MEMORY DIE CONTAINING STRESS REDUCING BACKSIDE CONTACT VIA STRUCTURES AND METHOD OF MAKING THE SAME
A three-dimensional memory device includes a pair of alternating stacks of insulating layers and electrically conductive layers located over a semiconductor region, and laterally spaced from each other by a backside trench, memory stack structures extending through the pair of alternating, each memory stack structure containing a vertical semiconductor channel and a memory film, and a backside contact assembly located in the backside trench. The backside contact assembly includes an isolation dielectric spacer contacting the pair of alternating stacks, a conductive liner contacting inner sidewalls of the isolation dielectric spacer and a top surface of the semiconductor region, and composite non-metallic core containing at least one outer dielectric fill material portion that is laterally enclosed by a lower portion of the conductive liner and a dielectric core contacting an inner sidewall of the at least one outer dielectric fill material portion.
The present application is a continuation-in-part application of U.S. application Ser. No. 16/367,455 filed on Mar. 28, 2019, the entire contents of which are incorporated herein by reference.
FIELDThe present disclosure relates generally to the field of semiconductor devices, and particular to methods for wafer warpage reduction by stress-reducing backside contact via structures in three-dimensional memory devices.
BACKGROUNDA three-dimensional memory device including vertical NAND strings having one bit per cell are disclosed in an article by T. Endoh et al., titled “Novel Ultra High Density Memory With A Stacked-Surrounding Gate Transistor (S-SGT) Structured Cell”, IEDM Proc. (2001) 33-36. Memory stack structures may be formed on a semiconductor chip through an alternating stack of insulating layers and electrically conductive layers that function as word lines. Various additional structures vertically extend through the alternating stack. Local variations in the material composition in the memory stack structures may induce stress that deforms or warps the semiconductor wafer upon which structures are formed. The deformation or warping may cause difficulty in subsequent processing steps that may include chip bonding or packaging.
SUMMARYAccording to an aspect of the present disclosure, a three-dimensional memory device includes a pair of alternating stacks of insulating layers and electrically conductive layers located over a semiconductor region, and laterally spaced from each other by a backside trench, memory stack structures extending through the pair of alternating, each memory stack structure containing a vertical semiconductor channel and a memory film, and a backside contact assembly located in the backside trench. The backside contact assembly includes an isolation dielectric spacer contacting the pair of alternating stacks, a conductive liner contacting inner sidewalls of the isolation dielectric spacer and a top surface of the semiconductor region, and composite non-metallic core containing at least one outer dielectric fill material portion that is laterally enclosed by a lower portion of the conductive liner and a dielectric core contacting an inner sidewall of the at least one outer dielectric fill material portion.
According to another aspect of the present disclosure, a method of forming a three-dimensional memory device is provided, which comprises: forming a vertically alternating sequence of insulating layers and sacrificial material layers over a semiconductor region; forming memory stack structures through the vertically alternating sequence; forming backside trenches through the vertically alternating sequence; replacing the sacrificial material layers with electrically conductive layers through the backside trenches; and forming backside contact assemblies in a respective one of the backside trenches, wherein each of the backside contact assemblies comprises: an isolation dielectric spacer formed on the insulating layers and the electrically conductive layers; a conductive liner formed on inner sidewalls of the isolation dielectric spacer and a top surface of the semiconductor layer; and composite non-metallic core comprising at least one outer dielectric fill material portion that is laterally enclosed by a lower portion of the conductive liner, and comprising a dielectric core contacting an inner sidewall of the at least one outer dielectric fill material portion.
According to an aspect of the present disclosure, a memory die is provided, which comprises: at least one first plane including a plurality of first memory blocks; and at least one second plane including a plurality of second memory blocks. Each memory block selected from the plurality of first memory blocks and the plurality of second memory blocks includes a respective set of memory stack structures that vertically extend through a respective alternating stack of insulating layers and electrically conductive layers. Each memory stack structure within the sets of memory stack structures comprises a respective vertical semiconductor channel and a respective memory film. Each of the at least one first plane includes a respective set of first bit lines that laterally extend along a first horizontal direction and electrically connected to a respective subset of vertical semiconductor channels. Each of the at least one second plane includes a respective set of second bit lines that are parallel with respect to one another and laterally extend along a second horizontal direction that is perpendicular to the first horizontal direction and electrically connected to a respective subset of vertical semiconductor channels within the at least one second plane.
According to another aspect of the present disclosure, a method of forming memory dies is provided. The method comprises: providing a set of reticles that include lithographic patterns for multiple exposure levels of at least one semiconductor die. A layout for each semiconductor die within the set of reticles comprises a first sub-layout for at least one first plane including a plurality of first memory blocks and a second sub-layout for at least one second plane including a plurality of second memory blocks. The memory dies may be formed on a wafer by performing a sequence of processing steps including deposition processes, etch processes, and lithographic patterning processes that employ the set of reticles, wherein the memory dies are physical implementations of a design for the at least one semiconductor die as embodied in the set of reticles. For each of the memory dies, each memory block selected from the plurality of first memory blocks and the plurality of second memory blocks includes a respective set of memory stack structures that vertically extend through a respective alternating stack of insulating layers and electrically conductive layers, wherein each memory stack structure within the sets of memory stack structures comprises a respective vertical semiconductor channel and a respective memory film. Each of the at least one first plane includes a respective set of first bit lines that laterally extend along a first horizontal direction and electrically connected to a respective subset of vertical semiconductor channels; and each of the at least one second plane includes a respective set of second bit lines that are parallel with respect to one another and laterally extend along a second horizontal direction that is perpendicular to the first horizontal direction and electrically connected to a respective subset of vertical semiconductor channels within the at least one second plane.
According to yet another aspect of the present disclosure, a method of forming memory dies is provided. The method comprises: providing a set of reticles that includes lithographic patterns for multiple exposure levels of a plurality of semiconductor dies, wherein a layout for one of at least one first-type semiconductor die within the plurality of semiconductor dies is congruent, with or without a mirror symmetry reflection, with a layout for one of at least one second-type semiconductor die within the plurality of semiconductor dies, and is rotated, with or without a mirror symmetry reflection, from the layout for the one of the at least one first-type semiconductor die by 90 degrees or 270 degrees; and forming memory dies on a wafer by performing a sequence of processing steps including deposition processes, etch processes, and lithographic patterning processes that employ the set of reticles, wherein the memory dies are physical implementations of a design for each of the plurality of semiconductor dies as embodied in the set of reticles. Each memory die comprises a respective set of memory blocks; and each of the memory blocks comprises a respective set of memory stack structures that vertically extend through a respective alternating stack of insulating layers and electrically conductive layers, wherein each memory stack structure within the sets of memory stack structures comprises a respective vertical semiconductor channel and a respective memory film.
According to still another aspect of the present disclosure, a method of forming memory dies is provided. The method comprises: providing a set of reticles that include lithographic patterns for multiple exposure levels of at least one semiconductor die; and forming memory dies on a wafer by performing a sequence of processing steps including deposition processes, etch processes, and lithographic patterning processes that employ the set of reticles, wherein the memory dies are physical implementations of a design for the at least one semiconductor die as embodied in the set of reticles. Each of the lithographic patterning steps comprises: a photoresist application step in which a photoresist layer is applied over the wafer; a first lithographic exposure step in which the photoresist layer is lithographically exposed within a lithographic pattern in a respective reticle selected from the set of reticles in a plurality of first exposure fields over the wafer while the wafer is oriented at a first rotational angle with respect to orientations of the first exposure fields about an vertical axis passing through a geometrical center of the wafer; and a second lithographic exposure step in which the photoresist layer is lithographically exposed within the lithographic pattern in the respective reticle selected from the set of reticles in a plurality of second exposure fields over the wafer while the wafer is oriented at a second rotational angle with respect to orientations of the second exposure fields about the vertical axis passing through the geometrical center of the wafer.
Memory stack structures including a respective memory film and a respective vertical semiconductor channel are formed through an alternating stack of insulating layers and electrically conductive layers that function as word lines. Various additional structures vertically extend through the alternating stack. Such additional structures may include source contact lines, dielectric wall structures that separate neighboring pairs of alternating stacks, and/or through-array contact via structures. Local variations in the material composition in the three-dimensional array device induces stress that deforms the semiconductor chip, which cause difficulty in subsequent processing steps that may include chip bonding or packaging. Normally, process conditions are optimized to minimize stress. However, such methods of optimizing process conditions may not be effective. In addition, a degradation of Cell and CMOS devices may be seen as a side effect of such conventional approaches. Thus, a method is desired to minimize the deformation of the semiconductor chip due to stress.
As discussed above, embodiments are disclosed herein that may be directed to methods for wafer warpage reduction through stress balancing by using rotated memory blocks including three-dimensional memory devices and structures formed by the same, the various aspects of which are described below. Various embodiments may form various structures including a multilevel memory structure, non-limiting examples of which include semiconductor devices such as three-dimensional monolithic memory array devices comprising a plurality of NAND memory strings. Embodiment structures may be formed to equally distribute stress due to local variations in the material composition in the memory stack structures in x and y-directions to minimize warpage.
The drawings are not drawn to scale. Multiple instances of an element may be duplicated where a single instance of the element is illustrated, unless absence of duplication of elements is expressly described or clearly indicated otherwise. Ordinals such as “first,” “second,” and “third” are used merely to identify similar elements, and different ordinals may be used across the specification and the claims of the instant disclosure. The same reference numerals refer to the same element or similar element. Unless otherwise indicated, elements having the same reference numerals are presumed to have the same composition. Unless otherwise indicated, a “contact” between elements refers to a direct contact between elements that provides an edge or a surface shared by the elements. As used herein, a first element located “on” a second element may be located on the exterior side of a surface of the second element or on the interior side of the second element. As used herein, a first element is located “directly on” a second element if there exist a physical contact between a surface of the first element and a surface of the second element. As used herein, a “prototype” structure or an “in-process” structure refers to a transient structure that is subsequently modified in the shape or composition of at least one component therein.
As used herein, a “layer” refers to a material portion including a region having a thickness. A layer may extend over the entirety of an underlying or overlying structure, or may have an extent less than the extent of an underlying or overlying structure. Further, a layer may be a region of a homogeneous or inhomogeneous continuous structure that has a thickness less than the thickness of the continuous structure. For example, a layer may be located between any pair of horizontal planes between, or at, a top surface and a bottom surface of the continuous structure. A layer may extend horizontally, vertically, and/or along a tapered surface. A substrate may be a layer, may include one or more layers therein, or may have one or more layer thereupon, thereabove, and/or therebelow.
A monolithic three-dimensional memory array is one in which multiple memory levels are formed above a single substrate, such as a semiconductor wafer, with no intervening substrates. The term “monolithic” means that layers of each level of the array are directly deposited on the layers of each underlying level of the array. In contrast, two dimensional arrays may be formed separately and then packaged together to form a non-monolithic memory device. For example, non-monolithic stacked memories have been constructed by forming memory levels on separate substrates and vertically stacking the memory levels, as described in U.S. Pat. No. 5,915,167 titled “Three-dimensional Structure Memory.” The substrates may be thinned or removed from the memory levels before bonding, but as the memory levels are initially formed over separate substrates, such memories are not true monolithic three-dimensional memory arrays. The various three-dimensional memory devices of the present disclosure include a monolithic three-dimensional NAND string memory device, and may be fabricated employing the various embodiments described herein.
Generally, a semiconductor package (or a “package”) refers to a unit semiconductor device that may be attached to a circuit board through a set of pins or solder balls. A semiconductor package may include a semiconductor chip (or a “chip”) or a plurality of semiconductor chips that are bonded thereamongst, for example, by flip-chip bonding or another chip-to-chip bonding. A package or a chip may include a single semiconductor die (or a “die”) or a plurality of semiconductor dies. A die is the smallest unit that may independently execute external commands or report status. Typically, a package or a chip with multiple dies is capable of simultaneously executing as many external commands as the total number of dies therein. Each die includes one or more planes. Identical concurrent operations may be executed in each plane within a same die, although there may be some restrictions. In case a die is a memory die, i.e., a die including memory elements, concurrent read operations, concurrent write operations, or concurrent erase operations may be performed in each plane within a same memory die. In a memory die, each plane contains a number of memory blocks (or “blocks”), which are the smallest unit that may be erased by in a single erase operation. Each memory block contains a number of pages, which are the smallest units that may be selected for programming, i.e., a smallest unit on which a programming operation may be performed.
Referring to
Each exposure field 3000 corresponds to the area of the wafer 4000 that is lithographically exposed during a single illumination step in a lithographic exposure tool. In case semiconductor dies 2000 are manufactured employing lithographic exposure and development processes, each exposure field 3000 may correspond to the area of a single semiconductor die 2000, or may correspond to the area of a plurality of semiconductor dies 2000. In one embodiment, the exposure fields 3000 may be arranged as a subset of a rectangular array such that the exposure fields 3000 are arranged as rows and columns that fit within the area of the wafer 4000. The rows and columns of the rectangular array may be arranged along the first horizontal direction hd1 and along the second horizontal direction hd2. During each lithographic exposure process, a photoresist layer may be applied over the wafer 4000 and each exposure field 3000 may be sequentially lithographically exposed. Upon completion of lithographic exposure of all exposure fields 3000, the photoresist layer may be developed to generate a pattern in the developed photoresist layer. A suitable processing step such as an etch step, a deposition step, and/or an ion implantation step may be performed employing the patterned photoresist layer. Generally, manufacture of semiconductor dies 2000 uses a sequence of processing steps including deposition steps, planarization steps, lithographic patterning steps, and etch steps. Each lithographic patterning step uses a reticle for lithographic exposure.
A set of reticles may be provided to manufacture semiconductor dies 2000. The set of reticles includes lithographic patterns for multiple exposure levels of at least one semiconductor die 2000, such as a memory die. In other words, each exposure field 3000 may include a pattern for a single semiconductor die 2000, or a pattern for a plurality of semiconductor dies 2000.
Each semiconductor die 2000 may include a plurality of planes (1000A, 1000B). Thus, each layout for each semiconductor die 2000 within the set of reticles comprises a first sub-layout for at least one first plane 1000A including a plurality of first memory blocks and a second sub-layout for at least one second plane 1000B including a plurality of second memory blocks. As used herein, a “sub-layout” refers to a subset of a layout that has a lesser area than the entire area of the layout. According to an aspect of the present disclosure, the sub-layout for each first plane 1000A is different from the sub-layout for each second plane 1000B. In case multiple first planes 1000A and multiple second planes 1000B are present within a semiconductor die 2000, the sub-layout for each of the multiple first planes 1000A may be the same throughout, and the sub-layout for each of the multiple second planes 1000B may be the same throughout.
In one embodiment, memory dies may be manufactured as the semiconductor dies 2000. The memory dies 2000 may be manufactured on the wafer 4000 by performing a sequence of processing steps including deposition processes, etch processes, and lithographic patterning processes that employ the set of reticles. The manufactured memory dies 2000 (i.e., the physical memory dies) are physical implementations of a design for the at least one semiconductor die 2000 as embodied in the set of reticles.
Each first plane 1000A may include a respective plurality of first memory blocks B 1, which are multiple implementations of a first block design. Each second plane 1000B may include a respective plurality of second memory blocks B2, which are multiple implementations of a second block design that may be rotated from the first block design by 90 degrees or 270 degrees. In one embodiment, each memory block (B1, B2) respectively selected from the plurality of first memory blocks B1 and the plurality of second memory blocks B2 includes a respective set of memory stack structures that vertically extend through a respective alternating stack of insulating layers and electrically conductive layers for each of the memory dies 2000. Each memory stack structure within the sets of memory stack structures comprises a respective vertical semiconductor channel and a respective memory film. A first exemplary structure for a set of memory stack structures is described in detail in a subsequent section.
In some embodiments, each of the first planes 1000A and the second planes 1000B may include a memory array region 100, staircase regions 300 adjoined to the memory array region 100, and peripheral device regions 200. The memory array region 100 includes a respective set of memory stack structures vertically extending through alternating stacks of insulating layers and electrically conductive layers embodying the word lines for the memory stack structures, and bit lines connected to vertical semiconductor channels within the memory stack structures. Each staircase region 300 includes stepped surfaces of the electrically conductive layers on which word line contact via structures are formed. The peripheral device regions 200 include peripheral devices that support operation of the memory elements within the memory stack structures. In an illustrative example, a set of peripheral device regions 200 within a plane (1000A or 1000B) may include a first peripheral device region 200A including a bit line decoder circuitry, a bit line driver circuitry, and sense amplifiers, and a second peripheral device region 200B including a word line decoder circuitry and a word line driver circuitry.
