Patents by Inventor Yun Chi

Yun Chi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230326857
    Abstract: A semiconductor device includes a substrate and an interconnect layer disposed over the substrate. The interconnect layer includes an interconnect structure which includes a topological material. The topological material includes a topological insulator, a topological semimetal, or a combination thereof. A method for manufacturing the semiconductor device is also disclosed.
    Type: Application
    Filed: April 8, 2022
    Publication date: October 12, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Meng-Pei LU, Shin-Yi YANG, Cian-Yu CHEN, Yun-Chi CHIANG, Ming-Han LEE
  • Publication number: 20230320089
    Abstract: Various embodiments of the present application are directed towards a method to integrate NVM devices with a logic or BCD device. In some embodiments, an isolation structure is formed in a semiconductor substrate. The isolation structure demarcates a memory region of the semiconductor substrate, and further demarcates a peripheral region of the semiconductor substrate. The peripheral region may, for example, correspond to BCD device or a logic device. A doped well is formed in the peripheral region. A dielectric seal layer is formed covering the memory and peripheral regions, and further covering the doped well. The dielectric seal layer is removed from the memory region, but not the peripheral region. A memory cell structure is formed on the memory region using a thermal oxidation process. The dielectric seal layer is removed from the peripheral region, and a peripheral device structure including a gate electrode is formed on the peripheral region.
    Type: Application
    Filed: June 2, 2023
    Publication date: October 5, 2023
    Inventors: Cheng-Bo Shu, Chung-Jen Huang, Yun-Chi Wu
  • Publication number: 20230320051
    Abstract: An assembly-disassembly tool is adapted for assembling and disassembling a lamp board. The assembly-disassembly tool includes a magnetic conductive member and a sliding module. The magnetic conductive member includes a through hole. When the disassembly tool is positioned on the lamp board, the through hole of the magnetic conductive member is aligned with an iron sheet of the light board. The sliding module including a magnet is slidably disposed above the magnetic conductive member along a direction parallel to a top surface of the magnetic conductive member. When the sliding module is located at a first position relative to the magnetic conductive member, the magnet is staggered with the through hole. When the sliding module slides to a second position relative to the magnetic conductive member, the magnet is aligned with the through hole and is configured to magnetically attract the iron sheet of the lamp board.
    Type: Application
    Filed: March 15, 2023
    Publication date: October 5, 2023
    Applicant: Optoma Corporation
    Inventors: Ting-Yun Chi, Chia-Yu Li, Shih-Hung Hsu
  • Publication number: 20230299196
    Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a source region and a drain region arranged over and/or within a substrate. Further, a shallow trench isolation (STI) structure is arranged within the substrate and between the source and drain regions. A gate electrode is arranged over the substrate, over the STI structure, and between the source and drain regions. A portion of the gate electrode extends into the STI structure such that a bottommost surface of the portion of the gate electrode is arranged between a topmost surface of the STI structure and a bottommost surface of the STI structure.
    Type: Application
    Filed: May 26, 2023
    Publication date: September 21, 2023
    Inventors: Yuan-Cheng Yang, Yun-Chi Wu, Shih-Jung Tu
  • Publication number: 20230282742
    Abstract: An integrated circuit structure includes a semiconductor substrate, a first source/drain feature, a second source/drain feature, a gate dielectric layer, a gate electrode, a field plate electrode, and a dielectric layer. The semiconductor substrate has a well region and a drift region therein. The first source/drain feature is in the well region. The second source/drain feature is in the semiconductor substrate. The drift region is between the well region and the second source/drain feature. The gate dielectric layer is over the well region and the drift region. The gate electrode is over the gate dielectric layer and vertically overlapping the well region. The field plate electrode is over the gate dielectric layer and vertically overlapping the drift region. The dielectric layer is between the gate electrode and the field plate electrode. A top surface of the gate electrode is free of the dielectric layer.
    Type: Application
    Filed: May 4, 2023
    Publication date: September 7, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Bo SHU, Yun-Chi WU
  • Patent number: 11711917
    Abstract: Various embodiments of the present application are directed towards a method to integrate NVM devices with a logic or BCD device. In some embodiments, an isolation structure is formed in a semiconductor substrate. The isolation structure demarcates a memory region of the semiconductor substrate, and further demarcates a peripheral region of the semiconductor substrate. The peripheral region may, for example, correspond to BCD device or a logic device. A doped well is formed in the peripheral region. A dielectric seal layer is formed covering the memory and peripheral regions, and further covering the doped well. The dielectric seal layer is removed from the memory region, but not the peripheral region. A memory cell structure is formed on the memory region using a thermal oxidation process. The dielectric seal layer is removed from the peripheral region, and a peripheral device structure including a gate electrode is formed on the peripheral region.
