Semiconductor device having a circular-arc profile on a silicon surface
A semiconductor device includes a shallow isolation trench (STI) structure on a silicon substrate for isolating element-forming regions from one another. The surface region of the silicon substrate in the element-forming regions, as viewed in the extending direction of the gate electrode lines, once falls and thereafter rises monotonically from the periphery toward the center of the element-forming regions.
Latest ELPIDA MEMORY, INC Patents:
- Nonvolatile semiconductor memory device of variable resistive type with reduced variations of forming current after breakdown
- Test method for semiconductor device having stacked plural semiconductor chips
- DRAM MIM capacitor using non-noble electrodes
- High work function, manufacturable top electrode
- Semiconductor device and control method for semiconductor device
This application is based upon and claims the benefit of priority from Japanese patent application No. 2006-127349 filed on May 1, 2006, the disclosure of which is incorporated herein in its entirety by reference.
BACKGROUND OF THE INVENTION1. Field of the Invention
The present invention relates to a semiconductor device and a method for manufacturing the semiconductor device, and more particularly to a semiconductor device including therein MIS (Metal Insulator Semiconductor) transistors and a method for manufacturing the same.
2. Description of the Related Art
Semiconductor memory devices such as a DRAM (Dynamic Random Access Memory) device incorporate therein capacitors as storage elements and MOS (Metal Oxide Semiconductor) transistors for driving the capacitors. Reduction in the design rule of the semiconductor memory devices has recently been accelerated, which reduces the device area occupied by the MOS transistors, with the result that a sufficient gate width is difficult to secure. The reduction in the gate width causes a decrease in the ON-current of the MOS transistors, thereby inducing a reduction in the S/N ratio of the DRAM device.
There is known a vertical-type MOS transistor as a MIS transistor capable of securing a larger gate width with a smaller occupied area, in which source and drain regions and gate electrodes are arranged in a three-dimensional structure. To form the vertical-type MOS transistor, however, additional processes must be performed of obtain the three-dimensional structure, and thus the number of the processes increases considerably as compared with the planar-type MOS transistor. In such circumstances, there is an increasing demand for a semiconductor memory device that achieves a low fabrication cost in forming the planar-type MOS transistor, while securing a sufficient gate width without an increase in the number of processes.
Patent Publication JP-2001-035913A describes a planar-type MOS transistor, such as shown in
In JP-2001-035913A, the formation of the step difference between the top surface of the silicon substrate 11, i.e., the element-forming regions 10A and the top surface of the isolation oxide film 13 in the element-isolation region 10B prolongs the length of the surface area of the silicon surface at the location of the step difference, which results in an increase of the gate width denoted by “W” in
In the method described in JP-2001-035913A; however, a corner edge 43 may be formed on the edge of the surface region of the silicon substrate 11 in the element-forming regions 10A, as shown in
It is an object of the present invention to provide a semiconductor device including MIS transistors having a larger gate width without causing degradation in the reliability of the MIS transistors.
It is another object of the present invention to provide a method for manufacturing the semiconductor device as described above.
The present invention provides, in a first aspect thereof, a semiconductor device including: a silicon substrate; an element isolation region including a trench formed in the silicon substrate and an insulation film formed within the trench; a plurality of element-forming regions configured by a surface region of the silicon substrate and isolated from one another by the element isolation region; and a gate electrode line extending on the element isolation region and the element-forming regions, wherein the surface region of the silicon substrate in the element-forming regions has a height profile as viewed in a direction along the gate electrode line, the height profile being such that the surface region once falls and thereafter rises monotonically as viewed from a boundary between the element-forming regions and the element isolation region toward a center of the element-forming regions.
The present invention provides, in a second aspect thereof a method for manufacturing a semiconductor device including: forming an element isolation region on a silicon substrate to isolate a surface region of the silicon substrate into a plurality of element-forming regions, the isolation region including a trench formed in the silicon substrate and an insulating film deposited therein; removing a surface portion of the insulating film by using an isotropic metric etching process; annealing the silicon substrate in a hydrogen atmosphere to allow the surface region of the silicon substrate in the element-forming regions to have a height profile as viewed in a direction along the gate electrode line, the height profile being such that the surface region once falls and thereafter rises monotonically as viewed from a boundary between the element-forming regions and the element isolation region toward a center of the element-forming regions; and etching back the surface region of the silicon substrate by using an anisotropic etching process.
The above and other objects, features and advantages of the present invention will be more apparent from the following description, referring to the accompanying drawings.
Now, an exemplary embodiment of the present invention and a modification thereof will be described with reference to accompanying drawings, wherein similar constituent elements are designated by similar reference numerals throughout the drawings.