In one embodiment, each of the at least one first plane 1000A within a memory die 2000 includes a respective set of first bit lines that laterally extend along a first horizontal direction hd1 (represented as the “bd” direction within first planes 1000A of
The word lines for each plane (1000A or 1000B) may be perpendicular to the bit lines for the same plane (1000A or 1000B). In one embodiment, each of the at least one first plane 1000A within a memory die 2000 includes a respective set of first word lines that laterally extend along the second horizontal direction hd2 (represented as the “wd” direction within first planes 1000A of
In one embodiment, electrically conductive layers within the at least one first plane 1000A comprise word lines for a respective one of the first memory blocks B1 and laterally extend along the second horizontal direction hd2, and electrically conductive layers within the at least one second plane 1000B comprise word lines for a respective one of the second memory blocks B2 and laterally extend along the first horizontal direction hd1.
According to an aspect of the present disclosure, each memory die 2000 may include at least one first plane 1000A and at least one second plane 1000B such that the lateral stress along the first horizontal direction hd1 is balanced with the lateral stress along the second horizontal direction hd2. In other words, the overall magnitude and type of lateral stress applied by each memory die 2000 to neighboring memory dies 2000 along the first horizontal direction hdl may be substantially the same as the overall magnitude and type of lateral stress applied by each memory die 2000 to neighboring memory dies 2000 along the second horizontal direction hd2. In this case, deformation of the wafer 4000 along the first horizontal direction hd1 may have the same magnitude and type as deformation of the wafer 4000 along the second horizontal direction hd2. For example, if deformation of the wafer 4000 along the first horizontal direction hdl during, and after, manufacture of the memory dies 2000 on the wafer 4000 includes downward bowing of the wafer 4000 with a radius of curvature within a vertical plane including the first horizontal direction hd1, deformation of the wafer 4000 along the second horizontal direction hd2 during, and after, manufacture of the memory dies 2000 on the wafer 4000 also includes downward bowing of the wafer 4000 with the same radius of curvature within a vertical plane including the second horizontal direction hd2. Thus, saddle-shaped deformation or deformation having different radii of curvature along different horizontal directions may be avoided for the wafer 4000, and post-manufacture processing of the memory die 2000 (such as formation of a bonded assembly of dies) may be facilitated.
In one embodiment, each of the memory dies 2000 includes a same total number of the at least one first plane 1000A as a total number of the at least one second plane 1000B, and memory stack structures within each of the at least one second plane 1000B has a layout that is rotated, with or without a mirror symmetry reflection, from a layout of memory stack structures within one of the at least one first plane 1000A by 90 degrees or 270 degrees. As used herein, rotation of a layout refers to rotation of the entirety of the layout within the two-dimensional plane including the layout. As used herein, a mirror symmetry reflection refers to a reflection about the word line direction or about the bit line direction of a layout. In the examples illustrated in
In one embodiment, the at least one first plane 1000A within each memory die 2000 comprises a plurality of first planes 1000A, and the at least one second plane 1000B within each memory die 2000 comprises a plurality of second planes 1000B. A total area of the plurality of first planes 1000A within each memory die 2000 is the same as a total area of the plurality of second planes 1000B within each memory die 2000.
In one embodiment, at least a subset SS of the plurality of first planes 1000A and the plurality of second planes 1000B within each memory die 2000 may be arranged with an inversion symmetry with respect to a vertical axis VA passing through a geometrical center of the subset of the plurality of first planes 1000A and the plurality of second planes 1000B. The subset SS of the plurality of first planes 1000A and the plurality of second planes 1000B within each memory die 2000 may include all, or less than all, of the first planes 1000A and the second planes 1000B in the memory die 2000. As used herein, an “inversion symmetry” refers to the change of signs for all x-coordinates and y-coordinates generated employing a point of symmetry (such as the vertical axis VA passing through the geometrical center of a set of planes (1000A, 1000B)) as the origin for the coordinate system. Exemplary vertical axes VA pasting through the geometrical center of the respective subset of the plurality of first planes 1000A and the plurality of second planes 1000B are illustrated in
Upon completion of manufacture of the memory dies 2000 on the wafer 4000, the memory dies 2000 may be singulated by dicing. The memory dies 2000 formed employing the layouts illustrated in
According to an aspect of the present disclosure, a discrete memory die 2000 is provided by dicing the memory dies 2000 on the wafer 4000. The discrete memory die 2000 comprises: at least one first plane 1000A including a plurality of first memory blocks B1; and at least one second plane 1000B including a plurality of second memory blocks B2. Each memory block (B1, B2) respectively selected from the plurality of first memory blocks B1 and the plurality of second memory blocks B2 includes a respective set of memory stack structures that vertically extend through a respective alternating stack of insulating layers and electrically conductive layers. Each memory stack structure within the sets of memory stack structures comprises a respective vertical semiconductor channel and a respective memory film. Each of the at least one first plane 1000A includes a respective set of first bit lines that laterally extend along a first horizontal direction hd1 (which is the bit line direction “bd” in the respective first plane 1000A) and electrically connected to a respective subset of vertical semiconductor channels. Each of the at least one second plane 1000B includes a respective set of second bit lines that are parallel with respect to one another and laterally extend along a second horizontal direction hd2 (which is the bit line direction “bd” in the respective second plane 1000B) that is perpendicular to the first horizontal direction hd1 and electrically connected to a respective subset of vertical semiconductor channels within the at least one second plane 1000B.
In one embodiment, electrically conductive layers within the at least one first plane 1000A comprise word lines for a respective one of the first memory blocks B1 and laterally extend along the second horizontal direction hd2 (which is the word line direction “wd” in the respective first plane 1000A). Electrically conductive layers within the at least one second plane 1000B comprise word lines for a respective one of the second memory blocks and laterally extend along the first horizontal direction hd1 (which is the word line direction “wd” in the respective second plane 1000B).
In one embodiment, first memory blocks B1 within each first plane 1000A are laterally spaced apart respectively from one another by first trenches (such as backside trenches to be described below) that laterally extend along the second horizontal direction hd2 (which is the word line direction “wd” for the first plane 1000A), and second memory blocks B2 within each second plane 1000B are laterally spaced apart respectively from one another by second trenches (such as backside trenches to be described below) that laterally extend along the first horizontal direction hd1 (which is the word line direction “wd” for the second plane 1000B). In one embodiment, each of the first bit lines extends over a respective plurality of first memory blocks B1, and each of the second bit lines extends over a respective plurality of second memory blocks B2. In one embodiment shown in
The dicing channels used to singulate the semiconductor dies 2000 on the wafer 4000 may be parallel to the first horizontal direction hd1 or the second horizontal direction hd2. Each semiconductor die 2000 after singulation may comprise: a pair of first sidewalls that are parallel to the first horizontal direction hd1; a pair of second sidewalls that are parallel to the second horizontal direction hd2; a planar top surface adjoined to an upper edge of each of the pair of first sidewalls; and a planar bottom surface adjoined to a lower edge of each of the pair of second sidewalls.
In one embodiment, the memory die 2000 includes a same total number of the at least one first plane 1000A as a total number of the at least one second plane 1000B, and memory stack structures within each of the at least one second plane 1000B has a layout that is rotated from a layout of memory stack structures within one of the at least one first plane by 90 degrees or 270 degrees.
Referring to
Generally, a set of reticles that includes lithographic patterns for multiple exposure levels of a plurality of semiconductor dies is provided. A layout for one of at least one first-type semiconductor die 2000A within the plurality of semiconductor dies 2000 is congruent, with or without a mirror symmetry reflection, with a layout for one of at least one second-type semiconductor die 2000B within the plurality of semiconductor dies 2000, and is rotated, with or without a mirror symmetry reflection, from the layout for the one of the at least one first-type semiconductor die 2000A by 90 degrees or 270 degrees. In one embodiment, the layout for each first-type semiconductor die 2000A may be congruent, with or without a mirror symmetry reflection, with the layout for each second-type semiconductor die 2000B, and is rotated, with or without a mirror symmetry reflection, from the layout for the first-type semiconductor die 2000A by 90 degrees or 270 degrees.
In one embodiment, the semiconductor dies 2000 may be memory dies 2000. The memory dies 2000 may be formed on the wafer by performing a sequence of processing steps including deposition processes, etch processes, and lithographic patterning processes that employ the set of reticles. The memory dies 2000 are physical implementations of a design for each of the plurality of semiconductor dies 2000 as embodied in the set of reticles. Each memory die 2000 comprises a respective set of memory blocks (B1, B2). Each of the memory blocks (B1, B2) comprises a respective set of memory stack structures that vertically extend through a respective alternating stack of insulating layers and electrically conductive layers. Each memory stack structure within the sets of memory stack structures comprises a respective vertical semiconductor channel and a respective memory film. Each of the memory dies 2000 comprises bit lines that are parallel with respect to one another and electrically connected to a respective subset of memory stack structures within a respective one of the memory dies 2000.
In one embodiment, all patterns for the bit lines within memory array regions in the layout for the one of the at least one first-type semiconductor die 2000A laterally extend along a first horizontal direction hd1 (which is the bit line direction “bd” within each first-type semiconductor die 2000A), and all patterns for the bit lines within memory array regions in the layout for the one of the at least one second-type semiconductor die 2000B laterally extend along a second horizontal direction hd2 (which is the bit line direction “bd” within each second-type semiconductor die 2000B) that is perpendicular to the first horizontal direction hd1.
In one embodiment, all patterns for the word lines within memory array regions in the layout for the one of the at least one first-type semiconductor die 2000A laterally extend along the second horizontal direction hd2 (which is the word line direction “wd” within each first-type semiconductor die 2000A), and all patterns for the word lines within memory array regions in the layout for the one of the at least one second-type semiconductor die 2000B laterally extend along the first horizontal direction hd1 (which is the word line direction “wd” within each second-type semiconductor die 2000B).
In one embodiment, the at least one first-type semiconductor die 2000A within the plurality of semiconductor dies 2000 in an exposure field 3000 comprises a plurality of first-type semiconductor dies 2000A, and the at least one second-type semiconductor die 2000B within the plurality of semiconductor dies 2000 comprises a plurality of second-type semiconductor dies 2000B. A total number of the plurality of first-type semiconductor dies 2000A in an exposure field 3000 may be the same as a total number of the plurality of second-type semiconductor dies 2000B in the exposure field 3000. The total number of the plurality of first-type semiconductor dies 2000A in an exposure field 3000 may be 2, 3, 4, 5, 6, etc. Alternatively, the at least one first-type semiconductor die 2000A within the plurality of semiconductor dies 2000 in an exposure field 3000 comprises a single first-type semiconductor die 2000A, and the at least one second-type semiconductor die 2000B within the plurality of semiconductor dies 2000 comprises a single second-type semiconductor die 2000B.
In one embodiment, each layout for any of the plurality of first-type semiconductor dies 2000A is congruent, with or without a mirror symmetry reflection, with a layout for any of the plurality of second-type semiconductor dies 2000B, and is rotated, with or without a mirror symmetry reflection, from the layout for any of the plurality of second-type semiconductor dies 2000B by 90 degrees or 270 degrees.
According to an aspect of the present disclosure, each exposure field 3000 may include at least one first-type semiconductor die 2000A (which may be at least one first-type memory die) and at least one second semiconductor die 2000B (which may be at least one second-type memory die) such that the lateral stress along the first horizontal direction hd1 is balanced with the lateral stress along the second horizontal direction hd2. In other words, the overall magnitude and type of lateral stress applied by a set of semiconductor dies 2000 within each exposure field 3000 to semiconductor dies 2000 within a neighboring exposure field 3000 along the first horizontal direction hd1 may be substantially the same as the overall magnitude and type of lateral stress applied by the set of semiconductor dies 2000 within the exposure field 3000 to semiconductor dies 2000 within another neighboring exposure field 3000 along the second horizontal direction hd2. In this case, deformation of the wafer 4000 along the first horizontal direction hd1 may have the same magnitude and type as deformation of the wafer 4000 along the second horizontal direction hd2. For example, if deformation of the wafer 4000 along the first horizontal direction hd1 during, and after, manufacture of the memory dies 2000 on the wafer 4000 includes downward bowing of the wafer 4000 with a radius of curvature within a vertical plane including the first horizontal direction hd1, deformation of the wafer 4000 along the second horizontal direction hd2 during, and after, manufacture of the memory dies 2000 on the wafer 4000 also includes downward bowing of the wafer 4000 with the same radius of curvature within a vertical plane including the second horizontal direction hd2. Thus, saddle-shaped deformation or deformation having different radii of curvature along different horizontal directions may be avoided for the wafer 4000, and post-manufacture processing of the memory die 2000 (such as formation of a bonded assembly of dies) may be facilitated.
Referring to
Each exposure field 3000 includes patterns for at least one semiconductor die 2000. The semiconductor dies 2000 that are formed within the first exposure fields 3000A are referred to as first semiconductor dies 2000A (which may be first memory dies), and the semiconductor dies 2000 that are formed within the second exposure fields 3000B are referred to as second semiconductor dies 2000B. Each first semiconductor die 2000A includes at least one first plane 1000A including first memory blocks B1, and each second semiconductor die 2000B includes at least one second plane 1000B including second memory blocks B2. Each first memory block B1 may include bit lines laterally extending along a first horizontal direction hd1 (which is the bit line direction “bd” in the first planes 1000A) and word lines laterally extending along a second horizontal direction hd2 (which is the word line direction “wd” in the first planes 1000A) that is perpendicular to the first horizontal direction hd1. Each second memory block B2 may include bit lines laterally extending along the second horizontal direction hd2 (which is the bit line direction “bd” in the second planes 1000B) and word lines laterally extending along the first horizontal direction hd1 (which is the word line direction “wd” in the second planes 1000B).
Generally, a set of reticles that include lithographic patterns for multiple exposure levels of at least one semiconductor die 2000 is provided. The at least one semiconductor die 2000 may include at least one memory die 2000. Memory dies 2000 may be formed on a wafer 4000 by performing a sequence of processing steps including deposition processes, etch processes, and lithographic patterning processes that employ the set of reticles. The memory dies 2000 are physical implementations of a design for the at least one semiconductor die 2000 as embodied in the set of reticles.
Each of the lithographic patterning steps may comprise a photoresist application step in which a photoresist layer is applied over the wafer 4000, a first lithographic exposure step in which the photoresist layer is lithographically exposed within a lithographic pattern in a respective reticle selected from the set of reticles in a plurality of first exposure fields 3000A over the wafer 4000 while the wafer 4000 is oriented at a first rotational angle with respect to orientations of the first exposure fields about an vertical axis passing through a geometrical center GCW of the wafer 4000, and a second lithographic exposure step in which the photoresist layer is lithographically exposed within the lithographic pattern in the respective reticle selected from the set of reticles in a plurality of second exposure fields 3000B over the wafer 4000 while the wafer 4000 is oriented at a second rotational angle with respect to orientations of the second exposure fields 3000B about the vertical axis passing through the geometrical center GWC of the wafer 4000. The second exposure fields 3000B are not lithographically exposed during the first lithographic exposure step, and the first exposure fields are not lithographically exposed during the second lithographic exposure step.
In one embodiment, the each of the lithographic patterning steps comprises a development step in which lithographic patterns transferred into the photoresist layer in the first lithographic exposure step and in the second lithographic exposure step are simultaneously developed within areas of the plurality of first exposure fields 3000A and within areas of the plurality of second exposure fields 3000B. In one embodiment, the second rotational angle and the first rotational angle are different from each other by 90 degrees or 270 degrees.
In one embodiment, each memory die 2000 comprises a respective set of memory blocks (B1 or B2), each of the memory blocks (B1 or B2) comprises a respective set of memory stack structures that vertically extend through a respective alternating stack of insulating layers and electrically conductive layers. Each memory stack structure within the sets of memory stack structures comprises a respective vertical semiconductor channel and a respective memory film.
In one embodiment, a total area of the plurality of first exposure fields 3000A may be in a range from 35% to 60% of a total area of the wafer, and a total area of the plurality of second exposure fields 3000B is in a range from 35% to 60% of the total area of the wafer 4000. The total area of the first exposure fields 3000A does not overlap with any of the total area of the second exposure fields 3000B. Each of the memory dies 2000 comprises a plurality of planes 1000. Each plane within the plurality of planes 1000 includes a respective plurality of memory blocks (B1 or B2).
Referring to
As used herein, a “semiconductor material” refers to a material having electrical conductivity in the range from 1.0×10−6 S/cm to 1.0×105 S/cm in the absence of electrical dopants therein, and is capable of producing a doped material having electrical conductivity in a range from 1.0 S/cm to 1.0×105 S/cm upon suitable doping with an electrical dopant. As used herein, an “electrical dopant” refers to a p-type dopant that adds a hole to a valence band within a band structure, or an n-type dopant that adds an electron to a conduction band within a band structure. As used herein, a “conductive material” refers to a material having electrical conductivity greater than 1.0×105 S/cm. As used herein, an “insulator material” or a “dielectric material” refers to a material having electrical conductivity less than 1.0×10−6 S/cm. As used herein, a “heavily doped semiconductor material” refers to a semiconductor material that is doped with electrical dopant at a sufficiently high atomic concentration to become a conductive material either as formed as a crystalline material or if converted into a crystalline material through an anneal process (for example, from an initial amorphous state), i.e., to have electrical conductivity greater than 1.0×105 S/cm. A “doped semiconductor material” may be a heavily doped semiconductor material, or may be a semiconductor material that includes electrical dopants (i.e., p-type dopants and/or n-type dopants) at a concentration that provides electrical conductivity in the range from 1.0×10−6 S/cm to 1.0×105 S/cm. An “intrinsic semiconductor material” refers to a semiconductor material that is not doped with electrical dopants. Thus, a semiconductor material may be semiconducting or conductive, and may be an intrinsic semiconductor material or a doped semiconductor material. A doped semiconductor material may be semiconducting or conductive depending on the atomic concentration of electrical dopants therein. As used herein, a “metallic material” refers to a conductive material including at least one metallic element therein. All measurements for electrical conductivities are made at the standard condition.