    Type: Grant
    Filed: August 16, 2021
    Date of Patent: July 25, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Bo Shu, Chung-Jen Huang, Yun-Chi Wu
  • Patent number: 11705515
    Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a source region and a drain region arranged over and/or within a substrate. Further, a shallow trench isolation (STI) structure is arranged within the substrate and between the source and drain regions. A gate electrode is arranged over the substrate, over the STI structure, and between the source and drain regions. A portion of the gate electrode extends into the STI structure such that a bottommost surface of the portion of the gate electrode is arranged between a topmost surface of the STI structure and a bottommost surface of the STI structure.
    Type: Grant
    Filed: May 12, 2021
    Date of Patent: July 18, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yuan-Cheng Yang, Yun-Chi Wu, Shih-Jung Tu
  • Patent number: 11688805
    Abstract: A method for forming an integrated circuit structure is provided. The method includes forming a gate dielectric layer over a semiconductor substrate; depositing a first gate electrode layer over the gate dielectric layer; etching the first gate electrode layer to form a gate electrode over the gate dielectric layer; forming a drift region in the semiconductor substrate; depositing a dielectric layer over the gate dielectric layer and the gate electrode, in which the dielectric layer has a first portion alongside a first sidewall of the gate electrode; depositing a second gate electrode layer over the dielectric layer; etching the second gate electrode layer to form a field plate electrode alongside the first portion of the dielectric layer; and forming source/drain features in the semiconductor substrate.
    Type: Grant
    Filed: May 28, 2021
    Date of Patent: June 27, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Bo Shu, Yun-Chi Wu
  • Publication number: 20230187499
    Abstract: A method of forming a semiconductor arrangement includes forming a gate dielectric layer over a semiconductor layer. A gate electrode layer is formed over the gate dielectric layer. A first gate mask is formed over the gate electrode layer. The gate electrode layer is etched using the first gate mask as an etch template to form a first gate electrode. A first dopant is implanted into the semiconductor layer using the first gate mask and the first gate electrode as an implantation template to form a first doped region in the semiconductor layer.
    Type: Application
    Filed: February 6, 2023
    Publication date: June 15, 2023
    Inventors: Yun-Chi WU, Tsung-Yu YANG, Cheng-Bo SHU, Chien Hung LIU
  • Patent number: 11676850
    Abstract: A semiconductor device and method of manufacturing the same are provided. The semiconductor device includes a substrate and a first isolation structure which has a first corner. The semiconductor device also includes a first well region with a first conductive type. The semiconductor device includes further includes a gate structure over the first well region and covers a portion of the first corner of the first isolation structure. In addition, the semiconductor device includes a first doped region and a second doped region disposed on two opposites of the gate structure. Each of the first doped region and the second doped region has the first conductive type. The semiconductor device also includes a first counter-doped region in the first well region with a second conductive type different from the first conductive type. The first counter-doped region covers the first corner of the first isolation structure.
    Type: Grant
    Filed: May 28, 2021
    Date of Patent: June 13, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chia-Chen Chang, Yuan-Cheng Yang, Yun-Chi Wu
  • Patent number: 11648667
    Abstract: A processing path generating device including an intuitive path teaching device and a controller is provided. The intuitive path teaching device is provided for gripping and moving with respect to a workpiece to create a moving path. The intuitive path teaching device has a detecting portion for detecting a surface feature of the workpiece. The controller is connected to the intuitive path teaching device. The controller generates a processing path according to the moving path of the intuitive path teaching device and the surface feature of the workpiece.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: May 16, 2023
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Tien-Yun Chi, Cheng-Han Tsai, Kuo-Feng Hung
  • Publication number: 20230129623
    Abstract: A cross laser calibration device used to calibrate a tool center point is provided. The calibration device includes a coordinate orifice plate, a set of cross laser sensors and a rotational and translational movement mechanism. The coordinate orifice plate has an orifice center point. The set of cross laser sensors is arranged on the coordinate orifice plate to generate cross laser lines intersecting at the orifice center point. The set of cross laser sensors is driven by the second motor to rotate around the center point of the second motor, wherein the orifice center point has an off-axis setting relative to the center point of the second motor.
    Type: Application
    Filed: December 27, 2021
    Publication date: April 27, 2023
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Sheng-Chieh HSU, Sheng-Han HSIEH, Mou-Tung HSIEH, Tien-Yun CHI, Kuo-Feng HUNG
  • Publication number: 20230109273
    Abstract: Some embodiments relate to an integrated chip that includes a first source/drain region and a second source/drain region disposed in a substrate. A plane that is substantially perpendicular to an upper surface of the substrate traverses the first source/drain region and the second source/drain region. Agate electrode extends over a channel region in the substrate between the first source/drain region and the second source/drain region. The gate electrode is separated from the channel region by way of a charge trapping dielectric structure. The charge trapping dielectric structure includes a tunnel dielectric layer, a charge trapping dielectric layer over the tunnel dielectric layer, and a blocking dielectric layer over the charge trapping dielectric layer. The channel region has a channel width measured perpendicularly to the plane, and the tunnel dielectric layer has different thicknesses at different respective points along the channel width.
