Low frequency vibrating actuator device and low frequency vibrating actuator apparatus including the same
Provided is a low frequency vibrating actuator device including an actuator configured to generate a vibration by receiving a voltage, a spring structure disposed on the actuator, and a vibrating mass part disposed on the spring structure. Here, the spring structure includes a first thin-film, a first spacer disposed between the first thin-film and the actuator, and a second spacer disposed between the first thin-film and the vibrating mass part. Also, the first spacer and the second spacer are horizontally offset from each other.
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This U.S. non-provisional patent application claims priority under 35 U.S.C. § 119 of Korean Patent Application Nos. 10-2020-0151070, filed on Nov. 12, 2020, and 10-2021-0030094, filed on Mar. 8, 2021, the entire contents of which are hereby incorporated by reference.
BACKGROUNDThe present disclosure herein relates to a low frequency vibrating actuator device and a low frequency vibrating actuator apparatus including the same, and more particularly, to a low frequency vibrating actuator device including a spring structure and a low frequency vibrating actuator apparatus including the same.
In general, a vibrating actuator device may be an actuator device generating and transmitting a vibration by using, e.g., an electric motor, a piezoelectric device, an electrostrictive device, and a capacitive device. The vibrating actuator device may perform a function of transmitting a vibration to a finger tip, a skin, and a tissue in a body of a human. A low frequency vibrating actuator device that provides a low frequency vibration sensible by a human may be applied to various technological and industrial fields such as a touch screen, a tactile display, an augmented reality(AR)/virtual reality(VR)/mixed reality(MR) field, and bio-diagnosis as well as a band-type, patch-type, wearing-type, mask-type, or helmet-type skin care vibration stimulating array apparatus that performs a function of providing a vibration stimulating massage to a skin.
SUMMARYThe present disclosure provides a low frequency vibrating actuator device that outputs a low frequency sensible by a human and a low frequency vibrating actuator apparatus including the same.
The object of the present invention is not limited to the aforesaid, but other objects not described herein will be clearly understood by those skilled in the art from descriptions below.
An embodiment of the inventive concept provides a low frequency vibrating actuator device including: an actuator configured to generate a vibration by receiving a voltage; a spring structure disposed on the actuator; and a vibrating mass part disposed on the spring structure. Here, the spring structure includes: a first thin-film; a first spacer disposed between the first thin-film and the actuator; and a second spacer disposed between the first thin-film and the vibrating mass part. Also, the first spacer and the second spacer are horizontally offset from each other.
In an embodiment of the inventive concept, a low frequency vibrating actuator apparatus includes: a substrate; and at least one low frequency vibrating actuator device disposed on the substrate. Here, the low frequency vibrating actuator device includes: an actuator configured to generate a vibration by receiving a voltage; a first spring structure disposed on the actuator; and a vibrating mass part disposed on the first spring structure. Also, the first spring structure includes: a first thin-film; a first spacer disposed between the first thin-film and the actuator; and a second spacer disposed between the first thin-film and the vibrating mass part. Here, the first spacer and the second spacer are horizontally offset from each other.
The accompanying drawings are included to provide a further understanding of the inventive concept, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the inventive concept and, together with the description, serve to explain principles of the inventive concept. In the drawings:
The present invention may be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the present invention to those skilled in the art. Further, the present invention is only defined by scopes of claims. In addition, the sizes of the elements and the relative sizes between elements may be exaggerated for further understanding of the present invention.
In the following description, the technical terms are used only for explaining a specific exemplary embodiment while not limiting the present disclosure. Unless terms used in embodiments of the present invention are differently defined, the terms may be construed as meanings that are commonly known to a person skilled in the art.
In the following description, the technical terms are used only for explaining a specific exemplary embodiment while not limiting the present disclosure. The terms of a singular form may include plural forms unless referred to the contrary. The meaning of “include,” “comprise,” “including,” or “comprising,” specifies a property, a region, a fixed number, a step, a process, an element and/or a component but does not exclude other properties, regions, fixed numbers, steps, processes, elements and/or components.
It will also be understood that when a layer is referred to as being “on” another layer or substrate, it can be directly on the other layer or substrate, or intervening layers may also be present.
It will be understood that although the terms first and second are used herein to describe various elements, these elements should not be limited by these terms. These terms are used only to discriminate one region or layer from another region or layer. Therefore, a portion referred to as a first portion in one embodiment can be referred to as a second portion in another embodiment. An embodiment described and exemplified herein includes a complementary embodiment thereof. Like reference numerals refer to like elements throughout.
