SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
A semiconductor integrated circuit device with a “PAD on I/O cell” structure in which a pad lead part is disposed almost in the center of an I/O part so as to reduce the chip layout area. In the I/O part, a transistor lies nearest to the periphery of the semiconductor chip. When seen in a plan view of the I/O part, a resistance lies above the transistor and a first and a second diode lie above the resistance; a second transistor lies above the diodes; and a logic block lies above the second transistor with a pad lead part, for example, formed in a metal wiring layer, therebetween. This permits the pad through the second transistor to be on the same node and therefore the pad lead part can be disposed almost in the center of the I/O part.
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The disclosure of Japanese Patent Application No. 2008-323589 filed on Dec. 19, 2008 including the specification, drawings and abstract is incorporated herein by reference in its entirety.
BACKGROUND OF THE INVENTIONThe present invention relates to chip area reduction techniques for semiconductor devices, and more particularly to a technique useful for layout area reduction in the “PAD on I/O (Input/Output)” cell structure.
In recent years, with the growing demand for low-cost and smaller semiconductor integrated circuit devices, efforts towards cost reduction with smaller semiconductor chip sizes have been made. For smaller chip sizes, it is necessary to reduce the layout area in which components to be packaged are arranged.
One of the known layout area reduction techniques is that pads coupled with bonding wires or the like are overlapped with I/O cells as interfaces with the outside, which is called the “PAD on I/O cell” structure.
SUMMARY OF THE INVENTIONHowever, the present inventors have found that the PAD on I/O cell technology has the following problem.
In an I/O cell, the output buffer block includes, for example, an output buffer comprised of a P-channel MOS transistor and an N-channel MOS transistor, a first and a second diode for ESD (electrostatic discharge) protection, a first and a second resistance, and an ESD protection circuit.
The first and second diodes for ESD protection are coupled in series between the supply voltage and reference potential. One coupling end of the P-channel MOS transistor is coupled with the supply voltage and the other coupling end of the transistor is coupled with one coupling end of the first resistance.
The other coupling end of the first resistance is coupled with one coupling end of the second resistance and the other coupling end of the second resistance is coupled with one coupling end of the N-channel MOS transistor.
The other coupling end of the N-channel MOS transistor is coupled with the reference potential. The ESD protection circuit is coupled between the supply voltage and reference voltage. A pad is coupled with the junction of the first and second diodes and the junction of the first and second resistances.
Because of restrictions related to bonding with bonding wires, it is difficult to adopt smaller pads, so in order to maximize chip area reduction, it is desirable to maximize the area in which a pad and an I/O cell overlap each other.
However, the above circuit configuration has the following drawback: a pad is coupled with the junction of the first and second resistances and thus the lead part coupled with the pad is forced to lie between these two resistances, and as a consequence, the pad will protrude from the I/O cell and the chip area cannot be reduced effectively.
Another problem is the recent tendency that micro fabrication processes have been increasingly used and wire resistances are high and the resistance of wiring to the ESD protection circuit is also high. As a consequence, the discharge characteristics of the ESD protection circuit may deteriorate, which may cause ESD surge to be discharged to the reference potential through the N-channel MOS transistor located remotely from the ESD protection circuit, resulting in damage to the device.
If the wire resistance is high, one possible approach is to increase the number of ESD protection circuits to protect the device. However, this approach has the problem that the chip area must be larger.
An object of the present invention is to provide a technique that in the “PAD on I/O (Input/Output) cell” structure, the pad lead part is disposed almost in the center of the I/O part (cell) so as to reduce the semiconductor chip layout area.
The above and further objects and novel features of the invention will more fully appear from the following detailed description in this specification and the accompanying drawings.
Preferred embodiments of the invention which will be disclosed herein are briefly outlined below.