The surface of the silicon substrate 11 is exposed in the element-forming regions 10A from the STI structure. The exposed silicon surface of the silicon substrate 11 in the element-forming regions 10A extends from a boundary between the exposed silicon surface and the surface of the isolation oxide film 13 in the element isolation region 1B toward the center of the exposed silicon surface while once reducing the height abruptly and then increasing the height moderately. The exposed silicon surface then extends from the center thereof toward the opposing boundary between the exposed silicon surface and the isolation oxide film while moderately reducing the height and then increasing the height abruptly.
In other word, the height profile of the exposed silicon surface in the element forming regions 10A configures a W-character shape, and the central region thereof forms a circular-arc shape. The height profile of the peripheral portion of the exposed silicon surface configures a V-character shape. The height of the center of the exposed silicon surface in the element forming regions 10A is substantially equal to the height of the top surface of the isolation oxide film 13 in the element isolation region 10B.
As shown in
In the structure of
A rhombus region 41, which is defined by a portion of the gate electrode 15 and a portion of the element-forming regions 10A overlapping one another, is the channel region of the MOS transistor extending between the source region 18 and the drain region 19. The length of the channel region 41 along the extending direction of the gate electrode 15 is referred to as the gate width W, with the length of the channel region 41 along the direction perpendicular thereto being referred as the gate length L. The ON-current of the MOS transistor is generally determined by the cross-sectional area of the channel region 41. The gate length L or line width of the gate electrodes 15 is determined in advance by the design rule of the semiconductor device. Therefore, it is desired that the gate width W be increased by a layout design, in order to increase the ON-current of the MOS transistors. In the semiconductor device 10, the line width Land the line space S between adjacent gate electrodes 15 are generally equal and set at 90 nm, for example, in this embodiment.
Turning to
Contact plugs 22 made of a conducting material such as impurifies-doped polysilicon are formed within the contact holes 21.
A single memory cell includes a MOS transistor and a cell capacitor connected to the MOS transistor. The top of the contact plugs 22 is connected to the bottom electrode of the cell capacitor or an overlying interconnection.
In the semiconductor device 10 of the present embodiment, the circular-arc surface of the silicon substrate 11 in the element-forming regions 10A increases the gate width W as understood from
Moreover, a sharp outside corner edge is not formed at the periphery of the silicon surface in the element-forming regions 10A Thus, it is possible, in the dry etching process for forming the gate electrodes 15, to alleviate the concentration of electric field on a specific portion of the gate oxide film 14 formed on the silicon substrate 11. This prevents an over-etching of the gate oxide film 14 on the specific portion. Accordingly, the resultant MOS transistors have a reliable characteristic.
It is to be noted that the conventional LOCOS (Local Oxidation of Silicon)-type element-isolating region is not used in the current semiconductor devices having a design rule of about 0.2 μm or less. This is because it is difficult for the LOCOS structure to achieve smaller dimensions for the element-isolating regions, failing to secure a sufficient gate width. It is thus preferable, in order to secure a sufficient gate width, to form the STI-type element-isolating region as described in the above embodiment.
Subsequently, by a dry etching technique using the hard mask 31 as an etching mask, a surface portion of the silicon substrate 11 is removed to thereby form a trench 12 in the element-isolating region 10B. In this etching, the taper angle of the trench is set at around 82 to 87 degrees, and the depth is selected at around 200 to 250 nm, for the case of the width of the element-forming regions 10A being 100 nm, fore example. These values are selected in consideration of the filling or embedding performance of the insulating material within the trench 12. The term taper angle as used herein means the angle of the silicon surface of the trench 12 with respect to the vertical direction.
Thereafter, a SiO2 film 32 is deposited within the trench 12 and on top of the silicon substrate 11 by a HDP (High Density Plasma)-CVD technique, for example (
Subsequently, by wet etching using a BHF (buffered HF) solution, which has a high etch selectivity of SiO2 with respect to silicon, a surface portion of the isolation oxide film 13 is removed by around a 20- to 30-nm thickness (
Subsequently, by an annealing treatment in a hydrogen atmosphere, the surface portion of the silicon substrate 11 in the element-forming regions 10A is configured to have a circular-arc profile wherein the surface portion moderately rises from the edge of the element-forming regions 10A toward the center thereof (
In the present embodiment, an ordinary in-line wafer annealer is used, and the pressure is set at 15 Torr, the substrate temperature at 900 degrees C., H2 gas flow rate at 30 slm (standard litter per minute), and treatment time length at 60 sec. The annealing treatment in the hydrogen atmosphere allows the surface of the silicon substrate 11 to be moderately curved. The reason may be that the hydrogen infiltrates into the silicon substrate under a high temperature, to activate the silicon atoms for movement, thereby allowing the surface portion of the silicon substrate 11 to shift to an energetically stable state.