Referring to
Each first material layer includes a first material, and each second material layer includes a second material that is different from the first material. In one embodiment, each first material layer may be an insulating layer 32, and each second material layer may be a sacrificial material layer 42. In this case, the stack may include an alternating plurality of insulating layers 32 and sacrificial material layers 42, and constitutes a prototype stack of alternating layers comprising insulating layers 32 and sacrificial material layers 42.
The stack of the alternating plurality is herein referred to as an alternating stack (32, 42). In one embodiment, the alternating stack (32, 42) may include insulating layers 32 composed of the first material, and sacrificial material layers 42 composed of a second material different from that of insulating layers 32. The first material of the insulating layers 32 may be at least one insulating material. As such, each insulating layer 32 may be an insulating material layer. Insulating materials that may be used for the insulating layers 32 include, but are not limited to, silicon oxide (including doped or undoped silicate glass), silicon nitride, silicon oxynitride, organosilicate glass (OSG), spin-on dielectric materials, dielectric metal oxides that are commonly known as high dielectric constant (high-k) dielectric oxides (e.g., aluminum oxide, hafnium oxide, etc.) and silicates thereof, dielectric metal oxynitrides and silicates thereof, and organic insulating materials. In one embodiment, the first material of the insulating layers 32 may be silicon oxide.
The second material of the sacrificial material layers 42 is a sacrificial material that may be removed selective to the first material of the insulating layers 32. As used herein, a removal of a first material is “selective to” a second material if the removal process removes the first material at a rate that is at least twice the rate of removal of the second material. The ratio of the rate of removal of the first material to the rate of removal of the second material is herein referred to as a “selectivity” of the removal process for the first material with respect to the second material.
The sacrificial material layers 42 may comprise an insulating material, a semiconductor material, or a conductive material. The second material of the sacrificial material layers 42 may be subsequently replaced with electrically conductive electrodes which may function, for example, as control gate electrodes of a vertical NAND device. Non-limiting examples of the second material include silicon nitride, an amorphous semiconductor material (such as amorphous silicon), and a polycrystalline semiconductor material (such as polysilicon). In one embodiment, the sacrificial material layers 42 may be spacer material layers that comprise silicon nitride or a semiconductor material including at least one of silicon and germanium.
In one embodiment, the insulating layers 32 may include silicon oxide, and sacrificial material layers may include silicon nitride sacrificial material layers. The first material of the insulating layers 32 may be deposited, for example, by chemical vapor deposition (CVD). For example, if silicon oxide is used for the insulating layers 32, tetraethyl orthosilicate (TEOS) may be used as the precursor material for the CVD process. The second material of the sacrificial material layers 42 can be formed, for example, CVD or atomic layer deposition (ALD).
The sacrificial material layers 42 may be suitably patterned so that conductive material portions to be subsequently formed by replacement of the sacrificial material layers 42 may function as electrically conductive electrodes, such as the control gate electrodes of the monolithic three-dimensional NAND string memory devices to be subsequently formed. The sacrificial material layers 42 may comprise a portion having a strip shape extending substantially parallel to the interface 7 between the carrier substrate 9 and the semiconductor material layer 10.
The thicknesses of the insulating layers 32 and the sacrificial material layers 42 may be in a range from 20 nm to 50 nm, although lesser and greater thicknesses may be used for each insulating layer 32 and for each sacrificial material layer 42. The number of repetitions of the pairs of an insulating layer 32 and a sacrificial material layer 42 (e.g., a control gate electrode or a sacrificial material layer) may be in a range from 2 to 1,024, and typically from 8 to 256, although a greater number of repetitions may also be used. The top and bottom gate electrodes in the stack may function as the select gate electrodes. In one embodiment, each sacrificial material layer 42 in the alternating stack (32, 42) may have a uniform thickness that is substantially invariant within each respective sacrificial material layer 42.
While the present disclosure is described using an embodiment in which the spacer material layers are sacrificial material layers 42 that are subsequently replaced with electrically conductive layers, embodiments are expressly contemplated herein in which the sacrificial material layers are formed as electrically conductive layers. In this case, steps for replacing the spacer material layers with electrically conductive layers may be omitted.
In alternative embodiments, an insulating cap layer 70 may be formed over the alternating stack (32, 42). The insulating cap layer 70 includes a dielectric material that is different from the material of the sacrificial material layers 42. In one embodiment, the insulating cap layer 70 may include a dielectric material that may be used for the insulating layers 32 as described above. The insulating cap layer 70 may have a greater thickness than each of the insulating layers 32. The insulating cap layer 70 may be deposited, for example, by chemical vapor deposition. In one embodiment, the insulating cap layer 70 may be a silicon oxide layer.
The first exemplary structure may include at least one memory array region 100 in which a three-dimensional array of memory elements is to be subsequently formed, at least one staircase region 300 in which stepped surfaces of the alternating stack (32, 42) are to be subsequently formed, and an interconnection region 200 in which interconnection via structures extending through the levels of the alternating stack (32, 42) are to be subsequently formed.
Referring to
The terrace region is formed in the staircase region 300, which is located between the memory array region 100 and the interconnection region 200 containing the at least one semiconductor device for the peripheral circuitry. The stepped cavity may have various stepped surfaces such that the horizontal cross-sectional shape of the stepped cavity changes in steps as a function of the vertical distance from the top surface of the semiconductor material layer 10. In one embodiment, the stepped cavity may be formed by repetitively performing a set of processing steps. The set of processing steps may include, for example, an etch process of a first type that vertically increases the depth of a cavity by one or more levels, and an etch process of a second type that laterally expands the area to be vertically etched in a subsequent etch process of the first type. As used herein, a “level” of a structure including alternating plurality is defined as the relative position of a pair of a first material layer and a second material layer within the structure.
Each sacrificial material layer 42 other than a topmost sacrificial material layer 42 within the alternating stack (32, 42) laterally extends farther than any overlying sacrificial material layer 42 within the alternating stack (32, 42) in the terrace region. The terrace region includes stepped surfaces of the alternating stack (32, 42) that continuously extend from a bottommost layer within the alternating stack (32, 42) to a topmost layer within the alternating stack (32, 42).
Each vertical step of the stepped surfaces may have the height of one or more pairs of an insulating layer 32 and a sacrificial material layer 42. In one embodiment, each vertical step may have the height of a single pair of an insulating layer 32 and a sacrificial material layer 42. In another embodiment, multiple “columns” of staircases may be formed along a word line direction wd such that each vertical step has the height of a plurality of pairs of an insulating layer 32 and a sacrificial material layer 42, and the number of columns may be at least the number of the plurality of pairs. Each column of staircase may be vertically offset from one another such that each of the sacrificial material layers 42 has a physically exposed top surface in a respective column of staircases. In an illustrative example (not shown in
A stepped dielectric material portion 65 (i.e., an insulating fill material portion) may be formed in the stepped cavity by deposition of a dielectric material therein. For example, a dielectric material such as silicon oxide may be deposited in the stepped cavity. Excess portions of the deposited dielectric material may be removed from above the top surface of the insulating cap layer 70, for example, by chemical mechanical planarization (CMP). The remaining portion of the deposited dielectric material filling the stepped cavity constitutes the stepped dielectric material portion 65. As used herein, a “stepped” element refers to an element that has stepped surfaces and a horizontal cross-sectional area that increases monotonically as a function of a vertical distance from a top surface of a substrate on which the element is present. If silicon oxide is used for the stepped dielectric material portion 65, the silicon oxide of the stepped dielectric material portion 65 may, or may not, be doped with dopants such as B, P, and/or F. In one embodiment, the stepped dielectric material portion 65 has a stepwise-increasing lateral extent that increases with a vertical distance from the carrier substrate 9.
Optionally, drain select level isolation structures 72 may be formed through the insulating cap layer 70 and a subset of the sacrificial material layers 42 located at drain select levels. The drain select level isolation structures 72 may be formed, for example, by forming drain select level isolation trenches and filling the drain select level isolation trenches with a dielectric material such as silicon oxide. Excess portions of the dielectric material may be removed from above the top surface of the insulating cap layer 70.
Referring to
The memory openings 49 extend through the entirety of the alternating stack (32, 42). The support openings 19 extend through a subset of layers within the alternating stack (32, 42). The chemistry of the anisotropic etch process used to etch through the materials of the alternating stack (32, 42) may alternate to optimize etching of the first and second materials in the alternating stack (32, 42). The anisotropic etch may be, for example, a series of reactive ion etches. The sidewalls of the memory openings 49 and the support openings 19 may be substantially vertical, or may be tapered. The patterned lithographic material stack may be subsequently removed, for example, by ashing.
The memory openings 49 and the support openings 19 may extend from the top surface of the alternating stack (32, 42) to at least the horizontal plane including the topmost surface of the semiconductor material layer 10. In one embodiment, an overetch into the semiconductor material layer 10 may be optionally performed after the top surface of the semiconductor material layer 10 is physically exposed at a bottom of each memory opening 49 and each support opening 19. The overetch may be performed prior to, or after, removal of the lithographic material stack. In other words, the recessed surfaces of the semiconductor material layer 10 may be vertically offset from the un-recessed top surfaces of the semiconductor material layer 10 by a recess depth. The recess depth may be, for example, in a range from 1 nm to 50 nm, although lesser and greater recess depths may also be used. The overetch is optional, and may be omitted. If the overetch is not performed, the bottom surfaces of the memory openings 49 and the support openings 19 may be coplanar with the topmost surface of the semiconductor material layer 10.
Each of the memory openings 49 and the support openings 19 may include a sidewall (or a plurality of sidewalls) that extends substantially perpendicular to the topmost surface of the substrate. A two-dimensional array of memory openings 49 may be formed in the memory array region 100. A two-dimensional array of support openings 19 may be formed in the staircase region 300.
Referring to
Referring to
Referring to
The blocking dielectric layer 52 may include a single dielectric material layer or a stack of a plurality of dielectric material layers. In one embodiment, the blocking dielectric layer may include a dielectric metal oxide layer consisting essentially of a dielectric metal oxide. As used herein, a dielectric metal oxide refers to a dielectric material that includes at least one metallic element and at least oxygen. The dielectric metal oxide may consist essentially of the at least one metallic element and oxygen, or may consist essentially of the at least one metallic element, oxygen, and at least one non-metallic element such as nitrogen. In one embodiment, the blocking dielectric layer 52 may include a dielectric metal oxide having a dielectric constant greater than 7.9, i.e., having a dielectric constant greater than the dielectric constant of silicon nitride.
Non-limiting examples of dielectric metal oxides include aluminum oxide (Al2O3), hafnium oxide (HfO2), lanthanum oxide (LaO2), yttrium oxide (Y2O3), tantalum oxide (Ta2O5), silicates thereof, nitrogen-doped compounds thereof, alloys thereof, and stacks thereof. The dielectric metal oxide layer may be deposited, for example, by chemical vapor deposition (CVD), atomic layer deposition (ALD), pulsed laser deposition (PLD), liquid source misted chemical deposition, or a combination thereof. The thickness of the dielectric metal oxide layer may be in a range from 1 nm to 20 nm, although lesser and greater thicknesses may also be used. The dielectric metal oxide layer may subsequently function as a dielectric material portion that blocks leakage of stored electrical charges to control gate electrodes. In one embodiment, the blocking dielectric layer 52 includes aluminum oxide. In one embodiment, the blocking dielectric layer 52 may include multiple dielectric metal oxide layers having different material compositions.
Alternatively or additionally, the blocking dielectric layer 52 may include a dielectric semiconductor compound such as silicon oxide, silicon oxynitride, silicon nitride, or a combination thereof. In one embodiment, the blocking dielectric layer 52 may include silicon oxide. In this case, the dielectric semiconductor compound of the blocking dielectric layer 52 may be formed by a conformal deposition method such as low pressure chemical vapor deposition, atomic layer deposition, or a combination thereof. The thickness of the dielectric semiconductor compound may be in a range from 1 nm to 20 nm, although lesser and greater thicknesses may also be used. Alternatively, the blocking dielectric layer 52 may be omitted, and a backside blocking dielectric layer may be formed after formation of backside recesses on surfaces of memory films to be subsequently formed.
Subsequently, the charge storage layer 54 may be formed. In one embodiment, the charge storage layer 54 may be a continuous layer or patterned discrete portions of a charge trapping material including a dielectric charge trapping material, which may be, for example, silicon nitride. Alternatively, the charge storage layer 54 may include a continuous layer or patterned discrete portions of a conductive material such as doped polysilicon or a metallic material that is patterned into multiple electrically isolated portions (e.g., floating gates), for example, by being formed within lateral recesses into sacrificial material layers 42. In one embodiment, the charge storage layer 54 includes a silicon nitride layer. In one embodiment, the sacrificial material layers 42 and the insulating layers 32 may have vertically coincident sidewalls, and the charge storage layer 54 may be formed as a single continuous layer.
In another embodiment, the sacrificial material layers 42 may be laterally recessed with respect to the sidewalls of the insulating layers 32, and a combination of a deposition process and an anisotropic etch process may also be used to form the charge storage layer 54 as a plurality of memory material portions that are vertically spaced apart. While the present disclosure is described employing an embodiment in which the charge storage layer 54 is a single continuous layer, embodiments are expressly contemplated herein in which the charge storage layer 54 is replaced with a plurality of memory material portions (which may be charge trapping material portions or electrically isolated conductive material portions) that are vertically spaced apart.
The charge storage layer 54 may be formed as a single charge storage layer of homogeneous composition, or may include a stack of multiple charge storage layers. The multiple charge storage layers, if used, may comprise a plurality of spaced-apart floating gate material layers that contain conductive materials (e.g., metal such as tungsten, molybdenum, tantalum, titanium, platinum, ruthenium, and alloys thereof, or a metal silicide such as tungsten silicide, molybdenum silicide, tantalum silicide, titanium silicide, nickel silicide, cobalt silicide, or a combination thereof) and/or semiconductor materials (e.g., polycrystalline or amorphous semiconductor material including at least one elemental semiconductor element or at least one compound semiconductor material). Alternatively or additionally, the charge storage layer 54 may comprise an insulating charge trapping material, such as one or more silicon nitride segments. Alternatively, the charge storage layer 54 may comprise conductive nanoparticles such as metal nanoparticles, which may be, for example, ruthenium nanoparticles. The charge storage layer 54 may be formed, for example, by chemical vapor deposition (CVD), atomic layer deposition (ALD), physical vapor deposition (PVD), or any suitable deposition technique for storing electrical charges therein. The thickness of the charge storage layer 54 may be in a range from 2 nm to 20 nm, although lesser and greater thicknesses may also be used.
The tunneling dielectric layer 56 includes a dielectric material through which charge tunneling may be performed under suitable electrical bias conditions. The charge tunneling may be performed through hot-carrier injection or by Fowler-Nordheim tunneling induced charge transfer depending on the mode of operation of the monolithic three-dimensional NAND string memory device to be formed. The tunneling dielectric layer 56 may include silicon oxide, silicon nitride, silicon oxynitride, dielectric metal oxides (such as aluminum oxide and hafnium oxide), dielectric metal oxynitride, dielectric metal silicates, alloys thereof, and/or combinations thereof. In one embodiment, the tunneling dielectric layer 56 may include a stack of a first silicon oxide layer, a silicon oxynitride layer, and a second silicon oxide layer, which is commonly known as an ONO stack. In one embodiment, the tunneling dielectric layer 56 may include a silicon oxide layer that is substantially free of carbon or a silicon oxynitride layer that is substantially free of carbon. The thickness of the tunneling dielectric layer 56 may be in a range from 2 nm to 20 nm, although lesser and greater thicknesses may also be used.
The optional first semiconductor channel layer 601 includes a semiconductor material such as at least one elemental semiconductor material, at least one III-V compound semiconductor material, at least one II-VI compound semiconductor material, at least one organic semiconductor material, or other semiconductor materials known in the art. In one embodiment, the first semiconductor channel layer 601 includes amorphous silicon or polysilicon. The first semiconductor channel layer 601 may be formed by a conformal deposition method such as low pressure chemical vapor deposition (LPCVD). The thickness of the first semiconductor channel layer 601 may be in a range from 2 nm to 10 nm, although lesser and greater thicknesses may also be used. A memory cavity 49′ is formed in the volume of each memory opening 49 that is not filled with the deposited material layers (52, 54, 56, 601).