According to one aspect of the present invention, there is provided a semiconductor integrated circuit device including a semiconductor chip, in which the semiconductor chip includes a plurality of I/O pads disposed along edges of the semiconductor chip, and a plurality of I/O parts disposed on the semiconductor chip and coupled with any of the I/O pads. The I/O parts each include an output buffer block including an N-channel transistor and a P-channel transistor to form an output buffer and functioning as an interface for output of signals to the outside, and a logic block for controlling the output buffer and an input buffer. In the I/O part, the logic block, the N-channel transistor, and the P-channel transistor are arranged toward an edge of the semiconductor chip in order and a pad lead part to be coupled with the I/O pad lies between the logic block and the N-channel transistor.
In the N-channel transistor, a conductive film may not be formed over part of a main surface of a semiconductor region functioning as a drain, so that a drain terminal of the N-channel transistor can have a high resistance.
The output buffer block may include a first and a second diode for ESD protection and the first and second diodes may lie between the N-channel transistor and P-channel transistor.
The output buffer block may have a resistance for ESD protection and the resistance may lie between the first and second diodes and the P-channel transistor.
Furthermore, in the P-channel transistor, a conductive film may not be formed over part of a main surface of a semiconductor region functioning as a drain, so that a drain terminal of the P-channel transistor can have a high resistance.
Other preferred embodiments of the invention are briefly described below.
According to another aspect of the invention, there is provided a semiconductor integrated circuit device including a semiconductor chip, in which the semiconductor chip includes a plurality of I/O pads disposed along edges of the semiconductor chip, and a plurality of I/O parts disposed on the semiconductor chip and coupled with any of the I/O pads. The I/O parts each include an output buffer block including an N-channel transistor and a P-channel transistor to form an output buffer and functioning as an interface for output of signals to the outside, and a logic block which includes an input buffer block functioning as an interface for input of signals from the outside and controls the output buffer and the input buffer. In the I/O part, the logic block, the P-channel transistor, and the N-channel transistor are arranged in line in order and a pad lead part to be coupled with the I/O pad lies between the logic block and the P-channel transistor.
In the N-channel transistor, a conductive film may not be formed over part of a main surface of a semiconductor region functioning as a drain, so that a drain terminal of the N-channel transistor can have a high resistance.
The output buffer block may include a first and a second diode for ESD protection and the first and second diodes may lie between the N-channel transistor and the P-channel transistor.
The output buffer block may have a resistance for ESD protection and the resistance may lie between the first and second diodes and the P-channel transistor.
Furthermore, in the P-channel transistor, a conductive film may not be formed over part of a main surface of a semiconductor region functioning as a drain, so that a drain terminal of the P-channel transistor can have a high resistance.
The advantageous effects achieved by the preferred embodiments of the present invention as disclosed herein are briefly summarized as follows:
(1) The number of constituent elements of the protection circuit of the output buffer block can be decreased.
(2) The pad area protruding from the I/O part can be considerably reduced so that the chip area of the semiconductor chip can be smaller.
Due to the effects mentioned above in (1) and (2), it is possible to provide a smaller and low-cost semiconductor integrated circuit device.
Next, the preferred embodiments of the present invention will be described in detail referring to the accompanying drawings. In all the drawings that illustrate the preferred embodiments, elements with like functions are designated by like reference numerals and repeated descriptions of such elements are omitted.
First EmbodimentIn the first embodiment, a semiconductor chip 1 which is provided in a semiconductor integrated circuit device has a plurality of pads 2 arranged in lines in four peripheral areas as shown in
Inside the pads 2 which function as I/O pads (or nearer to the center of the semiconductor chip 1), a plurality of pads 2a which also function as I/O pads are arranged in lines, in which the pads 2 and pads 2a are arranged in two rows and in a staggered pattern.
In the semiconductor chip 1, an I/O region 3 as an interface with the outside lies under the pads 2 and 2a, forming a so-called “PAD on I/O” structure. Located in the center of the semiconductor chip 1 is a core region 4 in which a logic circuit including semiconductor elements such as transistors is formed.
