Abstract: A cassette (50) for holding or transporting substrates therein includes a pair of frames (51, 52) opposite each other, a pair of side plates (53, 54) facing each other and supporting the frames, and at least two division plates (55, 56) between the frames. The side plates include inner surfaces and supporting members (531) protruding from the inner surfaces, and the division plates also have supporting members protruding therefrom. The frames, the side plates and the division plates define at least three spaces for holding differently sized substrates on the supporting members.

Abstract: A method for coating photoresist (300) on a substrate (100) includes the steps of forming grooves (120) on the substrate, applying photoresist onto the substrate, and finally vibrating the substrate. The photoresist can be coated on the substrate evenly, and the efficiency of utilization of the photoresist is high.