Referring to
Referring to
Referring to
Referring to
Each of the first thin-film 111, the second thin-film 112, the third thin-film 113, the fourth thin-film 114, the first spacer 121, the second spacer 122, and the third spacer 123, which are described with reference to
Each of the first to fourth thin-films 111, 112, 113, and 114 may have a thickness, a width, a shape, and a depth, which are not limited to the illustrations in the drawings. For example, each of the first to fourth thin-films 111, 112, 113, and 114 may have various shapes such as a square shape, a rectangular shape, a triangular shape, a circular shape, and an oval shape and have the same thickness, width, and depth as each other.
Each of the first to third spacers 121, 122, and 123 may have a thickness, a length, and a width, which are not limited to the illustrations in the drawings. For example, the first to third spacers 121, 122, and 123 may have the same thickness, length, and width as each other or different thicknesses, lengths, and widths from each other.
Referring to
Referring to
The spring structure 100 may be one of the spring structures 100a, 100b, 100c, 100d, and 100e described with reference to
Referring to
The insulation layers 221 may be laminated. In other words, the insulation layers 221 may be laminated in a third direction D3. The insulation layers 221 may include at least one of a piezoelectric device or an electrostrictive device. Each of the insulation layers 221 may be a piezoelectric thin-film. For example, each of the insulation layers 221 may include at least one of PZT, PLZT, PMN-PT, PYN-PT, PIN-PT, ZnO, CdS, AIN, BaTiO3, PbTiO3, LiNbO3, LiTaO3, BNT, PVDF, P(DVF-TrFE), P(VDF-TrFE-CFE), P(VDF-TrFE-CTFE), P(VDF-HFP), PVDF-TFE, PVC, PAN, PPEN, or polyamide. However, the embodiment of the inventive concept is not limited to the above-described materials. As the insulation layers 221 are integrated with each other, a boundary surface is not provided between the insulation layers 221 adjacent to each other. For another example, unlike as illustrated, the boundary surface may be provided between the insulation layers 221 adjacent to each other.
The first side electrode 211 and the second side electrode 212 may be respectively disposed on both sidewalls of the insulation layers 221. The first side electrode 211 and the second side electrode 212 may be respectively provided along the both sidewalls of the insulation layers 221. The first side electrode 211 and the second side electrode 212 may be spaced apart from each other in a first direction D1.
The internal electrodes 222 may include at least one first internal electrode 222a electrically connected with the first side electrode 211 and at least one second internal electrode 222b electrically connected with the second side electrode 212. The first internal electrode 222a and the second internal electrode 222b may be alternately laminated with each other. The first internal electrode 222a and the second internal electrode 222b may be spaced apart from each other in the third direction D3. Each of the first and second side electrodes 211 and 212 and the internal electrodes 222 may include at least one metal material of silver (Ag), palladium (Pd), platinum (Pt), nickel (Ni), copper (Cu), titanium (Ti), gold (Au), and tin (Sn). However, the embodiment of the inventive concept is not limited to the above-described materials.
As an alternating current voltage is applied between the first side electrode 211 and the second side electrode 212, the actuator 200 may vibrate, a generated vibration may be transmitted to the vibrating mass part 300 through the spring structure 100 disposed on the actuator 200, and finally the vibrating mass part 300 may vibrate.
Referring to
The vibrating mass part 300 may have a thickness, a width, a height, and a shape, which are not limited to the illustrations in the drawings. The vibrating mass part 300 may have various shapes such as a cylinder, an elliptical cylinder, a rectangular cylinder, and a triangular cylinder.
Since the actuator 200 has a resonance frequency of several tens to several hundreds kHz, the actuator 200 generates a vibration that is not sensed by a human. As the spring structure 100 and the vibrating mass part 300 are provided on the actuator 200, the low frequency vibrating actuator device 10 may have a resonance frequency in a range from about 100 Hz to about 500 Hz. In other words, as the spring structure 100 and the vibrating mass part 300 are provided, a low frequency vibration that is sensible by a human may be generated. The vibrating mass part 300 may have a resonance frequency less than that of the actuator 200. Also, as the spring structure 100 is provided, a vibration characteristic of each of the spring structure 100 and the vibrating mass part 300, which vertically vibrate, may improve. Also, as the low frequency vibrating actuator device 10 has a vibration displacement of about 10 μm or more and a vibration output of about several tens mN, a vibration having a high displacement and a high output may be generated.
