Abstract: A computation device is provided for measuring the dimensions of patterns formed on a sample based on a signal obtained from a charged particle beam device. The computation device includes a positional deviation amount calculation unit for calculating the amount of positional deviation in a direction parallel to a wafer surface between two patterns having different heights based on an image acquired at a given beam tilt angle; a pattern inclination amount calculation unit for calculating an amount of pattern inclination from the amount of positional deviation using a predetermined relational expression for the amount of positional deviation and the amount of pattern inclination; and a beam tilt control amount calculation unit for controlling the beam tilt angle so as to match the amount of pattern inclination. The pattern measurement device sets the beam tilt angle to a calculated beam tilt angle, reacquires an image and measures the patterns.

Abstract: A computation device is provided for measuring the dimensions of patterns formed on a sample based on a signal obtained from a charged particle beam device. The computation device includes a positional deviation amount calculation unit for calculating the amount of positional deviation in a direction parallel to a wafer surface between two patterns having different heights based on an image acquired at a given beam tilt angle; a pattern inclination amount calculation unit for calculating an amount of pattern inclination from the amount of positional deviation using a predetermined relational expression for the amount of positional deviation and the amount of pattern inclination; and a beam tilt control amount calculation unit for controlling the beam tilt angle so as to match the amount of pattern inclination. The pattern measurement device sets the beam tilt angle to a calculated beam tilt angle, reacquires an image and measures the patterns.

Abstract: A high-quality image is acquired while maintaining an improvement in throughput of image acquisition (measurement (length measurement)) in a charged particle beam system including a charged particle beam device and a computer system configured to control the charged particle beam device. The charged particle beam device includes an objective lens, a sample stage, and a backscattered electron detector that is disposed between the objective lens and the sample stage and that adjusts a focus of a charged particle beam with which a sample is irradiated. The computer system adjusts a value of an electric field on the sample in accordance with a change in a voltage applied to the backscattered electron detector.

Abstract: A vehicle controller with improved usability related to updating of a control program is provided. The vehicle controller is capable of updating a stored control program, based on update contents provided by a writing device. The control program includes a control code, and control data that is referred to when the control code is executed. The vehicle controller includes a nonvolatile memory that allows a first memory area and a second memory area to be switched and used alternately, the first memory area and the second memory area each storing both the control code and the control data, and an updating request determining unit that determines whether an updating request from the writing device requests updating of both the control code and the control data or requests updating of the control data only.

Abstract: An object of the invention is to acquire a high-quality image while maintaining an improvement in throughput of image acquisition (measurement (length measurement)). The present disclosure provides a charged particle beam system including a charged particle beam device and a computer system configured to control the charged particle beam device. The charged particle beam device includes an objective lens, a sample stage, and a backscattered electron detector that is disposed between the objective lens and the sample stage and that adjusts a focus of a charged particle beam with which a sample is irradiated. The computer system adjusts a value of an electric field on the sample in accordance with a change in a voltage applied to the backscattered electron detector.

Abstract: An information processing device receives a request transmitted from a terminal device in response to an operation by a user on predetermined transaction object reference information that indicates a reference to the first web page and is carried by an information carrying medium. The information processing device acquires, in response to the request being received, purchase availability information indicating whether purchase of the predetermined transaction object is available. The information processing device transmits location information indicating a location of the first web page when the purchase availability information indicates that the purchase of the predetermined transaction object is available.

Abstract: The purpose of the present invention is to provide a feature which, even when updated data to be written to an ECU is encrypted, is capable of appropriately resuming the writing processing when determined that the writing processing was interrupted while in progress. An electronic control device according to the present invention, wherein a first data block included in the updated data is encrypted by using a second data block, and when the writing processing for writing the first data block to the storage unit is interrupted while in progress, updated data which includes both the first data block and the second data block is reacquired, after which the first data block is decoded again by using the reacquired second data block.

Abstract: The purpose of the present invention is to provide technology whereby a retransmission start address can be properly identified even when update data is compressed or encrypted. In the electronic control device according to the present invention, update data includes at least one of compressed data and encrypted data and includes unprocessed data that is neither compressed nor encrypted, and the unprocessed data retains an address list that can identify the positions of data blocks included in the update data.

Abstract: Provided is a charged particle beam device that can impart a function of an energy filter to even a small BSE detector. The charged particle beam device includes a fluorescent substance that converts charged particles generated by irradiation of a sample with a charged particle beam into light; a detector that detects the light emitted from the fluorescent substance; a light guide element for guiding the light from the fluorescent substance to the detector; a light amount adjuster that adjusts the amount of light that is received by the detector through the fluorescent substance and the light guide element; and a control unit that controls the light amount adjuster.

Abstract: Provided is a technique for enabling software having different memory maps to be written in a nonvolatile memory of an electronic control device in reprogramming of control software. The electronic control device includes a microcomputer including a CPU and a nonvolatile memory. The nonvolatile memory includes activation software, control software, and validity confirmation information for confirming validity of the control software. A storage area of the validity confirmation information in the nonvolatile memory is different from a storage area of the activation software.

