Publication number: 20050241672
Abstract: A method comprises extracting impurities from one or more materials in a semiconductor device via treatment with a supercritical fluid (SCF). The SCF may comprise a solvent and one or more co-solvents. Solvents may comprise 1-hexanol, 1-propanol, 2-propanol, acetone, ammonia, argon, carbon dioxide, chlorotrifluoromethane, cyclohexane, dichlorodifluoromethane, ethane, ethyl alcohol, ethylene, methane, methanol, n-butane, n-hexane, nitrous oxide, n-pentane, propane, propylene, toluene, trichlorofluoromethane, trichloromethane, water, or combinations thereof.
Type:
Application
Filed:
August 13, 2004
Publication date:
November 3, 2005
Applicant:
Texas Instruments Incorporated
Inventors:
Phillip Matz, Sameer Ajmera, Ju-Ai Ruan, Jinyoung Kim, Zhijian Lu, Laura Matz