Patents by Inventor Yuichiro ENOMOTO

Yuichiro ENOMOTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF FORMING PATTERN AND ORGANIC PROCESSING LIQUID FOR USE IN THE METHOD
    Publication number: 20120028196
    Abstract: An embodiment of the method of forming a pattern, comprises (a) forming a chemically amplified resist composition into a film, (b) exposing the film to light, and (c) processing the exposed film with an organic processing liquid, wherein the processing liquid contains an organic solvent whose normal boiling point is 175° C. or higher, the organic solvent being contained in the processing liquid in a content of less than 30 mass %.
    Type: Application
    Filed: July 27, 2011
    Publication date: February 2, 2012
    Applicant: FUJIFILM CORPORATION
    Inventors: Sou KAMIMURA, Kaoru IWATO, Yuichiro ENOMOTO, Shohei KATAOKA, Keita KATO, Shoichi SAITOH
  • METHOD OF FORMING PATTERN AND DEVELOPER FOR USE IN THE METHOD
    Publication number: 20120003591
    Abstract: Provided is a method of forming a pattern, including (a) forming a chemically amplified resist composition into a film, (b) exposing the film to light, and (c) developing the exposed film with a developer containing an organic solvent, wherein the developer contains an alcohol compound (X) at a content of 0 to less than 500 ppm based on the total mass of the developer.
    Type: Application
    Filed: June 29, 2011
    Publication date: January 5, 2012
    Applicant: FUJIFILM CORPORATION
    Inventors: Yuichiro ENOMOTO, Shinji TARUTANI, Sou KAMIMURA, Kaoru IWATO, Keita KATO, Kana FUJII