Subsequently, using a dry etching process which provides a high etch selectivity of silicon with respect to SiO2, the surface portion of the silicon substrate 11 in the element-forming regions 10A is etched back by around a 20- to 30-nm thickness while maintaining the original shape. In this process, the height of the central area of the surface portion of the silicon substrate 11, which is exposed most, is leveled with the height of the top surface of the isolation oxide film 13. In addition, the portion of the silicon surface overhanged by the tapered edge of the isolation oxide film 13 remains without being etched. Thus, the surface portion of the silicon substrate 11 has the shape of character-W as shown in
In the first step, CF4 is used as an etching gas under the conditions of a flow rate of 100 sccm, an ambient pressure of 4 mTorr, a source power of 300 W, a bias power of 100 W, a substrate temperature of 20 degrees C., and an etching time length of 3 seconds. In the second step, HBr and O2 are used as an etching gas under the conditions of HBr flow rate of 150 sccm, O2 flow rate of 4 sccm, ambient pressure of 60 mTorr, source power of 300 W, bias power of 100 W, substrate temperature of 20 degrees C., and etching time length of 20 sec. With these conditions, the etching rate of the silicon is about 60 nm/min., where the etch selectivity of silicon with respect to SiO2 is larger than 200.
Subsequently, by using acid or the like, residual deposits generated by the etch-back process are removed (
After a gate oxide film 14 is formed on the surface of the silicon substrate 11, an impurities-doped polysilicon film 15a and a Si3N4 film 16a are consecutively deposited thereon. The Si3N4 film 16a is formed to have a sufficient thickness for use in a self-alignment process for forming the contact holes 21. Thereafter, a photoresist film 33 is formed on the Si3N4 film 16a (
Subsequently, by a dry etching process using the photoresist mask as an etching mask, the Si3N4 film 16a is patterned to form the gate spacers 16. Thereafter, by a dry etching process using the gate spacers 16 as an etching mask, the impurities-doped polysilicon film 15a is patterned to form the gate electrodes 15. Thereafter, impurities are injected into the surface portions of the silicon substrate 11 exposed from the gate spacers 16 to form the source regions 18 and drain regions 19. It should be noted that the gate spacers 16 may have a multiple-layer structure such as including a SiO2 film and a Si3N4 film.
After a Si3N4 film is deposited to a thickness of about 20 nm on the entire surface, the Si3N4 film is etched back to a form sidewall oxide film 17 on the sidewall of the gate electrodes 15 and gate spacers 16 overlying the gate oxide film 14. Consequently, MOS transistors including gate electrode 15, and source region 18 and drain region 19 formed on the silicon substrate 11 at both sides of the gate electrode 15 are formed. The structure at this stage is shown in
Thereafter, an interlayer dielectric film 20 having a thickness of 300 to 500 nm is deposited on the silicon substrate 11 to cover the gate spacers 16 and sidewall oxide films 17. The interlayer dielectric film 20 is made of BPSG or PSG Subsequently, the interlayer dielectric film 20 is subjected to an annealing treatment for about 60 min. at a substrate temperature of about 700 to 800 degrees C., thereby suppressing generation of voids in the interlayer dielectric film 20. Further, the top surface of the interlayer dielectric film 20 is polished by a CMP process.
Thereafter, a photoresist mask having a circular-opening pattern is formed on the interlayer dielectric film 20 by using a known photolithographic process. Subsequently, contact holes 21 are formed to expose therethrough the silicon substrate 11 between the sidewall oxide films 17 of adjacent gate electrodes, by a dry etching process using the photoresist mask as an etching mask and also the gate spacers 16 and sidewall oxide films 17 as a self-alignment mask.
Impurity-doped polysilicon is deposited within the contact holes 21 and on top of the interlayer dielectric film 20, followed by a CMP or etch-back process to remove a portion of the doped polysilicon on the interlevel dielectric film 20 and leaving contact plugs 22 within the contact holes 21. Further, capacitors and overlying interconnections are formed to connect to the contact plugs 22, to thereby complete the semiconductor device 10.
According to the method of the present embodiment, subsequent to formation of the element-isolating region 10B, wet etching of the isolation oxide film 13 and an annealing treatment in a hydrogen atmosphere are performed, thereby enabling the exposed surface portion of the silicon substrate 11 in the element-forming regions 10A to have a curved-shape moderately rising from the edge toward the center of the silicon surface. This allows the gate width W of the MOS transistors to be increased as compared to the case of a flat surface of the silicon substrate.
In the method of the present embodiment, the number of exposure processes is not increased compared to the conventional method, in which the surface portion of the silicon substrate is formed flat. As a result, it is possible to suppress a reduction in the throughput of the manufacturing process.