Referring to
An uppermost insulation layer 221 of the actuator 200 may include a first protruding portion 221P. The first protruding portion 221P may protrude in a direction to the first thin-film 111 from a top surface of the uppermost insulation layer 221 of the actuator 200. The first protruding portion 221P may be disposed adjacent to one side surface of the first thin-film 111.
The vibrating mass part 300 may include a second protruding portion 300P. The second protruding portion 300P may protrude in a direction from a bottom surface of the vibrating mass part 300 to the first thin-film 111. The second protruding portion 221P may be disposed adjacent to the other side surface of the first thin-film 111. The first protruding portion 221P and the second protruding portion 300P may be horizontally offset. That is, in this embodiment, the first protruding portion 221P and the second protruding portion 300P may serve as the spacer instead of the omitted spacers. In other words, the first thin-film 111, the first protruding portion 221P, and the second protruding portion 300P may constitute the spring structure of the embodiments of the inventive concept.
Referring to
A width between the first pattern P1 and one side surface of the first thin-film 111 may be a first width W1. A width between the first pattern P1 and the second pattern P2 adjacent to the first pattern P1 may be a second width W2. A width between the second patterns P2 facing each other may be a third width W3. A width of the through pattern TP may be a fourth width W4. For example, the first width W1 may be about 0.4 mm, the second width W2 may be about 0.2 mm, the third width W3 may be about 2.8 mm, and the fourth width W4 may be about 0.1 mm. However, the each of the first to fourth widths W1, W2, W3, and W4 may be freely changed instead of being limited thereto.
Referring to
Referring to
Referring to
The support 130 may be disposed on the actuator 200. The support 130 may have a U-shaped cross-section. The support 130 may include a first portion 130a covering a top surface of the actuator 200 and second portions 130b each extending in a direction from the first portion 130a to the first thin-film 111. The second portions 130b may be parallel to each other. The second portions 130b may be disposed adjacent to both side surfaces of the first thin-film 111, respectively. In other words, the second portions 130b may contact edges of the first thin-film 111, respectively. A width of each of the second portions 130b may be a fifth width W5. For example, the fifth width W5 may be substantially equal to the first width W1. For another example, the fifth width W5 may be different from the first width W1.
For example, the support 130 may include at least one of a metal material or an alloy having a high rigidity, an organic material, a ceramic material or a semiconductor material having a high rigidity and elasticity. However, the embodiment of the inventive concept is not limited to the above-described materials. For example, the support 130 may include the same material as the first to fourth thin-films 111, 112, 113, and 114 and the first to third spacers 121, 122, and 123. For example, the support 130 may include a different material from the first to fourth thin-films 111, 112, 113, and 114 and the first to third spacers 121, 122, and 123. The support 130 may have a shape, a width, a length, and a depth that are changeable instead of being limited thereto.
The vibrating mass part 300 may be disposed between second patterns P2 facing each other. As the through pattern TP is provided in the first thin-film 111, and the support 130 contacts the edge of the first thin-film 111, a vibration characteristic of the first thin-film 111 and the vibrating mass part 300, which vertically vibrate, may improve.
The vibrating actuator device described with reference to
Referring to
The substrate 400 may include a rigid material or a flexible material. For example, the substrate 400 may include at least one of polydimethylsiloxane (PDMS), elastomer, silicone, Ecoflex, rubber, or urethane. However, the embodiment of the inventive concept is not limited to the above-described materials.
A line pattern (not shown) may be disposed on the substrate 400. The line pattern (not shown) may be electrically connected with the first side electrode 211 and the second side electrode 212 of the actuator 200 to transmit an electrical signal. For another example, the line pattern (not shown) may be disposed in the substrate 400. When the substrate 400 includes a flexible material, the line pattern (not shown) may include a flexible material or have a serpentine structure.
Referring to
The first side electrode 211 and the second side electrode 212 may further extend onto a bottom surface of a lowermost insulation layer. Thus, the connection electrodes 401 may be electrically connected to one of the first side electrode 211 and the second side electrode 212.
The first side electrode 211 and the second side electrode 212 may be electrically connected with the connection electrodes 401 by a conductive adhesive. For example, the conductive adhesive may include a material such as silver, epoxy, copper epoxy, or silver paste. Also, the conductive adhesive may have an adhesive force that is strengthened through a thermal curing process and an optical curing process. For example, the connection electrodes 401 may be electrically connected with the line pattern (not shown).
