Patents by Inventor Yuan-Sheng Huang

Yuan-Sheng Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6551412
    Abstract: A method for recycling a fluid in a wet bench tank recycling device, comprising the following steps. An outer recycle tank is provided having sides and a bottom. The outer recycle tank holding outer recycle tank fluid. An inner process tank is provided having sides and a sieved bottom housed within the outer recycle tank. The inner process tank sides being spaced apart from the sides of the outer recycle tank sides and the inner process tank bottom being spaced apart from the outer recycle tank bottom. The inner process tank holding inner process tank fluid. A wide area filter fitted within the inner process tank proximate the inner process tank sieved bottom is provided. A vertically moveable top cover is provided at an uppermost position and fitted between the inner process tank sides and the outer recycle tank sides. The top cover having one-way valves therein that permit flow of fluid only downward through the one-way valves. The vertically moveable top cover having a top and a bottom.
    Type: Grant
    Filed: July 16, 2001
    Date of Patent: April 22, 2003
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventor: Yuan-Sheng Huang