Referring to
Each remaining portion of the first semiconductor channel layer 601 may have a tubular configuration. The charge storage layer 54 may comprise a charge trapping material or a floating gate material. In one embodiment, each charge storage layer 54 may include a vertical stack of charge storage regions that store electrical charges upon programming. In one embodiment, the charge storage layer 54 may be a charge storage layer in which each portion adjacent to the sacrificial material layers 42 constitutes a charge storage region.
A surface of the pedestal channel portion 11 (or a surface of the semiconductor material layer 10 in case the pedestal channel portions 11 are not used) may be physically exposed underneath the opening through the first semiconductor channel layer 601, the tunneling dielectric layer 56, the charge storage layer 54, and the blocking dielectric layer 52. Optionally, the physically exposed semiconductor surface at the bottom of each memory cavity 49′ may be vertically recessed so that the recessed semiconductor surface underneath the memory cavity 49′ is vertically offset from the topmost surface of the pedestal channel portion 11 (or of the semiconductor material layer 10 in embodiments where pedestal channel portions 11 are not used) by a recess distance. A tunneling dielectric layer 56 is located over the charge storage layer 54. A set of a blocking dielectric layer 52, a charge storage layer 54, and a tunneling dielectric layer 56 in a memory opening 49 constitutes a memory film 50, which includes a plurality of charge storage regions (as embodied as the charge storage layer 54) that are insulated from surrounding materials by the blocking dielectric layer 52 and the tunneling dielectric layer 56. In one embodiment, the first semiconductor channel layer 601, the tunneling dielectric layer 56, the charge storage layer 54, and the blocking dielectric layer 52 may have vertically coincident sidewalls.
Referring to
The materials of the first semiconductor channel layer 601 and the second semiconductor channel layer 602 are collectively referred to as a semiconductor channel material. In other words, the semiconductor channel material is a set of all semiconductor material in the first semiconductor channel layer 601 and the second semiconductor channel layer 602.
Referring to
Referring to
Each adjoining pair of a first semiconductor channel layer 601 and a second semiconductor channel layer 602 may collectively form a vertical semiconductor channel 60 through which electrical current may flow when a vertical NAND device including the vertical semiconductor channel 60 is turned on. A tunneling dielectric layer 56 is surrounded by a charge storage layer 54, and laterally surrounds a portion of the vertical semiconductor channel 60. Each adjoining set of a blocking dielectric layer 52, a charge storage layer 54, and a tunneling dielectric layer 56 collectively constitute a memory film 50, which may store electrical charges with a macroscopic retention time. In some embodiments, a blocking dielectric layer 52 may not be present in the memory film 50 at this step, and a blocking dielectric layer may be subsequently formed after formation of backside recesses. As used herein, a macroscopic retention time refers to a retention time suitable for operation of a memory device as a permanent memory device such as a retention time in excess of 24 hours.
Referring to
Each combination of a memory film 50 and a vertical semiconductor channel 60 within a memory opening 49 constitutes a memory stack structure 55. The memory stack structure 55 is a combination of a semiconductor channel, a tunneling dielectric layer, a plurality of memory elements as embodied as portions of the charge storage layer 54, and an optional blocking dielectric layer 52. Each combination of a pedestal channel portion 11 (if present), a memory stack structure 55, a dielectric core 62, and a drain region 63 within a memory opening 49 is herein referred to as a memory opening fill structure 58. Each combination of a pedestal channel portion 11 (if present), a memory film 50, a vertical semiconductor channel 60, a dielectric core 62, and a drain region 63 within each support opening 19 fills the respective support openings 19, and constitutes a support pillar structure 20 (not shown in
Referring to
Referring to
A photoresist layer (not shown) may be applied over the contact level dielectric layer 73, and is lithographically patterned to form openings in areas between clusters of memory stack structures 55. The pattern in the photoresist layer may be transferred through the contact level dielectric layer 73, the alternating stack (32, 42) and/or the stepped dielectric material portion 65 employing an anisotropic etch to form backside trenches 79, which vertically extend from the top surface of the contact level dielectric layer 73 at least to the top surface of the substrate semiconductor material layer 10, and laterally extend through the memory array region 100 and the staircase region 300.
In one embodiment, the backside trenches 79 may laterally extend along a word line direction wd and may be laterally spaced apart with respect to one another along a bit line direction bd that is perpendicular to the word line direction wd. The memory stack structures 55 may be arranged in rows that extend along the word line direction wd. The drain select level isolation structures 72 may laterally extend along the word line direction wd. Each backside trench 79 may have a uniform width that is invariant along the lengthwise direction (i.e., along the word line direction wd). Each drain select level isolation structure 72 may have a uniform vertical cross-sectional profile along vertical planes that are perpendicular to the word line direction wd that is invariant with translation along the word line direction wd. Multiple rows of memory stack structures 55 may be located between a neighboring pair of a backside trench 79 and a drain select level isolation structure 72, or between a neighboring pair of drain select level isolation structures 72. In one embodiment, the backside trenches 79 may include a source contact opening in which a source contact via structure may be subsequently formed. The photoresist layer may be removed, for example, by ashing.
Referring to
The etch process that removes the second material selective to the first material and the outermost layer of the memory films 50 may be a wet etch process employing a wet etch solution, or may be a gas phase (dry) etch process in which the etchant is introduced in a vapor phase into the backside trenches 79. For example, if the sacrificial material layers 42 include silicon nitride, the etch process may be a wet etch process in which the first exemplary structure is immersed within a wet etch tank including phosphoric acid, which etches silicon nitride selective to silicon oxide, silicon, and various other materials used in the art. The support pillar structure 20, the retro-stepped dielectric material portion 65, and the memory stack structures 55 provide structural support while the backside recesses 43 are present within volumes previously occupied by the sacrificial material layers 42.
Each backside recess 43 may be a laterally extending cavity having a lateral dimension that is greater than the vertical extent of the cavity. In other words, the lateral dimension of each backside recess 43 may be greater than the height of the backside recess 43. A plurality of backside recesses 43 may be formed in the volumes from which the second material of the sacrificial material layers 42 is removed. The memory openings in which the memory stack structures 55 are formed are herein referred to as front side openings or front side cavities in contrast with the backside recesses 43. In one embodiment, the memory array region 100 comprises an array of monolithic three-dimensional NAND strings having a plurality of device levels disposed above the substrate (9, 10). In this case, each backside recess 43 may define a space for receiving a respective word line of the array of monolithic three-dimensional NAND strings.
Each of the plurality of backside recesses 43 may extend substantially parallel to the top surface of the substrate (9, 10). A backside recess 43 may be vertically bounded by a top surface of an underlying insulating layer 32 and a bottom surface of an overlying insulating layer 32. In one embodiment, each backside recess 43 may have a uniform height throughout.
Physically exposed surface portions of the optional pedestal channel portions 11 and the semiconductor material layer 10 may be converted into dielectric material portions by thermal conversion and/or plasma conversion of the semiconductor materials into dielectric materials. For example, thermal conversion and/or plasma conversion may be used to convert a surface portion of each pedestal channel portion 11 into a tubular dielectric spacer 116, and to convert each physically exposed surface portion of the semiconductor material layer 10 into a planar dielectric portion 616. In one embodiment, each tubular dielectric spacer 116 may be topologically homeomorphic to a torus, i.e., generally ring-shaped. As used herein, an element is topologically homeomorphic to a torus if the shape of the element may be continuously stretched without destroying a hole or forming a new hole into the shape of a torus. The tubular dielectric spacers 116 include a dielectric material that includes the same semiconductor element as the pedestal channel portions 11 and additionally includes at least one non-metallic element such as oxygen and/or nitrogen such that the material of the tubular dielectric spacers 116 is a dielectric material. In one embodiment, the tubular dielectric spacers 116 may include a dielectric oxide, a dielectric nitride, or a dielectric oxynitride of the semiconductor material of the pedestal channel portions 11. Likewise, each planar dielectric portion 616 includes a dielectric material that includes the same semiconductor element as the semiconductor material layer and additionally includes at least one non-metallic element such as oxygen and/or nitrogen such that the material of the planar dielectric portions 616 is a dielectric material. In one embodiment, the planar dielectric portions 616 may include a dielectric oxide, a dielectric nitride, or a dielectric oxynitride of the semiconductor material of the semiconductor material layer 10.
Referring to
The backside blocking dielectric layer 44 may be formed in the backside recesses 43 and on a sidewall of the backside trench 79. The backside blocking dielectric layer 44 may be formed directly on horizontal surfaces of the insulating layers 32 and sidewalls of the memory stack structures 55 within the backside recesses 43. If the backside blocking dielectric layer 44 is formed, formation of the tubular dielectric spacers 116 and the planar dielectric portion 616 prior to formation of the backside blocking dielectric layer 44 is optional. In one embodiment, the backside blocking dielectric layer 44 may be formed by a conformal deposition process such as atomic layer deposition (ALD). The backside blocking dielectric layer 44 may consist essentially of aluminum oxide. The thickness of the backside blocking dielectric layer 44 may be in a range from 1 nm to 15 nm, such as 2 to 6 nm, although lesser and greater thicknesses may also be used.
The dielectric material of the backside blocking dielectric layer 44 may be a dielectric metal oxide such as aluminum oxide, a dielectric oxide of at least one transition metal element, a dielectric oxide of at least one Lanthanide element, a dielectric oxide of a combination of aluminum, at least one transition metal element, and/or at least one Lanthanide element. Alternatively or additionally, the backside blocking dielectric layer 44 may include a silicon oxide layer. The backside blocking dielectric layer 44 may be deposited by a conformal deposition method such as chemical vapor deposition or atomic layer deposition. The backside blocking dielectric layer 44 is formed on the sidewalls of the backside trenches 79, horizontal surfaces and sidewalls of the insulating layers 32, the portions of the sidewall surfaces of the memory stack structures 55 that are physically exposed to the backside recesses 43, and a top surface of the planar dielectric portion 616. A backside cavity 79′ is present within the portion of each backside trench 79 that is not filled with the backside blocking dielectric layer 44.
Referring to
Referring to
A plurality of electrically conductive layers 46 may be formed in the plurality of backside recesses 43, and a continuous metallic material layer 46L may be formed on the sidewalls of each backside trench 79 and over the contact level dielectric layer 73. Each electrically conductive layer 46 includes a portion of the metallic barrier layer 46A and a portion of the metallic fill material layer 46B that are located between a vertically neighboring pair of dielectric material layers such as a pair of insulating layers 32. The continuous metallic material layer 46L includes a continuous portion of the metallic barrier layer 46A and a continuous portion of the metallic fill material layer 46B that are located in the backside trenches 79 or above the contact level dielectric layer 73.
Each sacrificial material layer 42 may be replaced with an electrically conductive layer 46. A backside cavity 79′ is present in the portion of each backside trench 79 that is not filled with the backside blocking dielectric layer 44 and the continuous metallic material layer 46L. A tubular dielectric spacer 116 laterally surrounds a pedestal channel portion 11. A bottommost electrically conductive layer 46 laterally surrounds each tubular dielectric spacer 116 upon formation of the electrically conductive layers 46.
Referring to
Each electrically conductive layer 46 may function as a combination of a plurality of control gate electrodes located at a same level and a word line electrically interconnecting, i.e., electrically shorting, the plurality of control gate electrodes located at the same level. The plurality of control gate electrodes within each electrically conductive layer 46 are the control gate electrodes for the vertical memory devices including the memory stack structures 55. In other words, each electrically conductive layer 46 may be a word line that functions as a common control gate electrode for the plurality of vertical memory devices.
In one embodiment, the removal of the continuous electrically conductive material layer 46L may be selective to the material of the backside blocking dielectric layer 44. In this case, a horizontal portion of the backside blocking dielectric layer 44 may be present at the bottom of each backside trench 79. In another embodiment, the removal of the continuous electrically conductive material layer 46L may not be selective to the material of the backside blocking dielectric layer 44 or, the backside blocking dielectric layer 44 may not be used.
Referring to
If a backside blocking dielectric layer 44 is present, the insulating material layer may be formed directly on surfaces of the backside blocking dielectric layer 44 and directly on the sidewalls of the electrically conductive layers 46. If a backside blocking dielectric layer 44 is not used, the insulating material layer may be formed directly on sidewalls of the insulating layers 32 and directly on sidewalls of the electrically conductive layers 46.
An anisotropic etch is performed to remove horizontal portions of the insulating material layer from above the contact level dielectric layer 73 and at the bottom of each backside trench 79. Each remaining portion of the insulating material layer constitutes an insulating spacer 74. A backside cavity 79′ is present within a volume surrounded by each insulating spacer 74. A top surface of the semiconductor material layer 10 may be physically exposed at the bottom of each backside trench 79.
A source region 61 may be formed at a surface portion of the semiconductor material layer 10 under each backside cavity 79′ by implantation of electrical dopants into physically exposed surface portions of the semiconductor material layer 10. Each source region 61 is formed in a surface portion of the substrate (9, 10) that underlies a respective opening through the insulating spacer 74. Due to the straggle of the implanted dopant atoms during the implantation process and lateral diffusion of the implanted dopant atoms during a subsequent activation anneal process, each source region 61 may have a lateral extent greater than the lateral extent of the opening through the insulating spacer 74.
An upper portion of the semiconductor material layer 10 that extends between the source region 61 and the plurality of pedestal channel portions 11 constitutes a horizontal semiconductor channel 59 for a plurality of field effect transistors. The horizontal semiconductor channel 59 is connected to multiple vertical semiconductor channels 60 through respective pedestal channel portions 11. The horizontal semiconductor channel 59 contacts the source region 61 and the plurality of pedestal channel portions 11. A bottommost electrically conductive layer 46 provided upon formation of the electrically conductive layers 46 within the alternating stack (32, 46) may comprise a select gate electrode for the field effect transistors. Each source region 61 is formed in an upper portion of the substrate (9, 10). Semiconductor channels (59, 11, 60) extend between each source region 61 and a respective set of drain regions 63. The semiconductor channels (59, 11, 60) include the vertical semiconductor channels 60 of the memory stack structures 55.
A backside contact via structure 76 may be formed within each backside cavity 79′. Each contact via structure 76 may fill a respective cavity 79′. The contact via structures 76 may be formed by depositing at least one conductive material in the remaining unfilled volume (i.e., the backside cavity 79′) of the backside trench 79. For example, the at least one conductive material may include a conductive liner 76A and a conductive fill material portion 76B. The conductive liner 76A may include a conductive metallic liner such as TiN, TaN, WN, TiC, TaC, WC, an alloy thereof, or a stack thereof. The thickness of the conductive liner 76A may be in a range from 3 nm to 30 nm, although lesser and greater thicknesses may also be used. The conductive fill material portion 76B may include a metal or a metallic alloy. For example, the conductive fill material portion 76B may include W, Cu, Al, Co, Ru, Ni, an alloy thereof, or a stack thereof.
The at least one conductive material may be planarized employing the contact level dielectric layer 73 overlying the alternating stack (32, 46) as a stopping layer. If chemical mechanical planarization (CMP) process is used, the contact level dielectric layer 73 may be used as a CMP stopping layer. Each remaining continuous portion of the at least one conductive material in the backside trenches 79 constitutes a backside contact via structure 76.
The backside contact via structure 76 extends through the alternating stack (32, 46), and contacts a top surface of the source region 61. If a backside blocking dielectric layer 44 is used, the backside contact via structure 76 may contact a sidewall of the backside blocking dielectric layer 44.
Referring to
Referring to
A first line level dielectric layer 90 is deposited over the via level dielectric layer 80. Various metal line structures (98, 96, 94) are formed in the first line level dielectric layer 90. The metal line structures (98, 96, 94) are herein referred to as first line level metal interconnect structures. The various metal line structure (98, 96, 94) include bit lines 98 that are electrically connected to a respective plurality of the drain contact via structures 88 (for example, through the bit line connection via structures 198), a word-line-connection metal interconnect lines 96 that are electrically connected to a respective one of the word line contact via structures 86 (for example, through a word line connection via structure 196), and peripheral metal interconnect lines 94 that are electrically connected to a respective one of the pass-through via structures 8P (for example, through a peripheral extension via structure 194).
The bit lines 98 are electrically connected to upper ends of a respective subset of the vertical semiconductor channels 60 in the memory stack structures 55 in the memory array region 100. In one embodiment, the memory stack structures 55 are arranged in rows that extend along the word line direction wd, and the bit lines 98 laterally extend along the bit line direction bd.
Referring to
Dielectric material layers are formed over the semiconductor devices, which are herein referred to as lower-level dielectric material layers 760. The lower-level dielectric material layers 760 may include, for example, a dielectric liner 762 (such as a silicon nitride liner that blocks diffusion of mobile ions and/or apply appropriate stress to underlying structures), first dielectric material layers 764 that overlie the dielectric liner 762, and a silicon nitride layer (e.g., hydrogen diffusion barrier) 766 that overlies the first dielectric material layers 764.