Further, a corner edge or outside corner surface is not formed on the silicon substrate 11 in the element-forming regions 10 Thus, it is possible, in the dry etching process to pattern the gate electrodes 15, to alleviate the concentration of electric field in a specific portion of the gate oxide film 14 formed on the silicon substrate 11, and thus prevent over-etching of the gate oxide film 14. As a result, the reliability of the MOS transistor can be maintained.
In the method described in JP-2001-035913A, during forming the photoresist film 33 used for patterning the gate electrodes 15, as shown in
On the other hand, in the method of the present embodiment, the silicon substrate 11 is etched back after the annealing treatment, whereby the height in the center of the exposed silicon surface of the silicon substrate 11 in the element-forming regions 10A is substantially equal to the height of the top surface of the isolation oxide film 13. As a result, as shown in
In manufacturing the semiconductor device 23, after the process of forming the sidewall oxide film such as 17 shown in
If the contact layer 24 is to be formed in the method described in JP-2001-035913A, as shown in
In the modified example, in contrast, since the edge of the exposed surface of the silicon substrate 11 is lower than the top surface of the isolation oxide film 13, the contact layer 24 has an edge within the edge of the surface area of the exposed silicon substrate 11. This can prevent the short-circuit failure from occurring between the adjacent contact layers 24.
In the semiconductor device of the above embodiment of the present invention and the modification, the surface of the silicon substrate in the element-forming region is curved. Therefore, the length of the gate electrode line formed along such a curved surface increases, allowing the gate width of the MOS transistors to be increased. Further, no outside corner edge is formed on the surface portion of the silicon substrate in the element-forming region. Thus, in a dry etching process for patterning gate electrodes, electric field can be suppressed from concentrating on a specific portion of the gate oxide film, thereby preventing an over-etching of the gate insulating film.
While the invention has been particularly shown and described with reference to exemplary embodiments thereof, the invention is not limited to these embodiments. It will be understood by those of ordinary skill in the art that various changes in form and details be made therein without departing from the spirit and scope of the present invention as defined in the claims. For instance, although a DRAM is exemplified in the above embodiment, the present invention is applicable to various types of semiconductor devices including therein MOS transistors.
Claims
1. A semiconductor device comprising:
- a silicon substrate;
- an element isolation region including a trench formed in said silicon substrate and an insulation film formed within said trench;
- a plurality of element-forming regions configured by a surface region of said silicon substrate and isolated from one another by said element isolation region; and
- a gate electrode line extending on said element isolation region and said element-forming regions,
- wherein said surface region of said silicon substrate in said element-forming regions has a height profile as viewed in a direction along said gate electrode line, said height profile being such that said surface region once falls and thereafter rises monotonically as viewed from a boundary between said element-forming regions and said element isolation region toward a center of said element-forming regions.
2. The semiconductor device according to claim 1, wherein said height profile is such that a height of center of said surface region is substantially equal to a height of a periphery of said surface region.
3. The semiconductor device according to claim 1, wherein a potion of said surface region including said center has a shape of substantially circular arc.
4. The semiconductor device according to claim 1, further comprising a contact plug in contact with said surface region, said contact plug penetrating a space formed between a pair of said gate electrode lines.
5. The semiconductor device according to claim 4, wherein a contact layer is interposed between said contact plug and said surface region, said contact layer having a bottom extending between opposing peripheries of said surface region in said element-forming regions.
6. A method for manufacturing a semiconductor device comprising:
- forming an element isolation region on a silicon substrate to isolate a surface region of said silicon substrate into a plurality of element-forming regions, said isolation region including a trench formed in said silicon substrate and an insulating film deposited therein;
- removing a surface portion of said insulating film by using an isotropic metric etching process;
- annealing said silicon substrate in a hydrogen atmosphere to allow said surface region of said silicon substrate in said element-forming regions to have a height profile as viewed in a direction along said gate electrode line, said height profile being such that said surface region once falls and thereafter rises monotonically as viewed from a boundary between said element-forming regions and said element isolation region toward a center of said element-forming regions; and
- etching back said surface region of said silicon substrate by using an anisotropic etching process.
7. The method according to claim 6, wherein said annealing uses a ambient pressure of 30 Torr or below and a substrate temperature of 900 degrees C. or above.
8. The method according to claim 7, further comprising, subsequent to said etching back;
- forming a thermally-oxidized film on said surface region of said silicon substrate; and
- removing said thermally-oxidized film by using an isotropic etching process.
Type: Application
Filed: Apr 30, 2007
Publication Date: Nov 1, 2007
Patent Grant number: 8013415
Applicant: ELPIDA MEMORY, INC (Tokyo)
Inventor: Masahiko Ohuchi (Tokyo)
Application Number: 11/790,996
International Classification: H01L 29/00 (20060101);