Exhaust wall liner for semiconductor manufacturing apparatus
Description
Claims
The ornamental design for an exhaust wall liner for a semiconductor manufacturing apparatus, as shown and described.
Referenced Cited
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Patent History
Patent number: D1051081
Type: Grant
Filed: May 11, 2023
Date of Patent: Nov 12, 2024
Assignee: AP SYSTEMS INC.
Inventors: Chang Min Kwon (Hwaseong-si), Chang Kyo Kim (Hwaseong-si)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/891,976
Type: Grant
Filed: May 11, 2023
Date of Patent: Nov 12, 2024
Assignee: AP SYSTEMS INC.
Inventors: Chang Min Kwon (Hwaseong-si), Chang Kyo Kim (Hwaseong-si)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/891,976
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)