The dielectric layer stack including the lower-level dielectric material layers 760 functions as a matrix for lower-level metal interconnect structures 780 that provide electrical wiring to and from the various nodes of the semiconductor devices and landing pads for through-memory-level contact via structures to be subsequently formed. The lower-level metal interconnect structures 780 are formed within the dielectric layer stack of the lower-level dielectric material layers 760, and comprise a lower-level metal line structure located under and optionally contacting a bottom surface of the silicon nitride layer 766.
For example, the lower-level metal interconnect structures 780 may be formed within the first dielectric material layers 764. The first dielectric material layers 764 may be a plurality of dielectric material layers in which various elements of the lower-level metal interconnect structures 780 are sequentially formed. Each dielectric material layer selected from the first dielectric material layers 764 may include any of doped silicate glass, undoped silicate glass, organosilicate glass, silicon nitride, silicon oxynitride, and dielectric metal oxides (such as aluminum oxide). In one embodiment, the first dielectric material layers 764 may comprise, or consist essentially of, dielectric material layers having dielectric constants that do not exceed the dielectric constant of undoped silicate glass (silicon oxide) of 3.9. The lower-level metal interconnect structures 780 may include various device contact via structures 782 (e.g., source and drain electrodes which contact the respective source and drain nodes of the device or gate electrode contacts), intermediate lower-level metal line structures 784, lower-level metal via structures 786, and landing-pad-level metal line structures 788 that are configured to function as landing pads for through-memory-level contact via structures to be subsequently formed.
The landing-pad-level metal line structures 788 may be formed within a topmost dielectric material layer of the first dielectric material layers 764 (which may be a plurality of dielectric material layers). Each of the lower-level metal interconnect structures 780 may include a metallic nitride liner and a metal fill structure. Top surfaces of the landing-pad-level metal line structures 788 and the topmost surface of the first dielectric material layers 764 may be planarized by a planarization process, such as chemical mechanical planarization. The silicon nitride layer 766 may be formed directly on the top surfaces of the landing-pad-level metal line structures 788 and the topmost surface of the first dielectric material layers 764.
The at least one second dielectric material layer 768 may include a single dielectric material layer or a plurality of dielectric material layers. Each dielectric material layer selected from the at least one second dielectric material layer 768 may include any of doped silicate glass, undoped silicate glass, and organosilicate glass. In one embodiment, the at least one first second material layer 768 may comprise, or consist essentially of, dielectric material layers having dielectric constants that do not exceed the dielectric constant of undoped silicate glass (silicon oxide) of 3.9.
Referring to
The in-process source-level material layers 110′ may include various layers that are subsequently modified to form source-level material layers. The source-level material layers, upon formation, include a source contact layer that functions as a common source region for vertical field effect transistors of a three-dimensional memory device. In one embodiment, the in-process source-level material layers 110′ may include, from bottom to top, a lower source-level semiconductor layer 112, a lower sacrificial liner 103, a source-level sacrificial layer 104, an upper sacrificial liner 105, an upper source-level semiconductor layer 116, a source-level insulating layer 117, and an optional source-select-level conductive layer 118.
The lower source-level semiconductor layer 112 and the upper source-level semiconductor layer 116 may include a doped semiconductor material such as doped polysilicon or doped amorphous silicon. The conductivity type of the lower source-level semiconductor layer 112 and the upper source-level semiconductor layer 116 may be the opposite of the conductivity of vertical semiconductor channels to be subsequently formed. For example, if the vertical semiconductor channels to be subsequently formed have a doping of a first conductivity type, the lower source-level semiconductor layer 112 and the upper source-level semiconductor layer 116 have a doping of a second conductivity type that is the opposite of the first conductivity type. The thickness of each of the lower source-level semiconductor layer 112 and the upper source-level semiconductor layer 116 may be in a range from 10 nm to 300 nm, such as from 20 nm to 150 nm, although lesser and greater thicknesses may also be used.
The source-level sacrificial layer 104 includes a sacrificial material that may be removed selective to the lower sacrificial liner 103 and the upper sacrificial liner 105. In one embodiment, the source-level sacrificial layer 104 may include a semiconductor material such as undoped amorphous silicon or a silicon-germanium alloy with an atomic concentration of germanium greater than 20%. The thickness of the source-level sacrificial layer 104 may be in a range from 30 nm to 400 nm, such as from 60 nm to 200 nm, although lesser and greater thicknesses may also be used.
The lower sacrificial liner 103 and the upper sacrificial liner 105 include materials that may function as an etch stop material during removal of the source-level sacrificial layer 104. For example, the lower sacrificial liner 103 and the upper sacrificial liner 105 may include silicon oxide, silicon nitride, and/or a dielectric metal oxide. In one embodiment, each of the lower sacrificial liner 103 and the upper sacrificial liner 105 may include a silicon oxide layer having a thickness in a range from 2 nm to 30 nm, although lesser and greater thicknesses may also be used.
The source-level insulating layer 117 includes a dielectric material such as silicon oxide. The thickness of the source-level insulating layer 117 may be in a range from 20 nm to 400 nm, such as from 40 nm to 200 nm, although lesser and greater thicknesses may also be used. The optional source-select-level conductive layer 118 may include a conductive material that may be used as a source-select-level gate electrode. For example, the optional source-select-level conductive layer 118 may include a doped semiconductor material such as doped polysilicon or doped amorphous silicon that may be subsequently converted into doped polysilicon by an anneal process. The thickness of the optional source-select-level conductive layer 118 may be in a range from 30 nm to 200 nm, such as from 60 nm to 100 nm, although lesser and greater thicknesses may also be used.
The in-process source-level material layers 110′ may be formed directly above a subset of the semiconductor devices on the substrate 8 (e.g., silicon wafer). As used herein, a first element is located “directly above” a second element if the first element is located above a horizontal plane including a topmost surface of the second element and an area of the first element and an area of the second element has an areal overlap in a plan view (i.e., along a vertical plane or direction perpendicular to the top surface of the substrate 8.
The optional conductive plate layer 6 and the in-process source-level material layers 110′ may be patterned to provide openings in areas in which through-memory-level contact via structures and through-dielectric contact via structures are to be subsequently formed. Patterned portions of the stack of the conductive plate layer 6 and the in-process source-level material layers 110′ are present in each memory array region 100 in which three-dimensional memory stack structures are to be subsequently formed.
The optional conductive plate layer 6 and the in-process source-level material layers 110′ may be patterned such that an opening extends over a staircase region 200 in which contact via structures contacting word line electrically conductive layers are to be subsequently formed. In one embodiment, the staircase region 200 may be laterally spaced from the memory array region 100 along a first horizontal direction hd1. A horizontal direction that is perpendicular to the first horizontal direction hd1 is herein referred to as a second horizontal direction hd2. In one embodiment, additional openings in the optional conductive plate layer 6 and the in-process source-level material layers 110′ may be formed within the area of a memory array region 100, in which a three-dimensional memory array including memory stack structures is to be subsequently formed. A peripheral device region 400 that is subsequently filled with a field dielectric material portion may be provided adjacent to the staircase region 200.
The region of the semiconductor devices 710 and the combination of the lower-level dielectric material layers 760 and the lower-level metal interconnect structures 780 is herein referred to an underlying peripheral device region 700, which is located underneath a memory-level assembly to be subsequently formed and includes peripheral devices for the memory-level assembly. The lower-level metal interconnect structures 780 are formed in the lower-level dielectric material layers 760.
The lower-level metal interconnect structures 780 may be electrically connected to active nodes (e.g., transistor active regions 742 or gate electrodes 754) of the semiconductor devices 710 (e.g., CMOS devices), and are located at the level of the lower-level dielectric material layers 760. Through-memory-level contact via structures may be subsequently formed directly on the lower-level metal interconnect structures 780 to provide electrical connection to memory devices to be subsequently formed. In one embodiment, the pattern of the lower-level metal interconnect structures 780 may be selected such that the landing-pad-level metal line structures 788 (which are a subset of the lower-level metal interconnect structures 780 located at the topmost portion of the lower-level metal interconnect structures 780) may provide landing pad structures for the through-memory-level contact via structures to be subsequently formed.
Referring to
The first-tier alternating stack may include first insulting layers 132 as the first material layers, and first spacer material layers as the second material layers. In one embodiment, the first spacer material layers may be sacrificial material layers that are subsequently replaced with electrically conductive layers. In another embodiment, the first spacer material layers may be electrically conductive layers that are not subsequently replaced with other layers. While the present disclosure is described using embodiments in which sacrificial material layers are replaced with electrically conductive layers, embodiments in which the spacer material layers are formed as electrically conductive layers (thereby obviating the need to perform replacement processes) are expressly contemplated herein.
In one embodiment, the first material layers and the second material layers may be first insulating layers 132 and first sacrificial material layers 142, respectively. In one embodiment, each first insulating layer 132 may include a first insulating material, and each first sacrificial material layer 142 may include a first sacrificial material. An alternating plurality of first insulating layers 132 and first sacrificial material layers 142 is formed over the in-process source-level material layers 110′. As used herein, a “sacrificial material” refers to a material that is removed during a subsequent processing step.
As used herein, an alternating stack of first elements and second elements refers to a structure in which instances of the first elements and instances of the second elements alternate. Each instance of the first elements that is not an end element of the alternating plurality is adjoined by two instances of the second elements on both sides, and each instance of the second elements that is not an end element of the alternating plurality is adjoined by two instances of the first elements on both ends. The first elements may have the same thickness throughout, or may have different thicknesses. The second elements may have the same thickness throughout, or may have different thicknesses. The alternating plurality of first material layers and second material layers may begin with an instance of the first material layers or with an instance of the second material layers, and may end with an instance of the first material layers or with an instance of the second material layers. In one embodiment, an instance of the first elements and an instance of the second elements may form a unit that is repeated with periodicity within the alternating plurality.
The first-tier alternating stack (132, 142) may include first insulating layers 132 composed of the first material, and first sacrificial material layers 142 composed of the second material, which is different from the first material. The first material of the first insulating layers 132 may be at least one insulating material. Insulating materials that may be used for the first insulating layers 132 include, but are not limited to silicon oxide (including doped or undoped silicate glass), silicon nitride, silicon oxynitride, organosilicate glass (OSG), spin-on dielectric materials, dielectric metal oxides that are commonly known as high dielectric constant (high-k) dielectric oxides (e.g., aluminum oxide, hafnium oxide, etc.) and silicates thereof, dielectric metal oxynitrides and silicates thereof, and organic insulating materials. In one embodiment, the first material of the first insulating layers 132 may be silicon oxide.
The second material of the first sacrificial material layers 142 is a sacrificial material that may be removed selective to the first material of the first insulating layers 132. As used herein, a removal of a first material is “selective to” a second material if the removal process removes the first material at a rate that is at least twice the rate of removal of the second material. The ratio of the rate of removal of the first material to the rate of removal of the second material is herein referred to as a “selectivity” of the removal process for the first material with respect to the second material.
The first sacrificial material layers 142 may comprise an insulating material, a semiconductor material, or a conductive material. The second material of the first sacrificial material layers 142 may be subsequently replaced with electrically conductive electrodes which may function, for example, as control gate electrodes of a vertical NAND device. In one embodiment, the first sacrificial material layers 142 may be material layers that comprise silicon nitride.
In one embodiment, the first insulating layers 132 may include silicon oxide, and sacrificial material layers may include silicon nitride sacrificial material layers. The first material of the first insulating layers 132 may be deposited, for example, by chemical vapor deposition (CVD). For example, if silicon oxide is used for the first insulating layers 132, tetraethylorthosilicate (TEOS) may be used as the precursor material for the CVD process. The second material of the first sacrificial material layers 142 may be formed, for example, CVD or atomic layer deposition (ALD).
The thicknesses of the first insulating layers 132 and the first sacrificial material layers 142 may be in a range from 20 nm to 50 nm, although lesser and greater thicknesses may be used for each first insulating layer 132 and for each first sacrificial material layer 142. The number of repetitions of the pairs of a first insulating layer 132 and a first sacrificial material layer 142 may be in a range from 2 to 1,024, and typically from 8 to 256, although a greater number of repetitions may also be used. In one embodiment, each first sacrificial material layer 142 in the first-tier alternating stack (132, 142) may have a uniform thickness that is substantially invariant within each respective first sacrificial material layer 142.
A first insulating cap layer 170 is subsequently formed over the first alternating stack (132, 142). The first insulating cap layer 170 includes a dielectric material, which may be any dielectric material that may be used for the first insulating layers 132. In one embodiment, the first insulating cap layer 170 includes the same dielectric material as the first insulating layers 132. The thickness of the first insulating cap layer 170 may be in a range from 20 nm to 300 nm, although lesser and greater thicknesses may also be used.
Referring to
A dielectric fill material (such as undoped silicate glass or doped silicate glass) may be deposited to fill the first stepped cavity. Excess portions of the dielectric fill material may be removed from above the horizontal plane including the top surface of the first insulating cap layer 170. A remaining portion of the dielectric fill material that fills the region overlying the first stepped surfaces constitute a first retro-stepped dielectric material portion 165. As used herein, a “retro-stepped” element refers to an element that has stepped surfaces and a horizontal cross-sectional area that increases monotonically as a function of a vertical distance from a top surface of a substrate on which the element is present. The first-tier alternating stack (132, 142) and the first retro-stepped dielectric material portion 165 collectively constitute a first-tier structure, which is an in-process structure that is subsequently modified.
An inter-tier dielectric layer 180 may be optionally deposited over the first-tier structure (132, 142, 170, 165). The inter-tier dielectric layer 180 includes a dielectric material such as silicon oxide. In one embodiment, the inter-tier dielectric layer 180 may include a doped silicate glass having a greater etch rate than the material of the first insulating layers 132 (which may include an undoped silicate glass). For example, the inter-tier dielectric layer 180 may include phosphosilicate glass. The thickness of the inter-tier dielectric layer 180 may be in a range from 30 nm to 300 nm, although lesser and greater thicknesses may also be used.
Referring to
The first-tier memory openings 149 are openings that are formed in the memory array region 100 through each layer within the first alternating stack (132, 142) and are subsequently used to form memory stack structures therein. The first-tier memory openings 149 may be formed in clusters of first-tier memory openings 149 that are laterally spaced apart along the second horizontal direction hd2. Each cluster of first-tier memory openings 149 may be formed as a two-dimensional array of first-tier memory openings 149.
The first-tier support openings 129 are openings that are formed in the staircase region 200, and are subsequently employed to form support pillar structures. A subset of the first-tier support openings 129 that is formed through the first retro-stepped dielectric material portion 165 may be formed through a respective horizontal surface of the first stepped surfaces.
In one embodiment, the first anisotropic etch process may include an initial step in which the materials of the first-tier alternating stack (132, 142) are etched concurrently with the material of the first retro-stepped dielectric material portion 165. The chemistry of the initial etch step may alternate to optimize etching of the first and second materials in the first-tier alternating stack (132, 142) while providing a comparable average etch rate to the material of the first retro-stepped dielectric material portion 165. The first anisotropic etch process may use, for example, a series of reactive ion etch processes or a single reaction etch process (e.g., CF4/O2/Ar etch). The sidewalls of the various first-tier openings (149, 129) may be substantially vertical, or may be tapered.
After etching through the alternating stack (132, 142) and the first retro-stepped dielectric material portion 165, the chemistry of a terminal portion of the first anisotropic etch process may be selected to etch through the dielectric material(s) of the at least one second dielectric layer 768 with a higher etch rate than an average etch rate for the in-process source-level material layers 110′. For example, the terminal portion of the anisotropic etch process may include a step that etches the dielectric material(s) of the at least one second dielectric layer 768 selective to a semiconductor material within a component layer in the in-process source-level material layers 110′. In one embodiment, the terminal portion of the first anisotropic etch process may etch through the source-select-level conductive layer 118, the source-level insulating layer 117, the upper source-level semiconductor layer 116, the upper sacrificial liner 105, the source-level sacrificial layer 104, and the lower sacrificial liner 103, and at least partly into the lower source-level semiconductor layer 112. The terminal portion of the first anisotropic etch process may include at least one etch chemistry for etching the various semiconductor materials of the in-process source-level material layers 110′. The photoresist layer may be subsequently removed, for example, by ashing.
Optionally, the portions of the first-tier memory openings 149 and the first-tier support openings 129 at the level of the inter-tier dielectric layer 180 may be laterally expanded by an isotropic etch. In this case, the inter-tier dielectric layer 180 may comprise a dielectric material (such as borosilicate glass) having a greater etch rate than the first insulating layers 132 (that may include undoped silicate glass) in dilute hydrofluoric acid. An isotropic etch (such as a wet etch using HF) may be used to expand the lateral dimensions of the first-tier memory openings 149 at the level of the inter-tier dielectric layer 180. The portions of the first-tier memory openings 149 located at the level of the inter-tier dielectric layer 180 may be optionally widened to provide a larger landing pad for second-tier memory openings to be subsequently formed through a second-tier alternating stack (to be subsequently formed prior to formation of the second-tier memory openings).
