S/D epitaxial layer has a second width, and the first width is smaller than the second width. The semiconductor structure includes a dielectric spacer between the gate structure and the S/D silicide layer, and a top surface of the dielectric spacer is lower than a top surface of the gate structure.
    Type: Application
    Filed: December 9, 2022
    Publication date: April 6, 2023
    Inventors: Chun-Chieh WANG, Yu-Ting LIN, Yueh-Ching PAI, Shih-Chieh CHANG, Huai-Tei YANG
  • Patent number: 11588011
    Abstract: A method of capacitance structure manufacturing includes following operations. A plurality of insulating tubes is formed over a substrate and perpendicular to the substrate. A first supporting layer and a second supporting layer above the first supporting layer are formed and connect the insulating tubes. The first supporting layer protrudes from the second supporting layer. Conductive material is filled in the insulating tubes to form rod capacitors forming a capacitor array and the capacitor array is covered by an oxide layer from its top to the substrate. The oxide layer is formed along the first supporting layer and the second supporting layer such that the oxide layer extends along a direction having an angle with respect to the substrate.
    Type: Grant
    Filed: June 22, 2022
    Date of Patent: February 21, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Lai-Cheng Tien, Wei-Chuan Fang, Yu-Ting Lin, Mao-Ying Wang
  • Publication number: 20230046911
    Abstract: The present disclosure describes a structure that includes a substrate with first and second sides, a device layer disposed on the first side of the substrate, having a fault detection area on a back-side surface of the device layer configured to emit a signal that is indicative of a presence or an absence of a defect in the device layer, a first interconnect structure disposed on a front-side of the device layer, and a second interconnect structure disposed on the second side of the substrate, having a metal-free region aligned with the fault detection area and a first metal layer having first and second conductive lines disposed substantially parallel to each other. First and second sidewalls of the first and second conductive lines, respectively, facing each other are substantially aligned with first and second sides of the fault detection area.
    Type: Application
    Filed: June 29, 2022
    Publication date: February 16, 2023
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Meng-Han WANG, Yu-Ting LIN, Chia Hong LIN, Wei-Cheng LIU
  • Patent number: 11569228
    Abstract: A semiconductor structure and a method of manufacturing a semiconductor structure are provided. The method includes forming a conductive layer on a precursor memory structure, in which the precursor memory structure includes a plurality of transistors and a plurality of contact plugs disposed on and connected to the transistors. The conductive layer in a TEG region is then patterned to form a first patterned conductive layer on the precursor memory structure. The first patterned conductive layer is then patterned to form a plurality of first landing pads extending along a first direction, in which the first landing pads are separated from each other in a second direction that is different from the first direction and are electrically connected to each other through the contact plugs and the transistors.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: January 31, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Chiang-Lin Shih, Hsueh-Han Lu, Yu-Ting Lin, Tsang-Po Yang
  • Patent number: 11526073
    Abstract: A pellicle comprises a stress-controlled metal layer. The stress in said metal layer may be between about 500-50 MPa. A method of manufacturing a pellicle comprising a metal layer includes deposing said metal layer by plasma physical vapor deposition. Process parameters are selected so as to produce a desired stress value in said metal layer, such as between about 500-50 MPa.
    Type: Grant
    Filed: March 11, 2022
    Date of Patent: December 13, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Po Hsuan Li, Yu-Ting Lin, Yun-Yue Lin, Huai-Tei Yang
  • Patent number: 11527655
    Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a gate structure formed over a fin structure, and a source/drain (S/D) epitaxial layer formed in the fin structure and adjacent to the gate structure. The S/D epitaxial layer includes a first S/D epitaxial layer and a second epitaxial layer. The semiconductor structure includes a gate spacer formed on a sidewall surface of the gate structure, and the gate spacer is directly over the first S/D epitaxial layer. The semiconductor structure includes a dielectric spacer formed adjacent to the gate spacer, and the dielectric spacer is directly over the second epitaxial layer.
    Type: Grant
    Filed: January 22, 2021
    Date of Patent: December 13, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Chieh Wang, Yu-Ting Lin, Yueh-Ching Pai, Shih-Chieh Chang, Huai-Tei Yang
  • Patent number: 11520735
    Abstract: A cloud-based migration system exposes a source-independent application programming interface for receiving data to be migrated. The data is uploaded and stored as a single entity in a cloud-based storage system. A migration system then accesses the migration package and begins migrating the data to its destination, from the cloud-based storage system.
