Method of manufacturing light-emitting device
A method of manufacturing a light-emitting device includes: providing a structure body including: a first substrate having a first surface and a second surface opposite to the first surface, the first surface including first regions and second regions; first light-emitting element portions respectively located on the first regions; and second light-emitting element portions respectively located on the second regions; fixing the first light-emitting element portions to a second substrate without fixing the second light-emitting element portions to the second substrate; subsequently, transferring the first light-emitting element portions from the first substrate to the second substrate by removing, from the second surface, portions of the first substrate overlapping the first regions when viewed from the second surface; and subsequently, separating the first light-emitting element portions from the second substrate in a state in which the second light-emitting element portions are located on the second regions.
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This application claims priority to Japanese Patent Application No. 2020-012479, filed on Jan. 29, 2020, the disclosure of which is hereby incorporated by reference in its entirety.
BACKGROUNDThe present disclosure relates to a method of manufacturing a light-emitting device.
For example, the assembly of semiconductor devices including a plurality of pixels is known (WO 2017/037475). It is desirable to improve the producibility of a method of manufacturing a light-emitting device.
SUMMARYAccording to certain embodiment of the present disclosure, a method of manufacturing a light-emitting device may allow for improved producibility.
According to the certain embodiment of the present disclosure, a method of manufacturing a light-emitting device includes: a structure body providing step, a first structure body fixing step, a first transfer step, and a separation step. In the structure body providing step, a structure including a first substrate having a first surface and a second surface opposite to the first surface, the first surface including a plurality of first regions and a plurality of second regions, first light-emitting element portions are respectively located on the first regions of the first surface, and second light-emitting element portions are respectively located on the second regions of the first surface is provided. In the first structure body fixing step, the first light-emitting element portions are fixed to a second substrate without fixing the second light-emitting element portions to the second substrate while the first light-emitting element portions and the second light-emitting element portions face the second substrate. In the first transfer step after the first structure body fixing step, the first light-emitting element portions are transferred from the first substrate to the second substrate by removing, from the second surface, portions of the first substrate overlapping with the first regions when viewed from the second surface. In the separation step after the first transfer step, the first light-emitting element portions are separated from the second substrate in a state in which the second light-emitting element portions are located on the second regions.
According to certain embodiments of the present disclosure, a method of manufacturing a light-emitting device may provide for improved producibility.
Certain embodiments of the present disclosure will be described below with reference to the accompanying drawings.
The drawings are schematic or conceptual, and the relationship between a thickness and a width of each component, the ratio between sizes of components, etc., in the drawings may not be the same as those of an actual product. Also, the dimensions and ratios of the same component in different drawings may be different from each other.
In the specification of the present application, an element that is the same as that in a drawing that has been previously described is indicated with the same reference numeral, and its repeated detailed description is omitted as appropriate.
As shown in
In the structure body providing step, a structure body 15 illustrated in
The structure body 15 illustrated in
A plurality of first light-emitting element portions 51 and a plurality of second light-emitting element portions 52 are provided on the first surface 10fa of the first substrate 10. The first surface 10fa includes a plurality of first regions 11 and a plurality of second regions 12. One of the first light-emitting element portions 51 is located on each respective one of the first regions 11. One of the second light-emitting element portions 52 is located on each respective one of the second regions 12. The first light-emitting element portions 51 and the second light-emitting element portions 52 are formed by, for example, partially removing the semiconductor layered body 50 after the semiconductor layered body 50 is formed on the first surface 10fa of the first substrate 10 in the structure body providing step.
For example, the first surface 10fa is located between the second surface 10fb and the first light-emitting element portions 51. For example, the first surface 10fa is located between the second surface 10fb and the second light-emitting element portions 52. In the present example, the first regions 11 and the second regions 12 are alternately arranged along the X-axis direction as shown in
A direction from the first substrate 10 to the semiconductor layered body 50 is referred to as the Z-axis direction as shown in
For example, the first surface 10fa substantially are disposed along the X-Y plane. In the example shown in
In First Structure Body Fixing Step S120 illustrated in
For example, in First Structure Body Fixing Step S120, first members 61 are disposed on the respective first light-emitting element portions 51 as shown in
After that, the structure body 15 is faced to the second substrate 20 such that the first light-emitting element portions 51 are fixed to the second substrate 20 with the first members 61 therebetween as shown in
The first members 61 can be selected according to the method of fixing the first light-emitting element portions 51 to the second substrate 20. For example, in the case in which the first light-emitting element portions 51 are fixed to the second substrate 20 by thermocompression bonding, resin is used for the first members 61. In this case, for example, resin films can be selectively disposed on the first light-emitting element portions 51 by using photosensitive resin as the resin. For example, in the case in which the first light-emitting element portions 51 are fixed to the second substrate 20 by surface-activated bonding, which is a room temperature bonding method, a dielectric substance such as silicon oxide and silicon nitride can be used for the first members 61.