Referring to
In one embodiment, the sacrificial first-tier fill material may include a semiconductor material such as silicon (e.g., a-Si or polysilicon), a silicon-germanium alloy, germanium, a III-V compound semiconductor material, or a combination thereof. Optionally, a thin etch stop liner (such as a silicon oxide layer or a silicon nitride layer having a thickness in a range from 1 nm to 3 nm) may be used prior to depositing the sacrificial first-tier fill material. The sacrificial first-tier fill material may be formed by a non-conformal deposition or a conformal deposition method.
In another embodiment, the sacrificial first-tier fill material may include a silicon oxide material having a higher etch rate than the materials of the first insulating layers 132, the first insulating cap layer 170, and the inter-tier dielectric layer 180. For example, the sacrificial first-tier fill material may include borosilicate glass or porous or non-porous organosilicate glass having an etch rate that is at least 100 times higher than the etch rate of densified TEOS oxide (i.e., a silicon oxide material formed by decomposition of tetraethylorthosilicate glass in a chemical vapor deposition process and subsequently densified in an anneal process) in a 100:1 dilute hydrofluoric acid. In this case, a thin etch stop liner (such as a silicon nitride layer having a thickness in a range from 1 nm to 3 nm) may be used prior to depositing the sacrificial first-tier fill material. The sacrificial first-tier fill material may be formed by a non-conformal deposition or a conformal deposition method.
In yet another embodiment, the sacrificial first-tier fill material may include amorphous silicon or a carbon-containing material (such as amorphous carbon or diamond-like carbon) that may be subsequently removed by ashing, or a silicon-based polymer that may be subsequently removed selective to the materials of the first alternating stack (132, 142).
Portions of the deposited sacrificial material may be removed from above the topmost layer of the first-tier alternating stack (132, 142), such as from above the inter-tier dielectric layer 180. For example, the sacrificial first-tier fill material may be recessed to a top surface of the inter-tier dielectric layer 180 using a planarization process. The planarization process may include a recess etch, chemical mechanical planarization (CMP), or a combination thereof. The top surface of the inter-tier dielectric layer 180 may be used as an etch stop layer or a planarization stop layer.
Remaining portions of the sacrificial first-tier fill material comprise sacrificial first-tier opening fill portions (148, 128). Specifically, each remaining portion of the sacrificial material in a first-tier memory opening 149 constitutes a sacrificial first-tier memory opening fill portion 148. Each remaining portion of the sacrificial material in a first-tier support opening 129 constitutes a sacrificial first-tier support opening fill portion 128. The various sacrificial first-tier opening fill portions (148, 128) are concurrently formed, i.e., during a same set of processes including the deposition process that deposits the sacrificial first-tier fill material and the planarization process that removes the first-tier deposition process from above the first alternating stack (132, 142) (such as from above the top surface of the inter-tier dielectric layer 180). The top surfaces of the sacrificial first-tier opening fill portions (148, 128) may be coplanar with the top surface of the inter-tier dielectric layer 180. Each of the sacrificial first-tier opening fill portions (148, 128) may, or may not, include cavities therein.
Referring to
In one embodiment, the third material layers may be second insulating layers 232 and the fourth material layers may be second spacer material layers that provide vertical spacing between each vertically neighboring pair of the second insulating layers 232. In one embodiment, the third material layers and the fourth material layers may be second insulating layers 232 and second sacrificial material layers 242, respectively. The third material of the second insulating layers 232 may be at least one insulating material. The fourth material of the second sacrificial material layers 242 may be a sacrificial material that may be removed selective to the third material of the second insulating layers 232. The second sacrificial material layers 242 may comprise an insulating material, a semiconductor material, or a conductive material. The fourth material of the second sacrificial material layers 242 may be subsequently replaced with electrically conductive electrodes which may function, for example, as control gate electrodes of a vertical NAND device.
In one embodiment, each second insulating layer 232 may include a second insulating material, and each second sacrificial material layer 242 may include a second sacrificial material. In this case, the second alternating stack (232, 242) may include an alternating plurality of second insulating layers 232 and second sacrificial material layers 242. The third material of the second insulating layers 232 may be deposited, for example, by chemical vapor deposition (CVD). The fourth material of the second sacrificial material layers 242 may be formed, for example, CVD or atomic layer deposition (ALD).
The third material of the second insulating layers 232 may be at least one insulating material. Insulating materials that may be used for the second insulating layers 232 may be any material that may be used for the first insulating layers 132. The fourth material of the second sacrificial material layers 242 is a sacrificial material that may be removed selective to the third material of the second insulating layers 232. Sacrificial materials that may be used for the second sacrificial material layers 242 may be any material that may be used for the first sacrificial material layers 142. In one embodiment, the second insulating material may be the same as the first insulating material, and the second sacrificial material may be the same as the first sacrificial material.
The thicknesses of the second insulating layers 232 and the second sacrificial material layers 242 may be in a range from 20 nm to 50 nm, although lesser and greater thicknesses may be used for each second insulating layer 232 and for each second sacrificial material layer 242. The number of repetitions of the pairs of a second insulating layer 232 and a second sacrificial material layer 242 may be in a range from 2 to 1,024, and typically from 8 to 256, although a greater number of repetitions may also be used. In one embodiment, each second sacrificial material layer 242 in the second alternating stack (232, 242) may have a uniform thickness that is substantially invariant within each respective second sacrificial material layer 242.
Second stepped surfaces in the second stepped area may be formed in the staircase region 200 using a same set of processing steps as the processing steps used to form the first stepped surfaces in the first stepped area with suitable adjustment to the pattern of at least one masking layer. A second retro-stepped dielectric material portion 265 may be formed over the second stepped surfaces in the staircase region 200.
A second insulating cap layer 270 may be subsequently formed over the second alternating stack (232, 242). The second insulating cap layer 270 includes a dielectric material that is different from the material of the second sacrificial material layers 242. In one embodiment, the second insulating cap layer 270 may include silicon oxide. In one embodiment, the first and second sacrificial material layers (142, 242) may comprise silicon nitride.
Generally speaking, at least one alternating stack of insulating layers (132, 232) and spacer material layers (such as sacrificial material layers (142, 242)) may be formed over the in-process source-level material layers 110′, and at least one retro-stepped dielectric material portion (165, 265) may be formed over the staircase regions on the at least one alternating stack (132, 142, 232, 242).
Optionally, drain-select-level isolation structures 72 may be formed through a subset of layers in an upper portion of the second-tier alternating stack (232, 242). The second sacrificial material layers 242 that are cut by the drain-select-level isolation structures 72 correspond to the levels in which drain-select-level electrically conductive layers are subsequently formed. The drain-select-level isolation structures 72 include a dielectric material such as silicon oxide. The drain-select-level isolation structures 72 may laterally extend along a first horizontal direction hd1, and may be laterally spaced apart along a second horizontal direction hd2 that is perpendicular to the first horizontal direction hd1. The combination of the second alternating stack (232, 242), the second retro-stepped dielectric material portion 265, the second insulating cap layer 270, and the optional drain-select-level isolation structures 72 collectively constitute a second-tier structure (232, 242, 265, 270, 72).
Referring to
The pattern of openings in the photoresist layer may be transferred through the second-tier structure (232, 242, 265, 270, 72) by a second anisotropic etch process to form various second-tier openings (249, 229) concurrently, i.e., during the second anisotropic etch process. The various second-tier openings (249, 229) may include second-tier memory openings 249 and second-tier support openings 229.
The second-tier memory openings 249 are formed directly on a top surface of a respective one of the sacrificial first-tier memory opening fill portions 148. The second-tier support openings 229 are formed directly on a top surface of a respective one of the sacrificial first-tier support opening fill portions 128. Further, each second-tier support openings 229 may be formed through a horizontal surface within the second stepped surfaces, which include the interfacial surfaces between the second alternating stack (232, 242) and the second retro-stepped dielectric material portion 265. Locations of steps S in the first-tier alternating stack (132, 142) and the second-tier alternating stack (232, 242) are illustrated as dotted lines in
The second anisotropic etch process may include an etch step in which the materials of the second-tier alternating stack (232, 242) are etched concurrently with the material of the second retro-stepped dielectric material portion 265. The chemistry of the etch step may alternate to optimize etching of the materials in the second-tier alternating stack (232, 242) while providing a comparable average etch rate to the material of the second retro-stepped dielectric material portion 265. The second anisotropic etch process may use, for example, a series of reactive ion etch processes or a single reaction etch process (e.g., CF4/O2/Ar etch). The sidewalls of the various second-tier openings (249, 229) may be substantially vertical, or may be tapered. A bottom periphery of each second-tier opening (249, 229) may be laterally offset, and/or may be located entirely within, a periphery of a top surface of an underlying sacrificial first-tier opening fill portion (148, 128). The photoresist layer may be subsequently removed, for example, by ashing.
Referring to
Referring to
Referring to
Subsequently, the charge storage layer 54 may be formed. In one embodiment, the charge storage layer 54 may be a continuous layer or patterned discrete portions of a charge trapping material including a dielectric charge trapping material, which may be, for example, silicon nitride. Alternatively, the charge storage layer 54 may include a continuous layer or patterned discrete portions of a conductive material such as doped polysilicon or a metallic material that is patterned into multiple electrically isolated portions (e.g., floating gates), for example, by being formed within lateral recesses into sacrificial material layers (142, 242). In one embodiment, the charge storage layer 54 includes a silicon nitride layer. In one embodiment, the sacrificial material layers (142, 242) and the insulating layers (132, 232) may have vertically coincident sidewalls, and the charge storage layer 54 may be formed as a single continuous layer. Alternatively, the sacrificial material layers (142, 242) may be laterally recessed with respect to the sidewalls of the insulating layers (132, 232), and a combination of a deposition process and an anisotropic etch process may be used to form the charge storage layer 54 as a plurality of memory material portions that are vertically spaced apart. The thickness of the charge storage layer 54 may be in a range from 2 nm to 20 nm, although lesser and greater thicknesses may also be used.
The tunneling dielectric layer 56 includes a dielectric material through which charge tunneling may be performed under suitable electrical bias conditions. The charge tunneling may be performed through hot-carrier injection or by Fowler-Nordheim tunneling induced charge transfer depending on the mode of operation of the monolithic three-dimensional NAND string memory device to be formed. The tunneling dielectric layer 56 may include silicon oxide, silicon nitride, silicon oxynitride, dielectric metal oxides (such as aluminum oxide and hafnium oxide), dielectric metal oxynitride, dielectric metal silicates, alloys thereof, and/or combinations thereof. In one embodiment, the tunneling dielectric layer 56 may include a stack of a first silicon oxide layer, a silicon oxynitride layer, and a second silicon oxide layer, which is commonly known as an ONO stack. In one embodiment, the tunneling dielectric layer 56 may include a silicon oxide layer that is substantially free of carbon or a silicon oxynitride layer that is substantially free of carbon. The thickness of the tunneling dielectric layer 56 may be in a range from 2 nm to 20 nm, although lesser and greater thicknesses may also be used. The stack of the blocking dielectric layer 52, the charge storage layer 54, and the tunneling dielectric layer 56 constitutes a memory film 50 that stores memory bits.
The semiconductor channel material layer 60L includes a p-doped semiconductor material such as at least one elemental semiconductor material, at least one III-V compound semiconductor material, at least one II-VI compound semiconductor material, at least one organic semiconductor material, or other semiconductor materials known in the art. In one embodiment, the semiconductor channel material layer 60L may having a uniform doping. In one embodiment, the semiconductor channel material layer 60L has a p-type doping in which p-type dopants (such as boron atoms) are present at an atomic concentration in a range from 1.0×1012/cm3 to 1.0×1018/cm3, such as from 1.0×1014/cm3 to 1.0×1017/cm3. In one embodiment, the semiconductor channel material layer 60L includes, and/or consists essentially of, boron-doped amorphous silicon or boron-doped polysilicon. In another embodiment, the semiconductor channel material layer 60L has an n-type doping in which n-type dopants (such as phosphor atoms or arsenic atoms) are present at an atomic concentration in a range from 1.0×1012/cm3 to 1.0×1018/cm3, such as from 1.0×1014/cm3 to 1.0×1017/cm3. The semiconductor channel material layer 60L may be formed by a conformal deposition method such as low pressure chemical vapor deposition (LPCVD). The thickness of the semiconductor channel material layer 60L may be in a range from 2 nm to 10 nm, although lesser and greater thicknesses may also be used. A cavity 49′ is formed in the volume of each memory opening 49 that is not filled with the deposited material layers (52, 54, 56, 60L).
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Each remaining portion of the doped semiconductor material of the second conductivity type constitutes a drain region 63. The dopant concentration in the drain regions 63 may be in a range from 5.0×1019/cm3 to 2.0×1021/cm3, although lesser and greater dopant concentrations may also be used. The doped semiconductor material may be, for example, doped polysilicon.
Each remaining portion of the semiconductor channel material layer 60L constitutes a vertical semiconductor channel 60 through which electrical current may flow when a vertical NAND device including the vertical semiconductor channel 60 is turned on. A tunneling dielectric layer 56 is surrounded by a charge storage layer 54, and laterally surrounds a vertical semiconductor channel 60. Each adjoining set of a blocking dielectric layer 52, a charge storage layer 54, and a tunneling dielectric layer 56 collectively constitute a memory film 50, which may store electrical charges with a macroscopic retention time. In some embodiments, a blocking dielectric layer 52 may not be present in the memory film 50 at this step, and a blocking dielectric layer may be subsequently formed after formation of backside recesses. As used herein, a macroscopic retention time refers to a retention time suitable for operation of a memory device as a permanent memory device such as a retention time in excess of 24 hours.
Each combination of a memory film 50 and a vertical semiconductor channel 60 (which is a vertical semiconductor channel) within a memory opening 49 constitutes a memory stack structure 55. The memory stack structure 55 is a combination of a vertical semiconductor channel 60, a tunneling dielectric layer 56, a plurality of memory elements comprising portions of the charge storage layer 54, and an optional blocking dielectric layer 52. Each combination of a memory stack structure 55, a dielectric core 62, and a drain region 63 within a memory opening 49 constitutes a memory opening fill structure 58. The in-process source-level material layers 110′, the first-tier structure (132, 142, 170, 165), the second-tier structure (232, 242, 270, 265, 72), the inter-tier dielectric layer 180, and the memory opening fill structures 58 collectively constitute a memory-level assembly.
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A photoresist layer (not shown) may be applied over the first contact level dielectric layer 280, and may be lithographically patterned to form discrete openings within the area of the memory array region 100 in which memory opening fill structures 58 are not present. An anisotropic etch may be performed to form vertical interconnection region cavities 585 having substantially vertical sidewalls that extend through the first contact level dielectric layer 280, the second-tier structure (232, 242, 270, 265, 72), and the first-tier structure (132, 142, 170, 165) may be formed underneath the openings in the photoresist layer. A top surface of a lower-level metal interconnect structure 780 may be physically exposed at the bottom of each vertical interconnection region cavity 585. The photoresist layer may be removed, for example, by ashing.
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Wet etch chemicals such as hot TMY and TMAH are selective to doped semiconductor materials such as the p-doped semiconductor material and/or the n-doped semiconductor material of the upper source-level semiconductor layer 116 and the lower source-level semiconductor layer 112. Thus, use of selective wet etch chemicals such as hot TMY and TMAH for the wet etch process that forms the source cavity 109 provides a large process window against etch depth variation during formation of the backside trenches 79. Specifically, even if sidewalls of the upper source-level semiconductor layer 116 are physically exposed or even if a surface of the lower source-level semiconductor layer 112 is physically exposed upon formation of the source cavity 109 and/or the backside trench spacers 77, collateral etching of the upper source-level semiconductor layer 116 and/or the lower source-level semiconductor layer 112 is minimal, and the structural change to the second exemplary structure caused by accidental physical exposure of the surfaces of the upper source-level semiconductor layer 116 and/or the lower source-level semiconductor layer 112 during manufacturing steps do not result in device failures. Each of the memory opening fill structures 58 is physically exposed to the source cavity 109. Specifically, each of the memory opening fill structures 58 includes a sidewall and that are physically exposed to the source cavity 109.