    Type: Grant
    Filed: August 25, 2020
    Date of Patent: December 6, 2022
    Assignee: Microsoft Technology Licensing, LLC
    Inventors: Joe Keng Yap, Mahadevan Thangaraju, Sean L. Livingston, Roberta Cannerozzi, Ghania Moussa, Ron Shimon Estrin, Yu-Ting Lin, Simon Bourdages, Trung Duc Nguyen, Wenyu Cai, Zachary Adam Koehne, Patrick J. Simek, Sukhvinder Singh Gulati, Ben Canning
  • Publication number: 20220384428
    Abstract: A semiconductor structure and a method of manufacturing a semiconductor structure are provided. The method includes forming a conductive layer on a precursor memory structure, in which the precursor memory structure includes a plurality of transistors and a plurality of contact plugs disposed on and connected to the transistors. The conductive layer in a TEG region is then patterned to form a first patterned conductive layer on the precursor memory structure. The first patterned conductive layer is then patterned to form a plurality of first landing pads extending along a first direction, in which the first landing pads are separated from each other in a second direction that is different from the first direction and are electrically connected to each other through the contact plugs and the transistors.
    Type: Application
    Filed: June 1, 2021
    Publication date: December 1, 2022
    Inventors: Chiang-Lin SHIH, Hsueh-Han LU, Yu-Ting LIN, Tsang-Po YANG
  • Patent number: 11472435
    Abstract: A trajectory determination method for a vehicle is provided. A target vehicle trajectory is determined from among multiple candidate vehicle trajectories by considering, for each of the candidate vehicle trajectories, presence or absence of a front obstacle, presence or absence of a potentially-colliding obstacle, and a condition related to lane change, so as to enhance driving safety of the vehicle.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: October 18, 2022
    Assignee: AUTOMOTIVE RESEARCH & TESTING CENTER
    Inventors: Yu-Ting Lin, Tsung-Ming Hsu
  • Publication number: 20220326300
    Abstract: The present disclosure provides a method and a system for testing semiconductor device. The method includes providing a device under test (DUT) having an input terminal and an output terminal; applying a voltage having a first voltage level to the input terminal of the DUT during a first period; applying a stress signal to the input terminal of the DUT during a second period subsequent to the first period; obtaining an output signal in response to the stress signal at the output terminal of the DUT; and comparing the output signal with the stress signal. The stress signal includes a plurality of sequences, each having a ramp-up stage and a ramp-down stage. The stress signal has a second voltage level and a third voltage level.
    Type: Application
    Filed: June 29, 2022
    Publication date: October 13, 2022
    Inventors: JUN HE, YU-TING LIN, WEI-HSUN LIN, YUNG-LIANG KUO, YINLUNG LU
  • Publication number: 20220328250
    Abstract: A method of manufacturing a semiconductor structure includes: forming a first oxide layer over a landing pad layer; forming a middle patterned dielectric layer over the first oxide layer; sequentially forming a second oxide layer and a top dielectric layer over the middle patterned dielectric layer; forming a trench through the top dielectric layer, the second oxide layer and the first oxide layer; conformally forming a bottom conductive layer in the trench; removing a portion of the top dielectric layer adjacent to the trench to expose a portion of the second oxide layer beneath the portion of the top dielectric layer; and performing an etching process to remove the second oxide layer and the first oxide layer from the portion of the second oxide layer. A semiconductor structure is also provided.
    Type: Application
    Filed: April 13, 2021
    Publication date: October 13, 2022
    Inventors: Mao-Ying WANG, Yu-Ting LIN
  • Publication number: 20220320266
    Abstract: A method of capacitance structure manufacturing includes following operations. A plurality of insulating tubes is formed over a substrate and perpendicular to the substrate. A first supporting layer and a second supporting layer above the first supporting layer are formed and connect the insulating tubes. The first supporting layer protrudes from the second supporting layer. Conductive material is filled in the insulating tubes to form rod capacitors forming a capacitor array and the capacitor array is covered by an oxide layer from its top to the substrate. The oxide layer is formed along the first supporting layer and the second supporting layer such that the oxide layer extends along a direction having an angle with respect to the substrate.