Referring to
A plurality of low frequency vibrating actuator devices 10 may be arranged in an array shape on the substrate 400. As the plurality of low frequency vibrating actuator devices 10 are arranged, each of the devices may realize a different vibration pattern. As a result, various types of vibration patterns may be realized according to the embodiment.
Referring to
The protection layer 500 may include a flexible material. For example, the protection layer 500 may include at least one of polydimethylsiloxane (PDMS), polymethyl methacrylate (PMMA), Ecoflex, elastomer, silicone, urethane, or rubber. However, the embodiment of the inventive concept is not limited to the above-described materials.
As the protection layer 500 is provided, the low frequency vibrating actuator devices 10 may be protected against external contact and moisture, or a human skin contacting the low frequency vibrating actuator apparatus 1003 may be protected.
Referring to
In the projection 510, a width of a top surface may be less than that of a bottom surface. For example, the projection 510 may have a width that gradually decreases in the third direction D3. The projection 510 may have a shape and a width that are changeable instead of being limited thereto.
The projection 510 may include a rigid material or a flexible material. For example, the projection 510 may include at least one of a hard material such as metal, plastic, and ceramic or a flexible material such as PDMS, elastomer, silicone, Ecoflex, rubber, or urethane. However, the embodiment of the inventive concept is not limited to the above-described materials.
As the projection 510 is provided, a vibration generated from the low frequency vibrating actuator device 10 may be further effectively transmitted to a skin surface.
Referring to
As the plurality of projections 510 are provided, a high density vibration stimulus may be possibly generated.
Referring to
The vibrating layer 410 may include a flexible material. The vibrating layer 410 may include the same material as the protection layer 500. For example, the protection layer 500 may include at least one of PDMS, PMMA, Ecoflex, elastomer, silicone, urethane, or rubber. However, the embodiment of the inventive concept is not limited to the above-described materials. Each of the low frequency vibrating actuator devices 10 may be disposed on the vibrating layer 410.
The support 530 may be substantially the same as the support 130 described with reference to
As the vibrating layer 410 and the support 530 are provided, a vibration interference between the low frequency vibrating actuator devices 10 may be reduced. In other words, a vibration of the low frequency vibrating actuator devices 10 may be minimally transmitted to the substrate 400 or minimally propagated to the adjacent low frequency vibrating actuator device 10.
Referring to
A low frequency vibrating actuator device 10 may include a first spring structure 100 disposed between an actuator 200 and a vibrating mass part 300. The low frequency vibrating actuator device 10 may include a second spring structure 100′ disposed on the vibrating mass part 300.
The second spring structure 100′ may be one of the spring structures 100a, 100b, 100c, 100d, and 100e described with reference to
The box-type structure 600 may include a lower portion 600a, an upper portion 600b, and connection portions 600c. Connection electrodes 401 may be disposed in the lower portion 600a. The actuator 200 may be disposed on the lower portion 600a. The lower portion 600a and the upper portion 600b may be spaced apart from each other in the third direction D3. The lower portion 600a and the upper portion 600b may be parallel to each other. The connection portions 600c may connect the lower portion 600a and the upper portion 600b to each other. The connection portions 600c each may extend in the third direction D3.
The second spring structure 100′ may contact the upper portion 600b. Thus, the low frequency vibrating actuator device 10 may be mounted into the box-type structure 600. For another example, when the second spring structure 100′ is omitted, the vibrating mass part 300 may contact the upper portion 600b.
As the box-type structure 600 is provided, the low frequency vibrating actuator device 10 may be mounted into the box-type structure 600 and protected from an external impact.
Experimental examples 1 to 4 below are performed on the low frequency vibrating actuator device according to the embodiments of the inventive concept.
EXPERIMENTAL EXAMPLE 1Each of
Although each of the vibration displacement and the traction force at the resonance frequency is extremely high in a theoretical analysis, the vibration displacement and the traction force around the resonance frequency in a real experiment may be similar to real values in consideration of damping. Thus, it is expected that, at the first resonance frequency of about 192 Hz to about 194 Hz, the vibration displacement (in a vertical direction) is about 4 μm to about 6 μm, and the traction force (in the vertical direction) is about 0.35 N to about 0.36 N. Also, it is expected that, at the third resonance frequency of about 393 Hz to about 395 Hz, the vibration displacement (in a vertical direction) is about 130 μm to about 132 μm, and the traction force (in the vertical direction) is about 7N to about 8N.
