Abstract: When focus adjustment is performed according to the height of the surface of a sample at each inspection point in order to continuously inspect a plurality of inspection points on a wafer by using an electron microscope, even when the focus adjustment by an electrostatic lens in which a variation of heights of inspection points is greater than a predetermined range, and that can perform adjustment at a high speed and adjustment by an electromagnetic lens with a low speed are required to be used together, a flow of focus adjustment in which the number of times of the adjustment by the electromagnetic lens is reduced by using a relation of changes of heights at inspection points, an inspection order, and a range in which an electrostatic focus can be performed is realized, so that inspection with high throughput is made possible.

Abstract: Provided is a charged particle beam device capable of focusing with high accuracy even when a charged particle beam has a large off-axis amount. The charged particle beam device generates an observation image of a sample by irradiating the sample with a charged particle beam, and includes: a deflection unit that inclines the charged particle beam; a focusing lens that focuses the charged particle beam; an adjustment unit that adjusts a lens strength of the focusing lens based on an evaluation value calculated from the observation image; a storage unit that stores a relationship between a visual field movement amount and the lens strength; and a filter setting unit that calculates the visual field movement amount based on an inclination angle of the charged particle beam and the relationship, and sets an image filter to be superimposed on the observation image based on the calculated visual field movement amount.

Abstract: A charged particle beam device includes: a stage 124 on which a sample 108 is to be placed; a charged particle optical system including a charged particle source 113 and an objective lens 121 that focuses a charged particle beam from the charged particle source onto the sample; and a detector 123 disposed between the objective lens and the stage and configured to detect electrons 109 emitted by an interaction between the charged particle beam and the sample. The stage, the charged particle optical system, and the detector are housed in a vacuum housing 112, and the detector includes a scintillator 107, a solid-state photomultiplier tube 104, and a light guide 106 provided between the scintillator and the solid-state photomultiplier tube, and an area of a light receiving surface of the scintillator is larger than an area of a light receiving surface of the solid-state photomultiplier tube.

Abstract: An electronic control unit for vehicle capable of receiving a program by communication expands the received program in a volatile memory and executes the expanded program. As an example of this program, there is a program for changing a communication environment for communicating with another unit.

Abstract: An object of the invention is to acquire a high-quality image while maintaining an improvement in throughput of image acquisition (measurement (length measurement)). The present disclosure provides a charged particle beam system including a charged particle beam device and a computer system configured to control the charged particle beam device. The charged particle beam device includes an objective lens, a sample stage, and a backscattered electron detector that is disposed between the objective lens and the sample stage and that adjusts a focus of a charged particle beam with which a sample is irradiated. The computer system adjusts a value of an electric field on the sample in accordance with a change in a voltage applied to the backscattered electron detector.

Abstract: The present invention realizes control program update even when the difference data is large. In the present invention, when updating the program, by controlling the amount of data to be received according to the capacity of the area of the vehicle control device storing the difference data, the vehicle control device sequentially performs restoration and update from the received partial data even if not all the difference data are stored.

Abstract: To implement a calibration sample by which an incident angle can be measured with high accuracy, an electron beam adjustment method, and an electron beam apparatus using the calibration sample.

Abstract: A vehicle controller with improved usability related to updating of a control program is provided. The vehicle controller is capable of updating a stored control program, based on update contents provided by a writing device. The control program includes a control code, and control data that is referred to when the control code is executed. The vehicle controller includes a nonvolatile memory that allows a first memory area and a second memory area to be switched and used alternately, the first memory area and the second memory area each storing both the control code and the control data, and an updating request determining unit that determines whether an updating request from the writing device requests updating of both the control code and the control data or requests updating of the control data only.

Abstract: A computation device is provided for measuring the dimensions of patterns formed on a sample based on a signal obtained from a charged particle beam device. The computation device includes a positional deviation amount calculation unit for calculating the amount of positional deviation in a direction parallel to a wafer surface between two patterns having different heights based on an image acquired at a given beam tilt angle; a pattern inclination amount calculation unit for calculating an amount of pattern inclination from the amount of positional deviation using a predetermined relational expression for the amount of positional deviation and the amount of pattern inclination; and a beam tilt control amount calculation unit for controlling the beam tilt angle so as to match the amount of pattern inclination. The pattern measurement device sets the beam tilt angle to a calculated beam tilt angle, reacquires an image and measures the patterns.

Abstract: An electronic control unit for a vehicle including a nonvolatile memory capable of erasing and writing data electrically and two buffers to acquire, by communication, divided data obtained by dividing a program by predetermined size. Then, in parallel with using the two buffers alternately to receive divided data, the electronic control unit for a vehicle uses one buffer that is not used to receive divided data to write the received divided data into the nonvolatile memory.

Abstract: The present invention has a computation device for measuring the dimensions of patterns formed on a sample on the basis of a signal obtained from a charged particle beam device. The computation device has a positional deviation amount calculation unit for calculating the amount of positional deviation in a direction parallel to a wafer surface between two patterns having different heights on the basis of an image acquired at a given beam tilt angle; a pattern inclination amount calculation unit for calculating an amount of pattern inclination from the amount of positional deviation using a predetermined relational expression for the amount of positional deviation and the amount of pattern inclination; and a beam tilt control amount calculation unit for controlling the beam tilt angle so as to match the amount of pattern inclination. The pattern measurement device sets the beam tilt angle to a calculated beam tilt angle, reacquires an image and measures the patterns.