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In one embodiment, the doped semiconductor material of the second conductivity type may be deposited on the physically exposed semiconductor surfaces around the source cavity 109 by a selective semiconductor deposition process. A semiconductor precursor gas, an etchant, and a dopant gas may be flowed concurrently into a process chamber including the second exemplary structure during the selective semiconductor deposition process. For example, the semiconductor precursor gas may include silane, disilane, or dichlorosilane, the etchant gas may include gaseous hydrogen chloride, and the dopant gas may include a hydride of a dopant atom such as phosphine, arsine, stibine, or diborane. In this case, the selective semiconductor deposition process grows a doped semiconductor material having a doping of the second conductivity type from physically exposed semiconductor surfaces around the source cavity 109. The deposited doped semiconductor material forms a source contact layer 114, which may contact sidewalls of the vertical semiconductor channels 60. The atomic concentration of the dopants of the second conductivity type in the deposited semiconductor material may be in a range from 1.0×1020/cm3 to 2.0×1021/cm3, such as from 2.0×1020/cm3 to 8.0×1020/cm3. The source contact layer 114 as initially formed may consist essentially of semiconductor atoms and dopant atoms of the second conductivity type. Alternatively, at least one non-selective doped semiconductor material deposition process may be used to form the source contact layer 114. Optionally, one or more etch back processes may be used in combination with a plurality of selective or non-selective deposition processes to provide a seamless and/or voidless source contact layer 114.
The duration of the selective semiconductor deposition process may be selected such that the source cavity 109 is filled with the source contact layer 114, and the source contact layer 114 contacts bottom end portions of inner sidewalls of the backside trench spacers 77. In one embodiment, the source contact layer 114 may be formed by selectively depositing a doped semiconductor material having a doping of the second conductivity type from semiconductor surfaces around the source cavity 109. In one embodiment, the doped semiconductor material may include doped polysilicon. Thus, the source-level sacrificial layer 104 may be replaced with the source contact layer 114.
The layer stack including the lower source-level semiconductor layer 112, the source contact layer 114, and the upper source-level semiconductor layer 116 constitutes a buried source layer (112, 114, 116). The set of layers including the buried source layer (112, 114, 116), the source-level insulating layer 117, and the source-select-level conductive layer 118 constitutes source-level material layers 110, which replaces the in-process source-level material layers 110′.
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An oxidation process may be performed to convert physically exposed surface portions of semiconductor materials into dielectric semiconductor oxide portions. For example, surfaces portions of the source contact layer 114 and the upper source-level semiconductor layer 116 may be converted into dielectric semiconductor oxide plates 122, and surface portions of the source-select-level conductive layer 118 may be converted into annular dielectric semiconductor oxide spacers 124.
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The isotropic etch process may be a wet etch process using a wet etch solution, or may be a gas phase (dry) etch process in which the etchant is introduced in a vapor phase into the backside trench 79. For example, if the sacrificial material layers (142, 242) include silicon nitride, the etch process may be a wet etch process in which the second exemplary structure is immersed within a wet etch tank including phosphoric acid, which etches silicon nitride selective to silicon oxide, silicon, and various other materials used in the art.
Backside recesses (143, 243) are formed in volumes from which the sacrificial material layers (142, 242) are removed. The backside recesses (143, 243) include first backside recesses 143 that are formed in volumes from which the first sacrificial material layers 142 are removed and second backside recesses 243 that are formed in volumes from which the second sacrificial material layers 242 are removed. Each of the backside recesses (143, 243) may be a laterally extending cavity having a lateral dimension that is greater than the vertical extent of the cavity. In other words, the lateral dimension of each of the backside recesses (143, 243) may be greater than the height of the respective backside recess (143, 243). A plurality of backside recesses (143, 243) may be formed in the volumes from which the material of the sacrificial material layers (142, 242) is removed. Each of the backside recesses (143, 243) may extend substantially parallel to the top surface of the substrate semiconductor layer 9. A backside recess (143, 243) may be vertically bounded by a top surface of an underlying insulating layer (132, 232) and a bottom surface of an overlying insulating layer (132, 232). In one embodiment, each of the backside recesses (143, 243) may have a uniform height throughout.
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At least one conductive material may be deposited in the plurality of backside recesses (143, 243), on the sidewalls of the backside trenches 79, and over the first contact level dielectric layer 280. The at least one conductive material may be deposited by a conformal deposition method, which may be, for example, chemical vapor deposition (CVD), atomic layer deposition (ALD), electroless plating, electroplating, or a combination thereof. The at least one conductive material may include an elemental metal, an intermetallic alloy of at least two elemental metals, a conductive nitride of at least one elemental metal, a conductive metal oxide, a conductive doped semiconductor material, a conductive metal-semiconductor alloy such as a metal silicide, alloys thereof, and combinations or stacks thereof.
In one embodiment, the at least one conductive material may include at least one metallic material, i.e., an electrically conductive material that includes at least one metallic element. Non-limiting exemplary metallic materials that may be deposited in the backside recesses (143, 243) include tungsten, tungsten nitride, titanium, titanium nitride, tantalum, tantalum nitride, cobalt, and ruthenium. For example, the at least one conductive material may include a conductive metallic nitride liner that includes a conductive metallic nitride material such as TiN, TaN, WN, or a combination thereof, and a conductive fill material such as W, Co, Ru, Mo, Cu, or combinations thereof. In one embodiment, the at least one conductive material for filling the backside recesses (143, 243) may be a combination of titanium nitride layer and a tungsten fill material.
Electrically conductive layers (146, 246) may be formed in the backside recesses (143, 243) by deposition of the at least one conductive material. A plurality of first electrically conductive layers 146 may be formed in the plurality of first backside recesses 143, a plurality of second electrically conductive layers 246 may be formed in the plurality of second backside recesses 243, and a continuous metallic material layer (not shown) may be formed on the sidewalls of each backside trench 79 and over the first contact level dielectric layer 280. Each of the first electrically conductive layers 146 and the second electrically conductive layers 246 may include a respective conductive metallic nitride liner and a respective conductive fill material. Thus, the first and second sacrificial material layers (142, 242) may be replaced with the first and second electrically conductive layers (146, 246), respectively. Specifically, each first sacrificial material layer 142 may be replaced with an optional portion of the backside blocking dielectric layer and a first electrically conductive layer 146, and each second sacrificial material layer 242 may be replaced with an optional portion of the backside blocking dielectric layer and a second electrically conductive layer 246. A backside cavity is present in the portion of each backside trench 79 that is not filled with the continuous metallic material layer.
Residual conductive material may be removed from inside the backside trenches 79. Specifically, the deposited metallic material of the continuous metallic material layer may be etched back from the sidewalls of each backside trench 79 and from above the first contact level dielectric layer 280, for example, by an anisotropic or isotropic etch. Each remaining portion of the deposited metallic material in the first backside recesses constitutes a first electrically conductive layer 146. Each remaining portion of the deposited metallic material in the second backside recesses constitutes a second electrically conductive layer 246. Sidewalls of the first electrically conductive material layers 146 and the second electrically conductive layers may be physically exposed to a respective backside trench 79. The backside trenches may have a pair of curved sidewalls having a non-periodic width variation along the first horizontal direction hd1 and a non-linear width variation along the vertical direction.
Each electrically conductive layer (146, 246) may be a conductive sheet including openings therein. A first subset of the openings through each electrically conductive layer (146, 246) may be filled with memory opening fill structures 58. A second subset of the openings through each electrically conductive layer (146, 246) may be filled with the support pillar structures 20. Each electrically conductive layer (146, 246) may have a lesser area than any underlying electrically conductive layer (146, 246) because of the first and second stepped surfaces. Each electrically conductive layer (146, 246) may have a greater area than any overlying electrically conductive layer (146, 246) because of the first and second stepped surfaces.
In some embodiment, drain-select-level isolation structures 72 may be provided at topmost levels of the second electrically conductive layers 246. A subset of the second electrically conductive layers 246 located at the levels of the drain-select-level isolation structures 72 constitutes drain select gate electrodes. A subset of the electrically conductive layer (146, 246) located underneath the drain select gate electrodes may function as combinations of a control gate and a word line located at the same level. The control gate electrodes within each electrically conductive layer (146, 246) are the control gate electrodes for a vertical memory device including the memory stack structure 55.
Each of the memory stack structures 55 comprises a vertical stack of memory elements located at each level of the electrically conductive layers (146, 246). A subset of the electrically conductive layers (146, 246) may comprise word lines for the memory elements. The semiconductor devices in the underlying peripheral device region 700 may comprise word line switch devices configured to control a bias voltage to respective word lines. The memory-level assembly is located over the substrate semiconductor layer 9. The memory-level assembly includes at least one alternating stack (132, 146, 232, 246) and memory stack structures 55 vertically extending through the at least one alternating stack (132, 146, 232, 246).
Referring to
As discussed above, local electrical field variations that occur during etching of the etched portions of the first contact level dielectric layer 280, the second-tier structure (232, 242, 270, 265, 72), the first-tier structure (132, 142, 170, 165) introduce random variations in the vertical cross-sectional profiles of the backside trenches 79, thereby forming non-vertical surfaces for the sidewalls of the backside trenches 79. For example, a lengthwise sidewall of each backside trench 79 may include a non-vertical segment such as a concave segment, a convex segment, and/or a tapered segment.
A laterally-insulated conductive via structure can be formed in each of the backside trenches 79. For example, an isolation dielectric layer can be conformally deposited in each backside trench 79, and can be subsequently anisotropically etched to form an isolation dielectric spacer 172. The isolation dielectric spacer 172 in each backside trench 79 includes a dielectric material such as undoped silicate glass, a doped silicate glass, or organosilicate glass. The anisotropic etch process etches narrower portions of the isolation dielectric layer at a greater etch rate than wider portions of the outer dielectric fill material layer. Thus, the anisotropic etching of the isolation dielectric layer during formation of the isolation dielectric spacer 172 has the effect of reducing the magnitude of lateral undulation of inner sidewalls of the isolation dielectric spacer 172 relative to the magnitude of the lateral undulation of sidewalls of the respective backside trench 79 in which the isolation dielectric spacer 172 is formed. An underlying surface of the semiconductor region, such as a surface of a source contact layer 114 of the source-level material layers 110 of the second embodiment or the source region 61 of the first embodiment can be physically exposed after the anisotropic etch process. The maximum lateral thickness of each isolation dielectric spacer 172 may be in arrange from 5% to 40%, such as from 10% to 35%, of the maximum lateral width of a respective backside trench 79 in which the isolation dielectric spacer 172 is formed. An isolation dielectric spacer 172 can have a non-straight outer sidewall and can have a non-uniform width that changes with a vertical distance from an underlying semiconductor region, such as the source contact layer 114 of the second embodiment or the source region 61 of the first embodiment. Each isolation dielectric spacer 172 can be formed in the backside trenches 79 on the sidewalls of the insulating layers 32 and the electrically conductive layers 46 that constitute a neighboring pair of alternating stacks (132, 246, 232, 246).
A conductive material can be subsequently deposited by a conformal deposition process on inner sidewalls of the isolation dielectric spacers 172 and on each physically exposed surface of the underlying semiconductor region, such as the source contact layer 114 of the second embodiment or the source region 61 of the first embodiment. The conductive material can include a metallic material or a heavily-doped semiconductor material. For example, the conductive material can include a conductive metallic nitride material such as TiN, TaN, WN, or a combination thereof. The conformally deposited conductive material forms a conductive liner 182 that continuously extends from the source-level material layers 110 to a top surface of the first contact level dielectric layer 280 and overlies the top surface of the first contact level dielectric layer 280. The thickness of the conductive liner 182 can be in a range from 1% to 30%, such as from 3% to 20% of the maximum lateral width of each backside trench 79.
In one embodiment, the conductive liner 182 can include at least one tapered segment in which a lateral separation distance between a pair of inner sidewalls of the conductive liner 182 increases with a vertical distance from an underlying semiconductor region (such as the source contact layer 114 or the source region), and at least one reverse-tapered segment in which the lateral separation distance between the pair of inner sidewalls of the conductive liner 182 decreases with the vertical distance from an underlying semiconductor region (such as a source contact layer 114 or the source region 61). A conductive liner 182 may include at least one concave segment in which a portion of an outer sidewall of the conductive liner 182 has a concave profile in a vertical cross-sectional view, and/or may include at least one convex segment in which a portion of an outer sidewall of the conductive liner 182 has a convex profile in a vertical cross-sectional view. The conductive liner 182 can have a uniform thickness throughout. The conductive liner 182 can be formed on inner sidewalls of the isolation dielectric spacers 172 and on a top surface of an underlying semiconductor region (such as the source contact layer 114 or the source region 61).
An outer dielectric fill material layer 273L can be formed in the backside trenches 79 by a conformal deposition process. The outer dielectric fill material layer 273L includes a dielectric material such as undoped silicate glass, a doped silicate glass, or organosilicate glass. The thickness of the outer dielectric fill material layer 273L is selected that a vertically-extending void is present within each backside trench 79 after deposition of the outer dielectric fill material layer 273L. Each void can have a generally tapered profile in which the width of the void increases with a vertical distance from an underlying semiconductor region (such as the source contact layer 114 or the source region 61).
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Each remaining portion of the dielectric core material layer 274L in the backside trenches 79 constitutes a dielectric core 274. Each dielectric core 274 is laterally enclosed by, and is contacted by, at least one outer dielectric fill material portion 273. In one embodiment, the at least one outer dielectric fill material portion 273 comprises a plurality of outer dielectric fill material portions 273 that are vertically spaced apart among one another and laterally surrounds and contacts the dielectric core 62. The set of material portions located inside the conductive liner 182 in a backside trench 79 constitutes a composite non-metallic core 276, which may be a composite dielectric core that includes a dielectric core 274 and at least one outer dielectric fill material portion 273. In one embodiment, the composite non-metallic core 276 consists of the at least one outer dielectric fill material portion 273 and the dielectric core 274.
Referring to
A conductive plug 178 can be formed over each backside trench 79. A composite non-metallic core 276 contacts a bottom surface of each conductive plug 178. The composite non-metallic core 276 can comprise at least one outer dielectric fill material portion 273 laterally enclosed by a lower portion of a conductive liner 182, and a dielectric core 274 contacting an inner sidewall of the at least one outer dielectric fill material portion 273.
The set of all material portions filling a backside trench 79 or extending into a volume of the backside trench 79 constitutes a backside contact assembly 186. Each backside contact assembly 186 can include, and may consist of, an isolation dielectric spacer 172, a conductive liner 182, a composite non-metallic core 276, and a conductive plug 178. The composite non-metallic core 276 comprises a dielectric core 274 and at least one outer dielectric fill material portion 273. The conductive plug 178 is formed directly on, and over, the conductive liner 182 and the dielectric core 274. Each conductive liner 182 is located on inner sidewalls of an isolation dielectric spacer 172 and a top surface of an underlying semiconductor region, such as the source contact layer 114 or the source region 61. In one embodiment, the conductive liner 182 can consist essentially of a conductive metal nitride.
In one embodiment, a first taper angle al of an interface between the conductive liner 182 and the conductive plug 178 is greater than a second taper angle a2 of an interface between the conductive liner 182 and a bottommost one of the at least one outer dielectric fill material portion 273.
In one embodiment, the conductive plug 178 comprises a tapered downward-protruding portion that contacts an inner tapered sidewall of the conductive liner 182 and vertically extending below a horizontal plane including a bottom surface of a topmost electrically conductive layer 246 (such as a topmost one of the second electrically conductive layers 246) within each of the alternating stacks (132, 146, 232, 246).
In one embodiment, the isolation dielectric spacer 172 comprises a vertical outer sidewall segment 1722 and an inner tapered sidewall segment 1724 above a horizontal plane including a topmost electrically conductive layer 246 within the alternating stacks (132, 146, 232, 246).
Referring to
The anisotropic etch process employed to form the semiconductor fill material portions 373 etches narrower portions of the conformal semiconductor fill material layer at a greater etch rate than wider portions of the conformal semiconductor fill material layer. Thus, the anisotropic etching of the conformal semiconductor fill material layer has the effect of reducing the magnitude of lateral undulation of inner sidewalls of the semiconductor fill material portions 373 relative to the magnitude of the lateral undulation of inner sidewalls of a respective conductive liner 182.
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Subsequently, the photoresist layer 457 can be removed, for example, by ashing. Remaining horizontal portions of the outer dielectric fill material layer 273L that overlie the first contact level dielectric layer 280 can be removed by an additional anisotropic etch process. The backside cavities 279 can be vertically extended during the additional anisotropic etch process. Each remaining portion of the outer dielectric fill material layer 273L that remains in a backside trench 79 constitutes an outer dielectric fill material portion 273.
Voids 179V can be present within areas in which the outer dielectric fill material layer 273L is masked with the patterned photoresist layer 457 at the processing steps of
Each outer dielectric fill material portion 273 can have a height modulation along the lengthwise direction of a respective backside trench 79. The locations at which an outer dielectric fill material portion 273 has a greater height correspond to areas in which the outer dielectric fill material layer 273L is masked with the patterned photoresist layer 457 at the processing steps of
Horizontal portions of the conductive liner 182 can be removed from above the first contact level dielectric layer 280. Upper tapered portions of the conductive liner 182 can be removed in areas in which the backside cavities 279 are present. Tapered surfaces of an isolation dielectric spacers 172, a conductive liner 182, and an outer dielectric fill material portion can be physically exposed within each area of the openings 459 through the photoresist layer 457 at the processing steps of
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The outer dielectric fill material layer 273L can be converted into a densified outer dielectric fill material layer 473L during the oxidation process. The atomic concentration of hydrogen in the densified outer dielectric fill material layer 473L can be less than 50% of the atomic concentration of hydrogen in the outer dielectric fill material layer 273L as deposited.