EXPERIMENTAL EXAMPLE 2In this experimental example, a low frequency vibrating actuator device having the structure of
Each of
That is, the lower frequency vibrating actuator device according to the embodiments of the inventive has a resonance frequency of about 500 Hz or less that is sensible by a human, and since a range of a resonance spectrum increases as a Q factor of the resonance decreases due to damping when hands contacts the lower frequency vibrating actuator device, the human may easily feel the vibration although a sine wave of about 100 Hz to about 500 Hz is applied.
EXPERIMENTAL EXAMPLE 3In this experimental example, a low frequency vibrating actuator device having the structure of
In this experimental example, a low frequency vibrating actuator device having a structure of
Although each of the vibration displacement and the traction force at the resonance frequency is extremely high in a theoretical analysis, the vibration displacement and the traction force around the resonance frequency in a real experiment may be similar to real values in consideration of damping. Thus, it is expected that, at a first resonance frequency of about 228 to about 231 Hz, the vibration displacement (in the vertical direction) is about 64 μm to about 65 μm, and the traction force (in the vertical direction) is about 0.4N to about 0.5N.
Referring to
In order to smoothly transmit the vibration to the skin, the projection 510, the vibrating layer 410, and the support 530, which are described with reference to
Referring to
The low frequency vibrating actuator apparatus 1009 may further include a mask for fixing the low frequency vibrating actuator devices 10. In order to closely contact the mask 800 to the skin, a band (not shown) or a closely contacting device (not shown) may be additionally provided. The above-described apparatus may improve a blood circulation of a facial skin. Also, a massage effect may be maximized by providing a vibration stimulus having various patterns allowing a nutritional component to be easily absorbed into the skin. In order to smoothly transmit the vibration to the skin, the projection 510, the vibrating layer 410, and the support 530, which are described with reference to
Referring to
The low frequency vibrating actuator apparatus 1010 may further include a helmet 900 that fixes the low frequency vibrating actuator devices 10 and is worn on the scalp of a human. In order to closely contact the helmet 900 to the skin, a band (not shown) or a closely contacting device (not shown) may be additionally provided. The above-described apparatus may improve a blood circulation of the scalp. Also, a massage effect may be maximized by providing a vibration stimulus having various patterns allowing a nutritional component to be easily absorbed into the scalp. The vibrating layer 410 and the support 530, which are described with reference to
According to the embodiment of the inventive concept, as the spring structure and the vibrating mass part are provided on the actuator, the low frequency vibration sensible by the human may be outputted.
The object of the present invention is not limited to the aforesaid, but other objects not described herein will be clearly understood by those skilled in the art from descriptions below.
Although the embodiments of the present invention have been described, it is understood that the present invention should not be limited to these embodiments but various changes and modifications can be made by one ordinary skilled in the art within the spirit and scope of the present invention as hereinafter claimed.
Claims
1. A low frequency vibrating actuator device comprising:
- an actuator configured to generate a vibration by receiving a voltage;
- a spring structure disposed on the actuator; and
- a vibrating mass part disposed on the spring structure,
- wherein the spring structure comprises:
- a first thin-film;
- a first spacer disposed between the first thin-film and the actuator; and
- a second spacer disposed between the first thin-film and the vibrating mass part,
- wherein the first spacer and the second spacer are horizontally offset from each other.
2. The low frequency vibrating actuator device of claim 1, wherein the first spacer is disposed adjacent to one side surface of the first thin-film, and
- the second spacer is disposed adjacent to the other side surface of the first thin-film.
3. The low frequency vibrating actuator device of claim 1, wherein the spring structure further comprises:
- a second thin-film disposed between the second spacer and the vibrating mass part; and
- a third thin-film disposed between the first spacer and the actuator.
4. The low frequency vibrating actuator device of claim 1, wherein the spring structure further comprises a second thin-film and a third spacer, which are disposed between the second spacer and the vibrating mass part,
- wherein the third spacer is disposed between the second thin-film and the vibrating mass part.
5. The low frequency vibrating actuator device of claim 4, wherein the third spacer vertically overlaps the first spacer and is horizontally offset from the second spacer.
6. The low frequency vibrating actuator device of claim 4, wherein the spring structure further comprises:
- a third thin-film disposed between the first spacer and the actuator; and
- a fourth thin-film disposed between the third spacer and the vibrating mass part.
7. The low frequency vibrating actuator device of claim 1, wherein the actuator comprises:
- a plurality of insulation layers that are laminated with each other;
- internal electrodes that are alternately laminated between the insulation layers adjacent to each other; and
- a first side electrode and a second side electrode that are respectively provided along sidewalls of the insulation layers and electrically connected to at least one of the internal electrodes.