Abstract: The inventors have found that the interaction between HP1 and INCENP can serve as an indicator for chromosome instability and established a method for evaluating chromosome instability of cancer cells. The evaluation system can be used for screening of anticancer agent with a new-concept of targeting chromosome instability of cancer cells. The inventors further prepared an antibody for specifically recognizing phosphorylation of serine at position 92 of HP1?, by which the action of Aurora B can be evaluated. The interaction between HP1 and INCENP can be readily evaluated by the antibody.

Abstract: Provided is a charged particle beam device capable of focusing with high accuracy even when a charged particle beam has a large off-axis amount. The charged particle beam device generates an observation image of a sample by irradiating the sample with a charged particle beam, and includes: a deflection unit that inclines the charged particle beam; a focusing lens that focuses the charged particle beam; an adjustment unit that adjusts a lens strength of the focusing lens based on an evaluation value calculated from the observation image; a storage unit that stores a relationship between a visual field movement amount and the lens strength; and a filter setting unit that calculates the visual field movement amount based on an inclination angle of the charged particle beam and the relationship, and sets an image filter to be superimposed on the observation image based on the calculated visual field movement amount.

Abstract: A vacuum cleaner includes a main body portion, a secondary battery, an electric blower, a handle and a conductive member. The secondary battery is disposed in the main body portion. The electric blower operates by electric power supply from the secondary battery. The handle is one which a user contacts when the vacuum cleaner is used. At least a part of the conductive member is disposed at the handle and conducts static electricity generated due to operation of the electric blower.

Abstract: A physical quantity measuring device includes: a metallic cylindrical case; a sensor module configured to detect a physical quantity; a synthetic-resin joint provided near a first open end of the cylindrical case, the joint being attached with the sensor module and provided with an introduction port for introducing a measurement target fluid; and a cover provided near a second open end of the cylindrical case. The cover includes a locking portion for locking the sensor module. The cylindrical case includes an engagement portion provided near the first open end and engaged with the joint and a crimp portion provided near the second open end, the crimp portion configured to be plastically deformed by crimping. The cover is attached to the cylindrical case by crimping the crimp portion.

Abstract: A scanning electron microscope includes an electron-optical system including an electron source and an objective lens, a stage on which a sample is placed, a secondary electron detector disposed adjacent to the electron source relative to the objective lens and configured to detect secondary electrons, a backscattered electron detector disposed between the objective lens and the stage and configured to detect backscattered electrons, a backscattered electron detection system controller configured to apply a voltage to the backscattered electron detector, and a device-control computer configured to detect a state of an electrical charge carried by the backscattered electron detector based on signal intensity at the secondary electron detector when the primary electrons are applied to the sample with a predetermined voltage applied to the backscattered electron detector.

Abstract: A decompression and restoration unit, when differential data between a new execution program and a specific program is input, decompresses and restores the compressed specific program and rewrites the execution program as the specific program. A differential restoration unit differentially restores the new execution program from the differential data and the specific program and rewrites the specific program as the new execution program. A differential restoration unit that, when differential data between a new execution program and a specific program is input, differentially restores the new execution program from the differential data and the execution program in a memory unit and rewrites the execution program in the memory unit as the new execution program. The decompression and restoration unit decompresses and restores the compressed specific program and rewrites the new execution program as the specific program.

Abstract: Provided is a scanning electron microscope which can perform high-speed focus correction even when an electron beam having high energy is used. The scanning electron microscope includes an electron optical system including an electron source 100 that emits an electron beam and an objective lens 113, a sample stage 1025 which is disposed on a stage 115 and on which a sample 114 is placed, a backscattered electron detector 1023 which is disposed between the objective lens and the sample stage and is configured to detect backscattered electrons 1017 emitted due to interaction between the electron beam and the sample, a backscattered electron detection system control unit 138 which is provided corresponding to the backscattered electron detector and is configured to apply a voltage to the backscattered electron detector, and a device control calculation device 146.

Abstract: A combustion apparatus includes a combustion part, a blower fan, an ignition device, and a control part. The control part selectively performs continuous combustion in which the combustion part is operated to burn continuously and intermittent combustion in which a combustion period and a non-combustion period of the combustion part are repeatedly provided. When the continuous combustion is stopped, the control part extinguishes the combustion part and operates the blower fan to perform a scavenging operation. When the combustion period in the intermittent combustion is ended, the control part extinguishes the combustion part and operates the blower fan to perform a scavenging operation in the non-combustion period. A total air blowing amount of the blower fan in the scavenging operation during the non-combustion period is set to be less than a total air blowing amount of the blower fan in the scavenging operation when the continuous combustion is stopped.

Abstract: A clamped object is reliably clamped. A clamp sensor includes a pair of clamp arms that are formed so as to be substantially arc-shaped in plan view, that are configured so that at least one of the clamp arms is rotatable so that respective front ends of the clamp arms open and close, and that form a ring-shaped body in a state where the front ends are closed. Front end portions of the clamp arms have a pair of facing surfaces that construct the outer circumferential surface and the inner circumferential surface of the ring-shaped body, a pair of facing surfaces that construct two side surfaces of the ring-shaped body, a pair of facing surfaces that are inclined to the facing surfaces, and a pair of facing surfaces that are inclined to the facing surfaces.