In first transfer step S130 illustrated in
For example, a mask 66 is formed on the second surface 10fb of the first substrate 10 as shown in
The portions 11p of the first regions 11 overlapping with the first regions 11 when viewed from the second surface 10fb are removed, and therefore the first light-emitting element portions 51 are separated from the first substrate 10 while being fixed to the second substrate 20. The first light-emitting element portions 51 are thus transferred from the first substrate 10 to the second substrate 20. Portions 10p of the first substrate 10 are left on the first light-emitting element portions 51 as shown in
In separation step S140 illustrated in
The portions 10p of the first substrate 10 left on the first light-emitting element portions 51 are removed by, for example, reactive ion etching (RIE). Accordingly, the first light-emitting element portions 51 are exposed as shown in
In the manufacturing method according to the present embodiment, the first light-emitting element portions 51 on the first substrate 10 can be collectively transferred to the second substrate 20. The first light-emitting element portions 51 can be transferred more easily than in the case in which the first light-emitting element portions 51 are individually transferred. The present embodiment may provide a method of manufacturing a light-emitting device with improved producibility.
In mounting step S150 shown in
For example, as shown in
The second substrate 20 is removed from the first light-emitting element portions 51 as shown in
For example, in the case in which the first light-emitting element portions 51 are bonded to the second substrate 20 by thermocompression bonding using first members 61 formed of a resin-based material, the second substrate 20 can be removed from the first light-emitting element portions 51 by removing the first members 61 by, for example, wet etching using a stripping solution. For example, in the case in which the first light-emitting element portions 51 are bonded to the second substrate 20 by surface-activated bonding, the second substrate 20 and the first members 61 are removed by etching. The first light-emitting element portions 51 can be collectively mounted on the mounting board 70 by such a method.
In the above example, the first members 61 fix the first light-emitting element portions 51 to the second substrate 20. The first light-emitting element portions 51 can be directly fixed to the second substrate 20 in the embodiment.
Examples of Second Structure Body Fixing Step S141 and Second Transfer Step S142 shown in
In Second Structure Body Fixing Step S141, for example, second members 62 (see
The structure body 15 faces a third substrate 30 such that the second light-emitting element portions 52 provided with the second members 62 face the third substrate 30 as shown in
In Second Transfer Step S142 shown in
As shown in
The portions 10q of the first substrate 10 overlapping with the second regions 12 when viewed from the second surface 10fb side are removed, and therefore the second light-emitting element portions 52 are separated from the first substrate 10 while being fixed to the third substrate 30. The second light-emitting element portions 52 are thus transferred from the first substrate 10 to the third substrate 30. Portions (portions 10q) of the first substrate 10 left on the second light-emitting element portions 52 are removed by, for example, reactive ion etching (RIE).
The upper surfaces of the second light-emitting element portions 52 are thus exposed as shown in
For example, in Mounting Step S160 shown in
As shown in
After that, as shown in
By the manufacturing method according to the present embodiment, a light-emitting device including a plurality of first light-emitting element portions 51 and a plurality of second light-emitting element portions 52 is obtained. In the present embodiment, a plurality of light-emitting element portions can be precisely mounted on a mounting board or a transfer substrate. The first light-emitting element portions 51 on the first substrate 10 can be collectively transferred to the second substrate 20 in the embodiment, so that high producibility may be obtained compared with the case in which a plurality of singulated light-emitting elements are individually mounted.
In the above example, the second members 62 fix the second light-emitting element portions 52 to the third substrate 30. Alternatively, the second light-emitting element portions 52 can be directly fixed to the third substrate 30 in the embodiment.
In the steps described referring to
On the other hand, the wavelength distribution of light emitted from the “second light-emitting element portions 52” illustrated in
Certain embodiments of the present disclosure have been described above with reference to specific examples. However, the scope of the present invention is not limited to those specific examples. For example, specific structures of the substrates, the semiconductor layered body, and the light-emitting element portions included in the light-emitting device can be appropriately selected from known art by a person skilled in the art, and variations of such specific configurations are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and can obtain similar effects.
Further, two or more elements, combined to the extent technical possible, in the specific examples are also within the scope of the present invention as long as the combination of the two or more elements involves the gist of the present invention.
Claims
1. A method of manufacturing a light-emitting device, the method comprising:
- providing a structure body comprising: a first substrate having a first surface and a second surface opposite to the first surface, the first surface including first regions and second regions; first light-emitting element portions respectively located on the first regions of the first surface; and second light-emitting element portions respectively located on the second regions of the first surface;
- while the first light-emitting element portions and the second light-emitting element portions face a second substrate, fixing the first light-emitting element portions to the second substrate without fixing the second light-emitting element portions to the second substrate;
- subsequently, transferring the first light-emitting element portions from the first substrate to the second substrate by removing, from the second surface, portions of the first substrate overlapping the first regions when viewed from the second surface; and
- subsequently, separating the first substrate from the second substrate in a state in which the second light-emitting element portions are located on the second regions.