Abstract: When focus adjustment is performed according to the height of the surface of a sample at each inspection point in order to continuously inspect a plurality of inspection points on a wafer by using an electron microscope, even when the focus adjustment by an electrostatic lens in which a variation of heights of inspection points is greater than a predetermined range, and that can perform adjustment at a high speed and adjustment by an electromagnetic lens with a low speed are required to be used together, a flow of focus adjustment in which the number of times of the adjustment by the electromagnetic lens is reduced by using a relation of changes of heights at inspection points, an inspection order, and a range in which an electrostatic focus can be performed is realized, so that inspection with high throughput is made possible.

Abstract: Provided is a charged particle beam device capable of focusing with high accuracy even when a charged particle beam has a large off-axis amount. The charged particle beam device generates an observation image of a sample by irradiating the sample with a charged particle beam, and includes: a deflection unit that inclines the charged particle beam; a focusing lens that focuses the charged particle beam; an adjustment unit that adjusts a lens strength of the focusing lens based on an evaluation value calculated from the observation image; a storage unit that stores a relationship between a visual field movement amount and the lens strength; and a filter setting unit that calculates the visual field movement amount based on an inclination angle of the charged particle beam and the relationship, and sets an image filter to be superimposed on the observation image based on the calculated visual field movement amount.

Abstract: A charged particle beam device includes: a stage 124 on which a sample 108 is to be placed; a charged particle optical system including a charged particle source 113 and an objective lens 121 that focuses a charged particle beam from the charged particle source onto the sample; and a detector 123 disposed between the objective lens and the stage and configured to detect electrons 109 emitted by an interaction between the charged particle beam and the sample. The stage, the charged particle optical system, and the detector are housed in a vacuum housing 112, and the detector includes a scintillator 107, a solid-state photomultiplier tube 104, and a light guide 106 provided between the scintillator and the solid-state photomultiplier tube, and an area of a light receiving surface of the scintillator is larger than an area of a light receiving surface of the solid-state photomultiplier tube.

Abstract: An electronic control unit for vehicle capable of receiving a program by communication expands the received program in a volatile memory and executes the expanded program. As an example of this program, there is a program for changing a communication environment for communicating with another unit.

Abstract: An object of the invention is to acquire a high-quality image while maintaining an improvement in throughput of image acquisition (measurement (length measurement)). The present disclosure provides a charged particle beam system including a charged particle beam device and a computer system configured to control the charged particle beam device. The charged particle beam device includes an objective lens, a sample stage, and a backscattered electron detector that is disposed between the objective lens and the sample stage and that adjusts a focus of a charged particle beam with which a sample is irradiated. The computer system adjusts a value of an electric field on the sample in accordance with a change in a voltage applied to the backscattered electron detector.

Abstract: The present invention realizes control program update even when the difference data is large. In the present invention, when updating the program, by controlling the amount of data to be received according to the capacity of the area of the vehicle control device storing the difference data, the vehicle control device sequentially performs restoration and update from the received partial data even if not all the difference data are stored.

Abstract: To implement a calibration sample by which an incident angle can be measured with high accuracy, an electron beam adjustment method, and an electron beam apparatus using the calibration sample.

Abstract: A vehicle controller with improved usability related to updating of a control program is provided. The vehicle controller is capable of updating a stored control program, based on update contents provided by a writing device. The control program includes a control code, and control data that is referred to when the control code is executed. The vehicle controller includes a nonvolatile memory that allows a first memory area and a second memory area to be switched and used alternately, the first memory area and the second memory area each storing both the control code and the control data, and an updating request determining unit that determines whether an updating request from the writing device requests updating of both the control code and the control data or requests updating of the control data only.

Abstract: A computation device is provided for measuring the dimensions of patterns formed on a sample based on a signal obtained from a charged particle beam device. The computation device includes a positional deviation amount calculation unit for calculating the amount of positional deviation in a direction parallel to a wafer surface between two patterns having different heights based on an image acquired at a given beam tilt angle; a pattern inclination amount calculation unit for calculating an amount of pattern inclination from the amount of positional deviation using a predetermined relational expression for the amount of positional deviation and the amount of pattern inclination; and a beam tilt control amount calculation unit for controlling the beam tilt angle so as to match the amount of pattern inclination. The pattern measurement device sets the beam tilt angle to a calculated beam tilt angle, reacquires an image and measures the patterns.

Abstract: An electronic control unit for a vehicle including a nonvolatile memory capable of erasing and writing data electrically and two buffers to acquire, by communication, divided data obtained by dividing a program by predetermined size. Then, in parallel with using the two buffers alternately to receive divided data, the electronic control unit for a vehicle uses one buffer that is not used to receive divided data to write the received divided data into the nonvolatile memory.