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Each remaining portion of the dielectric core material layer 274L in a backside trench 79 constitutes a dielectric core 274. Each remaining portion of the densified outer dielectric fill material layer 473L in a backside trench 79 constitutes an outer dielectric fill material portion 473, which can be a continuous dielectric material portion. A composite non-metallic core 576 is formed within each backside trench 79. Each composite non-metallic core 576 includes a dielectric core 274, an outer dielectric fill material portion 473, and a metal oxide layer 184 formed by oxidation of a portion of the conductive liner 182 into dielectric metal oxide.
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Generally, a backside contact assembly 186 includes a conductive plug 178 overlying a backside trench 79. A composite non-metallic core (176, 276, 376, 476, or 576) contacts a bottom surface of each conductive plug 178. The composite non-metallic core (176, 276, 376, 476, or 576) can comprise at least one outer dielectric fill material portion (273, 673, or 473) laterally enclosed by a lower portion of a conductive liner 182, and a dielectric core 274 contacting an inner sidewall of the at least one outer dielectric fill material portion (273, 673, or 473).
The set of all material portions filling a backside trench 79 or extending into a volume of the backside trench 79 constitutes a backside contact assembly 186. Each backside contact assembly 186 can comprise an isolation dielectric spacer 172, a conductive liner 182, a composite non-metallic core (176, 276, 376, 476, or 576), and a conductive plug 178. The composite non-metallic core (176, 276, 376, 476, or 576) comprises a dielectric core 274 and at least one outer dielectric fill material portion (273, 673, 473). The conductive plug 178 is formed directly on, and over, the conductive liner 182 and the dielectric core 274. Each conductive liner 182 is located on inner sidewalls of an isolation dielectric spacer 172 and a top surface of an underlying semiconductor region, such as the source contact layer 114 or the source region 61. In one embodiment, the conductive liner 182 can consist essentially of a conductive metal nitride, such as TiN.
In one embodiment, a first taper angle al of an interface between the conductive liner 182 and the conductive plug 178 is greater than a second taper angle a2 of an interface between the conductive liner 182 and a bottommost one of the at least one outer dielectric fill material portion 273.
In one embodiment, the conductive plug 178 comprises a tapered downward-protruding portion that contacts an inner tapered sidewall of the conductive liner 182 and vertically extending below a horizontal plane including a bottom surface of a topmost electrically conductive layer 246 (such as a topmost one of the second electrically conductive layers 246) within each of the alternating stacks (132, 146, 232, 246).
In one embodiment, the isolation dielectric spacer 172 comprises a vertical outer sidewall segment 1722 and an inner tapered sidewall segment 1724 above a horizontal plane including a topmost electrically conductive layer within the alternating stacks (132, 146, 232, 246).
Referring to
A photoresist layer (not shown) may be applied over the second contact level dielectric layer 282, and may be lithographically patterned to form various contact via openings. For example, openings for forming drain contact via structures may be formed in the memory array region 100, and openings for forming staircase region contact via structures may be formed in the staircase region 200. An anisotropic etch process is performed to transfer the pattern in the photoresist layer through the second and first contact level dielectric layers (282, 280) and underlying dielectric material portions. The drain regions 63 and the electrically conductive layers (146, 246) may be used as etch stop structures. Drain contact via cavities may be formed over each drain region 63, and staircase-region contact via cavities may be formed over each electrically conductive layer (146. 246) at the stepped surfaces underlying the first and second retro-stepped dielectric material portions (165, 265). The photoresist layer may be subsequently removed, for example, by ashing.
Drain contact via structures 88 are formed in the drain contact via cavities and on a top surface of a respective one of the drain regions 63. Staircase-region contact via structures 86 are formed in the staircase-region contact via cavities and on a top surface of a respective one of the electrically conductive layers (146, 246). The staircase-region contact via structures 86 may include drain select level contact via structures that contact a subset of the second electrically conductive layers 246 that function as drain select level gate electrodes. Further, the staircase-region contact via structures 86 may include word line contact via structures that contact electrically conductive layers (146, 246) that underlie the drain select level gate electrodes and function as word lines for the memory stack structures 55.
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At least one additional dielectric layer may be formed over the contact level dielectric layers (280, 282), and additional metal interconnect structures (herein referred to as upper-level metal interconnect structures) may be formed in the at least one additional dielectric layer. For example, the at least one additional dielectric layer may include a line-level dielectric layer 290 that is formed over the contact level dielectric layers (280, 282). The upper-level metal interconnect structures may include bit lines 98 contacting a respective one of the drain contact via structures 88, and interconnection line structures 96 contacting, and/or electrically connected to, at least one of the staircase-region contact via structures 86 and/or the peripheral-region contact via structures 488 and/or the through-memory-region via structures 588. The word line contact via structures (which are provided as a subset of the staircase-region contact via structures 86) may be electrically connected to the word line driver circuit through a subset of the lower-level metal interconnect structures 780 and through a subset of the peripheral-region contact via structures 488.
Referring to all drawings and according to various embodiments of the present disclosure, a three-dimensional memory device is provided, which comprises: a pair of alternating stacks of insulating layers (132, 232) and electrically conductive layers (146, 246) located over a semiconductor region (such as a source contact layer 114 or a source region 61), and laterally spaced apart from each other by a backside trench 79; memory stack structures 55 extending through the pair of alternating stacks (132, 146, 232, 246); and a backside contact assembly 186 located in the backside trench 79. The backside contact assembly 186 comprises an isolation dielectric spacer 172 contacting a respective pair of alternating stacks (132, 146, 232, 246); a conductive liner 182 contacting inner sidewalls of the isolation dielectric spacer 172 and a top surface of the semiconductor layer; and a composite non-metallic core (176, 276, 376, 476, or 576) comprising at least one outer dielectric fill material portion (273, 673, 473) that is laterally enclosed by a lower portion of the conductive liner 182 and a dielectric core 274 contacting an inner sidewall of the at least one outer dielectric fill material portion (273, 673, 473).
In one embodiment, the backside contact assembly 186 further comprises a conductive plug 178 that contacts the conductive liner 182 and the dielectric core 274.
In one embodiment, a first taper angle al of an interface between the conductive liner 182 and the conductive plug 178 is greater than a second taper angle a2 of an interface between the conductive liner 182 and a bottommost one of the at least one outer dielectric fill material portion 273.
In one embodiment, the conductive plug 178 comprises a tapered downward-protruding portion that contacts an inner tapered sidewall of the conductive liner 182 and vertically extending below a horizontal plane including a bottom surface of a topmost electrically conductive layer (such as a topmost one of the second electrically conductive layers 246) within each pair of alternating stacks (132, 146, 232, 246).
In one embodiment, the isolation dielectric spacer 172 comprises a vertical outer sidewall segment 1722 and an inner tapered sidewall segment 1724 above a horizontal plane including a topmost electrically conductive layer within the pair of alternating stacks (132, 146, 232, 246).
In one embodiment, the conductive liner 182 comprises a conductive metal nitride. In one embodiment, each of the at least one outer dielectric fill material portion (273, 673, 473) comprises a dielectric fill material selected from undoped silicate glass, a doped silicate glass, and organosilicate glass.
In one embodiment, the conductive liner 182 comprises at least one tapered segment in which a lateral separation distance between a pair of inner sidewalls of the conductive liner 182 increases with a vertical distance from the semiconductor region (such as the source contact layer 114 or the source region) and at least one reverse-tapered segment in which the lateral separation distance between the pair of inner sidewalls of the conductive liner 182 decreases with the vertical distance from the semiconductor layer.
In one embodiment, the at least one outer dielectric fill material portion (273, 673, 473) comprises a plurality of outer dielectric fill material portions that are vertically spaced apart from each other, and the at least one outer dielectric fill material portion (273, 673, 473) comprises laterally surrounds and contacts the dielectric core 274.
In one embodiment, the composite non-metallic core (176, 276) consists of the at least one outer dielectric fill material portion (273, 473) and the dielectric core 274.
In one embodiment, the composite non-metallic core 376 comprises at least one semiconductor fill material portion 373 including a semiconductor fill material, wherein the at least one outer dielectric fill material portion 673 comprises an oxide of the semiconductor fill material.
In one embodiment, the at least one outer dielectric fill material portion 273 includes laterally-extending cavities that are filled with a laterally-protruding portion 274P of the dielectric core 274. In one embodiment, the backside contact assembly further comprises a metal oxide layer 184.
In one embodiment, the conductive plug 178 comprises at least one first tapered sidewall that contacts a respective tapered inner sidewall of the conductive liner 182 and laterally spaced from the isolation dielectric spacer 172 (illustrated in
The backside contact assembly 186 includes a composite non-metallic core (176, 276, 376, 476, or 576), which includes at least one non-metallic material. The composite non-metallic core (176, 276, 376, 476, or 576) can consist of dielectric material portions or can include dielectric material portions and semiconductor material portions. The non-metallic material of the composite non-metallic core (176, 276, 376, 476, or 576) that reduces mechanical stress in the backside trenches 79. Specifically, the silicate glass material in at least one outer dielectric fill material portion (273, 473) and the dielectric core 274, the semiconductor material in the optional semiconductor fill material portions 373, and the dielectric metal oxide in the optional metal oxide layer 184 can absorb, and/or compensate for, the stress generated by the electrically conductive layers (146, 246) in the alternating stacks (132, 146, 232, 246). Thus, the composite non-metallic core (176, 276, 376, 476, or 576) can reduce the stress and the resultant substrate warping.
Although the foregoing refers to particular preferred embodiments, it will be understood that the disclosure is not so limited. It will occur to those of ordinary skill in the art that various modifications may be made to the disclosed embodiments and that such modifications are intended to be within the scope of the disclosure. Compatibility is presumed among all embodiments that are not alternatives of one another. The word “comprise” or “include” contemplates all embodiments in which the word “consist essentially of” or the word “consists of” replaces the word “comprise” or “include,” unless explicitly stated otherwise. Where an embodiment employing a particular structure and/or configuration is illustrated in the present disclosure, it is understood that the present disclosure may be practiced with any other compatible structures and/or configurations that are functionally equivalent provided that such substitutions are not explicitly forbidden or otherwise known to be impossible to one of ordinary skill in the art. All of the publications, patent applications and patents cited herein are incorporated herein by reference in their entirety.
Claims
1. A three-dimensional memory device, comprising:
- a pair of alternating stacks of insulating layers and electrically conductive layers located over a semiconductor region, and laterally spaced from each other by a backside trench;
- memory stack structures extending through the pair of alternating stacks of insulating layers and electrically conductive layers, each memory stack structure comprising a vertical semiconductor channel and a memory film; and
- a backside contact assembly located in the backside trench and comprising:
- an isolation dielectric spacer contacting the pair of alternating stacks;
- a conductive liner contacting inner sidewalls of the isolation dielectric spacer and a top surface of the semiconductor region; and
- a composite non-metallic core comprising:
- at least one outer dielectric fill material portion that is laterally enclosed by a lower portion of the conductive liner; and
- a dielectric core contacting an inner sidewall of the at least one outer dielectric fill material portion,
- wherein the backside contact assembly further comprises a conductive plug that contacts the conductive liner and the dielectric core, and
- wherein the three-dimensional memory device comprises at least one feature selected from: a first feature that a first taper angle of an interface between the conductive liner and the conductive plug is greater than a second taper angle of an interface between the conductive liner and a bottommost one of the at least one outer dielectric fill material portion; a second feature that the conductive plug comprises a tapered downward-protruding portion that contacts an inner tapered sidewall of the conductive liner and vertically extending below a horizontal plane including a bottom surface of a topmost electrically conductive layer within each pair of the alternating stacks; a third feature that the isolation dielectric spacer comprises a vertical outer sidewall segment and an inner tapered sidewall segment above a horizontal plane including a topmost electrically conductive layer within each pair of the alternating stacks; or a fourth feature that the conductive plug comprises at least one first tapered sidewall that contacts a respective tapered inner sidewall of the conductive liner and laterally spaced from the isolation dielectric spacer, and at least one second tapered sidewall that contacts a respective tapered inner sidewall of an upper portion of the isolation dielectric spacer.
2. (canceled)
3. The three-dimensional memory device of claim 1, wherein the three-dimensional memory device comprises the first feature.
4. The three-dimensional memory device of claim 1, wherein the three-dimensional memory device comprises the second feature.
5. The three-dimensional memory device of claim 1, wherein the three-dimensional memory device comprises the third feature.
6. The three-dimensional memory device of claim 1, wherein the conductive liner comprises a conductive metal nitride.
7. The three-dimensional memory device of claim 1, wherein each of the at least one outer dielectric fill material portion comprises a dielectric fill material selected from undoped silicate glass, a doped silicate glass, and organosilicate glass.
8. The three-dimensional memory device of claim 7, wherein the conductive liner comprises at least one tapered segment in which a lateral separation distance between a pair of inner sidewalls of the conductive liner increases with a vertical distance from the semiconductor region and at least one reverse-tapered segment in which the lateral separation distance between the pair of inner sidewalls of the conductive liner decreases with the vertical distance from the semiconductor region.
9. The three-dimensional memory device of claim 7, wherein the at least one outer dielectric fill material portion comprises a plurality of outer dielectric fill material portions that are vertically spaced apart from each other, and the at least one outer dielectric fill material portion laterally surrounds and contacts the dielectric core.
10. The three-dimensional memory device of claim 7, wherein the composite non-metallic core consists of the at least one outer dielectric fill material portion and the dielectric core.
11. The three-dimensional memory device of claim 7, wherein the composite non-metallic core comprises at least one semiconductor fill material, wherein the at least one outer dielectric fill material portion comprises an oxide of the semiconductor fill material.
12. The three-dimensional memory device of claim 7, wherein the at least one outer dielectric fill material portion includes laterally-extending cavities that are filled with a laterally-protruding portion of the dielectric core.
13. The three-dimensional memory device of claim 7, wherein the backside contact assembly further comprises a metal oxide layer.
14. The three-dimensional memory device of claim 1, wherein the three-dimensional memory device comprises the fourth feature.
15.-20. (canceled)
21. A three-dimensional memory device, comprising:
- a pair of alternating stacks of insulating layers and electrically conductive layers located over a semiconductor region, and laterally spaced from each other by a backside trench;
- memory stack structures extending through the pair of alternating stacks of insulating layers and electrically conductive layers, each memory stack structure comprising a vertical semiconductor channel and a memory film; and
- a backside contact assembly located in the backside trench and comprising:
- an isolation dielectric spacer contacting the pair of alternating stacks;
- a conductive liner contacting inner sidewalls of the isolation dielectric spacer and a top surface of the semiconductor region; and
- a composite non-metallic core comprising:
- at least one outer dielectric fill material portion that is laterally enclosed by a lower portion of the conductive liner; and
- a dielectric core contacting an inner sidewall of the at least one outer dielectric fill material portion,
- wherein each of the at least one outer dielectric fill material portion comprises a dielectric fill material selected from undoped silicate glass, a doped silicate glass, and organosilicate glass; and
- wherein the three-dimensional memory device comprises at least one feature selected from: a first feature that the conductive liner comprises at least one tapered segment in which a lateral separation distance between a pair of inner sidewalls of the conductive liner increases with a vertical distance from the semiconductor region and at least one reverse-tapered segment in which the lateral separation distance between the pair of inner sidewalls of the conductive liner decreases with the vertical distance from the semiconductor region; a second feature that the at least one outer dielectric fill material portion comprises a plurality of outer dielectric fill material portions that are vertically spaced apart from each other, and the at least one outer dielectric fill material portion laterally surrounds and contacts the dielectric core; a third feature that the composite non-metallic core comprises at least one semiconductor fill material, wherein the at least one outer dielectric fill material portion comprises an oxide of the semiconductor fill material; a fourth feature that the at least one outer dielectric fill material portion includes laterally-extending cavities that are filled with a laterally-protruding portion of the dielectric core; or a fifth feature that the backside contact assembly further comprises a metal oxide layer.
22. The three-dimensional memory device of claim 21, wherein the three-dimensional memory device comprises the first feature.
23. The three-dimensional memory device of claim 21, wherein the three-dimensional memory device comprises the second feature.
24. The three-dimensional memory device of claim 21, wherein the three-dimensional memory device comprises the third feature.
25. The three-dimensional memory device of claim 21, wherein the three-dimensional memory device comprises the fourth feature.
26. The three-dimensional memory device of claim 21, wherein the three-dimensional memory device comprises the fifth feature.
Type: Application
Filed: Jul 19, 2019
Publication Date: Oct 1, 2020
Inventors: Motoki KAWASAKI (Yokkaichi), Arata OKUYAMA (Nagoya), Xun GU (Yokkaichi), Kengo KAJIWARA (Yokkaichi), Jixin YU (Milpitas, CA)
Application Number: 16/516,726