    Type: Application
    Filed: December 12, 2022
    Publication date: April 6, 2023
    Inventors: Jui-Yu Pan, Cheng-Bo Shu, Chung-Jen Huang, Jing-Ru Lin, Tsung-Yu Yang, Yun-Chi Wu, Yueh-Chieh Chu
  • Publication number: 20230100202
    Abstract: This invention relates to an iridium metal complex. The iridium metal complex comprises no more than three 1,3-dihydro-2H-benzo[d]imidazol-2-ylidene based carbene cyclometalate ligands. The iridium metal complex provides a blue emission. This is useful for organic light emitting diode (OLED) components where blue emitters have trailed behind the advances of red and green emitters.
    Type: Application
    Filed: August 18, 2021
    Publication date: March 30, 2023
    Inventors: Yun CHI, Yi YUAN, Caifa YOU
  • Publication number: 20230098697
    Abstract: This invention relates to an iridium metal complex. The iridium metal complex comprises no more than three 1,3-dihydro-2H-benzo[d]imidazol-2-ylidene based carbene cyclometalate ligands. The iridium metal complex provides a blue emission. This is useful for organic light emitting diode (OLED) components where blue emitters have trailed behind the advances of red and green emitters.
    Type: Application
    Filed: September 2, 2021
    Publication date: March 30, 2023
    Inventors: Yun CHI, Yi YUAN, Caifa YOU
  • Publication number: 20230040514
    Abstract: A method for making a semiconductor device includes forming a ROX layer on a substrate and a patterned silicon oxynitride layer on the patterned ROX layer; conformally forming a dielectric oxide layer to cover the substrate, the patterned silicon oxynitride layer, and the patterned ROX layer; and fully oxidizing the patterned silicon oxynitride layer to form a fully oxidized gate oxide layer on the substrate.
    Type: Application
    Filed: October 19, 2022
    Publication date: February 9, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tsu-Hsiu PERNG, Yun-Chi WU, Chia-Chen CHANG, Cheng-Bo SHU, Jyun-Guan JHOU, Pei-Lun WANG
  • Patent number: 11575008
    Abstract: A method of forming a semiconductor arrangement includes forming a gate dielectric layer over a semiconductor layer. A gate electrode layer is formed over the gate dielectric layer. A first gate mask is formed over the gate electrode layer. The gate electrode layer is etched using the first gate mask as an etch template to form a first gate electrode. A first dopant is implanted into the semiconductor layer using the first gate mask and the first gate electrode as an implantation template to form a first doped region in the semiconductor layer.
    Type: Grant
    Filed: November 16, 2020
    Date of Patent: February 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Yun-Chi Wu, Tsung-Yu Yang, Cheng-Bo Shu, Chien Hung Liu
  • Patent number: 11574918
    Abstract: A non-volatile memory (NVM) cell includes a semiconductor wire including a select gate portion and a control gate portion. The NVM cell includes a select transistor formed with the select gate portion and a control transistor formed with the control gate portion. The select transistor includes a gate dielectric layer disposed around the select gate portion and a select gate electrode disposed on the gate dielectric layer. The control transistor includes a stacked dielectric layer disposed around the control gate portion, a gate dielectric layer disposed on the stacked dielectric layer and a control gate electrode disposed on the gate dielectric layer. The stacked dielectric layer includes a first silicon oxide layer disposed on the control gate portion, a charge trapping layer disposed on the first silicon oxide, and a second silicon oxide layer disposed on the charge trapping layer.
    Type: Grant
    Filed: June 7, 2021
    Date of Patent: February 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yun-Chi Wu, Yu-Wen Tseng
  • Publication number: 20230019614
    Abstract: A semiconductor structure includes a semiconductor substrate, a transistor, a plurality of isolation structures, and a conductive feature. The transistor is over the semiconductor substrate. The isolation structures are over the semiconductor substrate. The isolation structures define a semiconductor ring of the semiconductor substrate surrounding the transistor. The conductive feature extends vertically in the semiconductor substrate and surrounds the transistor and semiconductor ring. The conductive feature has a rounded corner facing the semiconductor ring from a top view.
    Type: Application
    Filed: September 26, 2022
    Publication date: January 19, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Ming PAN, Chia-Ta HSIEH, Po-Wei LIU, Yun-Chi WU
  • Publication number: 20230006152
    Abstract: A metal complex having at least one chelating N-heterocyclic carbene ligand. The metal complex provides a blue emission. This is useful for organic light emitting diode (OLED) components where blue emitters have trailed behind the advances of red and green emitters.
    Type: Application
    Filed: August 22, 2022
    Publication date: January 5, 2023
    Inventors: Yun Chi, Jie Yan