In the I/O region 3, a plurality of I/O parts 5 are arranged in a row along each edge of the semiconductor chip 1 and pads 2 and 2a are arranged in two rows above them in a staggered pattern. The I/O parts 5 and pads 2 and 2a are each rectangular and the long edge of each of the pads 1 and 2a is, for example, approximately half of the long edge of the I/O parts 5.
A pad lead part 5a is formed on one short edge side of each pad 2 (or 2a) and the center of the I/O part 5 is coupled with the corresponding pad 2 (or pad 2a) through the part lead part 5a.
As shown in
As shown in
The diodes 10 and 11 are coupled in series between supply voltage VCCQ and reference potential VSSQ. One coupling end of the transistor 8 is coupled with the supply voltage VCCQ and the other coupling end of the transistor 8 is coupled with one coupling end of the resistance 12.
The other coupling end of the resistance 12 is coupled with one coupling end of the transistor 9 and the other coupling end of the transistor 9 is coupled with the reference potential VSSQ. The junction of the diode 10, a first diode, and the diode 11, a second diode, and the junction of the other coupling end of the resistance 12 and the one coupling end of the transistor 9 form an output part for the output buffer block 7 which is coupled with a pad 2 (or pad 2a).
Also, as shown in
The transistor 9 lies above the diodes 10 and 11, and the logic block 6 lies above the transistor 9 with the pad lead part 5a, for example, formed in a metal wiring layer between them.
From top to bottom in
The go-round wire for core supply voltage 13 feeds the supply voltage to the core region 4 and the go-round wire for core reference potential 14 feeds the reference potential to the core region 4. The go-round wires for I/O supply voltage 15 and 18 feed supply voltage VCCQ to the I/O part 5 and the go-round wires for I/O reference potential 16 and 17 feeds reference potential VSSQ to the I/O part 5.
This pad 2 is one of the pads located on the outer side (the peripheral side of the semiconductor chip 1) among the pads 2 arranged in a staggered pattern and the pad 2 is in such a position that it does not protrude from the short edge of the I/O part 5 on the peripheral side of the semiconductor chip 1.
In the device formation layer at the bottom, the logic block 6, and the transistor 9, diode 11 and diode 10, resistance 12 and transistor 8 of the output buffer block 7 are formed from left to right in
In the wiring layer lying over the device formation layer, the go-round wire for core supply voltage 13, the go-round wire for core reference potential 14, go-round wires for I/O supply voltage 15, go-round wires for I/O reference potential 16, go-round wires for I/O reference potential 17, and go-round wires for I/O supply voltage 18 are formed from left to right in
In the pad formation layer, the pad lead part 5a and pad 2 are formed. The pad lead part 5a and pad 2 are so formed that they lie over the output buffer block 7 formed in the device formation layer.
The transistor 9 (indicated by the dotted line circle in
For example, in the transistor 9, a P-well 19 is formed over a semiconductor substrate, and an N+ type semiconductor region 20 functioning as a drain and an N+ type semiconductor region 21 functioning as a source are formed on the right and left over the P-well 19.
Formed over the N+ type semiconductor region 21 is a conductive film which is a metal silicide 22 such as cobalt silicide or nickel silicide. On the other hand, a metal silicide 23 is formed over the N+ type semiconductor region 20 as well, though the region 20 is not all covered by the metal silicide 23 unlike the N+ type semiconductor region 21 and the metal silicide 23 is only formed over part of the region 20 which is coupled with a via 25 for coupling with a wire 24 formed in the overlying wiring layer.
As a consequence, the sheet resistance can be increased, for example, to a level approximately 10 to 50 times higher than when a metal silicide is formed all over the N+ type semiconductor region 20. In addition, a gate 26 is formed over the P-well 19 through an insulating film such as silicon oxide.
Due to the absence of the metal silicide 23 over part of the N+ type semiconductor region 20 as mentioned above, the drain terminal can have a high resistance so that the transistor 9 is protected from ESD.
The I/O part 50 (shown in
The output buffer block 52 includes transistors 53 and 54 for output buffer, diodes 55 and 56 for ESD protection, and resistances 57 and 58 for ESD protection.
