Inspection system and device manufacturing method using the same
An inspection system includes a light source, a scanning device for scanning a surface to be inspected, with light from the light source, wherein the scanning device includes an optical member disposed with inclination with respect to a primary scan direction, the optical member being adapted to provide a convergent light being converged to form a spot at a distance changeable with the position of a scan, and a light receiving device for receiving scattered light from the surface.
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Claims
1. An inspection system for inspecting a surface of an object, said system comprising:
- a light source;
- a scanning lens system for linearly scanning the surface with light from said light source, said scanning lens system having an asymmetrical refracting power in a direction of the scan, for providing a convergent light beam, to be focused on the surface to image a spot on the surface at a focal distance which is changeable in accordance with the position of scan on the surface; and
- a detector for receiving light from the surface.
2. A system according to claim 1, wherein said scanning lens system further comprises a scanning mirror and further comprising a lens having a shape asymmetrical with respect to an optical axis.
3. A system according to claim 1, wherein said scanning lens system further comprises a scanning mirror and further comprising a hologram member having a changing grating pitch.
4. A system according to claim 1, wherein said scanning lens system further comprises a scanning mirror and a lens movable along an optical axis for directing the light from said light source to said scanning mirror.
5. A system according to claim 1, wherein said scanning lens system further comprises deflecting means for reflectively deflecting received light in different directions with different refractivities.
6. A device manufacturing method usable with a reticle having a device pattern, said method comprising the steps of:
- scanning a surface of the reticle to be inspected, with light from a light source and through a scanning lens system having an asymmetrical refracting power in a direction of the scan, wherein the scanning lens system provides a convergent light beam being focused on the surface to image a spot on the surface at a focal distance which is changeable in accordance with the position of scan on the surface;
- receiving, through light receiving means, scattered light from the surface and performing inspection of the reticle on the basis of the result of the light reception; and
- transferring the device pattern of the inspected reticle to a substrate through a lithographic process.
7. An inspection method for inspecting a surface of an object, said method comprising the steps of:
- providing a light beam;
- deflecting the light beam to perform a linear scan of the surface;
- causing the light beam to be focused on the surface to image a spot on the surface at a focal distance which is changeable in accordance with the position of scan on the surface, by use of a scanning lens system having an asymmetrical refracting power in the direction of the scan; and
- detecting light from the surface.
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| 04 143640 | May 1992 | JPX |
Type: Grant
Filed: Nov 25, 1996
Date of Patent: Jun 16, 1998
Assignee: Canon Kabushiki Kaisha (Tokyo)
Inventors: Masayuki Suzuki (Utsunomiya), Noriyuki Nose (Atsugi), Minoru Yoshii (Tokyo), Kyoichi Miyazaki (Utsunomiya), Toshihiko Tsuji (Utsunomiya), Seiji Takeuchi (Utsunomiya)
Primary Examiner: Hoa Q. Pham
Law Firm: Fitzpatrick, Cella, Harper & Scinto
Application Number: 8/755,352
International Classification: G01N 2100;