2. The method of manufacturing a light-emitting device according to claim 1, wherein:
- the step of fixing the first light-emitting element portions to the second substrate comprises: disposing first members respectively on the first light-emitting element portions without disposing the first members on the second light-emitting element portions, and fixing the first light-emitting element portions to the second substrate via the first members.
3. The method of manufacturing a light-emitting device according to claim 1, further comprising:
- fixing the second light-emitting element portions to a third substrate; and
- subsequently, transferring the second light-emitting element portions from the first substrate to the third substrate by removing, from the second surface, portions of the first substrate overlapping the second regions when viewed from a second surface side.
4. The method of manufacturing a light-emitting device according to claim 2, further comprising:
- fixing the second light-emitting element portions to a third substrate; and
- subsequently, transferring the second light-emitting element portions from the first substrate to the third substrate by removing, from the second surface, portions of the first substrate overlapping the second regions when viewed from a second surface side.
5. The method of manufacturing a light-emitting device according to claim 3, wherein:
- the step of fixing the second light-emitting element portions to the third substrate comprises: disposing second members respectively on the second light-emitting element portions, and fixing the second light-emitting element portions to the third substrate via the second members.
6. The method of manufacturing a light-emitting device according to claim 4, wherein:
- the step of fixing the second light-emitting element portions to the third substrate comprises: disposing second members respectively on the second light-emitting element portions, and fixing the second light-emitting element portions to the third substrate via the second members.
7. The method of manufacturing a light-emitting device according to claim 5, wherein:
- the first surface of the first substrate further comprises third regions,
- the structure body further comprises third light-emitting element portions respectively located on the third regions,
- the third light-emitting element portions are not fixed to the third substrate in the step of fixing the second light-emitting element portions to the third substrate, and
- after the step of transferring the second light-emitting element portions from the first substrate to the third substrate, the third light-emitting element portions are separated from the third substrate while being located on the third regions.
8. The method of manufacturing a light-emitting device according to claim 6, wherein:
- the first surface of the first substrate further comprises third regions,
- the structure body further comprises third light-emitting element portions respectively located on the third regions,
- the third light-emitting element portions are not fixed to the third substrate in the step of fixing the second light-emitting element portions to the third substrate, and
- after the step of transferring the second light-emitting element portions from the first substrate to the third substrate, the third light-emitting element portions are separated from the third substrate while being located on the third regions.
9. The method of manufacturing a light-emitting device according to claim 1, wherein:
- the step of providing the structure body comprises: forming a semiconductor layered body on the first substrate, and forming the first light-emitting element portions and the second light-emitting element portions from the semiconductor layered body by removing parts of the semiconductor layered body.
10. The method of manufacturing a light-emitting device according to claim 2, wherein:
- the step of providing the structure body comprises: forming a semiconductor layered body on the first substrate, and forming the first light-emitting element portions and the second light-emitting element portions from the semiconductor layered body by removing parts of the semiconductor layered body.
11. The method of manufacturing a light-emitting device according to claim 3, wherein:
- the step of providing the structure body comprises: forming a semiconductor layered body on the first substrate, and forming the first light-emitting element portions and the second light-emitting element portions from the semiconductor layered body by removing parts of the semiconductor layered body.
12. The method of manufacturing a light-emitting device according to claim 1, further comprising:
- between the step of providing the structure body and the step of fixing the first light-emitting element portions to a second substrate, forming grooves in the first substrate by removing a portion of the first substrate between one of the first regions and one of the second regions from the first surface,
- wherein, in the step of transferring the first light-emitting element portions from the first substrate to the second substrate, the first substrate is removed to reach the grooves.
13. The method of manufacturing a light-emitting device according to claim 2, further comprising:
- between the step of providing the structure body and the step of fixing the first light-emitting element portions to a second substrate, forming grooves in the first substrate by removing a portion of the first substrate between one of the first regions and one of the second regions from the first surface,
- wherein, in the step of transferring the first light-emitting element portions from the first substrate to the second substrate, the first substrate is removed to reach the grooves.
14. The method of manufacturing a light-emitting device according to claim 3, further comprising:
- between the step of providing the structure body and the step of fixing the first light-emitting element portions to a second substrate, forming grooves in the first substrate by removing a portion of the first substrate between one of the first regions and one of the second regions from the first surface,
- wherein, in the step of transferring the first light-emitting element portions from the first substrate to the second substrate, the first substrate is removed to reach the grooves.
15. The method of manufacturing a light-emitting device according to claim 1, wherein the first substrate comprises a silicon substrate.
16. The method of manufacturing a light-emitting device according to claim 2, wherein the first substrate comprises a silicon substrate.
17. The method of manufacturing a light-emitting device according to claim 3, wherein the first substrate comprises a silicon substrate.
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Type: Grant
Filed: Jan 25, 2021
Date of Patent: Oct 24, 2023
Patent Publication Number: 20210234062
Assignee: NICHIA CORPORATION (Anan)
Inventor: Yusuke Aoki (Anan)
Primary Examiner: Ratisha Mehta
Application Number: 17/157,570