    Type: Application
    Filed: June 22, 2022
    Publication date: October 6, 2022
    Inventors: Lai-Cheng TIEN, Wei-Chuan FANG, Yu-Ting LIN, Mao-Ying WANG
  • Publication number: 20220311363
    Abstract: The present application discloses a motor controller, a motor control method and a computer program product for vehicle assist control. An assist torque command for a motor device to perform vehicle assist control is generated according to an execution command of a vehicle assist determination unit and a rotor position signal and a rotor speed signal of a motor device. An original position signal of the motor device and the rotor position signal are calculated, and a position ratio calculation is performed to generate a front-order torque command. A torque damping command is generated according to the speed ratio calculation based on the rotor speed signal, and is calculated with the front-order torque command to generate an assist torque command. Thus, position information of the rotor of the motor device can be directly used in the calculation and speed information is at the same time used for an assist calculation, thereby preventing an error and solving the issue of sliding during parking.
    Type: Application
    Filed: March 18, 2022
    Publication date: September 29, 2022
    Inventors: YU-TING LIN, CHENG-TSUNG LIN
  • Patent number: 11448692
    Abstract: The present disclosure provides a method and a system for testing semiconductor device. The method includes providing a device under test (DUT) having an input terminal and an output terminal; applying a voltage having a first voltage level to the input terminal of the DUT during a first period; applying a stress signal to the input terminal of the DUT during a second period subsequent to the first period; obtaining an output signal in response to the stress signal at the output terminal of the DUT; and comparing the output signal with the stress signal. The stress signal includes a plurality of sequences, each having a ramp-up stage and a ramp-down stage. The stress signal has a second voltage level and a third voltage level.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: September 20, 2022
    Assignee: TAIWANN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Jun He, Yu-Ting Lin, Wei-Hsun Lin, Yung-Liang Kuo, Yinlung Lu
  • Publication number: 20220285354
    Abstract: A DRAM including a silicon substrate, buried word lines, and active areas is provided. The silicon substrate has a carrier surface. The buried word lines are buried in the silicon substrate. The active areas are located on the carrier surface. The buried word lines intersect the active area. Each of the buried word lines has a first width in one of the active area, and has a second width outside the active areas, and the first width is larger than the second width. A manufacturing method of DRAM is also provided.
    Type: Application
    Filed: May 24, 2022
    Publication date: September 8, 2022
    Inventors: Chiang-Lin SHIH, Yu-Ting LIN
  • Patent number: 11437383
    Abstract: The present disclosure provides a method for fabricating DRAM devices with cylinder-type stacked capacitors. By utilizing offsetting of a first lattice pattern on a second silicon nitride layer (i.e., a middle silicon nitride layer) and a second lattice pattern on a third silicon nitride layer (i.e., a top silicon nitride layer), a collapse or deformation phenomenon of bottom electrodes of stacked capacitors can be reduced or eliminated. The wobbling phenomenon of bottom electrodes of stacked capacitors can be significantly reduced.
    Type: Grant
    Filed: June 2, 2021
    Date of Patent: September 6, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Mao-Ying Wang, Yu-Ting Lin
  • Patent number: 11411006
    Abstract: The present disclosure provides a manufacturing method of a memory structure. The manufacturing method includes the operations of: receiving a substrate; forming a landing pad layer in the substrate; forming trenches over the landing pad layer; and forming a top pad over the trenches to form the capacitor array. The operation of forming the trenches over the landing pad layer includes the operations of: forming an integrated layer having an array pattern over the landing pad layer; forming, by a chop mask, a masking layer to mask an edge portion of the array pattern so as to define a rectangle portion of the array pattern; and etching the integrated layer according to the rectangle portion of the array pattern to form the plurality of trenches. The edge portion of the array pattern surrounds the rectangle portion of the array pattern.
    Type: Grant
    Filed: April 16, 2021
    Date of Patent: August 9, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Yu-Ting Lin, Pei-Jhen Wu
  • Patent number: 11404533
    Abstract: A capacitance structure includes a substrate, a plurality of rod capacitors and an oxide layer. The rod capacitors are located on a top surface of the substrate and form a capacitor array. The oxide layer covers a top and a side of the capacitor array and a portion of the substrate. The rod capacitors extend along a first direction perpendicular to a second direction in which the top surface of the substrate extends. The oxide layer extends from the top of the capacitor array to the substrate along a third direction, and an angle is formed between the first and third directions.
    Type: Grant
    Filed: August 18, 2020
    Date of Patent: August 2, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Lai-Cheng Tien, Wei-Chuan Fang, Yu-Ting Lin, Mao-Ying Wang