For example, the transistor 53 is a P-channel MOS transistor and the transistor 54 is an N-channel MOS transistor. The diodes 55 and 56 are coupled in series between supply voltage VCCQ and reference potential VSSQ.
One coupling end of the transistor 53 is coupled with the supply voltage VCCQ and the other coupling end of the transistor 53 is coupled with one coupling end of the resistance 57. The other coupling end of the resistance 57 is coupled with one coupling end of the resistance 58 and the other coupling end of the resistance 58 is coupled with one coupling end of the transistor 54.
The other coupling end of the transistor 54 is coupled with the reference potential VSSQ. The junction of the diode 55 and diode 56 and the junction of the resistance 53 and resistance 54 are coupled with a pad lead part 59 which forms an output part for the output buffer block 52.
When seen in the plan view (
The diode 55 lies below the diode 56 with the pad lead part 59 between them. The resistance 57 lies below the diode 55 and the transistor 53 lies below the resistance 57.
In this circuit configuration, the pad lead part 59 to be coupled with a pad 60 can only be placed between the resistance 57 and resistance 58 and as a consequence, the pad lead part 59 should be located off the center of the I/O part 50, resulting in a protrusion from the short edge of the I/O part 50 as shown on the left in
On the other hand, in the case of the I/O part 5, the structure of the transistor 9 shown in
Since the pad lead part 5a is located almost in the center of the I/O part 5, as shown in
Therefore, the pads 2 and 2a can be located inside the I/O part 5 without the need for decreasing the size of the pads 2 and 2a.
In addition, since the diodes 10 and 11 and the resistance 12 are placed between the transistors 8 and 9, the distance between the transistors 8 and 9 can be increased, so latch-up phenomena due to parasitic thyristors (SCR) is prevented and the reliability is improved.
Consequently, according to the first embodiment, the protection circuit in the output buffer block 7 can be smaller.
Furthermore, since the pads 2 and 2a are arranged in an overlaid manner, so as not to protrude from the I/O part 5, the chip area of the semiconductor chip 1 can be decreased, making it possible to realize a smaller and low-cost semiconductor integrated circuit device.
Although the transistor 9, diode 11, diode 10, resistance 12 and transistor 8 are arranged in order from top to bottom when seen in the plan view of
The layout of the output buffer block may be altered as follows: the diode 11, diode 10, transistor 9, resistance 12, and transistor 8 are arranged from top to bottom as shown in
In the second embodiment, the semiconductor chip 1 is the same as the one shown in
The diodes 10 and 11 are coupled in series between supply voltage VCCQ and reference potential VSSQ. One coupling end of the transistor 8a, a P-channel MOS transistor, is coupled with the supply voltage VCCQ and the other coupling end of the transistor 8a is coupled with one coupling end of the transistor 9, an N-channel MOS transistor.
The other coupling end of the transistor 9 is coupled with the reference potential VSSQ. The junction of the diode 10 and diode 11, and the junction of the transistor 8a and transistor 9 form an output part for the output buffer block 7 which is coupled with a pad 2 or pad 2a.
In this structure, not only in the transistor 9 but also in the transistor 8a, a metal silicide film is not formed over part of the upper surface of the N+ type semiconductor region which functions as a drain, so that the drain terminal has a high resistance.
Consequently, since the drain terminal of the transistor 8a can have the same function as the resistance 12 (
When seen in the plan view (
In this case as well, the pad lead part 5a can be located almost in the center of the I/O part 5, so the chip area of the semiconductor chip 1 (
The layout of the output buffer block 7 as shown in
Another possible layout of the output buffer block 7 is that as shown in
In the third embodiment, as shown in
One coupling end of the resistance 27 is coupled with the junction of the diodes 10 and 11 and the other coupling end of the resistance 27 is coupled with the junction of the transistor 8a and transistor 9. The other elements are coupled in the same way as those in the second embodiment as shown in
When seen in the plan view (
The resistance 27 lies below the diode 11 and the transistor 9 lies below the resistance 27, and the transistor 8 lies below the transistor 9.