8. The low frequency vibrating actuator device of claim 7, wherein each of the insulation layers comprises at least one of PZT, PLZT, PMN-PT, PYN-PT, PIN-PT, ZnO, CdS, AIN, BaTiO3, PbTiO3, LiNbO3, LiTaO3, BNT, PVDF, P(DVF-TrFE), P(VDF-TrFE-CFE), P(VDF-TrFE-CTFE), P(VDF-HFP), PVDF-TFE, PVC, PAN, PPEN, and polyamides.
9. The low frequency vibrating actuator device of claim 1, further comprising:
- a protection layer disposed on the vibrating mass part; and
- at least one projection disposed on the protection layer.
10. The low frequency vibrating actuator device of claim 9, wherein the projection vertically overlaps the vibrating mass part.
11. The low frequency vibrating actuator device of claim 1, wherein the first spacer and the second spacer each comprises the same material as the first thin-film and are connected to each other in an integrated manner.
12. The low frequency vibrating actuator device of claim 1, wherein the low frequency vibrating actuator device has a resonance frequency of about 100 Hz to about 500 Hz.
13. A low frequency vibrating actuator apparatus comprising:
- a substrate; and
- at least one low frequency vibrating actuator device disposed on the substrate,
- wherein the low frequency vibrating actuator device comprises:
- an actuator configured to generate a vibration by receiving a voltage;
- a first spring structure disposed on the actuator; and
- a vibrating mass part disposed on the first spring structure,
- wherein the first spring structure comprises:
- a first thin-film;
- a first spacer disposed between the first thin-film and the actuator; and
- a second spacer disposed between the first thin-film and the vibrating mass part,
- wherein the first spacer and the second spacer are horizontally offset from each other.
14. The low frequency vibrating actuator apparatus of claim 13, further comprising connection electrodes disposed in the substrate,
- wherein a top surface of each of the connection electrodes is exposed from the substrate,
- wherein the actuator comprises:
- a plurality of insulation layers that are laminated with each other;
- internal electrodes that are alternately laminated between the insulation layers adjacent to each other; and
- a first side electrode and a second side electrode that are respectively provided along sidewalls of the insulation layers and electrically connected to at least one of the internal electrodes,
- wherein each of the connection electrodes is electrically connected to one of the first side electrode and the second side electrode.
15. The low frequency vibrating actuator apparatus of claim 13, wherein the low frequency vibrating actuator device comprises a plurality of low frequency vibrating actuator devices and further comprises a protection layer disposed on the low frequency vibrating actuator devices.
16. The low frequency vibrating actuator apparatus of claim 15, further comprising at least one projection disposed on the protection layer,
- wherein the projection vertically overlaps the vibrating mass part.
17. The low frequency vibrating actuator apparatus of claim 13, further comprising:
- a vibrating layer disposed below the actuator; and
- a support disposed between the vibrating layer and the substrate.
18. The low frequency vibrating actuator apparatus of claim 13, wherein the first spacer is disposed adjacent to one side surface of the first thin-film, and
- the second spacer is disposed adjacent to the other side surface of the first thin-film.
19. The low frequency vibrating actuator apparatus of claim 18, wherein the first spring structure comprises:
- a second thin-film disposed between the second spacer and the vibrating mass part; and
- a third thin-film disposed between the first spacer and the actuator.
20. The low frequency vibrating actuator apparatus of claim 13, wherein the low frequency vibrating actuator device further comprises a second spring structure disposed on the vibrating mass part,
- wherein the second spring structure comprises:
- a second thin film;
- a third spacer disposed on a top surface of the second thin film and adjacent to one side surface of the second thin film; and
- a fourth spacer disposed on a bottom surface of the second thin film and adjacent to the other side surface of the second thin film.
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Type: Grant
Filed: Oct 4, 2021
Date of Patent: Jan 14, 2025
Patent Publication Number: 20220149265
Assignee: Electronics and Telecommunications Research Institute (Daejeon)
Inventors: Kang-Ho Park (Daejeon), Jong Tae Lim (Seoul), Seung Youl Kang (Daejeon), Bock Soon Na (Daejeon), Chan Woo Park (Daejeon), Wooseup Youm (Daejeon), Ji-Young Oh (Daejeon)
Primary Examiner: Emily P Pham
Application Number: 17/493,120