Wafer holding frame

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Description

FIG. 1 is a front elevational view of a wafer holding frame showing our new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side elevational view thereof; and

FIG. 6 is a cross sectional view thereof taken along line A--A in FIG. 1.

Referenced Cited
U.S. Patent Documents
D260237 August 18, 1981 Fuzere
3856472 December 1974 Schweitzer et al.
3877134 April 1975 Shanahan
4228902 October 21, 1980 Schulte
4388140 June 14, 1983 Nakazato et al.
4550239 October 29, 1985 Uehara et al.
4550242 October 29, 1985 Uehara et al.
4573851 March 4, 1986 Butler
4574950 March 11, 1986 Koe et al.
Patent History
Patent number: D291413
Type: Grant
Filed: Jan 8, 1985
Date of Patent: Aug 18, 1987
Assignee: Tokyo Denshi Kagaku Co., Ltd. (Kanagawa)
Inventors: Akira Uehara (Kanagawa), Isamu Hijikata (Kanagawa), Hisashi Nakane (Kanagawa), Muneo Nakayama (Tokyo)
Primary Examiner: Robert C. Spangler
Attorneys: Irving M. Weiner, Joseph P. Carrier, Pamela S. Burt
Application Number: 6/689,661
Classifications
Current U.S. Class: D/9367