In this case as well, the pad lead part 5a can be located almost in the center of the I/O part 5, so the chip area of the semiconductor chip 1 (
The layout of the output buffer block 7 as shown in
The invention made by the present inventors has been so far detailed in reference to the preferred embodiments thereof. However, the invention is not limited to such embodiments and it is obvious that these details may be modified in various ways without departing from the spirit and scope of the invention.
The present invention is suitable as a chip area reduction technique for semiconductor integrated circuit devices with a “PAD on I/O (Input/Output)” cell structure.
Claims
1-10. (canceled)
11. A semiconductor integrated circuit device comprising a semiconductor chip, the semiconductor chip comprising:
- a core region including logic circuits having semiconductor elements;
- an I/O region arranged around the core region;
- a plurality of I/O pads formed in the I/O region; and
- a plurality of I/O parts formed in the I/O region and disposed along an edge of the semiconductor chip, each of the I/O parts coupled with an associated one of the I/O pads,
- the I/O parts each comprising: an output buffer block including an output buffer to function as an interface for output of signal to the outside, the output buffer including a first transistor and a second transistor; a logic block configured to control the output buffer; and a pad lead part disposed between the logic block and the first transistor, and coupled to the associated one of the I/O pads,
- wherein, in each of the I/O parts: in plan view, the logic block, the pad lead part, the first transistor and the second transistor are arranged in this order starting from a position closer to a center of the semiconductor chip toward the edge of the semiconductor chip, the pad lead part is coupled with a connection part of a drain terminal of the first transistor and a drain terminal of the second transistor, in the first transistor a conductive film is not formed over part of a main surface of a semiconductor region functioning as a drain, in the second transistor a conductive film is not formed over part of a main surface of a semiconductor region functioning as a drain.
12. The semiconductor integrated circuit device according to claim 11,
- wherein conductivity of the first transistor is different from conductivity of the second transistor.
13. The semiconductor integrated circuit device according to claim 11,
- wherein the output buffer block includes a first and a second diode for ESD protection, and
- wherein both the first and the second diodes are coupled to the connection part of the drain terminal of the first transistor and the drain terminal of the second transistor.
14. The semiconductor integrated circuit device according to claim 13,
- wherein the first and the second diodes are arranged between the first transistor and the second transistor.
15. The semiconductor integrated circuit device according to claim 13,
- wherein the first and the second diodes are arranged between the first transistor and the pad lead part.
16. The semiconductor integrated circuit device according to claim 13,
- wherein the first and the second diodes are arranged between the logic block and the pad lead part.
17. The semiconductor integrated circuit device according to claim 13,
- wherein the first diode is arranged between the logic block and the pad lead part, and
- wherein the second diode is arranged between the pad lead part and the first transistor.
18. The semiconductor integrated circuit device according to claim 11,
- wherein the output buffer block further comprises a resistor, and
- wherein the pad lead part is coupled with the connection part of the drain terminal of the first transistor and the drain terminal of the second transistor through the resistor.
19. The semiconductor integrated circuit device according to claim 18,
- wherein the resistor is arranged between the pad lead part and the first transistor.
20. The semiconductor integrated circuit according to claim 11,
- wherein the I/O pads comprise a plurality of first I/O pads and a plurality of second I/O pads,
- wherein each of the first I/O pads is arranged closer to the center of the semiconductor chip than the pad lead part so as to be overlapped with the logic block of a corresponding one of the I/O parts in plan view, and
- wherein each of the second I/O pads is arranged closer to the edge of the semiconductor chip than the pad lead part so as to be overlapped with the output buffer block of a corresponding one of the I/O parts in plan view.
Type: Application
Filed: Mar 12, 2018
Publication Date: Jul 12, 2018
Applicant:
Inventors: Takeo TOBA (Tokyo), Kazuo TANAKA (Tokyo), Hiroyasu ISHIZUKA (Tokyo)
Application Number: 15/918,659